M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).

[CrossRef]
[PubMed]

A. Krywonos, J. E. Harvey, and N. Choi, “Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles,” Accepted for publication in J. Opt. Soc. Am. A (March 25, 2011)

S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, “Angle-resolved scattering: an effective method for characterizing thin-film coatings,” Appl. Opt. 50(9), C164–C171 (2011).

[CrossRef]
[PubMed]

J. C. Stover, “Experimental confirmation of the Rayleigh-Rice obliquity factor,” Proc. SPIE 7792, 77920J, 77920J-5 (2010).

[CrossRef]

J. E. Harvey, N. Choi, and A. Krywonos, “Scattering from moderately rough interfaces between two arbitrary media,” Proc. SPIE 7794, 77940V, 77940V-11 (2010).

[CrossRef]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

M. Flemming, L. Coriand, and A. Duparré, “Ultra-hydrophobicity through stochastic surface roughness,” J. Adhes. Sci. Technol. 23(3), 381–400 (2009).

[CrossRef]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

J. E. Harvey, A. Krywonos, and C. L. Vernold, “Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles,” Opt. Eng. 46(7), 078002 (2007).

[CrossRef]

T. M. Elfouhaily and C. A. Guerin, “A critical survey of approximate scattering wave theories from random rough surfaces,” Waves Random Media 14(4), R1–R40 (2004).

[CrossRef]

E. L. Church, “Statistical effects in the measurement and characterization of smooth scattering surfaces,” Proc. SPIE 511, 18 (1984).

E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Relationship #res,” Opt. Eng. 18, 125 (1979).

J. M. Elson and J. M. Bennett, “Vector scattering theory,” Opt. Eng. 18, 116–124 (1979).

S. O. Rice, “Reflection of electromagnetic waves from slightly rough surfaces,” Commun. Pure Appl. Math. 4(2-3), 351–378 (1951).

[CrossRef]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. M. Bennett, “Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components,” Appl. Opt. 41(1), 154–171 (2002).

[CrossRef]
[PubMed]

J. M. Elson and J. M. Bennett, “Vector scattering theory,” Opt. Eng. 18, 116–124 (1979).

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

A. Krywonos, J. E. Harvey, and N. Choi, “Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles,” Accepted for publication in J. Opt. Soc. Am. A (March 25, 2011)

J. E. Harvey, N. Choi, and A. Krywonos, “Scattering from moderately rough interfaces between two arbitrary media,” Proc. SPIE 7794, 77940V, 77940V-11 (2010).

[CrossRef]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

E. L. Church and P. Z. Takacs, “Specification of surface figure and finish in terms of system performance,” Appl. Opt. 32(19), 3344–3353 (1993).

[CrossRef]
[PubMed]

E. L. Church, “Statistical effects in the measurement and characterization of smooth scattering surfaces,” Proc. SPIE 511, 18 (1984).

E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Relationship #res,” Opt. Eng. 18, 125 (1979).

M. Flemming, L. Coriand, and A. Duparré, “Ultra-hydrophobicity through stochastic surface roughness,” J. Adhes. Sci. Technol. 23(3), 381–400 (2009).

[CrossRef]

S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, “Angle-resolved scattering: an effective method for characterizing thin-film coatings,” Appl. Opt. 50(9), C164–C171 (2011).

[CrossRef]
[PubMed]

M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).

[CrossRef]
[PubMed]

M. Flemming, L. Coriand, and A. Duparré, “Ultra-hydrophobicity through stochastic surface roughness,” J. Adhes. Sci. Technol. 23(3), 381–400 (2009).

[CrossRef]

A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. M. Bennett, “Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components,” Appl. Opt. 41(1), 154–171 (2002).

[CrossRef]
[PubMed]

T. M. Elfouhaily and C. A. Guerin, “A critical survey of approximate scattering wave theories from random rough surfaces,” Waves Random Media 14(4), R1–R40 (2004).

