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Alloy nanoparticle plasmon resonance for enhancing broadband antireflection of laser-textured silicon surfaces

Lanying Yang, Xiong Li, Xianguo Tuo, Thanh Thi Van Nguyen, Xiangang Luo, and Minghui Hong

Open Access Open Access

Abstract

In this paper, Ag-Au alloy nanoparticles (NPs) were fabricated by dewetting process to enhance the broadband antireflection performance of textured silicon surfaces. The alloy NPs presented a large range of shapes and sizes, which provided an average reflectance (AR) below 4% over the spectral range of 300~1200 nm, a decrease of ~50% and ~90% as compared to the corresponding monometallic NPs and the original flat Si surfaces, respectively. The superior broadband antireflection demonstrated by the alloy NPs are attributed to the enhanced light trapping by alloy nanoparticle plasmon resonance.

©2011 Optical Society of America

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Figures (5)
Fig. 1
Fig. 1 Cross-section schematics of NPs on (a) flat and (b) textured Si substrates.

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Fig. 2
Fig. 2 SEM images (a-c) and size distribution (d-f) of NPs on flat Si surfaces, NPs size formed by thermal annealing of (a, d) 30 nm Ag, (b, e) 15 nm Au, and (c, f) 15nm-Au/30nm-Ag thin films.

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Fig. 3
Fig. 3 Measured reflection spectra of flat Si surfaces coated with metallic NPs, NPs are formed by thermal dewetting of 30 nm Ag, 15 nm Au, and 15nm-Au/30nm-Ag thin films.

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Fig. 4
Fig. 4 SEM images of NPs formed on laser-textured Si surfaces, NPs formed by thermal annealing of (a) 30 nm Ag, (b) 15 nm Au, and (d) 15nm-Au/30nm-Ag thin films.

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Fig. 5
Fig. 5 Measured reflection spectra of laser-textured Si surfaces coated without and with NPs (Ag, Au, and Ag-Au). NPs were formed by the annealing of 30 nm Ag, 15 nm Au, and 15nm-Au/30nm-Ag thin films, (Inset) NPs were formed by the annealing of 50 nm Ag, 10 nm Au, and 10nm-Au/50nm-Ag thin films.

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Tables (1)

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Table 1. Morphological Parameters and Optical Performance of NPs on Flat Si Surfaces a

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