Abstract

Many remarkable semiconductor-based nanolaser cavities using metal have been reported in past few years. However, the efficient coupling of these small cavities to waveguides still remains a large challenge. Here, we show highly efficient coupling of a semiconductor-based metal-clad nanolaser cavity operating in the fundamental dielectric cavity mode to a silicon-on-insulator waveguide. By engineering the effective refractive index and the field distribution of the cavity mode, a coupling efficiency as high as 78% can be achieved for a metal-clad nanolaser with a modal volume of 0.28 (λ/n)3 while maintaining a high optical quality factor of > 600.

© 2011 OSA

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    [CrossRef]

2011 (4)

A. M. Lakhani, K. Yu, and M. C. Wu, “Lasing in subwavelength semiconductor nanopatches,” Semicond. Sci. Technol. 26(1), 014013 (2011).
[CrossRef]

R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

Q. Ding, A. Mizrahi, Y. Fainman, and V. Lomakin, “Dielectric shielded nanoscale patch laser resonators,” Opt. Lett. 36(10), 1812–1814 (2011).
[CrossRef] [PubMed]

2010 (6)

M.-K. Kim, S. H. Lee, M. Choi, B.-H. Ahn, N. Park, Y.-H. Lee, and B. Min, “Low-loss surface-plasmonic nanobeam cavities,” Opt. Express 18(11), 11089–11096 (2010).
[CrossRef] [PubMed]

K. Yu, A. Lakhani, and M. C. Wu, “Subwavelength metal-optic semiconductor nanopatch lasers,” Opt. Express 18(9), 8790–8799 (2010).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
[CrossRef]

C.-Y. Lu, S.-W. Chang, S. L. Chuang, T. D. Germann, and D. Bimberg, “Metal-cavity surface-emitting microlaser at room temperature,” Appl. Phys. Lett. 96(25), 251101 (2010).
[CrossRef]

S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
[CrossRef] [PubMed]

G. Roelkens, L. Liu, D. Liang, R. Jones, A. W. Fang, B. Koch, and J. E. Bowers, “III-V/silicon photonics for on-chip and intra-chip optical interconnects,” Laser Photon. Rev. 4(6), 751–779 (2010).
[CrossRef]

2009 (5)

D. Liang, M. Fiorentino, T. Okumura, H.-H. Chang, D. T. Spencer, Y.-H. Kuo, A. W. Fang, D. Dai, R. G. Beausoleil, and J. E. Bowers, “Electrically-pumped compact hybrid silicon microring lasers for optical interconnects,” Opt. Express 17(22), 20355–20364 (2009).
[CrossRef] [PubMed]

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
[CrossRef] [PubMed]

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

2008 (1)

S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
[CrossRef]

2007 (3)

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
[CrossRef] [PubMed]

2006 (2)

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

2002 (1)

J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
[CrossRef] [PubMed]

1998 (1)

A. V. Krishnamoorthy and K. W. Goossen, “Optoelectronic-VLSI: Photonics integrated with VLSI circuits,” IEEE J. Sel. Top. Quantum Electron. 4(6), 899–912 (1998).
[CrossRef]

1992 (1)

S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
[CrossRef]

1972 (1)

P. B. Johnson and R. W. Christy, “Optical Constants of the Noble Metals,” Phys. Rev. B 6(12), 4370–4379 (1972).
[CrossRef]

Ahn, B.-H.

Ahn, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Apsel, A. B.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Baets, R.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
[CrossRef] [PubMed]

Bakker, R.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Bartal, G.

R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

Beals, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Beausoleil, R. G.

Belgrave, A. M.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Bimberg, D.

C.-Y. Lu, S.-W. Chang, S. L. Chuang, T. D. Germann, and D. Bimberg, “Metal-cavity surface-emitting microlaser at room temperature,” Appl. Phys. Lett. 96(25), 251101 (2010).
[CrossRef]

Binetti, P. R. A.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

Bondarenko, O.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
[CrossRef]

Bowers, J. E.

Carothers, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Chang, H.-H.

Chang, S.-W.

C.-Y. Lu, S.-W. Chang, S. L. Chuang, T. D. Germann, and D. Bimberg, “Metal-cavity surface-emitting microlaser at room temperature,” Appl. Phys. Lett. 96(25), 251101 (2010).
[CrossRef]

Chen, Y.-K.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Choi, H.-J.