[CrossRef]

J. M. Elson and J. M. Bennett, “Vector scattering theory,” Opt. Eng. 18, 116–124 (1979).

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

M. Flemming, L. Coriand, and A. Duparré, “Ultra-hydrophobicity through stochastic surface roughness,” J. Adhes. Sci. Technol. 23(3), 381–400 (2009).

[CrossRef]

T. M. Elfouhaily and C. A. Guerin, “A critical survey of approximate scattering wave theories from random rough surfaces,” Waves Random Media 14(4), R1–R40 (2004).

[CrossRef]

A. Krywonos, J. E. Harvey, and N. Choi, “Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles,” Accepted for publication in J. Opt. Soc. Am. A (March 25, 2011)

J. E. Harvey, N. Choi, and A. Krywonos, “Scattering from moderately rough interfaces between two arbitrary media,” Proc. SPIE 7794, 77940V, 77940V-11 (2010).

[CrossRef]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

J. E. Harvey, A. Krywonos, and C. L. Vernold, “Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles,” Opt. Eng. 46(7), 078002 (2007).

[CrossRef]

J. E. Harvey, A. Krywonos, and D. Bogunovic, “Nonparaxial scalar treatment of sinusoidal phase gratings,” J. Opt. Soc. Am. A 23(4), 858–865 (2006).

[CrossRef]

J. E. Harvey, K. L. Lewotsky, and A. Kotha, “Effects of surface scatter on the optical performance of x-ray synchrotron beam-line mirrors,” Appl. Opt. 34(16), 3024–3032 (1995).

[CrossRef]
[PubMed]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Relationship #res,” Opt. Eng. 18, 125 (1979).

A. Krywonos, J. E. Harvey, and N. Choi, “Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles,” Accepted for publication in J. Opt. Soc. Am. A (March 25, 2011)

J. E. Harvey, N. Choi, and A. Krywonos, “Scattering from moderately rough interfaces between two arbitrary media,” Proc. SPIE 7794, 77940V, 77940V-11 (2010).

[CrossRef]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

J. E. Harvey, A. Krywonos, and C. L. Vernold, “Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles,” Opt. Eng. 46(7), 078002 (2007).

[CrossRef]

J. E. Harvey, A. Krywonos, and D. Bogunovic, “Nonparaxial scalar treatment of sinusoidal phase gratings,” J. Opt. Soc. Am. A 23(4), 858–865 (2006).

[CrossRef]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

S. O. Rice, “Reflection of electromagnetic waves from slightly rough surfaces,” Commun. Pure Appl. Math. 4(2-3), 351–378 (1951).

[CrossRef]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, “Angle-resolved scattering: an effective method for characterizing thin-film coatings,” Appl. Opt. 50(9), C164–C171 (2011).

[CrossRef]
[PubMed]

M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).

[CrossRef]
[PubMed]

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

J. C. Stover, “Experimental confirmation of the Rayleigh-Rice obliquity factor,” Proc. SPIE 7792, 77920J, 77920J-5 (2010).

[CrossRef]

J. E. Harvey, A. Krywonos, and C. L. Vernold, “Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles,” Opt. Eng. 46(7), 078002 (2007).

[CrossRef]

E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Relationship #res,” Opt. Eng. 18, 125 (1979).

E. L. Church and P. Z. Takacs, “Specification of surface figure and finish in terms of system performance,” Appl. Opt. 32(19), 3344–3353 (1993).

[CrossRef]
[PubMed]

J. E. Harvey, K. L. Lewotsky, and A. Kotha, “Effects of surface scatter on the optical performance of x-ray synchrotron beam-line mirrors,” Appl. Opt. 34(16), 3024–3032 (1995).

[CrossRef]
[PubMed]

T. V. Vorburger, E. Marx, and T. R. Lettieri, “Regimes of surface roughness measurable with light scattering,” Appl. Opt. 32(19), 3401–3408 (1993).

[CrossRef]
[PubMed]

A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. M. Bennett, “Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components,” Appl. Opt. 41(1), 154–171 (2002).

[CrossRef]
[PubMed]

M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).

