Abstract

We present dynamically reconfigurable photonic crystal nanobeam cavities, operating at ~1550 nm, that can be continuously and reversibly tuned over a 9.5 nm wavelength range. The devices are formed by two coupled nanobeam cavities, and the tuning is achieved by varying the lateral gap between the nanobeams. An electrostatic force, obtained by applying bias voltages directly to the nanobeams, is used to control the spacing between the nanobeams, which in turn results in tuning of the cavity resonance. The observed tuning trends were confirmed through simulations that modeled the electrostatic actuation as well as the optical resonances in our reconfigurable geometries.

© 2010 OSA

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2009 (6)

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Q. P. Unterreithmeier, E. M. Weig, and J. P. Kotthaus, “Universal transduction scheme for nanomechanical systems based on dielectric forces,” Nature 458(7241), 1001–1004 (2009).
[CrossRef] [PubMed]

2008 (5)

M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008).
[CrossRef]

M. Notomi, E. Kuramochi, and H. Taniyama, “Ultrahigh-Q nanocavity with 1D photonic gap,” Opt. Express 16(15), 11095–11102 (2008).
[CrossRef] [PubMed]

A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De la Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express 16(16), 12084–12089 (2008).
[CrossRef]

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

2007 (6)

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, “Ultra-high q/v fabry-perot microcavity on soi substrate,” Opt. Express 15(24), 16090–16096 (2007).
[CrossRef] [PubMed]

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

M. W. McCutcheon, A. G. Pattantyus-Abraham, G. W. Rieger, and J. F. Young, “Emission spectrum of electromagnetic energy stored in a dynamically perturbed optical microcavity,” Opt. Express 15(18), 11472–11480 (2007).
[CrossRef] [PubMed]

2006 (3)

2005 (6)

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

H. Altug and J. Vucković, “Polarization control and sensing with two-dimensional coupled photonic crystal microcavity arrays,” Opt. Lett. 30(9), 982–984 (2005).
[CrossRef] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, “Modal-reflectivity enhancement by geometry tuning in Photonic Crystal microcavities,” Opt. Express 13(1), 245–255 (2005).
[CrossRef] [PubMed]

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

2004 (1)

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Aers, G. C.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Akahane, Y.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Altug, H.

Andreani, L. C.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Asano, T.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Atatüre, M.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Badolato, A.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Baehr-Jones, T.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Belotti, M.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Bulla, D.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

Camacho, R.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

Camacho, R. M.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

Chan, J.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

Charvolin, T.

Chen, C. J.

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

Cheung, I. W.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Dalacu, D.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

De la Rue, R. M.

Deotare, P. B.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

Deppe, D. G.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Eggleton, B. J.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

Eichenfield, M.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

El Melhaoui, L.

Englund, D.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

Fält, S.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Fan, S.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Faraon, A.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

Fedeli, J. M.

Fejer, M. M.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Frank, I. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

Frederick, S.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Fushman, I.

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

Galli, M.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Gerace, D.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Gibbs, H. M.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Gulde, S.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Hadji, E.

Harris, J. S.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Hendrickson, J.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Hennessy, K.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Herzig, H. P.

Hochberg, M.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Hu, E. L.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Hugonin, J. P.

Huo, Y.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Husko, C. A.

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

Imamoglu, A.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Johnson, N. P.

Khan, M.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

Khitrova, G.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Kotthaus, J. P.

Q. P. Unterreithmeier, E. M. Weig, and J. P. Kotthaus, “Universal transduction scheme for nanomechanical systems based on dielectric forces,” Nature 458(7241), 1001–1004 (2009).
[CrossRef] [PubMed]

Krauss, T. F.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Kuramochi, E.

M. Notomi, E. Kuramochi, and H. Taniyama, “Ultrahigh-Q nanocavity with 1D photonic gap,” Opt. Express 16(15), 11095–11102 (2008).
[CrossRef] [PubMed]

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

Lalanne, P.

Lecamp, G.

Lee, M. C. M.

Loncar, M.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008).
[CrossRef]

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Luther-Davies, B.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

Lyan, P.

Manolatou, C.

Märki, I.

Maune, B.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

McCutcheon, M. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008).
[CrossRef]

M. W. McCutcheon, A. G. Pattantyus-Abraham, G. W. Rieger, and J. F. Young, “Emission spectrum of electromagnetic energy stored in a dynamically perturbed optical microcavity,” Opt. Express 15(18), 11472–11480 (2007).
[CrossRef] [PubMed]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Md Zain, A. R.

Mitsugi, S.

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

Mosor, S.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Noda, S.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Notomi, M.

M. Notomi, E. Kuramochi, and H. Taniyama, “Ultrahigh-Q nanocavity with 1D photonic gap,” Opt. Express 16(15), 11095–11102 (2008).
[CrossRef] [PubMed]

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

O’Faolain, L.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Painter, O.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

Pan, J.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Pattantyus-Abraham, A. G.

