Abstract

Novel capping layer structures have been deposited on periodic Mo/Si multilayers to optimize reflectance at 30.4 nm. Design, deposition and characterization of such coatings are presented. Most of the structures proposed show improved performance with respect to standard Mo/Si multilayers and are stable over time. Reflectance at 121.6 nm and in the visible spectral range have been also tested to explore the applicability of such coatings to the Multi Element Telescope for Imaging and Spectroscopy (METIS) instrument, a coronagraph being developed for the ESA Solar Orbiter platform.

© 2011 OSA

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2011 (1)

2010 (3)

2009 (2)

2008 (2)

2006 (1)

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

2005 (2)

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44(3), 384–390 (2005).
[CrossRef] [PubMed]

2004 (3)

2003 (3)

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

2002 (1)

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

2001 (1)

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

2000 (1)

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

1998 (2)

1995 (1)

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Adam, E.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Alameda, J.

Alameda, J. B.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

André, J. M.

Aquila, A.

Aquila, A. L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Artzner, G. E.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Au, B.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Bajt, S.

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003).
[CrossRef] [PubMed]

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Baker, S. L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Barbee, T. W.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Baron, T.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Bello, V.

Berghmans, D.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Bijkerk, F.

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Bocquet, J. L.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Bontempi, E.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Bridou, F.

Brunaud, J.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Catura, R. C.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Chapman, H. N.

Chauvineau, J. P.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Christensen, F. E.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Clette, F.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Clift, W. M.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Corso, A. J.

Craig, W. W.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Crocombette, J. P.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Cugnon, P.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Dalla Torre, J.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Defise, J. M.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Delaboudineire, J. P.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Delmotte, F.

Depero, L.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

der Linden, R. V.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Dere, K. P.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Dollar, F. J.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Donguy, S.

Falco, C. M.

Folta, J. A.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Gabriel, A. H.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Galtayries, A.

Gardiol, D.

Gautier, J.

Giglia, A.

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Golub, L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Grantham, S.

Gullikson, E.

Gullikson, E. M.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Gurman, J. B.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Hailey, C.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Harrison, F. A.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Hochedez, J. F.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Howard, R. A.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Hu, M. H.

Huang, Q. S.

Ichimaru, S.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010).
[CrossRef]

Jamar, C.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Jérome, A.

Jimenez-Garate, M.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Jonnard, P.

Kalyanaram, R.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Katsyiannis, A. C.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Kaufmann, B.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Kessels, M. J. H.

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Kjornrattanawanich, B.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

Kreplin, R.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Lawrence, G.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Le Guen, K.

Lecat, J. H.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Lemen, J. R.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Li, H. C.

Limoge, Y.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Lucatorto, T. B.

Maggioni, G.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Malinowski, M.

Mao, P. H.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

Marioge, J. P.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Martin, G.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Mattarello, V.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Mattei, G.

Maucherat, A.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Mazy, E.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Mazzoldi, P.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Meltchakov, E.

Michels, D. J.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Millier, F.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Monaco, G.

Moses, J. D.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Mur, P.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Naletto, G.

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Nannarone, S.

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Neupert, W. M.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Nguyen, N.

Nicolosi, P.

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009).
[CrossRef] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008).
[CrossRef] [PubMed]

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Nicula, B.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Ohchi, T.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010).
[CrossRef]

Patelli, A.

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Pelizzo, M. G.

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009).
[CrossRef] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008).
[CrossRef] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Pelizzo, M.-G.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Ravet, M. F.

Rigato, V.

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Rivallin, P.

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

Robinson, J. C.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003).
[CrossRef] [PubMed]

Rochus, P.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Roulliay, M.

Salmaso, G.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Schühle, U.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Seely, J.

Seely, J. F.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Shing, L.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Slaughter, J. M.

Slemzin, V.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Song, X. Y.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Soufli, R.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Spiller, E.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Spiller, E. A.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Stern, R. A.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Suman, M.

Takenaka, H.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010).
[CrossRef]

Tarrio, C.

Thibert, T.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Tichelaar, F. D.

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Tondello, G.

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Van Dessel, E. L.

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

Verhoeven, J.

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Wang, Z. S.

Watts, R. N.

Windt, D. L.

P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009).
[CrossRef] [PubMed]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

Yakshin, A. E.

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Zhou, S. K.

