Abstract

We demonstrate wheel-shaped silicon optomechanical resonators for resonant operation in ambient air. The high finesse of optical whispering gallery modes (loaded optical Q factor above 500,000) allows for efficient transduction of the wheel resonator’s mechanical radial contour modes of frequency up to 1.35 GHz with high mechanical Q factor around 4,000 in air.

© 2011 OSA

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  1. M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
    [CrossRef] [PubMed]
  2. K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
    [CrossRef] [PubMed]
  3. S. Sridaran and S. A. Bhave, “Electrostatic actuation of silicon optomechanical resonators,” Opt. Express 19(10), 9020–9026 (2011).
    [CrossRef] [PubMed]
  4. M. Hossein-Zadeh and K. J. Vahala, “Photonic RF down-converter based on optomechanical oscillation,” IEEE Photon. Technol. Lett. 20(4), 234–236 (2008).
    [CrossRef]
  5. Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
    [CrossRef]
  6. T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
    [CrossRef] [PubMed]
  7. S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
    [CrossRef]
  8. M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  13. J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
    [CrossRef]
  14. G. S. Wiederhecker, S. Manipatruni, S. Lee, and M. Lipson, “Broadband tuning of optomechanical cavities,” Opt. Express 19(3), 2782–2790 (2011).
    [CrossRef] [PubMed]
  15. C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
    [CrossRef] [PubMed]
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    [CrossRef]
  17. M. Li, W. H. P. Pernice, and H. X. Tang, “Reactive cavity optical force on microdisk-coupled nanomechanical beam waveguides,” Phys. Rev. Lett. 103(22), 223901 (2009).
    [CrossRef] [PubMed]
  18. E. Shah Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths,” Opt. Express 18(3), 2127–2136 (2010).
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    [CrossRef] [PubMed]
  20. F. Marquardt, J. P. Chen, A. A. Clerk, and S. M. Girvin, “Quantum theory of cavity-assisted sideband cooling of mechanical motion,” Phys. Rev. Lett. 99(9), 093902 (2007).
    [CrossRef] [PubMed]

2011

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

S. Sridaran and S. A. Bhave, “Electrostatic actuation of silicon optomechanical resonators,” Opt. Express 19(10), 9020–9026 (2011).
[CrossRef] [PubMed]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

G. S. Wiederhecker, S. Manipatruni, S. Lee, and M. Lipson, “Broadband tuning of optomechanical cavities,” Opt. Express 19(3), 2782–2790 (2011).
[CrossRef] [PubMed]

2010

E. Shah Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths,” Opt. Express 18(3), 2127–2136 (2010).
[CrossRef] [PubMed]

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
[CrossRef]

2009

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
[CrossRef] [PubMed]

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

M. Li, W. H. P. Pernice, and H. X. Tang, “Reactive cavity optical force on microdisk-coupled nanomechanical beam waveguides,” Phys. Rev. Lett. 103(22), 223901 (2009).
[CrossRef] [PubMed]

2008

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

M. Hossein-Zadeh and K. J. Vahala, “Photonic RF down-converter based on optomechanical oscillation,” IEEE Photon. Technol. Lett. 20(4), 234–236 (2008).
[CrossRef]

2007

1956

C. V. Stephenson, “Radial vibrations in short, hollow cylinders of barium titanate,” J. Acoust. Soc. Am. 28(1), 51–56 (1956).
[CrossRef]

Adibi, A.

Aksyuk, V.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Anetsberger, G.

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

Arcizet, O.

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

Aspelmeyer, M.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Atabaki, A. H.

Baker, C.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Bhave, S. A.

Borselli, M.

Camacho, R.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

Camacho, R. M.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

Chan, J.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

Chang, D.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

Chen, J. P.

F. Marquardt, J. P. Chen, A. A. Clerk, and S. M. Girvin, “Quantum theory of cavity-assisted sideband cooling of mechanical motion,” Phys. Rev. Lett. 99(9), 093902 (2007).
[CrossRef] [PubMed]

Chrystal, C.

Clerk, A. A.

F. Marquardt, J. P. Chen, A. A. Clerk, and S. M. Girvin, “Quantum theory of cavity-assisted sideband cooling of mechanical motion,” Phys. Rev. Lett. 99(9), 093902 (2007).
[CrossRef] [PubMed]

Cole, G. D.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Davanço, M.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Ducci, S.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Eichenfield, M.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

Favero, I.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Gigan, S.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Girvin, S. M.

F. Marquardt, J. P. Chen, A. A. Clerk, and S. M. Girvin, “Quantum theory of cavity-assisted sideband cooling of mechanical motion,” Phys. Rev. Lett. 99(9), 093902 (2007).
[CrossRef] [PubMed]

Gröblacher, S.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Hertzberg, J. B.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Hossein-Zadeh, M.

M. Hossein-Zadeh and K. J. Vahala, “Photonic RF down-converter based on optomechanical oscillation,” IEEE Photon. Technol. Lett. 20(4), 234–236 (2008).
[CrossRef]

Johnson, T. J.

Kippenberg, T. J.

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007).
[CrossRef] [PubMed]

Lee, S.

Lemaitre, A.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Leo, G.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Li, M.

M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
[CrossRef]

M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, and H. X. Tang, “Reactive cavity optical force on microdisk-coupled nanomechanical beam waveguides,” Phys. Rev. Lett. 103(22), 223901 (2009).
[CrossRef] [PubMed]

Lin, Q.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

Lipson, M.

Manipatruni, S.

Marquardt, F.

