Abstract

In this paper, we present a systematic study on the influence of composition of the adhesion layer between gold and a Pyrex substrate on the optical resonance transmission properties of nano-hole arrays in an optically thick gold film. Large nano-hole arrays with different hole periodicities in a square lattice arrangement were fabricated using Electron Beam Lithography using different adhesion layers (chromium, titanium, or etched adhesion layer). The fabricated nano-hole arrays were optically characterized using transmission spectroscopy. The optical performance of each nano-hole array was numerically simulated using a Finite Difference Time Domain (FDTD) method. The experiments and simulations revealed that the optical resonance transmission properties (i.e. the resonance wavelength, the spectral transmission modulation ratio, and the resonance bandwidth) of the nano-hole arrays depended highly on the composition and the thickness of the adhesion layer. The optical resonance bandwidths were larger for the nano-hole arrays with chromium or titanium adhesion layers. Also, a red-shift of the optical resonance peak was observed for nano-hole arrays with a metal adhesion layer compared to the corresponding nano-hole arrays with an etched adhesion layer, but the red-shift was greatest for the nano-hole array with the titanium adhesion layer. For adhesion layers of greater thickness, the optical resonance peaks were reduced in magnitude. Finally, nano-hole arrays with an etched adhesion layer had a significant blue-shift in the optical resonance peak and a narrower optical resonance bandwidth compared to nano-hole arrays with a titanium or a chromium adhesion layer. Consequently, a narrow optical resonance bandwidth characteristic of a nano-hole array with an etched adhesion layer can potentially enhance the spectral selectivity and offer improved optical performance.

© 2011 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  27. J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
    [CrossRef]

2011 (1)

B. C. Galarreta, P. R. Norton, and F. Lagugn-Labarthet, “SERS detection of Streptavidin/Biotin Monolayer assemblies,” Langmuir 27(4), 1494–1498 (2011).
[CrossRef] [PubMed]

2010 (4)

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

B. Lahiri, R. Dylewicz, R. M. De La Rue, and N. P. Johnson, “Impact of titanium adhesion layers on the response of arrays of metallic split-ring resonators (SRRs),” Opt. Express 18(11), 11202–11208 (2010).
[CrossRef] [PubMed]

M. Najiminaini, F. Vasefi, B. Kaminska, and J. J. L. Carson, “Experimental and numerical analysis on the optical resonance transmission properties of nano-hole arrays,” Opt. Express 18(21), 22255–22270 (2010).
[CrossRef] [PubMed]

2009 (5)

X. Chen, M. Pan, and K. Jiang, “Sensitivity enhancement of SPR biosensor by improving surface quality of glass slides,” Microelectron. Engin. 87(5–8), 790–792 (2009).

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

2008 (3)

B. A. Sexton, B. N. Feltis, and T. J. Davis, “Characterisation of gold surface plasmon resonance sensor substrates,” Sens. Actuators A Phys. 141(2Issue 2), 471–475 (2008).
[CrossRef]

S. G. Rodrigo, F. J. García-Vidal, and L. Martín-Moreno, “Influence of material properties on extraordinary optical transmission through hole arrays,” Phys. Rev. Lett. B 77, 075401 (2008).

A. Lesuffleur, H. Im, N. C. Lindquist, K. S. Lim, and S. H. Oh, “Laser-illuminated nanohole arrays for multiplex plasmonic microarray sensing,” Opt. Express 16(1), 219–224 (2008).
[CrossRef] [PubMed]

2007 (1)

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

2006 (2)

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

2005 (2)

A. A. Tseng, “Recent developments in nanofabrication using focused ion beams,” Small 1(10), 924–939 (2005).
[CrossRef] [PubMed]

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

2004 (2)

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

2001 (1)

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

1999 (1)

1998 (1)

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

1966 (1)

K. S. Yee, “Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antenn. Propag. 14(3), 302–307 (1966).
[CrossRef]

Aouani, H.

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Baxter, J. B.

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

Blair, S.

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

Brolo, A. G.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Cambril, E.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Carson, J. J. L.

Chen, J.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Chen, X.

X. Chen, M. Pan, and K. Jiang, “Sensitivity enhancement of SPR biosensor by improving surface quality of glass slides,” Microelectron. Engin. 87(5–8), 790–792 (2009).

Chen, Y.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

Cho, Y.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Choi, H. G.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Davis, T. J.

B. A. Sexton, B. N. Feltis, and T. J. Davis, “Characterisation of gold surface plasmon resonance sensor substrates,” Sens. Actuators A Phys. 141(2Issue 2), 471–475 (2008).
[CrossRef]

De La Rue, R. M.

Decanini, D.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Degiron, A.

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

Devaux, E.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Djaker, N.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

Dylewicz, R.