Zhu, J. T.

Zhukov, A.

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Zuppella, P.

Adv. Space Res. (1)

D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006).
[CrossRef]

Appl. Opt. (8)

C. Tarrio, R. N. Watts, T. B. Lucatorto, J. M. Slaughter, and C. M. Falco, “Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials,” Appl. Opt. 37(19), 4100–4104 (1998).
[CrossRef] [PubMed]

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004).
[CrossRef] [PubMed]

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44(3), 384–390 (2005).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008).
[CrossRef] [PubMed]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

J. T. Zhu, S. K. Zhou, H. C. Li, Q. S. Huang, Z. S. Wang, K. Le Guen, M. H. Hu, J. M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

Comput. Phys. (1)

D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

J. Appl. Phys. (2)

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000).
[CrossRef]

J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003).
[CrossRef]

J. Electron Spec. Rel. Phen. (1)

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. B (1)

M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004).
[CrossRef]

Opt. Eng. (1)

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Proc. SPIE (1)

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005).
[CrossRef]

Sol. Phys. (1)

J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995).
[CrossRef]

SPIE Proc. (1)

G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001).
[CrossRef]

Surf. Coat. Tech. (1)

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003).
[CrossRef]

Other (5)

F. Frassetto, D. Garoli, G. Monaco, P. Nicolosi, M. Pascolini, M. G. Pelizzo, V. Mattarello, A. Patelli, V. Rigato, A. Giglia, S. Nannarone, E. Antonucci, S. Fineschi, and M. Romoli, “Space applications of Si/B4C multilayer coatings at extreme ultra-violet region; comparison with standard Mo/Si coatings”, SPIE Proc. Vol. 5901, (2005).

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, “Multilayer coatings for multiband spectral observations”, Proceedings of 6th International Conference on Space Optics, ESTEC, Noordwjik, The Netherlands, 2006 (ESA SP-621 June 2006).

G. Naletto, E. Antonucci, V. Andretta, E. Battistelli, S. Cesare, V. Da Deppo, F. d’Angelo, S. Fineschi, M. Focardi, P. Lamy, F. Landini, D. Moses, G. Nicolini, P. Nicolosi, M. Pancrazzi, M. G. Pelizzo, L. Poletto, M. Romoli, S. Solanki, D. Spadaro, L. Teriaca, M. Uslenghi, and L. Zangrilli, “METIS, the multi-element telescope for imaging and spectroscopy for the solar orbiter mission” Proceedings of International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).

J. P. Halain, Y. Houbrechts, F. Auchère, P. Rochus, T. Appourchaux, D. Berghmans, U. Schühle, L. Harra, E. Renotte, and A. Zukhov, “The Solar Orbiter EUI instrument optical developments”, Proceedings of International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).

M. G. Pelizzo, M. Suman, D. L. Windt, G. Monaco, and P. Nicolosi, “Innovative methods for optimization and characterization of multilayer coatings”, Proceedings Vol. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, René Hudec; Ladislav Pina, Editors, 73600Q (2009).

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Figures (6)

Fig. 1
Fig. 1

Reflectance measurements performed at BEAR beamline and at ALS 6.3.2 beamline of sample CL1, CL2, CL3 and REF.

Fig. 3
Fig. 3

Reflectance measurements of CL4 a few weeks after deposition and after six months performed at BEAR beamline.

Fig. 2
Fig. 2

HR-TEM image of top layers in a Ir/Si ML; the top layer structure is equivalent to CL2.

Fig. 4
Fig. 4

Reflectance measurements at 121.6 nm performed after deposition at 10° incidence angle; the data are compared with the simulations performed with IMD program.

Fig. 5
Fig. 5

Standing wave intensity distribution in CL1 at 121.6 nm.

Fig. 6
Fig. 6

AFM analysis of CL4 after deposition and six months later

Tables (5)

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Table 1 Structure Of The Periodic Mo/Si ML Tuned To 30.4nm. d Is The Multilayer Period, Г Is The Layer Thickness Ratio, And N Is The Number Of Periods

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Table 2 The Capping-Layers Structure And Their Theoretical Reflectance Peak At 30.4nm

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Tab.3 Experimental data fitting parameters and peak reflectances.

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Table 4 Reflectances In The Visible Spectral Range

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Table 5 Summary Of Reflectance Measurement Data

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