[CrossRef]
[PubMed]

S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, “Angle-resolved scattering: an effective method for characterizing thin-film coatings,” Appl. Opt. 50(9), C164–C171 (2011).

[CrossRef]
[PubMed]

S. O. Rice, “Reflection of electromagnetic waves from slightly rough surfaces,” Commun. Pure Appl. Math. 4(2-3), 351–378 (1951).

[CrossRef]

M. Flemming, L. Coriand, and A. Duparré, “Ultra-hydrophobicity through stochastic surface roughness,” J. Adhes. Sci. Technol. 23(3), 381–400 (2009).

[CrossRef]

J. E. Harvey, A. Krywonos, and D. Bogunovic, “Nonparaxial scalar treatment of sinusoidal phase gratings,” J. Opt. Soc. Am. A 23(4), 858–865 (2006).

[CrossRef]

A. Krywonos, J. E. Harvey, and N. Choi, “Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles,” Accepted for publication in J. Opt. Soc. Am. A (March 25, 2011)

J. E. Harvey, A. Krywonos, and C. L. Vernold, “Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles,” Opt. Eng. 46(7), 078002 (2007).

[CrossRef]

E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Relationship #res,” Opt. Eng. 18, 125 (1979).

J. M. Elson and J. M. Bennett, “Vector scattering theory,” Opt. Eng. 18, 116–124 (1979).

C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer, “Comparison and optimization of randomly textured surfaces in thin-film solar cells,” Opt. Express 18(S3Suppl 3), A335–A341 (2010).

[CrossRef]
[PubMed]

J. E. Harvey, N. Choi, and A. Krywonos, “Scattering from moderately rough interfaces between two arbitrary media,” Proc. SPIE 7794, 77940V, 77940V-11 (2010).

[CrossRef]

E. L. Church, “Statistical effects in the measurement and characterization of smooth scattering surfaces,” Proc. SPIE 511, 18 (1984).

J. C. Stover, “Experimental confirmation of the Rayleigh-Rice obliquity factor,” Proc. SPIE 7792, 77920J, 77920J-5 (2010).

[CrossRef]

J. E. Harvey, N. Choi, A. Krywonos, and J. Marcen, “Calculating BRDFs from surface PSDs for moderately rough surfaces,” Proc. SPIE 7426, 74260I, 74260I-9 (2009).

[CrossRef]

T. M. Elfouhaily and C. A. Guerin, “A critical survey of approximate scattering wave theories from random rough surfaces,” Waves Random Media 14(4), R1–R40 (2004).

[CrossRef]

P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, (Pergamon Press, 1963).

S. Schröder, A. Duparré, “Finish assessment of complex surfaces by advanced light scattering techniques,” Proc. SPIE 7102, paper 0F (2008).

S. Schröder, A. Duparré, K. Füchsel, N. Kaiser, A. Tünnermann, and J. E. Harvey, “Scattering of Roughened TCO Films - Modeling and Measurement,” in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper ThD3.

A. Duparré, “Scattering from surfaces and thin films,” in Encyclopedia of Modern Optics, B. D. Guenther, D. G. Steel, and L. Bayvel, eds. (Elsevier, 2004).

A. Taflove and S. C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method, 2nd ed. (Artech House, 2000).

J. C. Stover, Optical Scattering, Measurement and Analysis, 2nd ed. (SPIE Press, 1995).

J. E. Harvey, “Light-scattering characteristics of optical surfaces,” Ph.D. Dissertation, University of Arizona (1976).

A. von Finck, M. Hauptvogel, and A. Duparré, “Instrument for close-to-process light scatter measurements of thin film coatings and substrates,” in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper ThD4.

A. Krywonos, “Predicting surface scatter using a linear systems formulation of non-paraxial scalar diffraction,” Ph.D. Dissertation, College of Optics and Photonics, University of Central Florida (2006).

“Optics and optical instruments-test methods for radiation scattered by optical components,” ISO 13696:2002 (International Organization for Standardization, 2002).