Ebbesen, T. W.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

T. Thio, H. F. Ghaemi, H. J. Lezec, P. A. Wolff, and T. W. Ebbesen, “Surface-plasmon-enhanced transmission through hole arrays in Cr films,” J. Opt. Soc. Am. B 16(10), 1743–1748 (1999).
[CrossRef]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Feltis, B. N.

B. A. Sexton, B. N. Feltis, and T. J. Davis, “Characterisation of gold surface plasmon resonance sensor substrates,” Sens. Actuators A Phys. 141(2Issue 2), 471–475 (2008).
[CrossRef]

Galarreta, B. C.

B. C. Galarreta, P. R. Norton, and F. Lagugn-Labarthet, “SERS detection of Streptavidin/Biotin Monolayer assemblies,” Langmuir 27(4), 1494–1498 (2011).
[CrossRef] [PubMed]

Garcia de Abajo, F. J.

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

Garcia-Vidal, F. J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

García-Vidal, F. J.

S. G. Rodrigo, F. J. García-Vidal, and L. Martín-Moreno, “Influence of material properties on extraordinary optical transmission through hole arrays,” Phys. Rev. Lett. B 77, 075401 (2008).

Genet, C.

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

Gérard, D.

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Ghaemi, H. F.

T. Thio, H. F. Ghaemi, H. J. Lezec, P. A. Wolff, and T. W. Ebbesen, “Surface-plasmon-enhanced transmission through hole arrays in Cr films,” J. Opt. Soc. Am. B 16(10), 1743–1748 (1999).
[CrossRef]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Goeckeritz, J.

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

Gordon, R.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Haghiri-Gosnet, A.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Hostein, R.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

Huang, F. M.

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

Im, H.

Jiang, K.

X. Chen, M. Pan, and K. Jiang, “Sensitivity enhancement of SPR biosensor by improving surface quality of glass slides,” Microelectron. Engin. 87(5–8), 790–792 (2009).

Jiao, X.

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

Johnson, N. P.

Judd, F. F.

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

Kaminska, B.

Kavanagh, K. L.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Kim, H.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Kim, J. G.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Kim, T. J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

Krishnan, A.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

Kuipers, L.

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

Kwok, S. C.

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

Kwon, S.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Lagugn-Labarthet, F.

B. C. Galarreta, P. R. Norton, and F. Lagugn-Labarthet, “SERS detection of Streptavidin/Biotin Monolayer assemblies,” Langmuir 27(4), 1494–1498 (2011).
[CrossRef] [PubMed]

Lahiri, B.

Laluet, J. Y.

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

Leathem, B.

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Lee, S.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Lesuffleur, A.

Lezec, H. J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

T. Thio, H. F. Ghaemi, H. J. Lezec, P. A. Wolff, and T. W. Ebbesen, “Surface-plasmon-enhanced transmission through hole arrays in Cr films,” J. Opt. Soc. Am. B 16(10), 1743–1748 (1999).
[CrossRef]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Lim, K. S.

Lindquist, N. C.

Mahdavi, F.

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Martin-Moreno, L.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

Martín-Moreno, L.

S. G. Rodrigo, F. J. García-Vidal, and L. Martín-Moreno, “Influence of material properties on extraordinary optical transmission through hole arrays,” Phys. Rev. Lett. B 77, 075401 (2008).

McKinnon, A.

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Moffitt, M. G.

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

Najiminaini, M.

Norton, P. R.

B. C. Galarreta, P. R. Norton, and F. Lagugn-Labarthet, “SERS detection of Streptavidin/Biotin Monolayer assemblies,” Langmuir 27(4), 1494–1498 (2011).
[CrossRef] [PubMed]

Oh, S. H.

Oldham, M.

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

Pafchek, R. M.

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

Pan, J.

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

Pan, M.

X. Chen, M. Pan, and K. Jiang, “Sensitivity enhancement of SPR biosensor by improving surface quality of glass slides,” Microelectron. Engin. 87(5–8), 790–792 (2009).

Park, J. W.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Pendry, J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

Przybilla, F.

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

Rajora, A.

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Rigneault, H.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Riordon, J.

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

Rodrigo, S. G.

S. G. Rodrigo, F. J. García-Vidal, and L. Martín-Moreno, “Influence of material properties on extraordinary optical transmission through hole arrays,” Phys. Rev. Lett. B 77, 075401 (2008).

Segerink, F. B.

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

Seo, J. W.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Sexton, B. A.

B. A. Sexton, B. N. Feltis, and T. J. Davis, “Characterisation of gold surface plasmon resonance sensor substrates,” Sens. Actuators A Phys. 141(2Issue 2), 471–475 (2008).
[CrossRef]

Shi, J.

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Sim, Y.

