Abstract

In this paper we report a desk-top microscopy reaching 50nm spatial resolution in very compact setup using a gas-puff laser plasma EUV source. The thickness of an object and the bandwidth of illuminating radiation were studied in order to estimate their quantitative influence on the EUV microscope spatial resolution. EUV images of various thickness objects obtained by illumination with variable bandwidth EUV radiation were compared in terms of knife-edge spatial resolution to study the bandwidth/object thickness parasitic influence on spatial resolution of the EUV microscope.

© 2011 OSA

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2010 (4)

P. W. Wachulak, A. Bartnik, and H. Fiedorowicz, “Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source,” Opt. Lett. 35(14), 2337–2339 (2010).
[CrossRef] [PubMed]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

2009 (3)

2007 (1)

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[CrossRef] [PubMed]

2006 (2)

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[CrossRef] [PubMed]

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

2005 (3)

M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005).
[CrossRef] [PubMed]

2003 (2)

S. S. Churilov, Y. N. Joshi, and J. Reader, “High-resolution spectrum of xenon ions at 13.4 nm,” Opt. Lett. 28(16), 1478–1480 (2003).
[CrossRef] [PubMed]

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

1998 (1)

J. M. Heck, D. T. Attwood, W. Meyer−Ilse, and E. H. Anderson, “Resolution determination in X−ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J.X-Ray Sci. Technol. 8, 95 (1998).

1995 (1)

1992 (2)

1987 (1)

R. L. Kelly, “Atomic and ionic spectrum lines below 2000 angstroms: hydrogen through krypton,” J. Phys. Chem. Ref. Data 16(1), (1987).

1982 (1)

G. O’Sullivan, “Charge-dependent wavefunction collapse in ionised xenon,” J. Phys. B 15(21), L765–L771 (1982).
[CrossRef]

Ahn, B. N.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Anderson, E.

Anderson, E. H.

Artioukov, I. A.

Asadchikov, V. E.

Attwood, D. T.

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[CrossRef] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[CrossRef] [PubMed]

G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005).
[CrossRef] [PubMed]

J. M. Heck, D. T. Attwood, W. Meyer−Ilse, and E. H. Anderson, “Resolution determination in X−ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J.X-Ray Sci. Technol. 8, 95 (1998).

L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, J. Brase, J. A. Koch, R. A. London, B. J. Macgowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, “Demonstration of x-ray microscopy with an x-ray laser operating near the carbon K edge,” Opt. Lett. 17(10), 754–756 (1992).
[CrossRef] [PubMed]

Barbee, T. W.

Bartnik, A.

P. W. Wachulak, A. Bartnik, and H. Fiedorowicz, “Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source,” Opt. Lett. 35(14), 2337–2339 (2010).
[CrossRef] [PubMed]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Bergmann, K.

L. Juschkin, R. Freiberger, and K. Bergmann, “EUV microscopy for defect inspection by dark-field mapping and zone plate zooming,” J. Phys.: Conf. Ser. 186, 012030 (2009).
[CrossRef]

Brase, J.

Brewer, C.

Brewer, C. A.

Brizuela, F.

Chae, J. S.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Chao, W.

Choi, K. S.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Chon, K. S.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Churilov, S. S.

Da Silva, L. B.

Daido, H.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

DiCicco, D. S.

Fedorenko, A. I.

Feigl, T.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

Fiedorowicz, H.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, and H. Fiedorowicz, “Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source,” Opt. Lett. 35(14), 2337–2339 (2010).
[CrossRef] [PubMed]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Fischer, P.

Freiberger, R.

L. Juschkin, R. Freiberger, and K. Bergmann, “EUV microscopy for defect inspection by dark-field mapping and zone plate zooming,” J. Phys.: Conf. Ser. 186, 012030 (2009).
[CrossRef]

Gaufridy de Dortan, F.

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

Goldberg, K. A.

Grisham, M.

Gweon, D. G.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Harteneck, B. D.

Hasegawa, N.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Heck, J. M.

J. M. Heck, D. T. Attwood, W. Meyer−Ilse, and E. H. Anderson, “Resolution determination in X−ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J.X-Ray Sci. Technol. 8, 95 (1998).

Heinzmann, U.

M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
[CrossRef]

Hertz, H. M.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[CrossRef] [PubMed]

Holmberg, A.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[CrossRef] [PubMed]

Jarocki, R.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

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[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Kang, S. H.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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Kim, D. E.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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Kim, J. G.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

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M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Kleineberg, U.

M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
[CrossRef]

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Kondratenko, V. V.

Kostecki, J.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
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H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

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K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Larotonda, M. A.

Liddle, J. A.

Lim, J. H.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Lindblom, M.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[CrossRef] [PubMed]

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London, R. A.

Lu, P.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

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Macgowan, B. J.

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Mikolajczyk, J.

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Min, J. Y.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

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Mrowka, S.

Nagai, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Nagashima, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Nam, K. Y.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Namba, Y.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
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Pershyn, Y. P.

Rah, S.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Rakowski, R.

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Reader, J.

Rekawa, S.

Rocca, J. J.

Rosser, R.

Rudawski, P.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

Ryc, L.

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

Sawicka, M.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

Serov, R. V.

Shin, H. J.

K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006).
[CrossRef]

Spielmann, Ch.

M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
[CrossRef]

Stollberg, H.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[CrossRef] [PubMed]

Stone, G.

Suckewer, S.

Sukegawa, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Szczurek, A.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Szczurek, M.

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010).
[CrossRef]

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010).
[CrossRef]

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010).
[CrossRef]

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005).
[CrossRef]

Tai, R.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Takenaka, H.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).

Takman, P. A. C.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
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M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
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Ultramicroscopy (1)

M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005).
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Figures (7)

Fig. 1
Fig. 1

(Color online) (a) scheme and (b) experimental arrangement of the EUV microscope (not to scale) using a laser-plasma EUV source based on gas puff target.

Fig. 2
Fig. 2

(Color online) Spectrum of radiation emitted from the EUV source for Ar plasma (a) and Xe plasma (b).

Fig. 3
Fig. 3

SEM images of two objects used during studies of object thickness influence on the EUV microscope spatial resolution: a copper mesh, 4mm thick (a) and perforated carbon foil, coated additionally by a thin layer of gold, total thickness of 70nm (b).

Fig. 4
Fig. 4

EUV images of Cu mesh object with Ar (a,c) and Xe (b,d) plasma illumination. (c,d) are the magnified subsections of larger EUV images indicated by boxed regions showing the edge in detail.

Fig. 5
Fig. 5

EUV images of perforated carbon/Au foil object with Ar (a,c) and Xe (b,d) plasma illumination. (c,d) are the magnified subsections of the EUV images in boxed regions showing a single hole in detail.

Fig. 6
Fig. 6

(Color online) Graphic representation of the KE resolution measurements for various objects and types of illumination with error bars corresponding to +/− standard deviation calculated from the measurements.

Fig. 7
Fig. 7

(color online) Typical KE lineouts indicating 10-90% intensity transition in the EUV image related to Rayleigh resolution criterion for both objects and different illumination bandwidths and the theoretical KE limit.

Tables (2)

Tables Icon

Table 1 EUV Imaging Experimental Details and Resolution Measurement Results for Different Objects and Illumination Bandwidth

Tables Icon

Table 2 Estimation of Gaussian PSF Approximation by De-Convolution Based on the KE Resolution Measurements

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