Abstract

We demonstrate 3rd order micro-ring filters, 100 GHz-spaced 16 channels and 50 GHz-spaced 32 channels. Fabrication-induced resonant wavelength errors, σ = 0.237 nm, and temperature-dependent wavelength shift, 0.043 nm/°C tolerable to ΔT>10 °C, has been measured on filters based on the fundamental TM mode. The problem of CMOS-compatible photolithography is solved, while maintaining a small radius, R = 9 μm. As some dummy channels are arranged, it is shown that an on-chip optical network for many cores CPU can be constructed by 16 channel ring filters with the currently available technology.

© 2011 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
    [CrossRef] [PubMed]
  2. J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
    [CrossRef] [PubMed]
  3. R. Claps, D. Dimitropoulos, V. Raghunathan, Y. Han, and B. Jalali, “Observation of stimulated Raman amplification in silicon waveguides,” Opt. Express 11(15), 1731–1739 (2003).
    [CrossRef] [PubMed]
  4. H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
    [CrossRef] [PubMed]
  5. H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
    [CrossRef]
  6. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
    [CrossRef]
  7. X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
    [CrossRef]
  8. M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
    [CrossRef] [PubMed]
  9. S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
    [CrossRef]
  10. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple-channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
    [CrossRef] [PubMed]
  11. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
    [CrossRef] [PubMed]
  12. J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
    [CrossRef]
  13. S. Park, K. J. Kim, J. M. Lee, I. G. Kim, and G. Kim, “Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution,” Opt. Express 17(14), 11884–11891 (2009).
    [CrossRef] [PubMed]
  14. F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
    [CrossRef]
  15. C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
    [CrossRef]
  16. J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
    [CrossRef] [PubMed]
  17. J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides,” Opt. Express 17(17), 14627–14633 (2009).
    [CrossRef] [PubMed]
  18. A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
    [CrossRef]
  19. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
    [CrossRef]
  20. A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
    [CrossRef]
  21. K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
    [CrossRef]
  22. P. Dong, W. Qia, H. Liang, R. Shafiiha, N. N. Feng, D. Feng, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low power and compact reconfigurable multiplexing devices based in silicon micro-ring resonators,” Opt. Express 18(10), 9852–9858 (2010).
    [CrossRef] [PubMed]
  23. A. H. Atabaki, E. Shah Hosseini, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, “Optimization of metallic micro-heaters for high-speed reconfigurable silicon photonics,” Opt. Express 18(17), 18312–18323 (2010).
    [CrossRef] [PubMed]
  24. M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems,” Opt. Express 19(1), 306–316 (2011).
    [CrossRef] [PubMed]
  25. H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
    [CrossRef] [PubMed]
  26. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
    [CrossRef]
  27. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
    [CrossRef] [PubMed]
  28. D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2010).
    [CrossRef]
  29. S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
    [CrossRef] [PubMed]
  30. J. Liu, X. Sun, R. Camacho-Aguilera, L. C. Kimerling, and J. Michel, “Ge-on-Si laser operating at room temperature,” Opt. Lett. 35(5), 679–681 (2010).
    [CrossRef] [PubMed]
  31. J. Joo, S. Kim, I. G. Kim, K. S. Jang, and G. Kim, “High-sensitivity 10 Gbps Ge-on-Si photoreceiver operating at λ~1.55μm,” Opt. Express 18(16), 16474–16479 (2010).
    [CrossRef] [PubMed]

2011 (1)

2010 (11)

J. Liu, X. Sun, R. Camacho-Aguilera, L. C. Kimerling, and J. Michel, “Ge-on-Si laser operating at room temperature,” Opt. Lett. 35(5), 679–681 (2010).
[CrossRef] [PubMed]

P. Dong, W. Qia, H. Liang, R. Shafiiha, N. N. Feng, D. Feng, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low power and compact reconfigurable multiplexing devices based in silicon micro-ring resonators,” Opt. Express 18(10), 9852–9858 (2010).
[CrossRef] [PubMed]

J. Joo, S. Kim, I. G. Kim, K. S. Jang, and G. Kim, “High-sensitivity 10 Gbps Ge-on-Si photoreceiver operating at λ~1.55μm,” Opt. Express 18(16), 16474–16479 (2010).
[CrossRef] [PubMed]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