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

Sinton, D.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

Thio, T.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

T. Thio, H. F. Ghaemi, H. J. Lezec, P. A. Wolff, and T. W. Ebbesen, “Surface-plasmon-enhanced transmission through hole arrays in Cr films,” J. Opt. Soc. Am. B 16(10), 1743–1748 (1999).
[CrossRef]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Tseng, A. A.

A. A. Tseng, “Recent developments in nanofabrication using focused ion beams,” Small 1(10), 924–939 (2005).
[CrossRef] [PubMed]

van der Molen, K. L.

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

van Hulst, N. F.

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

Vasefi, F.

Wenger, J.

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Wolff, P. A.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

T. Thio, H. F. Ghaemi, H. J. Lezec, P. A. Wolff, and T. W. Ebbesen, “Surface-plasmon-enhanced transmission through hole arrays in Cr films,” J. Opt. Soc. Am. B 16(10), 1743–1748 (1999).
[CrossRef]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Xu, T.

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Yee, K. S.

K. S. Yee, “Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antenn. Propag. 14(3), 302–307 (1966).
[CrossRef]

Zheludev, N. I.

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

ACS Nano (1)

H. Aouani, J. Wenger, D. Gérard, H. Rigneault, E. Devaux, T. W. Ebbesen, F. Mahdavi, T. Xu, and S. Blair, “Crucial Role of the Adhesion Layer on the Plasmonic Fluorescence Enhancement,” ACS Nano 3(7), 2043–2048 (2009).
[CrossRef] [PubMed]

Appl. Phys. Lett. (2)

F. M. Huang, Y. Chen, F. J. Garcia de Abajo, and N. I. Zheludev, “Focusing of light by a Nanohole array,” Appl. Phys. Lett. 90(9), 091119 (2007).
[CrossRef]

K. L. van der Molen, F. B. Segerink, N. F. van Hulst, and L. Kuipers, “Influence of hole size on the extraordinary transmission through subwavelength hole arrays,” Appl. Phys. Lett. 85(19), 4316–4318 (2004).
[CrossRef]

IEEE Trans. Adv. Packag. (1)

J. Pan, R. M. Pafchek, F. F. Judd, and J. B. Baxter, “Effect of Chromium–Gold and Titanium–Titanium Nitride–Platinum–Gold Metallization on Wire/Ribbon Bondability,” IEEE Trans. Adv. Packag. 29(4), 707–713 (2006).
[CrossRef]

IEEE Trans. Antenn. Propag. (1)

K. S. Yee, “Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antenn. Propag. 14(3), 302–307 (1966).
[CrossRef]

J. Am. Chem. Soc. (1)

A. G. Brolo, S. C. Kwok, M. G. Moffitt, R. Gordon, J. Riordon, and K. L. Kavanagh, “Enhanced fluorescence from arrays of Nanoholes in a gold film,” J. Am. Chem. Soc. 127(42), 14936–14941 (2005).
[CrossRef] [PubMed]

J. Opt. A, Pure Appl. Opt. (1)

F. Przybilla, A. Degiron, J. Y. Laluet, C. Genet, and T. W. Ebbesen, “Optical transmission in perforated noble and transition metal films,” J. Opt. A, Pure Appl. Opt. 8(5), 458–463 (2006).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Phys. Chem. C (1)

N. Djaker, R. Hostein, E. Devaux, T. W. Ebbesen, H. Rigneault, and J. Wenger, “Surface Enhanced Raman Scattering on a Single Nanometric Aperture,” J. Phys. Chem. C 114(39), 16250–16256 (2010).
[CrossRef]

Langmuir (1)

B. C. Galarreta, P. R. Norton, and F. Lagugn-Labarthet, “SERS detection of Streptavidin/Biotin Monolayer assemblies,” Langmuir 27(4), 1494–1498 (2011).
[CrossRef] [PubMed]

Laser Photon. Rev. (1)

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photon. Rev. 4(2), 311–335 (2010).
[CrossRef]

Microelectron. Eng. (2)

J. G. Kim, Y. Sim, Y. Cho, J. W. Seo, S. Kwon, J. W. Park, H. G. Choi, H. Kim, and S. Lee, “Large area pattern replication by nanoimprint lithography for LCD–TFT application,” Microelectron. Eng. 86(12), 2427–2431 (2009).
[CrossRef]

J. Chen, J. Shi, D. Decanini, E. Cambril, Y. Chen, and A. Haghiri-Gosnet, “Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography,” Microelectron. Eng. 86(4-6), 632–635 (2009).
[CrossRef]

Microelectron. Engin. (1)

X. Chen, M. Pan, and K. Jiang, “Sensitivity enhancement of SPR biosensor by improving surface quality of glass slides,” Microelectron. Engin. 87(5–8), 790–792 (2009).

