Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[Crossref] [PubMed]

J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002).
[Crossref]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005).
[Crossref]

M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[Crossref] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[Crossref] [PubMed]

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[Crossref] [PubMed]

A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005).
[Crossref]

G. Naletto, E. Antonucci, V. Andretta, E. Battistelli, S. Cesare, V. Da Deppo, F. d’Angelo, S. Fineschi, M. Focardi, P. Lamy, F. Landini, D. Moses, G. Nicolini, P. Nicolosi, M. Pancrazzi, M. G. Pelizzo, L. Poletto, M. Romoli, S. Solanki, D. Spadaro, L. Teriaca, M. Uslenghi, and L. Zangrilli, “METIS; the multielement telescope for imaging and spectroscopy for the solar orbiter mission” ICSO Proc. - International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).

J. P. Halain, Y. Houbrechts, F. Auchère, P. Rochus, T. Appourchaux, D. Berghmans, U. Schühle, L. Harra, E. Renotte, and A. Zukhov, The SOLar Orbiter EUI instrument optical developments, ICSO Proc. - International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).

ESA, “Solar Orbiter environmental specification”, Issue 2.0 (2008).

M. G. Pelizzo, M. Suman, D. L. Windt, G. Monaco, and P. Nicolosi, “Innovative methods for optimization and characterization of multilayer coatings (Proceedings Paper)”, Proceedings Vol. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, René Hudec; Ladislav Pina, Editors, 73600Q (2009).

A. J. Corso, P. Zuppella, P. Nicolosi, D. L. Windt, E. Gullikson, and M. G. Pelizzo, “Capped multilayers with improved performances at 30.4 nm for future solar missions”, Accepted by Opt. Express (2011).