Abstract

We report on the formation of polarization dependent ripples on ZF6 glass by femtosecond laser irradiation. Two kinds of polarization dependent ripples are formed on the laser modified region. The ripples with direction parallel to laser polarization distribute in a pit in the center of laser modified region, the period of the ripples increases with the increasing pulse number. The ripples with direction perpendicular to laser polarization spread around the pit, the period of the ripples (~750nm) almost keeps constant with the increasing pulse number.

© 2011 OSA

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  1. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
    [CrossRef] [PubMed]
  2. Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
    [CrossRef] [PubMed]
  3. R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
    [CrossRef] [PubMed]
  4. L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
    [CrossRef]
  5. Q. Z. Zhao, S. Malzer, and L. J. Wang, “Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses,” Opt. Lett. 32(13), 1932–1934 (2007).
    [CrossRef] [PubMed]
  6. T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
    [CrossRef]
  7. A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
    [CrossRef]
  8. M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
    [CrossRef]
  9. R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
    [CrossRef] [PubMed]
  10. G. Miyaji and K. Miyazaki, “Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 89(19), 191902 (2006).
    [CrossRef]
  11. Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
    [CrossRef] [PubMed]
  12. J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
    [CrossRef]
  13. M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
    [CrossRef] [PubMed]
  14. F. Garrelie, J. P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express 19(10), 9035–9043 (2011).
    [CrossRef] [PubMed]
  15. T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
    [CrossRef]
  16. E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
    [CrossRef]
  17. H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
    [CrossRef]
  18. Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
    [CrossRef]
  19. X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
    [CrossRef]
  20. V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
    [CrossRef]
  21. M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
    [CrossRef]

2011

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

F. Garrelie, J. P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express 19(10), 9035–9043 (2011).
[CrossRef] [PubMed]

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

2010

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

2009

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

2008

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

2007

M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
[CrossRef]

Q. Z. Zhao, S. Malzer, and L. J. Wang, “Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses,” Opt. Lett. 32(13), 1932–1934 (2007).
[CrossRef] [PubMed]

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

2006

G. Miyaji and K. Miyazaki, “Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 89(19), 191902 (2006).
[CrossRef]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

2004

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

2003

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
[CrossRef]

1999

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

1983

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Beresna, M.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Bhardwaj, V. R.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Bounhalli, M.

Brown, W. D.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Buividas, R.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Chen, H. L.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Chen, S. C.

Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
[CrossRef]

Cheng, Y.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Chin, S. L.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Colombier, J. P.

Corkum, P. B.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Datsyuk, V.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Dreisow, F.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Fan, W.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Faure, N.

Förster, E.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Fukumori, Y.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

Garrelie, F.

Gibson, G. N.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

Glatzel, U.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Golosov, E. V.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Hashimoto, S.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

Heinrich, M.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Her, T.-H.

M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
[CrossRef]

Hirao, K.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Hnatovsky, C.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Huang, K. T.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Huang, M.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Ionin, A. A.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Juodkazis, S.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Kazansky, P. G.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Keil, R.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Kinoshita, K.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

Kolobov, Y. R.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Korovin, A. V.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Koubassov, V.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Kudrius, T.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Kudryashov, S. I.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Laprise, J. F.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Li, M.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

Ligachev, A. E.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Lin, C. H.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Lu, Y.

Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
[CrossRef]

Makarov, S. V.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Malshe, A. P.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Malzer, S.

Matsuo, S.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

Menon, S.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

Miura, K.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Miyaji, G.

G. Miyaji and K. Miyazaki, “Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 89(19), 191902 (2006).
[CrossRef]

Miyazaki, K.

G. Miyaji and K. Miyazaki, “Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 89(19), 191902 (2006).
[CrossRef]

Molian, P. A.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Müller, B.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Nibarger, J. P.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

Nolte, S.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Novoselov, Y. N.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Ozkan, A. M.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Parriaux, O.

Peschel, U.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Pey, K. L.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Pigeon, F.

Preston, J.

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Qiu, J.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Railkar, T. A.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Rajeev, P. P.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Ramirez, L. P.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Rayner, D. M.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Reynaud, S.

Richter, S.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Rosa, L.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Sakakura, M.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Sauerbrey, R.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Seleznev, L. V.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Sharipov, A. R.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Shimotsuma, Y.

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Shirk, M. D.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

Simova, E.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Sinitsyn, D. V.

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

Sipe, J.

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Slekys, G.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Sliupas, R.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Tan, C. W.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Tang, M. Z.

M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
[CrossRef]

Taylor, R. S.

