Abstract

We demonstrate the design, fabrication and characterization of an artificially structured, gradient index metamaterial with a linear index variation of Δn ∼ 3.0. The linear gradient profile is repeated periodically to form the equivalent of a blazed grating, with the gradient occurring across a spatial distance of 61μm. The grating, which operates at a wavelength of 10.6μm, is composed of non-resonant, progressively modified “I-beam” metamaterial elements and approximates a linear phase shift gradient using 61 distinguishable phase levels. The grating structure consists of four layers of lithographically patterned metallic I-beam elements separated by dielectric layers of SiO2. The index gradient is confirmed by comparing the measured magnitudes of the −1, 0 and +1 diffracted orders to those obtained from full wave simulations incorporating all material properties of the metals and dielectrics of the structures. The large index gradient has the potential to enable compact infrared diffractive and gradient index optics, as well as more exotic transformation optical media.

© 2011 OSA

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2011

2010

2009

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
[CrossRef] [PubMed]

L. H. Gabrielli, J. Cardenas, C. B. Poitras, and M. Lipson, “Silicon nanostructure cloak operating at optical frequencies,” Nat. Photonics 3, 461–463 (2009).
[CrossRef]

R. Liu, Q. Cheng, J. Y. Chin, J. J. Mock, T. J. Cui, and D. R. Smith, “Broadband gradient index microwave quasi-optical elements based on non-resonant metamaterials,” Opt. Express 17, 21030–21041 (2009).
[CrossRef] [PubMed]

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

R. Liu, C. Ji, J. J. Mock, J. Y. Chin, T. J. Cui, and D. R. Smith, “Broadband ground-plane cloak,” Science 323, 366–369 (2009).
[CrossRef] [PubMed]

2008

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

G. Beadie, J. S. Shirk, A. Rosenberg, P. A. Lane, E. Fleet, A. R. Kamdar, Y. Jin, M. Ponting, T. Kazmierczak, Y. Yang, A. Hiltner, and E. Baer, “Optical properties of a bio-inspired gradient refractive index polymer lens,” Opt. Express 16, 11540–11547 (2008).
[PubMed]

C. Rockstuhl, C. Menzel, T. Paul, T. Pertsch, and F. Lederer, “Light propagation in a fishnet metamaterial,” Phys. Rev. B 78 (2008).
[CrossRef]

2007

G. Dolling, M. Wegener, and S. Linden, “Realization of a three-functional-layer negative-index photonic metamaterial,” Opt. Lett. 32, 551–553 (2007).
[CrossRef] [PubMed]

Y. Jin, H. Tai, A. Hiltner, E. Baer, and J. S. Shirk, “New class of bioinspired lenses with a gradient refractive index,” J. Appl. Polym. Sci. 103, 1834–1841 (2007).
[CrossRef]

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett. 98, 243901 (2007).
[CrossRef] [PubMed]

2006

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312, 1780–1782 (2006).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

A. K. Popov and V. M. Shalaev, “Compensating losses in negative-index metamaterials by optical parametric amplification,” Opt. Lett. 31, 2169–2171 (2006).
[CrossRef] [PubMed]

2005

D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
[CrossRef]

U. Levy, M. Nezhad, H.-C. Kim, C.-H. Tsai, L. Pang, and Y. Fainman, “Implementation of a graded-index medium by use of subwavelength structures with graded fill factor,” J. Opt. Soc. Am. A 22, 724–733 (2005).
[CrossRef]

V. M. Shalaev, W. Cai, U. K. Chettiar, H.-K. Yuan, A. K. Sarychev, V. P. Drachev, and A. V. Kildishev, “Negative index of refraction in optical metamaterials,” Opt. Lett. 30, 3356–3358 (2005).
[CrossRef]

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef] [PubMed]

2004

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305, 788–792 (2004).
[CrossRef] [PubMed]

