Abstract

We have designed, fabricated, and characterized metamaterial enhanced bimaterial cantilever pixels for far-infrared detection. Local heating due to absorption from split ring resonators (SRRs) incorporated directly onto the cantilever pixels leads to mechanical deflection which is readily detected with visible light. Highly responsive pixels have been fabricated for detection at 95 GHz and 693 GHz, demonstrating the frequency agility of our technique. We have obtained single pixel responsivities as high as 16,500 V/W and noise equivalent powers of 10−8 W/Hz1/2 with these first-generation devices.

©2011 Optical Society of America

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  1. D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
    [Crossref] [PubMed]
  2. D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
    [Crossref] [PubMed]
  3. J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
    [Crossref] [PubMed]
  4. J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
    [Crossref] [PubMed]
  5. N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
    [Crossref] [PubMed]
  6. H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
    [Crossref]
  7. B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002).
    [Crossref] [PubMed]
  8. K. Sakai, Terahertz Optoelectronics (Springer-Verlag, 2005).
  9. P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
    [Crossref]
  10. D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
    [Crossref] [PubMed]
  11. N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
    [Crossref] [PubMed]
  12. H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
    [Crossref] [PubMed]
  13. J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
    [Crossref]
  14. M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics 1(2), 97–105 (2007).
    [Crossref]
  15. F. Sizov and A. Rogalski, “THz detectors,” Prog. Quantum Electron. 34(5), 278–347 (2010).
    [Crossref]
  16. F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
    [Crossref]
  17. H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
  18. B. Li, “Design and simulation of an uncooled doulbe-cantilever microbolometer with the potential for ~mK NETD,” Sens. Actuators A Phys. 112(2-3), 351–359 (2004).
    [Crossref]
  19. K. C. Liddiard, “Thin-film resistance bolometer IR detectors,” Infrared Phys. 24(1), 57–64 (1984).
    [Crossref]
  20. Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
    [Crossref]
  21. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
    [Crossref]
  22. X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
    [Crossref] [PubMed]

2011 (3)

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
[Crossref]

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

2010 (3)

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

F. Sizov and A. Rogalski, “THz detectors,” Prog. Quantum Electron. 34(5), 278–347 (2010).
[Crossref]

2009 (1)

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

2008 (3)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

2007 (2)

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics 1(2), 97–105 (2007).
[Crossref]

2006 (1)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

2005 (1)

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

2004 (2)

B. Li, “Design and simulation of an uncooled doulbe-cantilever microbolometer with the potential for ~mK NETD,” Sens. Actuators A Phys. 112(2-3), 351–359 (2004).
[Crossref]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

2002 (2)

B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002).
[Crossref] [PubMed]

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

2000 (2)

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
[Crossref] [PubMed]

1984 (1)

K. C. Liddiard, “Thin-film resistance bolometer IR detectors,” Infrared Phys. 24(1), 57–64 (1984).
[Crossref]

Averitt, R. D.

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

Bartal, G.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

Bingham, C. M.

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Chen, D.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Cooke, D. G.

P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
[Crossref]

Cummer, S. A.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Dong, F.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Fan, K.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Fang, N.

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

Ferguson, B.

B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002).
[Crossref] [PubMed]

Golenkov, A.

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

Guo, Z.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Hao, J.

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

Horowitz, R.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Jepsen, P. U.

P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
[Crossref]

Jiao, B.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Justice, B. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Kitching, J.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Koch, M.

P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
[Crossref]

Landy, N. I.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Lee, H.

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

Li, B.

B. Li, “Design and simulation of an uncooled doulbe-cantilever microbolometer with the potential for ~mK NETD,” Sens. Actuators A Phys. 112(2-3), 351–359 (2004).
[Crossref]

Li, C.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Li, J.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

Liddiard, K. C.

K. C. Liddiard, “Thin-film resistance bolometer IR detectors,” Infrared Phys. 24(1), 57–64 (1984).
[Crossref]

Liu, X.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

Majumdar, A.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Mao, M.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Miao, Z.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Nemat-Nasser, S. C.

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Norton, P.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Padilla, W. J.

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Pendry, J. B.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
[Crossref] [PubMed]

Pilon, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Qiu, M.

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

Reva, V.

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

Rogalski, A.

F. Sizov and A. Rogalski, “THz detectors,” Prog. Quantum Electron. 34(5), 278–347 (2010).
[Crossref]

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Schultz, S.

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Schurig, D.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Shrekenhamer, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Sizov, F.

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

F. Sizov and A. Rogalski, “THz detectors,” Prog. Quantum Electron. 34(5), 278–347 (2010).
[Crossref]

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Starr, A. F.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Starr, T.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

Strikwerda, A. C.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Sun, C.

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

Tao, H.

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

Tonouchi, M.

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics 1(2), 97–105 (2007).
[Crossref]

Valentine, J.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

Varesi, J.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Vier, D. C.

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Wang, J.

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

Wiltshire, M. C. K.