R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, “Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass,” Opt. Lett. 32(19), 2888–2890 (2007).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Théberge, F.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

Theppakuttai, S.

Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
[CrossRef]

Tomita, T.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

Tonchev, S.

Tünnermann, A.

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

van Driel, H.

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Wang, F.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Wang, L. J.

Wang, W. Y.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Wang, X. C.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Xu, N. S.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Xu, Z. Z.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Young, J.

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Yu, H. Y.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Zhang, H. T.

M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
[CrossRef]

Zhao, F. L.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Zhao, Q. Z.

Zheng, H. Y.

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

ACS Nano

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Adv. Mater. (Deerfield Beach Fla.)

Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura, and K. Hirao, “Ultrafast manipulation of self-assembled form birefringence in glass,” Adv. Mater. (Deerfield Beach Fla.) 22(36), 4039–4043 (2010).
[CrossRef] [PubMed]

Appl. Phys. Lett.

T. Tomita, Y. Fukumori, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Observation of laser-induced surface waves on flat silicon surface,” Appl. Phys. Lett. 92(1), 013104 (2008).
[CrossRef]

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75(23), 3716–3718 (1999).
[CrossRef]

T. Tomita, K. Kinoshita, S. Matsuo, and S. Hashimoto, “Effect of surface roughening on femtosecond laser-induced ripple structures,” Appl. Phys. Lett. 90(15), 153115 (2007).
[CrossRef]

G. Miyaji and K. Miyazaki, “Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 89(19), 191902 (2006).
[CrossRef]

Y. Lu, S. Theppakuttai, and S. C. Chen, “Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon,” Appl. Phys. Lett. 82(23), 4143–4145 (2003).
[CrossRef]

X. C. Wang, H. Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, and K. L. Pey, “Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation,” Appl. Phys. Lett. 96(8), 084101 (2010).
[CrossRef]

Appl. Phys., A Mater. Sci. Process.

V. Koubassov, J. F. Laprise, F. Théberge, E. Förster, R. Sauerbrey, B. Müller, U. Glatzel, and S. L. Chin, “Ultrafast laser-induced melting of glass,” Appl. Phys., A Mater. Sci. Process. 79, 499–505 (2004).
[CrossRef]

L. P. Ramirez, M. Heinrich, S. Richter, F. Dreisow, R. Keil, A. V. Korovin, U. Peschel, S. Nolte, and A. Tünnermann, “Tuning the structural properties of femtosecond-laser-induced nanogratings,” Appl. Phys., A Mater. Sci. Process. 100(1), 1–6 (2010).
[CrossRef]

Microelectron. Eng.

H. L. Chen, K. T. Huang, C. H. Lin, W. Y. Wang, and W. Fan, “Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography,” Microelectron. Eng. 84(5-8), 750–754 (2007).
[CrossRef]

Nanotechnology

M. Z. Tang, H. T. Zhang, and T.-H. Her, “Self-assembly of tunable and highly uniform tungsten nanogratings induced by a femtosecond laser with nanojoule energy,” Nanotechnology 18(48), 485304 (2007).
[CrossRef]

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotechnology 22(5), 055304 (2011).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Phys. Rev. B

E. V. Golosov, A. A. Ionin, Y. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Y. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, “Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface,” Phys. Rev. B 83(11), 115426 (2011).
[CrossRef]

J. Young, J. Preston, H. van Driel, and J. Sipe, “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,” Phys. Rev. B 27(2), 1155–1172 (1983).
[CrossRef]

Phys. Rev. Lett.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett. 82(11), 2394–2397 (1999).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

The absorbance spectrum (a) and the surface configuration (b) of 2-mm-thick ZF6 glass before laser irradiation.

Fig. 2
Fig. 2

(a) The SEM image of the ripples formed by 8 pulses at the energy density of 0.71μJ/cm2, (b) and (c) are the zoomed-in pictures of region (a) and (b) in Fig. 2(a). (d) is the 2D-FT picture of Fig. 2(a). The repetition rate of the laser is set to be 5Hz.

Fig. 3
Fig. 3

SEM pictures and corresponding 2D-FT images of ripples evolve with the increasing pulse number (N). (a)N = 2, (c) N = 7, (e) N = 10, (g) N = 15, (i) N = 20. The repetition rate of the laser is set to be 5Hz. The energy density is 0.71μJ/cm2.

Fig. 4
Fig. 4

The evolution of the ripples with the changing laser polarization direction, the repetition rate of the laser is set to be 5Hz.

Equations (1)

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Λ = λ λ λ s ± sin θ ,

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