Abstract

Bursts of femtosecond laser pulses with a repetition rate of f = 38.5MHz were created using a purpose-built optical resonator. Single Ti:Sapphire laser pulses, trapped inside a resonator and released into controllable burst profiles by computer generated trigger delays to a fast Pockels cell switch, drove filamentation-assisted laser machining of high aspect ratio holes deep into transparent glasses. The time dynamics of the hole formation and ablation plume physics on 2-ns to 400-ms time scales were examined in time-resolved side-view images recorded with an intensified-CCD camera during the laser machining process. Transient effects of photoluminescence and ablation plume emissions confirm the build-up of heat accumulation effects during the burst train, the formation of laser-generated filaments and plume-shielding effects inside the deeply etched vias. The small time interval between the pulses in the present burst train enabled a more gentle modification in the laser interaction volume that mitigated shock-induced microcracks compared with single pulses.

© 2011 OSA

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  1. R. R. Gattass, L. R. Cerami, and E. Mazur, “Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates,” Opt. Express 14(12), 5279–5284 (2006).
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    [CrossRef]
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    [CrossRef]
  23. M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
    [CrossRef] [PubMed]
  24. A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett. 22(5), 304–306 (1997).
    [CrossRef] [PubMed]
  25. B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
    [CrossRef]

2009 (3)

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE 7205, 720510, 720510-9 (2009).
[CrossRef]

V. Maselli, J. R. Grenier, S. Ho, and P. R. Herman, “Femtosecond laser written optofluidic sensor: Bragg Grating Waveguide evanescent probing of microfluidic channel,” Opt. Express 17(14), 11719–11729 (2009).
[CrossRef] [PubMed]

2008 (2)

2007 (1)

Y. Matsuoka, “Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser,” Appl. Phys., A Mater. Sci. Process. 88(2), 319–322 (2007).
[CrossRef]

2006 (2)

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

R. R. Gattass, L. R. Cerami, and E. Mazur, “Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates,” Opt. Express 14(12), 5279–5284 (2006).
[CrossRef] [PubMed]

2005 (4)

2004 (1)

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

2003 (2)

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

2002 (1)

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

2001 (2)

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[CrossRef] [PubMed]

1999 (2)

P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE 3616, 148–155 (1999).
[CrossRef]

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

1998 (2)

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

1997 (1)

1995 (1)

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Aközbek, N.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Arai, A. Y.

Ashkenasi, D.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Becker, A.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Beckmann, D.

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

Beyer, E.

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

Bhardwaj, V. R.

Bourayou, R.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Bovatsek, J.

Brodeur, A.

Cambell, E. E. B.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Cerami, L. R.

Chan, J. W.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Chen, K. P.

P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE 3616, 148–155 (1999).
[CrossRef]

Chen, W.-J.

Chien, C. Y.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett. 22(5), 304–306 (1997).
[CrossRef] [PubMed]

Chin, S. L.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett. 22(5), 304–306 (1997).
[CrossRef] [PubMed]

Corkum, P. B.

Desparois, A.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Ding, X.

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Eaton, S. M.

Eislöffel, J.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Esser, D.

D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE 7205, 720510, 720510-9 (2009).
[CrossRef]

Franco, M.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

Franco, M. A.

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Gattass, R. R.

Gottmann, J.

D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE 7205, 720510, 720510-9 (2009).
[CrossRef]

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

Grenier, J. R.

Grigoropoulos, C. P.

D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2008).
[CrossRef]

Grillon, G.

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Hatzes, A. P.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Hayden, J. S.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Henz, S.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Herman, P. R.

Hermans, M.

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

Herrmann, J.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Hidai, H.

D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2008).
[CrossRef]

Hiromatsu, K.

D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2008).
[CrossRef]

Hnatovsky, C.

Ho, S.

Hörstmann-Jungemann, M.

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

Hosseini, S. A.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Huser, T. R.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Hwang, D. J.

D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2008).
[CrossRef]

Ilkov, F. A.

Itoh, K.

Jiang, Y.

Jiang, Z.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Johnston, T. W.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Kandidov, V. P.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett. 22(5), 304–306 (1997).
[CrossRef] [PubMed]

Kaspar, J.

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

Kasparian, J.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Kautek, W.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Kawaguchi, Y.

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Kieffer, J.-C.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

König, J.

Kosareva, O. G.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett. 22(5), 304–306 (1997).
[CrossRef] [PubMed]

Krausz, F.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Krol, D. M.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Krüger, J.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Kuroda, D.

La Fontaine, B.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Laux, U.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Le Blanc, C.

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Lenzner, M.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Li, J.

Li, Y.

Liu, W.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Lopez, C.

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Luft, A.

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

Luo, Q.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Marjoribanks, R. S.

P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE 3616, 148–155 (1999).
[CrossRef]

Maselli, V.

Matsuoka, Y.

Y. Matsuoka, “Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser,” Appl. Phys., A Mater. Sci. Process. 88(2), 319–322 (2007).
[CrossRef]

Mazur, E.

Méjean, G.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Mysyrowicz, A.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Ng, M. L.

Nibbering, E. T. J.

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Niino, H.

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Nishii, J.

Nolte, S.

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

J. König, S. Nolte, and A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses,” Opt. Express 13(26), 10597–10607 (2005).
[CrossRef] [PubMed]

Oettl, A.