J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
[CrossRef] [PubMed]

Choi, M.

Christy, R. W.

P. B. Johnson and R. W. Christy, “Optical Constants of the Noble Metals,” Phys. Rev. B 6(12), 4370–4379 (1972).
[CrossRef]

Chuang, S. L.

C.-Y. Lu, S.-W. Chang, S. L. Chuang, T. D. Germann, and D. Bimberg, “Metal-cavity surface-emitting microlaser at room temperature,” Appl. Phys. Lett. 96(25), 251101 (2010).
[CrossRef]

Cohen, O.

Conway, T.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Dai, D.

Dai, L.

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

de Vries, T.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

de Waardt, H.

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Di Cioccio, L.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
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J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
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Ding, Q.

Eijkemans, T. J.

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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Fainman, Y.

Q. Ding, A. Mizrahi, Y. Fainman, and V. Lomakin, “Dielectric shielded nanoscale patch laser resonators,” Opt. Lett. 36(10), 1812–1814 (2011).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
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Fang, A. W.

Fedeli, J.-M.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
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J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
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M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
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Forchel, A.

S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
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M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
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K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
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M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
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M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
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S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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Kim, M.-K.

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S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
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G. Roelkens, L. Liu, D. Liang, R. Jones, A. W. Fang, B. Koch, and J. E. Bowers, “III-V/silicon photonics for on-chip and intra-chip optical interconnects,” Laser Photon. Rev. 4(6), 751–779 (2010).
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A. V. Krishnamoorthy and K. W. Goossen, “Optoelectronic-VLSI: Photonics integrated with VLSI circuits,” IEEE J. Sel. Top. Quantum Electron. 4(6), 899–912 (1998).
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Kwon, S.-H.

S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
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Leong, E. S. P.

Levi, A. F. J.

S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
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Liang, D.

G. Roelkens, L. Liu, D. Liang, R. Jones, A. W. Fang, B. Koch, and J. E. Bowers, “III-V/silicon photonics for on-chip and intra-chip optical interconnects,” Laser Photon. Rev. 4(6), 751–779 (2010).
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D. Liang, M. Fiorentino, T. Okumura, H.-H. Chang, D. T. Spencer, Y.-H. Kuo, A. W. Fang, D. Dai, R. G. Beausoleil, and J. E. Bowers, “Electrically-pumped compact hybrid silicon microring lasers for optical interconnects,” Opt. Express 17(22), 20355–20364 (2009).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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Liu, J.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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Liu, L.

G. Roelkens, L. Liu, D. Liang, R. Jones, A. W. Fang, B. Koch, and J. E. Bowers, “III-V/silicon photonics for on-chip and intra-chip optical interconnects,” Laser Photon. Rev. 4(6), 751–779 (2010).
[CrossRef]

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K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

Liu, V.

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
[CrossRef]

Liu, Z.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

Logan, R. A.

S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
[CrossRef]

Lomakin, V.

Q. Ding, A. Mizrahi, Y. Fainman, and V. Lomakin, “Dielectric shielded nanoscale patch laser resonators,” Opt. Lett. 36(10), 1812–1814 (2011).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
[CrossRef]

Lu, C.-Y.

C.-Y. Lu, S.-W. Chang, S. L. Chuang, T. D. Germann, and D. Bimberg, “Metal-cavity surface-emitting microlaser at room temperature,” Appl. Phys. Lett. 96(25), 251101 (2010).
[CrossRef]

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R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

Marell, M.

Marell, M. J. H.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

McCall, S. L.

S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
[CrossRef]

Michel, J.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Min, B.

Mizrahi, A.

Q. Ding, A. Mizrahi, Y. Fainman, and V. Lomakin, “Dielectric shielded nanoscale patch laser resonators,” Opt. Lett. 36(10), 1812–1814 (2011).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
[CrossRef]

N¨otzel, R.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

Narimanov, E. E.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Nezhad, M. P.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
[CrossRef]

Ning, C. Z.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

Ning, C.-Z.

Noginov, M. A.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Notzel, R.

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Nötzel, R.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
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Oei, Y. S.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

Oei, Y.-S.

