Abstract

We show a diffraction-based coupling scheme that allows a micro-resonator to directly manipulate a free-space optical beam at normal incidence. We demonstrate a high-Q micro-gear resonator with a 1.57-um radius whose vertical transmission and reflection change 40% over a wavelength range of only 0.3 nm. Without the need to be attached to a waveguide, a dense 2D array of such resonators can be integrated on a chip for spatial light modulation and parallel bio-sensing.

© 2011 OSA

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  2. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
    [CrossRef] [PubMed]
  3. P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
    [CrossRef] [PubMed]
  4. M. S. Rasras, K. Y. Tu, D. M. Gill, Y. K. Chen, A. E. White, S. S. Patel, A. Pomerene, D. Carothers, J. Beattie, M. Beals, J. Michel, and L. C. Kimerling, “Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators,” J. Lightwave Technol. 27(12), 2105–2110 (2009).
    [CrossRef]
  5. H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
    [CrossRef] [PubMed]
  6. L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
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    [CrossRef] [PubMed]
  10. M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
    [CrossRef]
  11. K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  14. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
    [CrossRef]
  15. M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
    [CrossRef]
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    [CrossRef]
  17. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
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  18. A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
    [CrossRef]
  19. M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
    [CrossRef]
  20. B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
    [CrossRef]

2010 (6)

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

2009 (5)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

N. Savage, “Digital spatial light modulators,” Nat. Photonics 3(3), 170–172 (2009).
[CrossRef]

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

M. S. Rasras, K. Y. Tu, D. M. Gill, Y. K. Chen, A. E. White, S. S. Patel, A. Pomerene, D. Carothers, J. Beattie, M. Beals, J. Michel, and L. C. Kimerling, “Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators,” J. Lightwave Technol. 27(12), 2105–2110 (2009).
[CrossRef]

2008 (1)

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

2007 (4)

2005 (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

2004 (1)

2001 (1)

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

1973 (1)

A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
[CrossRef]

Adibi, A.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Ahn, J.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Alipour, P.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Asghari, M.

Baba, T.

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

Baehr-Jones, T.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Baets, R.

Bailey, R. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Bartolozzi, I.

Beals, M.

Beattie, J.

Beausoleil, R. G.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Bergman, K.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Bienstman, P.

Binkert, N.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Carloni, L. P.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Carothers, D.

Chen, Y. K.

Claes, T.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Creazzo, T.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Cunningham, J. E.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Davis, A.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

De Koninck, Y.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

De Vos, K.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Dong, P.

Fan, L.

Fattal, D.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Feng, D.

Feng, N.-N.

Fiorentino, M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Fujita, M.

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

Gill, D. M.

Girones, J.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Gleeson, M. A.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Gunn, L. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Gunn, W. G.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Hochberg, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Iqbal, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Jouppi, N. P.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Khan, M. H.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

Kimerling, L. C.

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Krishnamoorthy, A. V.

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Leaird, D. E.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Li, G.

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Liang, H.

Liao, S.

Lipson, M.

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
[CrossRef] [PubMed]

Q. Xu, P. Dong, and M. Lipson, “Breaking the delay-bandwidth limit in a photonic structure,” Nat. Phys. 3(6), 406–410 (2007).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Manipatruni, S.

Marchena, E.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

McLaren, M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Michel, J.

Ouyang, J.

Patel, S. S.

Pomerene, A.

Popelka, S.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Prather, D. W.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Qi, M. H.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

Qing, L.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Rasras, M. S.

Redding, B.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Santori, C. M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Savage, N.

N. Savage, “Digital spatial light modulators,” Nat. Photonics 3(3), 170–172 (2009).
[CrossRef]

Schacht, E.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Schmidt, B.

Schreiber, R. S.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Sekaric, L.

F. N. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Shacham, A.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Shafiiha, R.

Shakya, J.

Shen, H.

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Shi, S. Y.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Shubin, I.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Soltani, M.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Spaugh, B.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Spillane, S. M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Taillaert, D.

Tu, K. Y.

Tybor, F.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Vantrease, D.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Varghese, L. T.

Vlasov, Y.

F. N. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Weiner, A. M.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

White, A. E.

Xia, F. N.

F. N. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Xiao, S. J.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Xu, Q.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Q. Xu, P. Dong, and M. Lipson, “Breaking the delay-bandwidth limit in a photonic structure,” Nat. Phys. 3(6), 406–410 (2007).
[CrossRef]

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Xuan, Y.

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Yariv, A.

A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
[CrossRef]

Yegnanarayanan, S.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Zhao, L.

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Zheng, X.

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (1)

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

IEEE J. Quantum Electron. (2)

A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
[CrossRef]

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

IEEE Photon. J. (1)

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

IEEE Trans. Comput. (1)

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

J. Lightwave Technol. (1)

Nat. Photonics (3)

F. N. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

N. Savage, “Digital spatial light modulators,” Nat. Photonics 3(3), 170–172 (2009).
[CrossRef]

Nat. Phys. (1)

Q. Xu, P. Dong, and M. Lipson, “Breaking the delay-bandwidth limit in a photonic structure,” Nat. Phys. 3(6), 406–410 (2007).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Opt. Express (4)

Opt. Lett. (1)

Photonics Nanostruct. Fundam. Appl. (1)

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Proc. IEEE (1)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

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