A. H. Atabaki, E. Shah Hosseini, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, “Optimization of metallic micro-heaters for high-speed reconfigurable silicon photonics,” Opt. Express 18(17), 18312–18323 (2010).
[CrossRef] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2010).
[CrossRef]

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[CrossRef] [PubMed]

2009 (5)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

S. Park, K. J. Kim, J. M. Lee, I. G. Kim, and G. Kim, “Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution,” Opt. Express 17(14), 11884–11891 (2009).
[CrossRef] [PubMed]

J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides,” Opt. Express 17(17), 14627–14633 (2009).
[CrossRef] [PubMed]

2008 (4)

J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
[CrossRef] [PubMed]

J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
[CrossRef] [PubMed]

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

2007 (4)

2006 (3)

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

2005 (2)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

2003 (1)

Adibi, A.

Akedo, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Alic, N.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Asghari, M.

Assefa, S.

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[CrossRef] [PubMed]

Atabaki, A. H.

Baets, R.

Barwicz, T.

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Bergman, K.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Bogaerts, W.

Bowers, J. E.

Camacho-Aguilera, R.

Carloni, L. P.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Chavez Boggio, J. M.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Chen, H.

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

Claps, R.

Cohen, O.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Cunningham, J. E.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Dahlem, M. S.

Dimitropoulos, D.

Divliansky, I. B.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Dong, P.

Dumon, P.

Eftekhar, A. A.

Fan, L.

Fang, A.

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Fang, A. W.

Feng, D.

Feng, N. N.

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Fujikata, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Furue, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Gaeta, A. L.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Gardes, F. Y.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Gomyo, A.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Gondarenko, A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

Green, W. M. L.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Hak, D.

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Han, X.

Han, Y.

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Holzwarth, C. W.

M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems,” Opt. Express 19(1), 306–316 (2011).
[CrossRef] [PubMed]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Ippen, E. P.

M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems,” Opt. Express 19(1), 306–316 (2011).
[CrossRef] [PubMed]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Ishi, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Itabashi, S. I.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Jalali, B.

Jang, K. S.

Jian, X.

Jones, R.

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Joo, J.

Kartner, F. X.

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Kärtner, F. X.

Khan, M. H.

Khilo, A.

Kim, D. J.

Kim, G.

Kim, G. H.

Kim, I. G.

Kim, K. J.

Kim, S.

Kimerling, L. C.

Kinoshita, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Krishnamoorthy, A. V.

P. Dong, W. Qia, H. Liang, R. Shafiiha, N. N. Feng, D. Feng, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low power and compact reconfigurable multiplexing devices based in silicon micro-ring resonators,” Opt. Express 18(10), 9852–9858 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Kuo, Y. H.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Kwon, O. K.

Lee, J. M.

Levy, J. S.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Li, G. L.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Liang, D.

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2010).
[CrossRef]

Liang, H.

Lipson, M.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Liu, A.

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Liu, J.

Liu, X.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Luo, X.

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

Mashanovich, G.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Michel, J.

Mizuno, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Mookherjea, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Moro, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Morthier, G.

Nakada, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Nicolaescu, R.

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Nishi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Nose, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ohashi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Okamoto, D.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Osgood, R. M.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Ouyang, J.

Paniccia, M.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Paniccia, M. J.

Park, H.

Park, J. S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Park, J. W.

Park, M.

Park, S.

Poon, A. W.

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

Popovic, M. A.

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Qi, M.

Qia, W.

Raday, O.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Radic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Raghunathan, V.

Rakich, P. T.

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Reed, G. T.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Rong, H.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Rooks, M.

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Schmidt, B. S.

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Sekaric, L.

Shacham, A.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Shafiiha, R.

Shah Hosseini, E.

Sharping, J. E.

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Shen, H.

Shimizu, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Shubin, I.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Sih, V.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Smith, H. I.

M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems,” Opt. Express 19(1), 306–316 (2011).
[CrossRef] [PubMed]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Sun, X.

Suzuki, N.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Teng, J.

Thomson, D. J.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Torii, S.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Tsuchizawa, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Turner, A. C.

