Abstract

We present a vertical-coupling optical interface with a grating coupler for transmitting and receiving optical signals between single-mode optical fibers and microphotonic waveguides with a view to realize on-chip optical interconnection. The optical interface consisting of a simple grating structure with a reflective mirror and an optical power combiner exhibits high optical coupling efficiency and wide tolerance range for the misalignment of optical fibers. The optical interface exhibits high coupling efficiency even if the optical input is almost vertical to the chip surface.

© 2011 OSA

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  1. D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE 97, 1166–1185 (2009).
    [CrossRef]
  2. K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
    [CrossRef]
  3. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
    [CrossRef]
  4. B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
    [CrossRef] [PubMed]
  5. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
    [CrossRef]
  6. G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
    [CrossRef] [PubMed]
  7. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
    [CrossRef]
  8. G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
    [CrossRef] [PubMed]
  9. F. Van Laere, W. Bogaerts, P. Dumon, G. Roelkens, D. Van Thourhout, and R. Baets, “Focusing polarization diversity gratings for Silicon-on-Insulator integrated circuits,” in Proceedings of the 5th International Conference on Group IV Photonics, ThB3, Sorrento, Italy, 18 September 2008, pp. 203–205.

2009 (3)

D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE 97, 1166–1185 (2009).
[CrossRef]

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

2008 (1)

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

2007 (1)

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

2006 (2)

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

2004 (1)

B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

Akedo, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ayre, M.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Baets, R.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

Bienstman, P.

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Bogaerts, W.

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Cassan, E.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Cunningham, J. E.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Fujikata, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Furue, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Giannone, D.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Gomyo, A.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Griol, A.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Gylfason, K. B.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Hill, D.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Ishi, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Itabashi, S.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Jiang, J.

B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

Kazmierczak, A.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Kinoshita, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Krauss, T. F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

Krishnamoorthy, A. V.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Li, G. L.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Maire, G.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Marris-Morini, D.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Miller, D. A. B.

D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE 97, 1166–1185 (2009).
[CrossRef]

Mizuno, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Nakada, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Nishi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Nordin, G. P.

B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

Nose, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ohashi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Okamoto, D.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Roelkens, G.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

Sanchez, B.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Sattler, G.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Schrauwen, J.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Shimizu, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Shubin, I.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Sohlstr├Âm, H.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Suzuki, N.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Taillaert, D.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Torii, S.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Tsuchizawa, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ueno, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ushida, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Van Laere, F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Van Thourhout, D.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Vivien, L.

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

Wang, B.

B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

Watanabe, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Yamada, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Yukawa, H.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Zheng, X.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

J. Lightwave Technol. (1)

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

Jpn. J. Appl. Phys. (1)

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides,” Jpn. J. Appl. Phys. 45(No. 8A), 6071–6077 (2006).
[CrossRef]

Opt. Express (3)

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[CrossRef] [PubMed]

B. Wang, J. Jiang, and G. P. Nordin, “Compact slanted grating couplers,” Opt. Express 12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

Proc. IEEE (3)

D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE 97, 1166–1185 (2009).
[CrossRef]

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Other (1)

F. Van Laere, W. Bogaerts, P. Dumon, G. Roelkens, D. Van Thourhout, and R. Baets, “Focusing polarization diversity gratings for Silicon-on-Insulator integrated circuits,” in Proceedings of the 5th International Conference on Group IV Photonics, ThB3, Sorrento, Italy, 18 September 2008, pp. 203–205.

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Figures (8)

Fig. 1
Fig. 1

Structure of vertical-coupling optical interface.

Fig. 2
Fig. 2

Calculated cross-sectional structure of grating coupler.

Fig. 3
Fig. 3

Calculated electric field profile in grating coupler.

Fig. 4
Fig. 4

Calculated diffraction efficiency as a function of the distance between the grating and the reflective mirror d.

Fig. 5
Fig. 5

Calculated operating wavelength range of whole structure.

Fig. 6
Fig. 6

Calculated tolerance for misalignment of optical beam with respect to grating.

Fig. 7
Fig. 7

View of fabricated interface: (a) Bottom view before evaporating gold mirror; (b) Bottom view of final structure, and (c) Cross section of grating coupler portion.

Fig. 8
Fig. 8

Measured tolerance for misalignment of optical beam to grating.

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