Abstract

We demonstrate planar Si3N4 ring resonators with ultra-high quality factors (Q) of 19 million, 28 million, and 7 million at 1060 nm, 1310 nm, and 1550 nm, respectively. By integrating the ultra-low-loss Si3N4 ring resonators with laterally offset planar waveguide directional couplers, optical add-drop and notch filters are demonstrated to have ultra-narrow bandwidths of 16 MHz, 38 MHz, and 300 MHz at 1060 nm, 1310 nm, and 1550 nm, respectively. These are the highest Qs reported for ring resonators with planar directional couplers, and ultra-narrowband microwave photonic filters can be realized based on these high-Q ring resonators.

© 2011 OSA

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  1. V. Lefevre-Seguin and S. Haroche, “Towards cavity-QED experiments with silica microspheres,” Mater. Sci. Eng., B B48, 53–58 (1997).
    [CrossRef]
  2. D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
    [CrossRef]
  3. S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
    [CrossRef] [PubMed]
  4. F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
    [CrossRef]
  5. L. Maleki, A. B. Matsko, A. A. Savchenkov, and V. S. Ilchenko, “Tunable delay line with interacting whispering-gallery-mode resonators,” Opt. Lett. 29(6), 626–628 (2004).
    [CrossRef] [PubMed]
  6. D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
    [CrossRef]
  7. E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
    [CrossRef]
  8. M. S. Rasras, T. Kun-Yii, D. M. Gill, C. Young-Kai, A. E. White, S. S. Patel, A. Pomerene, D. Carothers, J. Beattie, M. Beals, J. Michel, and L. C. Kimerling, “Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators,” J. Lightwave Technol. 27(12), 2105–2110 (2009).
    [CrossRef]
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  10. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
    [CrossRef] [PubMed]
  11. M. Soltani, S. Yegnanarayanan, and A. Adibi, “Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics,” Opt. Express 15(8), 4694–4704 (2007).
    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  16. J. F. Bauters, M. J. R. Heck, D. John, M.-C. Tien, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low loss silica-based waveguides with millimeter bend radius,” in Proceedings of ECOC (Torino, Italy, 2010).
  17. D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Polarization characteristics of low-loss nano-core buried optical waveguides and directional couplers,” in Group IV Photonics (GFP), 2010 7th IEEE International Conference on (2010), pp. 260–262.
  18. D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides,” (to be published).
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    [CrossRef] [PubMed]

2011 (1)

2010 (1)

I. Goykhman, B. Desiatov, and U. Levy, “Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength,” Appl. Phys. Lett. 97(8), 081108 (2010).
[CrossRef]

2009 (3)

2007 (2)

2005 (2)

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

2004 (1)

2003 (1)

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

2002 (2)

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[CrossRef] [PubMed]

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

1998 (1)

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

1997 (1)

V. Lefevre-Seguin and S. Haroche, “Towards cavity-QED experiments with silica microspheres,” Mater. Sci. Eng., B B48, 53–58 (1997).
[CrossRef]

Adibi, A.

Armani, D. K.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Arnold, S.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

Atabaki, A. H.

Baker, N.

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

Barton, J. S.

Bauters, J. F.

Beals, M.

Beattie, J.

Blumenthal, D. J.

Bond, T. C.

Bowers, J. E.

Braun, D.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

Carothers, D.

Dai, D.

Desiatov, B.

I. Goykhman, B. Desiatov, and U. Levy, “Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength,” Appl. Phys. Lett. 97(8), 081108 (2010).
[CrossRef]

Driessen, A.

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

Furusawa, A.

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

Gabriel, S.

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

Georgiades, N. P.

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

Geuzebroek, D.

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

Geuzebroek, D. H.

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

Gill, D. M.

Gondarenko, A.

Goykhman, I.

I. Goykhman, B. Desiatov, and U. Levy, “Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength,” Appl. Phys. Lett. 97(8), 081108 (2010).
[CrossRef]

Haroche, S.

V. Lefevre-Seguin and S. Haroche, “Towards cavity-QED experiments with silica microspheres,” Mater. Sci. Eng., B B48, 53–58 (1997).
[CrossRef]

Heck, M. J. R.

Heebner, J. E.

Heideman, R. G.

Ilchenko, V. S.

L. Maleki, A. B. Matsko, A. A. Savchenkov, and V. S. Ilchenko, “Tunable delay line with interacting whispering-gallery-mode resonators,” Opt. Lett. 29(6), 626–628 (2004).
[CrossRef] [PubMed]

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

John, D.

Kallman, J. S.

Kelderman, H.

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

Khoshsima, M.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

Kimble, H. J.