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
[CrossRef] [PubMed]

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
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Okumura, T.

Oulton, R. F.

R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
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Pan, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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Paniccia, M. J.

Park, H.

Park, H.-G.

S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
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L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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Rasras, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
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S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
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J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
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S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
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G. Roelkens, L. Liu, D. Liang, R. Jones, A. W. Fang, B. Koch, and J. E. Bowers, “III-V/silicon photonics for on-chip and intra-chip optical interconnects,” Laser Photon. Rev. 4(6), 751–779 (2010).
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J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
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Saykally, R. J.

J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
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J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
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Scherer, A.

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
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Schneider, C.

S. Reitzenstein, T. Heindel, C. Kistner, A. Rahimi-Iman, C. Schneider, S. Hofling, and A. Forchel, “Low threshold electrically pumped quantum dot-micropillar lasers,” Appl. Phys. Lett. 93(6), 061104 (2008).
[CrossRef]

Seassal, C.

S.-H. Kwon, J.-H. Kang, C. Seassal, S.-K. Kim, P. Regreny, Y.-H. Lee, C. M. Lieber, and H.-G. Park, “Subwavelength plasmonic lasing from a semiconductor nanodisk with silver nanopan cavity,” Nano Lett. 10(9), 3679–3683 (2010).
[CrossRef] [PubMed]

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
[CrossRef] [PubMed]

Shalaev, V. M.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
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S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, “Whispering-gallery mode microdisk lasers,” Appl. Phys. Lett. 60(3), 289 (1992).
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Slutsky, B.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nat. Photonics 4(6), 395–399 (2010).
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Smalbrugge, B.

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
[CrossRef] [PubMed]

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Smit, M. K.

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
[CrossRef] [PubMed]

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Sorger, V. J.

R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

Sparacin, D. K.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Spencer, D. T.

Stout, S.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Sun, M.

Suteewong, T.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Tu, K.-Y.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Turkiewicz, J. P.

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Vahala, K.

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
[CrossRef]

Van Campenhout, J.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
[CrossRef] [PubMed]

van Otten, F. W. M.

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Van Thourhout, D.

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, and R. Baets, “Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,” Opt. Express 15(11), 6744–6749 (2007).
[CrossRef] [PubMed]

van Veldhoven, P. J.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

M. T. Hill, M. Marell, E. S. P. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei, R. Nötzel, C.-Z. Ning, and M. K. Smit, “Lasing in metal-insulator-metal sub-wavelength plasmonic waveguides,” Opt. Express 17(13), 11107–11112 (2009).
[CrossRef] [PubMed]

J. Van Campenhout, P. R. A. Binetti, P. Rojo Romeo, P. Regreny, C. Seassal, X. J. M Leijtens, T. de Vries, Y. S. Oei, P. J. van Veldhoven, R. N¨otzel, L. Di Cioccio, J.-M. Fedeli, M. K. Smit, D. Van Thourhout, and R. Baets, “Low-footprint optical interconnect on an SOI chip through heterogeneous integration of InP-based microdisk lasers and microdetectors,” IEEE Photon. Technol. Lett. 21(8), 522–524 (2009).
[CrossRef]

M. T. Hill, Y.-S. Oei, B. Smalbrugge, Y. Zhu, T. de Vries, P. J. van Veldhoven, F. W. M. van Otten, T. J. Eijkemans, J. P. Turkiewicz, H. de Waardt, E. J. Geluk, S.-H. Kwon, Y.-H. Lee, R. Notzel, and M. K. Smit, “Lasing in metallic-coated nanocavities,” Nat. Photonics 1(10), 589–594 (2007).
[CrossRef]

Verstuyft, S.

Wang, H.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

White, A. E.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Wiesner, U.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
[CrossRef] [PubMed]

Wong, C. W.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Wu, M. C.

A. M. Lakhani, K. Yu, and M. C. Wu, “Lasing in subwavelength semiconductor nanopatches,” Semicond. Sci. Technol. 26(1), 014013 (2011).
[CrossRef]

K. Yu, A. Lakhani, and M. C. Wu, “Subwavelength metal-optic semiconductor nanopatch lasers,” Opt. Express 18(9), 8790–8799 (2010).
[CrossRef] [PubMed]

Yang, L.