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Turner-Foster, A. C.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

Ueno, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Ushida, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Varghese, L. T.

Vlasov, Y.

Vlasov, Y. A.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[CrossRef] [PubMed]

Watanabe, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Xia, F.

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[CrossRef] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Xiao, S.

Xu, F.

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Xu, S.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Xuan, Y.

Yamada, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Yegnanarayanan, S.

You, J. B.

Yukawa, H.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Zhang, H.

Zhao, L.

Zhao, M.

Zheng, X.

P. Dong, W. Qia, H. Liang, R. Shafiiha, N. N. Feng, D. Feng, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low power and compact reconfigurable multiplexing devices based in silicon micro-ring resonators,” Opt. Express 18(10), 9852–9858 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Zlatanovic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

IEEE Trans. Comput. (1)

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

J. Vac. Sci. Technol. B (1)

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Nat. Photonics (7)

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[CrossRef]

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. L. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

S. Zlatanovic, J. S. Park, S. Moro, J. M. Chavez Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultra compact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2010).
[CrossRef]

Nature (4)

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[CrossRef] [PubMed]

H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, “An all-silicon Raman laser,” Nature 433(7023), 292–294 (2005).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006).
[CrossRef] [PubMed]

Opt. Commun. (1)

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

Opt. Express (13)

R. Claps, D. Dimitropoulos, V. Raghunathan, Y. Han, and B. Jalali, “Observation of stimulated Raman amplification in silicon waveguides,” Opt. Express 11(15), 1731–1739 (2003).
[CrossRef] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple-channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
[CrossRef] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef] [PubMed]

J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
[CrossRef] [PubMed]

J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
[CrossRef] [PubMed]

S. Park, K. J. Kim, J. M. Lee, I. G. Kim, and G. Kim, “Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution,” Opt. Express 17(14), 11884–11891 (2009).
[CrossRef] [PubMed]

J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides,” Opt. Express 17(17), 14627–14633 (2009).
[CrossRef] [PubMed]

P. Dong, W. Qia, H. Liang, R. Shafiiha, N. N. Feng, D. Feng, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low power and compact reconfigurable multiplexing devices based in silicon micro-ring resonators,” Opt. Express 18(10), 9852–9858 (2010).
[CrossRef] [PubMed]

J. Joo, S. Kim, I. G. Kim, K. S. Jang, and G. Kim, “High-sensitivity 10 Gbps Ge-on-Si photoreceiver operating at λ~1.55μm,” Opt. Express 18(16), 16474–16479 (2010).
[CrossRef] [PubMed]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

A. H. Atabaki, E. Shah Hosseini, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, “Optimization of metallic micro-heaters for high-speed reconfigurable silicon photonics,” Opt. Express 18(17), 18312–18323 (2010).
[CrossRef] [PubMed]

M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems,” Opt. Express 19(1), 306–316 (2011).
[CrossRef] [PubMed]

Opt. Lett. (1)

Proc. IEEE (3)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

A. W. Poon, X. Luo, F. Xu, and H. Chen, “Cascaded micro resonator-based matrix switch for silicon on-chip optical interconnection,” Proc. IEEE 97(7), 1216–1238 (2009).
[CrossRef]

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. I. Itabashi, and J. Akedo, “On-Chip Optical Interconnect,” Proc. IEEE 97(7), 1186–1198 (2009).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

(a) A microscope image and (b) a scanning electron microscope image of our optimized design, and (c) a fundamental TM mode shape simulated by a FDTD program

Fig. 2
Fig. 2

Measurements of Si micro-ring filters. (a) Spectra of 50 GHz-spaced 32 channel filter, (b) Spectral shapes of odd channels, (c) Channel positions with respect to the target wavelengths, (d) Histogram graph of resonant wavelength deviations

Fig. 3
Fig. 3

Temperature dependence of resonant wavelengths. (a) Shifts of spectrum at different temperatures, (b) A graph of resonant wavelength vs temperature.

Fig. 4
Fig. 4

A hierarchical on-chip network structure. (a) Schematic structure of the network, (b) Device configuration of core 1. (c) Device configuration of control unit.

Tables (1)

Tables Icon

Table 1 Performance of 16 channel ring filters

Metrics