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

S. Linden, C. Enkrich, M. Wegener, J. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic response of metamaterials at 100 terahertz,” Science 306, 1351–1353 (2004).
[CrossRef] [PubMed]

X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
[CrossRef]

2002

D. R. Smith, S. Schultz, P. Markoš, and C. M. Soukoulis, “Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients,” Phys. Rev. B 65 (2002).
[CrossRef]

2001

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292, 77–79 (2001).
[CrossRef] [PubMed]

1998

1997

P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnol. 8, 53 (1997).
[CrossRef]

1983

Abashin, M.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett. 98, 243901 (2007).
[CrossRef] [PubMed]

Alexander, J. R. W.

Arnold, R.

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

Astilean, S.

Baer, E.

Bartal, G.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
[CrossRef] [PubMed]

Basov, D. N.

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Beadie, G.

Beigang, R.

Bell, R. J.

Bell, R. R.

Bell, S. E.

Born, M.

M. Born, Principles of optics : electromagnetic theory of propagation, interference and diffraction of light (Cambridge University Press, Cambridge ; New York, 1999).
[PubMed]

Brueck, S. R. J.

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef] [PubMed]

Cai, W.

Cambril, E.

Cardenas, J.

L. H. Gabrielli, J. Cardenas, C. B. Poitras, and M. Lipson, “Silicon nanostructure cloak operating at optical frequencies,” Nat. Photonics 3, 461–463 (2009).
[CrossRef]

Chavel, P.

Chen, K.-P.

Chen, X. D.

X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
[CrossRef]

Cheng, Q.

Chettiar, U. K.

Chin, J. Y.

Choi, M.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Cui, T. J.

R. Liu, C. Ji, J. J. Mock, J. Y. Chin, T. J. Cui, and D. R. Smith, “Broadband ground-plane cloak,” Science 323, 366–369 (2009).
[CrossRef] [PubMed]

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

R. Liu, Q. Cheng, J. Y. Chin, J. J. Mock, T. J. Cui, and D. R. Smith, “Broadband gradient index microwave quasi-optical elements based on non-resonant metamaterials,” Opt. Express 17, 21030–21041 (2009).
[CrossRef] [PubMed]

Cummer, S. A.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

Cunningham, J.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett. 98, 243901 (2007).
[CrossRef] [PubMed]

Di Falco, A.

Dolling, G.

Drachev, V. P.

Driscoll, T.

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

Elfström, H.

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

Enkrich, C.

S. Linden, C. Enkrich, M. Wegener, J. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic response of metamaterials at 100 terahertz,” Science 306, 1351–1353 (2004).
[CrossRef] [PubMed]

Fainman, Y.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett. 98, 243901 (2007).
[CrossRef] [PubMed]

U. Levy, M. Nezhad, H.-C. Kim, C.-H. Tsai, L. Pang, and Y. Fainman, “Implementation of a graded-index medium by use of subwavelength structures with graded fill factor,” J. Opt. Soc. Am. A 22, 724–733 (2005).
[CrossRef]

Fan, W.

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef] [PubMed]

Fang, N.

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Fleet, E.

Fu, L.

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Gabrielli, L. H.

L. H. Gabrielli, J. Cardenas, C. B. Poitras, and M. Lipson, “Silicon nanostructure cloak operating at optical frequencies,” Nat. Photonics 3, 461–463 (2009).
[CrossRef]

Giessen, H.

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Gollub, J. G.

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

Greegor, R. B.

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

Grzegorczyk, T. M.

X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
[CrossRef]

Guo, H.

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Hiltner, A.

Ikeda, K.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett. 98, 243901 (2007).
[CrossRef] [PubMed]

Ishii, S.

Ji, C.

R. Liu, C. Ji, J. J. Mock, J. Y. Chin, T. J. Cui, and D. R. Smith, “Broadband ground-plane cloak,” Science 323, 366–369 (2009).
[CrossRef] [PubMed]

Jin, Y.

Justice, B. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

Kaiser, S.