Nature (1)

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[CrossRef]

Opt. Commun. (1)

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, “Evanescently coupled resonance in surface plasmon enhanced transmission,” Opt. Commun. 200(1-6), 1–7 (2001).
[CrossRef]

Opt. Express (3)

Phys. Rev. Lett. (1)

R. Gordon, A. G. Brolo, A. McKinnon, A. Rajora, B. Leathem, and K. L. Kavanagh, “Strong polarization in the optical transmission through elliptical nanohole arrays,” Phys. Rev. Lett. 92(3), 037401 (2004).
[CrossRef] [PubMed]

Phys. Rev. Lett. B (1)

S. G. Rodrigo, F. J. García-Vidal, and L. Martín-Moreno, “Influence of material properties on extraordinary optical transmission through hole arrays,” Phys. Rev. Lett. B 77, 075401 (2008).

Plasmonics (1)

X. Jiao, J. Goeckeritz, S. Blair, and M. Oldham, “Localization of Near-Field Resonances in Bowtie Antennae: Influence of Adhesion Layers,” Plasmonics 4(1), 37–50 (2009).
[CrossRef]

Sens. Actuators A Phys. (1)

B. A. Sexton, B. N. Feltis, and T. J. Davis, “Characterisation of gold surface plasmon resonance sensor substrates,” Sens. Actuators A Phys. 141(2Issue 2), 471–475 (2008).
[CrossRef]

Small (1)

A. A. Tseng, “Recent developments in nanofabrication using focused ion beams,” Small 1(10), 924–939 (2005).
[CrossRef] [PubMed]

Other (3)

A. Taflove, and S. C. Hagness, Computational electrodynamics: The Finite-Difference Time-Domain method 2nd Ed (Artech House Publishers, Boston 2000).

E. D. Palik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985).

J. R. Lakowicz, M. H. Chowdhury, K. Ray, J. Zhang, Y. Fu, R. Badugu, C. R. Sabanayagam, K. Nowaczyk, H. Szmacinski, K. Aslan, and C. D. Geddes, “Plasmon-controlled fluorescence: A new detection technology,” Proc SPIE 6099, 9–1-9–14 (2009).

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Figures (7)

Fig. 1
Fig. 1

Electron beam lithography (EBL) for fabrication of nano-hole arrays

Fig. 2
Fig. 2

SEM images of a nano-hole array in a 100 nm gold film: a) angle view, and b) top view.

Fig. 3
Fig. 3

Optical transmission spectra of nano-hole arrays with circular holes, 223 nm in diameter, and 425 nm periodicity in a 100 nm thick gold film for various adhesion layers between gold and Pyrex substrate [5 nm chromium (red curve), 5 nm titanium (blue curve), 10 nm titanium (black curve), etched 10 nm titanium (green curve) and no adhesion layer (purple curve in simulation results)]: a) simulation results and b) experimental results. (Pg: Pyrex-gold side).

Fig. 4
Fig. 4

The (1,0) optical resonance position versus hole periodicity for nano-hole arrays in a 100 nm gold film with various adhesion layers between the gold and Pyrex substrate [5 nm chromium (red curve), 5 nm titanium (blue curve), etched 10 nm titanium (green curve), and theoretical results (light blue curve in simulation results)]: a) simulation results and b) experimental results.

Fig. 5
Fig. 5

The spectral transmission modulation ratio for (1,0) resonance peak and its respective minimum versus hole periodicity for nano-hole arrays in a 100 nm gold film with various adhesion layers between gold and Pyrex substrate [5 nm chromium (red curve), 5 nm titanium (blue curve), and etched 10 nm titanium (green curve)]: a) simulation results and b) experimental results.

Fig. 6
Fig. 6

The (1,0) optical resonance bandwidth versus hole periodicity for nano-hole arrays in a 100 nm gold film with various conductive and adhesion layers between the gold and Pyrex substrate [5 nm chromium (red curve), 5 nm titanium (blue curve), and etched 10 nm titanium (green curve)]: a) simulation results and b) experimental results.

Fig. 7
Fig. 7

The spatial distribution of electric field intensity for a xy surface 6 nm above the hole from air-gold side: a) 5 nm Cr adhesion layer, b) 5 nm Ti adhesion layer, and c) etched 10 nm Ti adhesion layer. Spatial distribution of the electric field intensity in the central xz plane of the structure d) 5 nm Cr adhesion layer, e) 5 nm Ti adhesion layer, and f) etched 10 nm Ti adhesion layer.

Tables (2)

Tables Icon

Table 1 Summary of the Conductive and Adhesion Layer Composition and Thickness

Tables Icon

Table 2 Summary of the Geometrical Parameters of the Simulated and Fabricated Nano-Hole Arrays

Metrics