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Wu, X.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Xiong, Z.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Zabudsky, V.

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

Zentgraf, T.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

Zhang, Q.

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Zhang, X.

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

Zhang, X.-C.

B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002).
[Crossref] [PubMed]

Zhao, Y.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Zhou, L.

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

Appl. Phys. Lett. (1)

J. Hao, J. Wang, X. Liu, W. J. Padilla, L. Zhou, and M. Qiu, “High performance optical absorber based on a plasmonic metamaterial,” Appl. Phys. Lett. 96(25), 251104 (2010).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

H. Tao, W. J. Padilla, X. Zhang, and R. D. Averitt, “Recent progress in electromagnetic metamaterial devices for terahertz applications,” IEEE J. Sel. Top. Quantum Electron. 17(1), 92–101 (2011).
[Crossref]

Infrared Phys. (1)

K. C. Liddiard, “Thin-film resistance bolometer IR detectors,” Infrared Phys. 24(1), 57–64 (1984).
[Crossref]

J. Infrared Millim. Terahertz Waves (1)

F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky, “Uncooled detectors challenges for THz/sub THz arrays imaging,” J. Infrared Millim. Terahertz Waves 32(10), 1192–1206 (2011).
[Crossref]

J. Microelectromech. Syst. (1)

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, “Optomechanical Uncooled infrared imaging system: design, microfabrication, and performance,” J. Microelectromech. Syst. 11(2), 136–146 (2002).
[Crossref]

Laser Photon. Rev. (1)

P. U. Jepsen, D. G. Cooke, and M. Koch, “Terahertz spectroscopy and imaging—modern techniques and applications,” Laser Photon. Rev. 5(1), 124–166 (2011).
[Crossref]

Nat. Mater. (2)

B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002).
[Crossref] [PubMed]

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[Crossref] [PubMed]

Nat. Photonics (1)

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics 1(2), 97–105 (2007).
[Crossref]

Opt. Express (1)

Optoelectron. Lett. (1)

Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, “Optical readout uncooled infrared imaging detector using knife-edge filter operation,” Optoelectron. Lett. 3(2), 119–122 (2007).
[Crossref]

Phys. Rev. B (1)

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).

Phys. Rev. Lett. (4)

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Prog. Quantum Electron. (1)

F. Sizov and A. Rogalski, “THz detectors,” Prog. Quantum Electron. 34(5), 278–347 (2010).
[Crossref]

Science (3)

N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308(5721), 534–537 (2005).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Sens. Actuators A Phys. (1)

B. Li, “Design and simulation of an uncooled doulbe-cantilever microbolometer with the potential for ~mK NETD,” Sens. Actuators A Phys. 112(2-3), 351–359 (2004).
[Crossref]

Other (1)

K. Sakai, Terahertz Optoelectronics (Springer-Verlag, 2005).

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Figures (5)

Fig. 1
Fig. 1 Metamaterial enhanced terahertz detector using optical readout. (a). Schematic of the device showing the metamaterial cantilever array, an individual pixel, and reflective optical read-out. (b). Numerical simulation of the transmission reflection and transmission of the device. (Inset) Simulated electric field distribution on resonance (693GHz). (c). Numerical simulation of the absorption of the device with (black line) and without (red line) split ring resonators (SRRs). (Inset) Simulated surface current on resonance.

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Fig. 2
Fig. 2 Dimensions of the metamaterial enhanced detectors resonant at 95 GHz and 693 GHz, respectively. The left (right) part of the figure shows the 95 GHz (693 GHz) pixel schematic while the center shows an SEM of a portion of the 693 GHz array.

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Fig. 3
Fig. 3 Response of the 95 GHz detector as a function of frequency of the incident radiation at two polarizations. (Inset, left top) Transmission spectra of the detector characterized using Terahertz time-domain spectroscopy (THz-TDS). (Inset, left bottom) Zoom-in view of the detector response with the polarization of the THz electric field parallel to the SRR gap (E||). The response is two orders of magnitude smaller than the response with the polarization of the THz electric field perpendicular to the SRR gap (E⊥). (Inset, right) Optical microscopy photo of one pixel of the 95 GHz detector with the two polarizations indicated.

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Fig. 4
Fig. 4 Photoresponse of the 95 GHz pixel as a function of incident power. (Inset, left) SEM photo of one pixel. (Inset, right) Oscilloscope observed temporal response of the 95 GHz at 5 Hz (blue) and 25 Hz (red), respectively.

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Fig. 5
Fig. 5 Photoresponse of the 693 GHz pixel. (a). Response of the detector as a function of incident power. The non-zero intercept results from residual vibrations. (Inset, left) Oscilloscope observed temporal responses of the 95 GHz at 8 Hz (blue) and 10 Hz (red), respectively. (Inset, right) THz-TDS characterized transmission spectrum of the detector showing a resonance at ~693 GHz. (b). Image of the incident THz beam profile using the metamaterial enhanced THz detector.

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