F. Marquardt, J. P. Chen, A. A. Clerk, and S. M. Girvin, “Quantum theory of cavity-assisted sideband cooling of mechanical motion,” Phys. Rev. Lett. 99(9), 093902 (2007).
[CrossRef] [PubMed]

Miao, H. X.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Michael, C. P.

Painter, O.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Pernice, W. H. P.

M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
[CrossRef]

M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, and H. X. Tang, “Reactive cavity optical force on microdisk-coupled nanomechanical beam waveguides,” Phys. Rev. Lett. 103(22), 223901 (2009).
[CrossRef] [PubMed]

Rakher, M. T.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Riviere, R.

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

Rosenberg, J.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

Schliesser, A.

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

Schwab, K. C.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Senellart, P.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

Shah Hosseini, E.

Soltani, M.

Sridaran, S.

Srinivasan, K.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Stephenson, C. V.

C. V. Stephenson, “Radial vibrations in short, hollow cylinders of barium titanate,” J. Acoust. Soc. Am. 28(1), 51–56 (1956).
[CrossRef]

Tang, H. X.

M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
[CrossRef]

M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, and H. X. Tang, “Reactive cavity optical force on microdisk-coupled nanomechanical beam waveguides,” Phys. Rev. Lett. 103(22), 223901 (2009).
[CrossRef] [PubMed]

Vahala, K. J.

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

M. Hossein-Zadeh and K. J. Vahala, “Photonic RF down-converter based on optomechanical oscillation,” IEEE Photon. Technol. Lett. 20(4), 234–236 (2008).
[CrossRef]

T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007).
[CrossRef] [PubMed]

Vanner, M. R.

S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, “Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity,” Nat. Phys. 5(7), 485–488 (2009).
[CrossRef]

Wiederhecker, G. S.

Yegnanarayanan, S.

Appl. Phys. Lett.

M. Li, W. H. P. Pernice, and H. X. Tang, “Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities,” Appl. Phys. Lett. 97(18), 183110 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[CrossRef]

IEEE Photon. Technol. Lett.

M. Hossein-Zadeh and K. J. Vahala, “Photonic RF down-converter based on optomechanical oscillation,” IEEE Photon. Technol. Lett. 20(4), 234–236 (2008).
[CrossRef]

J. Acoust. Soc. Am.

C. V. Stephenson, “Radial vibrations in short, hollow cylinders of barium titanate,” J. Acoust. Soc. Am. 28(1), 51–56 (1956).
[CrossRef]

Nano Lett.

K. Srinivasan, H. X. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, “Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator,” Nano Lett. 11(2), 791–797 (2011).
[CrossRef] [PubMed]

Nat. Nanotechnol.

M. Li, W. H. P. Pernice, and H. X. Tang, “Broadband all-photonic transduction of nanocantilevers,” Nat. Nanotechnol. 4(6), 377–382 (2009).
[CrossRef] [PubMed]

Nat. Photonics

Q. Lin, J. Rosenberg, D. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, and O. Painter, “Coherent mixing of mechanical excitations in nano-optomechanical structures,” Nat. Photonics 4(4), 236–242 (2010).
[CrossRef]

G. Anetsberger, R. Riviere, A. Schliesser, O. Arcizet, and T. J. Kippenberg, “Ultralow-dissipation optomechanical resonators on a chip,” Nat. Photonics 2(10), 627–633 (2008).
[CrossRef]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

Nat. Phys.

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M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
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Figures (4)

Fig. 1
Fig. 1

(a) Contour map showing the solutions of the characteristic equation [Eq. (1)] that determines the frequency of the radial contour modes. The inner radius ri of the ring is fixed at 21.22 µm. Inset: schematic of the wheel resonator. The vertical dashed line marks the choice of the outer radius ro = 30.14 µm in our design. (b) Normalized displacement profiles of the first four radial contour modes.

Fig. 2
Fig. 2

(a) Top-view optical microscope image showing the entire device, including the grating couplers, the wrap-around coupling waveguide, and the wheel resonator. (b) 45°-tilted-view scanning electron microscope (SEM) image of the wheel resonator. (c) SEM close-up view of the notched attaching point and the wrap-around coupling waveguide.

Fig. 3
Fig. 3

(a) Normalized optical transmission spectrum of the device. Note that the background fringes result from the two grating couplers, each of which has a coupling loss of around 8 dB. The high-extinction dips correspond to the wheel’s optical whispering gallery modes with a free spectral range of 3.39 nm. (b) Zoomed-in transmission spectrum showing the loaded optical Q factors exceeding 500,000.

Fig. 4
Fig. 4

(a) Full-range RF power spectral density of the device, showing the transduced mechanical modes. The first four orders of radial contour modes at 46 MHz, 465 MHz, 921 MHz, and 1.35 GHz are distinct. (b) Zoomed-in RF spectrum at each radial contour mode showing the mechanical Q factor. PSD: power spectral density.

Tables (1)

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Table 1 Properties of the first four mechanical radial contour modes, theoretical (superscript t), simulated (superscript s), and experimental (superscript e)

Equations (2)

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F( r i , r o ,f)=[ (σ1) J 1 (h r i )+h r i J 0 (h r i ) ][ (σ1) Y 1 (h r o )+h r o Y 0 (h r o ) ] [ (σ1) Y 1 (h r i )+h r i Y 0 (h r i ) ][ (σ1) J 1 (h r o )+h r o J 0 (h r o ) ]=0,
L sp =(2n1) λ a 4 = 2n1 4f E ρ ,n=1,2,3...

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