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

Kimerling, L. C.

Kippenberg, T. J.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[CrossRef] [PubMed]

Klein, E.

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

Klein, E. J.

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

Kun-Yii, T.

Lefevre-Seguin, V.

V. Lefevre-Seguin and S. Haroche, “Towards cavity-QED experiments with silica microspheres,” Mater. Sci. Eng., B B48, 53–58 (1997).
[CrossRef]

Leinse, A.

Levy, J. S.

Levy, U.

I. Goykhman, B. Desiatov, and U. Levy, “Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength,” Appl. Phys. Lett. 97(8), 081108 (2010).
[CrossRef]

Libchaber, A.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

Lipson, M.

Maleki, L.

Matsko, A. B.

Michel, J.

Patel, S. S.

Pomerene, A.

Rasras, M. S.

Savchenkov, A. A.

Shah Hosseini, E.

Soltani, M.

Spillane, S. M.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[CrossRef] [PubMed]

Teraoka, I.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

Tien, M.-C.

Vahala, K. J.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[CrossRef] [PubMed]

Vernooy, D. W.

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

Vollmer, F.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

White, A. E.

Yegnanarayanan, S.

Young-Kai, C.

Appl. Phys. Lett. (2)

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[CrossRef]

I. Goykhman, B. Desiatov, and U. Levy, “Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength,” Appl. Phys. Lett. 97(8), 081108 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

D. Geuzebroek, E. Klein, H. Kelderman, N. Baker, and A. Driessen, “Compact wavelength-selective switch for gigabit filtering in access networks,” IEEE Photon. Technol. Lett. 17(2), 336–338 (2005).
[CrossRef]

E. J. Klein, D. H. Geuzebroek, H. Kelderman, S. Gabriel, N. Baker, and A. Driessen, “Reconfigurable optical add-drop multiplexer using microring resonators,” IEEE Photon. Technol. Lett. 17(11), 2358–2360 (2005).
[CrossRef]

J. Lightwave Technol. (1)

Mater. Sci. Eng., B (1)

V. Lefevre-Seguin and S. Haroche, “Towards cavity-QED experiments with silica microspheres,” Mater. Sci. Eng., B B48, 53–58 (1997).
[CrossRef]

Nature (2)

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Opt. Express (5)

Opt. Lett. (1)

Phys. Rev. A (1)

D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, “Cavity QED with high-Q whispering gallery modes,” Phys. Rev. A 57, R2293–R2296 (1998).
[CrossRef]

Other (4)

P. Dong, N. N. Feng, D. Feng, W. Qian, H. Liang, D. C. Lee, B. J. Luff, M. Asghari, A. Agarwal, T. Banwell, R. Menendez, P. Toliver, and T. K. Woodward, “A tunable optical channelizing filter using silicon coupled ring resonators,” in 2010 Conference on Lasers and Electro-Optics (CLEO) (IEEE, San Jose, CA, USA, 2010).

J. F. Bauters, M. J. R. Heck, D. John, M.-C. Tien, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low loss silica-based waveguides with millimeter bend radius,” in Proceedings of ECOC (Torino, Italy, 2010).

D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Polarization characteristics of low-loss nano-core buried optical waveguides and directional couplers,” in Group IV Photonics (GFP), 2010 7th IEEE International Conference on (2010), pp. 260–262.

D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides,” (to be published).

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Figures (3)

Fig. 1
Fig. 1

Waveguide loss for different waveguide geometries in different wavelength regimes. Solid lines represent theoretical loss values while the circles and crosses indicate the experimental data. The rms deviation of sidewall and surface roughness used for calculation are 4.75 nm and 0.175 nm, while the correlation lengths are 50 nm and 30 nm, respectively [15].

Fig. 2
Fig. 2

A measurement setup for high-Q ring resonators. Different tunable lasers are used for measurement in the 1060 nm, 1310 nm, and 1550 nm wavelength regimes. PC: polarization controller; DUT: device under test.

Fig. 3
Fig. 3

(a) Transmission spectrum of an optical notch filter at 1060 nm. The radius of the ring is 5 mm with waveguide width of 5.3 μm and thickness of 40 nm (b) Transmission spectrum of an optical notch filter at 1310 nm. The radius of the ring is 5 mm with waveguide width of 5.3 μm and thickness of 50 nm (c) Transmission spectrum of an optical add-drop filter at 1550 nm. The radius of the ring is 1.5 mm with waveguide width of 2.8 μm and thickness of 80 nm.

Tables (1)

Tables Icon

Table 1 Summary of Intrinsic Qs and Waveguide Losses of Different Rings

Metrics