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
[CrossRef]

Yang, P.

J. C. Johnson, H.-J. Choi, K. P. Knutsen, R. D. Schaller, P. Yang, and R. J. Saykally, “Single gallium nitride nanowire lasers,” Nat. Mater. 1(2), 106–110 (2002).
[CrossRef] [PubMed]

Yin, L.

K. Ding, Z. Liu, L. Yin, H. Wang, R. Liu, M. T. Hill, M. J. H. Marell, P. J. van Veldhoven, R. Nötzel, and C. Z. Ning, “Electrical injection, continuous wave operation of subwavelength-metallic-cavity lasers at 260 K,” Appl. Phys. Lett. 98(23), 231108 (2011).
[CrossRef]

Yu, K.

A. M. Lakhani, K. Yu, and M. C. Wu, “Lasing in subwavelength semiconductor nanopatches,” Semicond. Sci. Technol. 26(1), 014013 (2011).
[CrossRef]

K. Yu, A. Lakhani, and M. C. Wu, “Subwavelength metal-optic semiconductor nanopatch lasers,” Opt. Express 18(9), 8790–8799 (2010).
[CrossRef] [PubMed]

Zentgraf, T.

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

Zhang, X.

R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature sub-diffraction-limited plasmon laser by total internal reflection,” Nat. Mater. 10(2), 110–113 (2011).
[CrossRef] [PubMed]

R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” Nature 461(7264), 629–632 (2009).
[CrossRef] [PubMed]

Zhang, Z.

Z. Zhang, L. Yang, V. Liu, T. Hong, K. Vahala, and A. Scherer, “Visible submicron microdisk lasers,” Appl. Phys. Lett. 90(11), 111119 (2007).
[CrossRef]

Zhu, G.

M. A. Noginov, G. Zhu, A. M. Belgrave, R. Bakker, V. M. Shalaev, E. E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature 460(7259), 1110–1112 (2009).
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Figures (6)

Fig. 1
Fig. 1

Perspective (a) and cross-sectional (b, c) schematic views of a Si-waveguide coupled metal-clad nanolaser cavity. Here, the nanolaser cavity is designed as a cuboid structure with a height (h) of 350 nm, a width (w) of 350 nm, and a variable length (l).

Fig. 2
Fig. 2

(a) Schematic of a metal-clad nanocavity on a semiconductor substrate. (b) Quality factor as a function of the cladding size (a = b). (c) Total Q-factor, radiation Q-factor, and absorption Q-factor as a function of cladding size. (d) External efficiency and quality factor of the cavity as a function of bottom InP post height between the nanocavity and the substrate.

Fig. 3
Fig. 3

Electric field intensity profile (vector plot overlaid) and the Fourier transform of the electric field profile for (a, e) a = b = 300 nm and l = 350 nm, (b, f) a = b = 150 nm and l = 350 nm (c, g) a = 100 nm, b = 150 nm and l = 350 nm, and (d, h) a = b = 150 nm and l = 450 nm, respectively. Here, a, b and l are defined in Fig. 1c. The closed solid lines in (g) and (h) enclose the wavevectors that couple to the Si-waveguide.

Fig. 4
Fig. 4

(a) Illustration showing the various energy loss paths from the cavity including metal and radiation losses. (b, c, d, e) Coupling efficiency (γcoupling/γrad) to Si-waveguide, energy confinement factor into active region, threshold material gain coefficient for lasing, and cavity quality factor as a function of a and l, respectively, with b = 150 nm and g = 600 nm. (f, g) Coupling efficiency, total external efficiency, total energy efficiency to Si-waveguide, threshold material gain coefficient for lasing, and quality factor as a function of g for the optimal structure with a = 60 nm, b = 150 nm and l = 350 nm.

Fig. 5
Fig. 5

Cross-sectional side views of |E| in logarithm scale with 40 dB range in the x-z and y-z planes for a of (a) 150 nm and (b) 60 nm, respectively, where b and g are fixed at 150 nm and 350 nm, respectively. Far-field radiation patterns to the substrate direction for a of (c) 150 nm and (d) 60 nm, respectively.

Fig. 6
Fig. 6

Coupling efficiency and quality factor for nanocavities with misaligned cladding positions along the (a) x- and (b) y-direction.

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