P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE 3616, 148–155 (1999).
[CrossRef]

Pépin, H.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Prade, B.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

Prade, B. S.

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Rayner, D. M.

Richardson, K.

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Richardson, M.

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Risbud, S. H.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Rivero, C.

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Rodriguez, M.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Rosenfeld, A.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Salmon, E.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Sartania, S.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Sauerbrey, R.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Scholz, A.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Schroeder, H.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Shah, L.

S. M. Eaton, H. Zhang, P. R. Herman, F. Yoshino, L. Shah, J. Bovatsek, and A. Y. Arai, “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate,” Opt. Express 13(12), 4708–4716 (2005).
[CrossRef] [PubMed]

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Simova, E.

Spielmann, C.

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Stecklum, B.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Sudrie, L.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

Taylor, R. S.

Théberge, F.

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

Tünnermann, A.

Varel, H.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

Vidal, F.

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Watanabe, W.

Will, M.

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

Wolf, J.-P.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Wortmann, D.

D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE 7205, 720510, 720510-9 (2009).
[CrossRef]

Wöste, L.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Yabe, A.

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Yamada, K.

Yasui, Y.

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Yoshino, F.

Yu, J.

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Zhang, H.

Zoubir, A.

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

Appl. Phys. Lett. (2)

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72(12), 1442–1444 (1998).
[CrossRef]

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett. 82(15), 2371–2373 (2003).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (3)

D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2008).
[CrossRef]

X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process. 75(3), 437–440 (2002).
[CrossRef]

Y. Matsuoka, “Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser,” Appl. Phys., A Mater. Sci. Process. 88(2), 319–322 (2007).
[CrossRef]

Appl. Surf. Sci. (1)

J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci. 127-129(1-2), 892–898 (1998).
[CrossRef]

Can. J. Phys. (1)

S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys. 83(9), 863–905 (2005).
[CrossRef]

J. Laser Appl. (1)

J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl. 18(2), 85–92 (2006).
[CrossRef]

JLMN (1)

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN 4(3), 192–196 (2009).
[CrossRef]

Opt. Commun. (2)

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun. 191(3-6), 333–339 (2001).
[CrossRef]

E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun. 119(5-6), 479–484 (1995).
[CrossRef]

Opt. Express (5)

Opt. Lett. (3)

Phys. Plasmas (1)

B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas 6(5), 1615–1621 (1999).
[CrossRef]

Phys. Rev. E Stat. Nonlin. Soft Matter Phys. (1)

M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 69(3), 036607 (2004).
[CrossRef] [PubMed]

Proc. SPIE (3)

P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE 3616, 148–155 (1999).
[CrossRef]

M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE 5273, 472–481 (2003).
[CrossRef]

D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE 7205, 720510, 720510-9 (2009).
[CrossRef]

Other (1)

P. R. Herman, M. Lapczyna, D. Breitling, H. Schittenhelm, H. W. Tan, Y. Kerachian, and R. S. Marjoribanks, “Laser micromachining of transparent glasses and aluminium with ps-pulses bursts at 1054nm”, Proc. CLEO 39 (2000).

Supplementary Material (2)

» Media 1: AVI (1669 KB)     
» Media 2: AVI (2034 KB)     

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Figures (6)

Fig. 1
Fig. 1

(Color online) Scheme of the experimental setup. The intensified CCD-camera was triggered by a digital delay generator which also triggered the mechanical shutter for getting time-resolved images of the laser interaction zone. The shortpass filter λ = 750nm avoided the imaging of the laser wavelength λ = 800nm. At the sample the hole and the ablation plume are schematically drawn. The inset on the right shows a typical burst train with four pulses separated by t = 26ns at f = 500Hz repetition rate.

Fig. 2
Fig. 2

A self-focusing filament in BK7 glass created with the presented burst resonator (two bursts with five pulses, respectively). The laser radiation was focused onto the surface and propagated from left to right.

Fig. 3
Fig. 3

Optical micrographs of holes in BK7 drilled with four pulses (Ep = 45µJ) in a burst in the pulse mode (left hole) and in the burst mode (right hole) for the 50th and the 200th burst, respectively (a) and with five pulses (Ep = 25µJ) in a burst for the 500th burst in the burst mode (b).

Fig. 4
Fig. 4

Time-resolved intensity images during the ablation process for the 1st and the 200th burst in the burst mode. The white line indicates the surface of the glass sample. The images on the far right side show the detected intensity values multiplied by a factor of 5. The beam propagation direction is top down. (Online available: Media 1 contains the pulse and the burst mode for the 1st burst, whereas Media 2 shows the pulse and the burst mode for the 50th burst, respectively.)

Fig. 5
Fig. 5

(Color online) Intensity decay of the filament brightness during the 1st burst in the burst mode (black square) and the pulse mode (red triangle). A double exponential decay was fitted to the data, respectively. The red arrows indicate the four hitting laser pulses in the burst mode.

Fig. 6
Fig. 6

(Color online) Brightness of the channel (black line) and of the ablation plume (red line) after the 1st, the 25th, the 50th and the 200th burst in the burst mode. The brightness is given in arbitrary values and the red arrows indicate the four hitting laser pulses in the burst mode.

Equations (1)

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P C = 3.77 λ 2 8πn n 2

Metrics