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Kamdar, A. R.

Kang, K.-Y.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Kang, S. B.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Kazmierczak, T.

Kehr, S. C.

Kildishev, A. V.

Kim, H.-C.

Kim, Y.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Kleemann, B. H.

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

Kong, J. A.

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N. Kundtz and D. R. Smith, “Extreme-angle broadband metamaterial lens,” Nat. Mater. 9, 129–132 (2010).
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M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
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M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
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G. Dolling, M. Wegener, and S. Linden, “Realization of a three-functional-layer negative-index photonic metamaterial,” Opt. Lett. 32, 551–553 (2007).
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Liu, R. P.

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S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
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R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

R. Liu, C. Ji, J. J. Mock, J. Y. Chin, T. J. Cui, and D. R. Smith, “Broadband ground-plane cloak,” Science 323, 366–369 (2009).
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R. Liu, Q. Cheng, J. Y. Chin, J. J. Mock, T. J. Cui, and D. R. Smith, “Broadband gradient index microwave quasi-optical elements based on non-resonant metamaterials,” Opt. Express 17, 21030–21041 (2009).
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D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
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P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnol. 8, 53 (1997).
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T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
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Nezhad, M.

Nielsen, J. A.

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

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Osgood, R. M.

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
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X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
[CrossRef]

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T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Pang, L.

Panoiu, N. C.

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef] [PubMed]

Parazzoli, C. G.

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

Park, N.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

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Paul, T.

C. Rockstuhl, C. Menzel, T. Paul, T. Pertsch, and F. Lederer, “Light propagation in a fishnet metamaterial,” Phys. Rev. B 78 (2008).
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D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312, 1780–1782 (2006).
[CrossRef] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305, 788–792 (2004).
[CrossRef] [PubMed]

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Pertsch, T.

C. Rockstuhl, C. Menzel, T. Paul, T. Pertsch, and F. Lederer, “Light propagation in a fishnet metamaterial,” Phys. Rev. B 78 (2008).
[CrossRef]

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L. H. Gabrielli, J. Cardenas, C. B. Poitras, and M. Lipson, “Silicon nanostructure cloak operating at optical frequencies,” Nat. Photonics 3, 461–463 (2009).
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C. Rockstuhl, C. Menzel, T. Paul, T. Pertsch, and F. Lederer, “Light propagation in a fishnet metamaterial,” Phys. Rev. B 78 (2008).
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Ruoff, J.

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

Rye, P. M.

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
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Schultz, S.

D. R. Smith, S. Schultz, P. Markoš, and C. M. Soukoulis, “Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients,” Phys. Rev. B 65 (2002).
[CrossRef]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292, 77–79 (2001).
[CrossRef] [PubMed]

Schurig, D.

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312, 1780–1782 (2006).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
[CrossRef]

Schweizer, H.

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Shalaev, V. M.

Shelby, R. A.

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292, 77–79 (2001).
[CrossRef] [PubMed]

Shin, J.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Shirk, J. S.

Smith, D. R.

N. Kundtz and D. R. Smith, “Extreme-angle broadband metamaterial lens,” Nat. Mater. 9, 129–132 (2010).
[CrossRef]

R. Liu, C. Ji, J. J. Mock, J. Y. Chin, T. J. Cui, and D. R. Smith, “Broadband ground-plane cloak,” Science 323, 366–369 (2009).
[CrossRef] [PubMed]

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

R. Liu, Q. Cheng, J. Y. Chin, J. J. Mock, T. J. Cui, and D. R. Smith, “Broadband gradient index microwave quasi-optical elements based on non-resonant metamaterials,” Opt. Express 17, 21030–21041 (2009).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312, 1780–1782 (2006).
[CrossRef] [PubMed]

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
[CrossRef]

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305, 788–792 (2004).
[CrossRef] [PubMed]

D. R. Smith, S. Schultz, P. Markoš, and C. M. Soukoulis, “Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients,” Phys. Rev. B 65 (2002).
[CrossRef]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292, 77–79 (2001).
[CrossRef] [PubMed]

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S. Linden, C. Enkrich, M. Wegener, J. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic response of metamaterials at 100 terahertz,” Science 306, 1351–1353 (2004).
[CrossRef] [PubMed]

D. R. Smith, S. Schultz, P. Markoš, and C. M. Soukoulis, “Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients,” Phys. Rev. B 65 (2002).
[CrossRef]

Starr, A. F.

