Abstract

The efficiency of B4C, Mo and Zr barrier layers to improve thermal stability of Mg/Co multilayer up to 400 °C is investigated. Multilayers were deposited by direct current magnetron sputtering and characterized using X-ray and extreme ultraviolet reflection. The results suggest that B4C barrier layer is not effective due to drastic diffusion at Mg-B4C interface. Although introducing Mo barriers improves the thermal stability from 200 to 300 °C, it increases the interface roughness and thus degrades the optical performances. On the contrary, Zr barriers can significantly increase the thermal stability of Mg/Co up to 400 °C without optical performance degradation. Thus, Mg/Zr/Co/Zr is suitable for EUV applications requiring both optimal optical performances and heat resistance.

© 2011 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
    [CrossRef]
  2. N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
    [CrossRef]
  3. D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
    [CrossRef]
  4. M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
    [CrossRef] [PubMed]
  5. Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
    [CrossRef]
  6. T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44(26), 5446–5453 (2005).
    [CrossRef] [PubMed]
  7. J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47(13), C310–C314 (2008).
    [CrossRef] [PubMed]
  8. J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
    [CrossRef] [PubMed]
  9. K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
    [CrossRef]
  10. H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
    [CrossRef]
  11. A. Aquila, F. Salmassi, Y. Liu, and E. M. Gullikson, “Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light,” Opt. Express 17(24), 22102–22107 (2009).
    [CrossRef] [PubMed]
  12. A. A. Nayeb-Hashemi and J. B. Clark, “The Mg-Zr (Magnesium-Zirconium) System,” Bull. Alloy Phase Diagrams 6(3), 246–250 (1985).
    [CrossRef]
  13. T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
    [CrossRef]
  14. P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
    [CrossRef]
  15. A. A. Nayeb-Hashemi and J. B. Clark, Phase Diagrams of Binary Magnesium Alloys (ASM International, 1988), pp 204–205.
  16. K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).
  17. K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
    [CrossRef]
  18. M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
    [CrossRef]

2011

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

2010

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

2009

2008

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47(13), C310–C314 (2008).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

2006

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

2005

2004

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

2003

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

2002

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

1999

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

1997

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

1985

A. A. Nayeb-Hashemi and J. B. Clark, “The Mg-Zr (Magnesium-Zirconium) System,” Bull. Alloy Phase Diagrams 6(3), 246–250 (1985).
[CrossRef]

André, J.-M.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Aquila, A.

Banse, T.

Beyer, E.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Bottger, T.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Bowen, D.

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

Braun, S.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Bridou, F.

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Broadway, D.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Chen, L. Y.

Clark, J. B.

A. A. Nayeb-Hashemi and J. B. Clark, “The Mg-Zr (Magnesium-Zirconium) System,” Bull. Alloy Phase Diagrams 6(3), 246–250 (1985).
[CrossRef]

Corkum, P. B.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Cui, M. Q.

DeGroot, B.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Delmotte, F.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

DeLuca, E.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Dong, J.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Donguy, S.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Dudovich, N.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Ejima, T.

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44(26), 5446–5453 (2005).
[CrossRef] [PubMed]

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

Galtayries, A.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

Giglia, A.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Golub, L.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Grupido, N.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Guen, K. L.

Gullikson, E. M.

A. Aquila, F. Salmassi, Y. Liu, and E. M. Gullikson, “Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light,” Opt. Express 17(24), 22102–22107 (2009).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Gutman, G.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Hecquet, C.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Hu, M.-H.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Huang, Q.

Huo, T. L.

Ichimaru, S.

Ivanov, M. Yu.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Jonnard, P.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Kim, B.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Kjornrattanawanich, B.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Kondo, Y.

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44(26), 5446–5453 (2005).
[CrossRef] [PubMed]

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

Le Guen, K.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Levesque, J.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Li, H.

Li, H. C.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

Li, H. Ch.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Liu, Y.

Mahne, N.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Mai, H.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Mairesse, Y.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Matney, K.

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

Maury, H.

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Meny, C.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Meyer, D. C.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Moss, M.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Nannarone, S.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

Nannaronne, S.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Nayeb-Hashemi, A. A.

A. A. Nayeb-Hashemi and J. B. Clark, “The Mg-Zr (Magnesium-Zirconium) System,” Bull. Alloy Phase Diagrams 6(3), 246–250 (1985).
[CrossRef]

Nicolosi, P.

Panaccione, C.

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

Paufler, P.

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Pelizzo, M. G.

Platonov, Y. Y.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Rodriguez, J.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Saito, K.

Salmassi, F.

Seely, J.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Smirnova, O.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Suman, M.

Takatsuka, H.

