Abstract

In this report, we demonstrate the implementation of biomimetic nanostructured antireflection coatings with polymethyl methacrylate (PMMA) layer on the micro-textured surface of silicon crystalline solar cells. To reduce cost, the process combines colloidal lithography, cast molding method, and reversal nanoimprint lithography. The technique is simple, low cost, and does not cause damage to the thin and brittle conventional crystalline solar cells. The antireflection properties of this biomimetic nanostructure coating are considered as effective as those of a conventional single-layer SiNx thin film. The resultant structures alone could reduce the average reflectance of solar cell from 13.2% to 7.8% and enhance power conversion efficiency from 12.85% to 14.2%.

© 2011 OSA

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  1. S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
    [CrossRef]
  2. M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. C. Yu, “Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures,” Opt. Express 18(S3Suppl 3), A308–A313 (2010).
    [CrossRef] [PubMed]
  3. J. Y. Chen and K. W. Sun, “Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer,” Sol. Energy Mater. Sol. Cells 94(3), 629–633 (2010).
    [CrossRef]
  4. K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
    [CrossRef]
  5. Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
    [CrossRef]
  6. Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
    [CrossRef] [PubMed]
  7. J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
  8. P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
    [CrossRef]
  9. Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
    [CrossRef] [PubMed]
  10. J. Y. Chen and K. W. Sun, “Growth of vertically aligned ZnO nanorod arrays as antireflection layer on silicon solar cells,” Sol. Energy Mater. Sol. Cells 94(5), 930–934 (2010).
    [CrossRef]
  11. H. L. Chen, S. Y. Chuang, C. H. Lin, and Y. H. Lin, “Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells,” Opt. Express 15(22), 14793–14803 (2007).
    [CrossRef] [PubMed]
  12. C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
    [CrossRef]
  13. Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).
  14. J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
    [CrossRef] [PubMed]
  15. N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
    [CrossRef]
  16. C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
    [CrossRef]
  17. B. Paivanranta, T. Saastamoinen, and M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
    [CrossRef] [PubMed]
  18. Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
    [CrossRef]
  19. J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
    [CrossRef] [PubMed]
  20. J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
    [CrossRef]
  21. C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
    [CrossRef]
  22. N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
    [CrossRef]

2011 (1)

K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
[CrossRef]

2010 (6)

Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
[CrossRef]

J. Y. Chen and K. W. Sun, “Growth of vertically aligned ZnO nanorod arrays as antireflection layer on silicon solar cells,” Sol. Energy Mater. Sol. Cells 94(5), 930–934 (2010).
[CrossRef]

J. Y. Chen and K. W. Sun, “Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer,” Sol. Energy Mater. Sol. Cells 94(3), 629–633 (2010).
[CrossRef]

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. C. Yu, “Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures,” Opt. Express 18(S3Suppl 3), A308–A313 (2010).
[CrossRef] [PubMed]

2009 (6)

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

B. Paivanranta, T. Saastamoinen, and M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

2008 (3)

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

2007 (5)

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

H. L. Chen, S. Y. Chuang, C. H. Lin, and Y. H. Lin, “Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells,” Opt. Express 15(22), 14793–14803 (2007).
[CrossRef] [PubMed]

2003 (1)

J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
[CrossRef]

Abbott, S.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Allsopp, D. W. E.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Bender, M.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Bolten, J.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Burkhard, G. F.

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Chang, C. H.

M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. C. Yu, “Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures,” Opt. Express 18(S3Suppl 3), A308–A313 (2010).
[CrossRef] [PubMed]

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Chang, F. Y.

Chang, Y. C.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Chang, Y. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chattopadhyay, S.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, H. L.

Chen, J. Y.

J. Y. Chen and K. W. Sun, “Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer,” Sol. Energy Mater. Sol. Cells 94(3), 629–633 (2010).
[CrossRef]

J. Y. Chen and K. W. Sun, “Growth of vertically aligned ZnO nanorod arrays as antireflection layer on silicon solar cells,” Sol. Energy Mater. Sol. Cells 94(5), 930–934 (2010).
[CrossRef]

Chen, K. H.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, L. C.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, M. F.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Chen, Q.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Chiu, C. H.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Chiu, M. Y.

Chou, C. P.

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

Chuang, S. Y.

Connor, S. T.

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Cui, Y.

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Dong, H. P.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Ebels, U.

J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
[CrossRef]

Fan, S. H.

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Fu, C. C.

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

Fuchs, A.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Ganguly, A.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Giersig, M.

J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
[CrossRef]

Han, K. S.

K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
[CrossRef]

Hong, G. S.

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Hsu, C. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Hsu, C. M.

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Hsu, J. W. P.

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

Hsu, S. H.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Hsu, Y. K.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Huang, M. C.

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

Huang, Y. F.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Hubbard, G.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Jen, Y. J.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Jia, F.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Jiang, B.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Jiang, P.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Kim, J. K.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Koo, N.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Kuittinen, M.

B. Paivanranta, T. Saastamoinen, and M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Kuo, H. C.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Kurz, H.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Lee, C. S.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lee, H.

K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
[CrossRef]

Lee, Y. J.

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

Li, C.

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Li, H. B.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Li, Y.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Li, Y. F.

Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
[CrossRef]

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Lin, C. H.

Lin, S. Y.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Lin, Y. H.

Linn, N. C.

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Liu, C.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Liu, T. A.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Liu, W.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Lo, H. C.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

McGehee, M.

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

McKenzie, B. B.

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

Paivanranta, B.

B. Paivanranta, T. Saastamoinen, and M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Pan, C. L.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Peng, C. Y.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Peters, D. W.

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

Plachetka, U.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Qi, L. M.

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Ruby, D. S.

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef] [PubMed]

Rybczynski, J.

J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
[CrossRef]

Saastamoinen, T.

B. Paivanranta, T. Saastamoinen, and M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Schubert, E. F.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Schubert, M. F.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Shields, P. A.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Shin, J. H.

K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
[CrossRef]

Smart, J. A.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Sun, C. H.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Sun, K. W.

J. Y. Chen and K. W. Sun, “Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer,” Sol. Energy Mater. Sol. Cells 94(3), 629–633 (2010).
[CrossRef]

J. Y. Chen and K. W. Sun, “Growth of vertically aligned ZnO nanorod arrays as antireflection layer on silicon solar cells,” Sol. Energy Mater. Sol. Cells 94(5), 930–934 (2010).
[CrossRef]

Sun, Z. Q.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Ting, C. J.

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

Tsai, H. Y.

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
[CrossRef]

Tsai, M. A.

Wahlbrink, T.

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Wang, P. W.

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Wang, Q.

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Wang, W. N.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Wang, Z. H.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Xi, J. Q.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Xu, W. Q.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Xu, Y. Q.

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Yang, B.

Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
[CrossRef]

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Yang, C. S.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Yoon, W. Y.

K. S. Han, J. H. Shin, W. Y. Yoon, and H. Lee, “Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography,” Sol. Energy Mater. Sol. Cells 95(1), 288–291 (2011).
[CrossRef]

Yu, D. P.

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Yu, J. C.

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Yu, P. C.

M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. C. Yu, “Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures,” Opt. Express 18(S3Suppl 3), A308–A313 (2010).
[CrossRef] [PubMed]

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Yu, Z. F.

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Zhang, J. H.

Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
[CrossRef]

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Zhang, L.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Zhu, J.

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Zhu, S. J.

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Adv. Mater. (Deerfield Beach Fla.) (2)

P. C. Yu, C. H. Chang, C. H. Chiu, C. S. Yang, J. C. Yu, H. C. Kuo, S. H. Hsu, and Y. C. Chang, “Efficiency Enhancement of GaAs Photovoltaics Employing Antireflective Indium Tin Oxide Nanocolumns,” Adv. Mater. (Deerfield Beach Fla.) 21(16), 1618–1621 (2009).
[CrossRef]

Y. F. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, F. Jia, Z. H. Wang, Z. Q. Sun, L. Zhang, Y. Li, H. B. Li, W. Q. Xu, and B. Yang, “Biomimetic Surfaces for High-Performance Optics,” Adv. Mater. (Deerfield Beach Fla.) 21, 4731–4734 (2009).

Appl. Phys. Lett. (3)

N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, “Self-assembled biomimetic antireflection coatings,” Appl. Phys. Lett. 91(10), 101108 (2007).
[CrossRef]

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

Chem. Mater. (1)

C. Li, G. S. Hong, P. W. Wang, D. P. Yu, and L. M. Qi, “Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals,” Chem. Mater. 21(5), 891–897 (2009).
[CrossRef]

Colloid Surface A (1)

J. Rybczynski, U. Ebels, and M. Giersig, “Large-scale, 2D arrays of magnetic nanoparticles,” Colloid Surface A 219(1-3), 1–6 (2003).
[CrossRef]

Mater. Sci. Eng. Rep. (1)

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep. 69(1-3), 1–35 (2010).
[CrossRef]

Microelectron. Eng. (1)

N. Koo, M. Bender, U. Plachetka, A. Fuchs, T. Wahlbrink, J. Bolten, and H. Kurz, “Improved mold fabrication for the definition of high quality nanopatterns by soft UV-nanoimprint lithography using diluted PDMS material,” Microelectron. Eng. 84(5-8), 904–908 (2007).
[CrossRef]

Nano Lett. (3)

J. Zhu, C. M. Hsu, Z. F. Yu, S. H. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

J. Zhu, Z. F. Yu, G. F. Burkhard, C. M. Hsu, S. T. Connor, Y. Q. Xu, Q. Wang, M. McGehee, S. H. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[CrossRef] [PubMed]

Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
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Nano Today (1)

Y. F. Li, J. H. Zhang, and B. Yang, “Antireflective surfaces based on biomimetic nanopillared arrays,” Nano Today 5(2), 117–127 (2010).
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Nanotechnology (2)

C. J. Ting, M. C. Huang, H. Y. Tsai, C. P. Chou, and C. C. Fu, “Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology,” Nanotechnology 19(20), 205301 (2008).
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Nat. Nanotechnol. (1)

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
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Nat. Photonics (1)

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Opt. Express (2)

Sol. Energy Mater. Sol. Cells (3)

J. Y. Chen and K. W. Sun, “Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer,” Sol. Energy Mater. Sol. Cells 94(3), 629–633 (2010).
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