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314, 977–980 (2006).
[CrossRef] [PubMed]

D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
[CrossRef]

Tai, H.

Y. Jin, H. Tai, A. Hiltner, E. Baer, and J. S. Shirk, “New class of bioinspired lenses with a gradient refractive index,” J. Appl. Polym. Sci. 103, 1834–1841 (2007).
[CrossRef]

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R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

Thompson, M. A.

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

Tsai, C.-H.

Valentine, J.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
[CrossRef] [PubMed]

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H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
[CrossRef]

Vier, D. C.

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Ward, C. A.

Wegener, M.

G. Dolling, M. Wegener, and S. Linden, “Realization of a three-functional-layer negative-index photonic metamaterial,” Opt. Lett. 32, 551–553 (2007).
[CrossRef] [PubMed]

S. Linden, C. Enkrich, M. Wegener, J. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic response of metamaterials at 100 terahertz,” Science 306, 1351–1353 (2004).
[CrossRef] [PubMed]

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D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305, 788–792 (2004).
[CrossRef] [PubMed]

Wu, B. I.

X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
[CrossRef]

Yang, X. M.

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

Yang, Y.

Yen, T. J.

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
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Yuan, H.-K.

Zentgraf, T.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
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S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef] [PubMed]

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J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
[CrossRef] [PubMed]

T. J. Yen, W. J. Padilla, N. Fang, D. C. Vier, D. R. Smith, J. B. Pendry, D. N. Basov, and X. Zhang, “Terahertz magnetic response from artificial materials,” Science 303, 1494–1496 (2004).
[CrossRef] [PubMed]

Zhou, J.

S. Linden, C. Enkrich, M. Wegener, J. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic response of metamaterials at 100 terahertz,” Science 306, 1351–1353 (2004).
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Appl. Opt.

Appl. Phys. Lett.

R. P. Liu, X. M. Yang, J. G. Gollub, J. J. Mock, T. J. Cui, and D. R. Smith, “Gradient index circuit by waveguided metamaterials,” Appl. Phys. Lett. 94 (2009).

T. Driscoll, D. N. Basov, A. F. Starr, P. M. Rye, S. Nemat-Nasser, D. Schurig, and D. R. Smith, “Free-space microwave focusing by a negative-index gradient lens,” Appl. Phys. Lett. 88, 081101 (2006).
[CrossRef]

R. B. Greegor, C. G. Parazzoli, J. A. Nielsen, M. A. Thompson, M. H. Tanielian, and D. R. Smith, “Simulation and testing of a graded negative index of refraction lens,” Appl. Phys. Lett. 87, 091114 (2005).
[CrossRef]

J. Appl. Polym. Sci.

Y. Jin, H. Tai, A. Hiltner, E. Baer, and J. S. Shirk, “New class of bioinspired lenses with a gradient refractive index,” J. Appl. Polym. Sci. 103, 1834–1841 (2007).
[CrossRef]

J. Opt. Soc. Am. A

Nanotechnol.

P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnol. 8, 53 (1997).
[CrossRef]

Nat. Mater.