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

Takenaka, H.

Verman, B.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Villeneuve, D. M.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Walton, C. C.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Wang, F. L.

Wang, H. C.

Wang, Z.

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Wang, Z. S.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47(13), C310–C314 (2008).
[CrossRef] [PubMed]

Watanabe, M.

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

Windt, D. L.

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Wood, J.

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Wormington, M.

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

Wu, W. J.

Xu, D.

Yamazaki, A.

Zhang, S. M.

Zhang, Z.

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47(13), C310–C314 (2008).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Zhao, Y. D.

Zhou, H. J.

Zhou, S.

Zhou, S. K.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Zhu, J.

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

Zhu, J. T.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47(13), C310–C314 (2008).
[CrossRef] [PubMed]

Appl. Opt.

Appl. Phys. Lett.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

Appl. Phys., A Mater. Sci. Process.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. C. Li, J. T. Zhu, Z. S. Wang, N. Mahne, A. Giglia, and S. Nannarone, “Introduction of Zr layers in Mg/Co multilayers for EUV applications,” Appl. Phys., A Mater. Sci. Process. 102, 69–77 (2011).

Bull. Alloy Phase Diagrams

A. A. Nayeb-Hashemi and J. B. Clark, “The Mg-Zr (Magnesium-Zirconium) System,” Bull. Alloy Phase Diagrams 6(3), 246–250 (1985).
[CrossRef]

Eur. Phys. J. B

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64(2), 193–199 (2008).
[CrossRef]

J. Phys. Chem. C

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Nat. Phys.

N. Dudovich, O. Smirnova, J. Levesque, Y. Mairesse, M. Yu. Ivanov, D. M. Villeneuve, and P. B. Corkum, “Measuring and controlling the birth of attosecond XUV pulses,” Nat. Phys. 2(11), 781–786 (2006).
[CrossRef]

Opt. Express

Philos. Trans. R. Soc. Lond. A

M. Wormington, C. Panaccione, K. Matney, and D. Bowen, “Characterization of structures from X-rayscattering data using genetic algorithms,” Philos. Trans. R. Soc. Lond. A 357(1761), 2827–2848 (1999).
[CrossRef]

Proc. SPIE

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Y. Y. Platonov, D. Broadway, B. DeGroot, B. Verman, B. Kim, G. Gutman, J. Wood, J. Rodriguez, and N. Grupido, “Deposition of X-Ray Multilayers on Long Size Substrates for Synchrotron Applications,” Proc. SPIE 3152, 231–239 (1997).
[CrossRef]

Surf. Rev. Lett.

Y. Kondo, T. Ejima, H. Takatsuka, and M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett. 9(1), 521–527 (2002).
[CrossRef]

Surf. Sci.

P. Jonnard, H. Maury, K. Le Guen, J.-M. André, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604(11-12), 1015–1021 (2010).
[CrossRef]

Thin Solid Films

T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444(1-2), 165–173 (2003).
[CrossRef]

Other

A. A. Nayeb-Hashemi and J. B. Clark, Phase Diagrams of Binary Magnesium Alloys (ASM International, 1988), pp 204–205.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1
Fig. 1

(Color online) Measured GIXR (a) and EUV (b) reflectance curves of Mg/Co multilayers: as-deposited, 300, 350 and 400 °C, respectively. In (a), each curve was shifted vertically by 4 orders of magnitude for better discrimination; scatter and solid lines represent measured and fitted GIXR curves, respectively.

Fig. 2
Fig. 2

(Color online) GIXR curves: (a) Mg/Co and Mg/B4C/Co/B4C multilayers; (b) Co/B4C multilayer for interface study.

Fig. 3
Fig. 3

(Color online) GIXR curves (a) and EUV reflectance (b) curves of Mg/Mo/Co/Mo multilayers: as-deposited, 300, 350 and 400 °C, respectively. In (a), each curve has been shifted vertically by 4 orders of magnitude for better discrimination; scatter and solid lines represent measured and fitted GIXR curves, respectively.

Fig. 4
Fig. 4

(Color online) GIXR curves (a) and EUV reflectance (b) curves of Mg/Zr/Co/Zr multilayers: as-deposited, 300, 350 and 400 °C, respectively. In (a), each curve has been shifted vertically by 4 orders of magnitude for better discrimination; scatter and solid lines represent measured and fitted GIXR curves, respectively.

Fig. 5
Fig. 5

(Color online) Evolution, as a function of the annealing temperature, of the normalized EUV reflectance decrease (NRD) of the Mg/Co, Mg/Mo/Co/Mo and Mg/Zr/Co/Zr multilayers.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

NRD(T)= R(T) R asdeposited

Metrics