N. Kundtz and D. R. Smith, “Extreme-angle broadband metamaterial lens,” Nat. Mater. 9, 129–132 (2010).
[CrossRef]

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8, 568–571 (2009).
[CrossRef] [PubMed]

N. Liu, H. Guo, L. Fu, S. Kaiser, H. Schweizer, and H. Giessen, “Three-dimensional photonic metamaterials at optical frequencies,” Nat. Mater. 7, 31–37 (2008).
[CrossRef]

Nat. Photonics

L. H. Gabrielli, J. Cardenas, C. B. Poitras, and M. Lipson, “Silicon nanostructure cloak operating at optical frequencies,” Nat. Photonics 3, 461–463 (2009).
[CrossRef]

Nature

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470, 369–373 (2011).
[CrossRef] [PubMed]

Opt. Commun.

H. Elfström, M. Kuittinen, T. Vallius, B. H. Kleemann, J. Ruoff, and R. Arnold, “Fabrication of blazed gratings by area-coded effective medium structures,” Opt. Commun. 266, 697–703 (2006).
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Opt. Express

Opt. Lett.

Phys. Rev. B

D. R. Smith, S. Schultz, P. Markoš, and C. M. Soukoulis, “Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients,” Phys. Rev. B 65 (2002).
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C. Rockstuhl, C. Menzel, T. Paul, T. Pertsch, and F. Lederer, “Light propagation in a fishnet metamaterial,” Phys. Rev. B 78 (2008).
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Phys. Rev. E

D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials,” Phys. Rev. E 71, 036609 (2005).
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X. D. Chen, T. M. Grzegorczyk, B. I. Wu, J. Pacheco, and J. A. Kong, “Robust method to retrieve the constitutive effective parameters of metamaterials,” Phys. Rev. E 70 (2004).
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Phys. Rev. Lett.

S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloy, R. M. Osgood, and S. R. J. Brueck, “Experimental demonstration of near-infrared negative-index metamaterials,” Phys. Rev. Lett. 95, 137404 (2005).
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Science

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Figures (8)

Fig. 1
Fig. 1

Relationship between the effective refractive index and the geometric parameters. This large span of the refractive index is achieved by making use of 3 geometries: small disk, rectangular bar and I-beam structure, shown in the inset above.

Fig. 3
Fig. 3

(a,b,c) Retrieved effective constitutive parameters of the I-beam structure shown in (d).

Fig. 2
Fig. 2

Material properties: (a) relative permittivity of SiO2; (b) relative permittivity of gold.

Fig. 4
Fig. 4

(a) Finite element simulations of the out-of-plane electric field patterns from a 6-layer grating with three periods (Λ = 61μm). (A): The plane used to calculate the complex transmittance for the grating; (B): The metamaterial grating region; (C): The excited surface current. The simulation shows that the optical beam is shifted to the positive direction. (b)The refractive index profile of the grating.

Fig. 5
Fig. 5

Process flow for the fabrication of the multi-layer metamaterial blazed grating. In step (i) the first SiO2 layer was deposited and the first metamaterial layer was patterned. Step (ii) shows the conformal nature of the evaporated SiO2 inter-layer dielectric. In the next step, (iii), a sacrificial planarizing layer of BCB was deposited. Reactive ion etching then removed the BCB and a thin layer of SiO2, as shown in step (iv). A second metamaterial layer was then patterned (step (v)). This process was repeated to build up multiple layers. As a final step, the upper layer of metamaterial was coated with a capping layer of SiO2 (250 nm thick, similar to the initial layer shown in step (i)).

Fig. 6
Fig. 6

Scanning electron micrographs of the fabricated metamaterial diffraction grating. Top: entire 732μm × 732μm device area. Lower-left: Three periods of the periodic index profile; lower-right: High magnification of fabricated metamaterial I-beam elements (the elements are spaced with periodicity of 1μm).

Fig. 7
Fig. 7

(a) The experimental setup for measuring grating efficiency; (b) Experimentally obtained image of the diffraction spots from the −1st, 0th and +1st diffracted orders; (c) The intensity profile of image (b).

Fig. 8
Fig. 8

Experiment vs. simulation results for a 4-layer metamaterial grating.

Equations (1)

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E ( ν x ) = E ( x ) exp ( j 2 π ν x x ) d x .

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