Petroff, P.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

Peyrade, D.

Picard, E.

Poole, P. J.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Popovic, M. A.

Portalupi, S. L.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Povinelli, M. L.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Psaltis, D.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Qiu, Y. M.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Richards, B. C.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Rieger, G. W.

M. W. McCutcheon, A. G. Pattantyus-Abraham, G. W. Rieger, and J. F. Young, “Emission spectrum of electromagnetic energy stored in a dynamically perturbed optical microcavity,” Opt. Express 15(18), 11472–11480 (2007).
[CrossRef] [PubMed]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Rodier, J. C.

Salt, M.

Sandhu, S.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Sauvan, C.

Scaccabarozzi, L.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Scherer, A.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Shchekin, O. B.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Shinya, A.

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

Song, B. S.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Sorel, M.

Stanley, R.

Stoltz, N.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

Sweet, J.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Tanabe, T.

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

Taniyama, H.

Timp, R.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Unterreithmeier, Q. P.

Q. P. Unterreithmeier, E. M. Weig, and J. P. Kotthaus, “Universal transduction scheme for nanomechanical systems based on dielectric forces,” Nature 458(7241), 1001–1004 (2009).
[CrossRef] [PubMed]

Vahala, K. J.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

Velha, P.

Vuckovic, J.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

H. Altug and J. Vucković, “Polarization control and sensing with two-dimensional coupled photonic crystal microcavity arrays,” Opt. Lett. 30(9), 982–984 (2005).
[CrossRef] [PubMed]

Waks, E.

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

Watts, M. R.

Weig, E. M.

Q. P. Unterreithmeier, E. M. Weig, and J. P. Kotthaus, “Universal transduction scheme for nanomechanical systems based on dielectric forces,” Nature 458(7241), 1001–1004 (2009).
[CrossRef] [PubMed]

Williams, R. L.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Winger, M.

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

Witzens, J.

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

Wong, C. W.

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

Wu, M. C.

Yamanaka, K.

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

Yang, X.

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

Yoshie, T.

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

Young, J. F.

M. W. McCutcheon, A. G. Pattantyus-Abraham, G. W. Rieger, and J. F. Young, “Emission spectrum of electromagnetic energy stored in a dynamically perturbed optical microcavity,” Opt. Express 15(18), 11472–11480 (2007).
[CrossRef] [PubMed]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Appl. Phys. Lett. (11)

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

T. Tanabe, M. Notomi, S. Mitsugi, A. Shinya, and E. Kuramochi, “All-optical switches on a silicon chip realized using photonic crystal nanocavities,” Appl. Phys. Lett. 87(15), 151112 (2005).
[CrossRef]

X. Yang, C. J. Chen, C. A. Husko, and C. W. Wong, “Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition,” Appl. Phys. Lett. 91, 161115 (2007).
[CrossRef]

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vučković, “Local tuning of photonic crystal cavities using chalcogenide glasses,” Appl. Phys. Lett. 92(4), 043123 (2008).
[CrossRef]

J. Pan, Y. Huo, K. Yamanaka, S. Sandhu, L. Scaccabarozzi, R. Timp, M. L. Povinelli, S. Fan, M. M. Fejer, and J. S. Harris, “Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning,” Appl. Phys. Lett. 92(10), 103114 (2008).
[CrossRef]

S. Mosor, J. Hendrickson, B. C. Richards, J. Sweet, G. Khitrova, H. M. Gibbs, T. Yoshie, A. Scherer, O. B. Shchekin, and D. G. Deppe, “Scanning a photonic crystal slab nanocavity by condensation of xenon,” Appl. Phys. Lett. 87(14), 141105 (2005).
[CrossRef]

B. Maune, M. Loncar, J. Witzens, M. Hochberg, T. Baehr-Jones, D. Psaltis, A. Scherer, and Y. M. Qiu, “Liquid-crystal electric tuning of a photonic crystal laser,” Appl. Phys. Lett. 85(3), 360–362 (2004).
[CrossRef]

I. Fushman, E. Waks, D. Englund, N. Stoltz, P. Petroff, and J. Vuckovic, “Ultrafast nonlinear optical tuning of photonic crystal cavities,” Appl. Phys. Lett. 90(9), 091118 (2007).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam Cavities,” Appl. Phys. Lett. 95(3), 031102 (2009).
[CrossRef]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O’Faolain, and T. F. Krauss, “Light scattering and fano resonances in high-q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Nat. Mater. (1)

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Nature (5)

Q. P. Unterreithmeier, E. M. Weig, and J. P. Kotthaus, “Universal transduction scheme for nanomechanical systems based on dielectric forces,” Nature 458(7241), 1001–1004 (2009).
[CrossRef] [PubMed]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462(7269), 78–82 (2009).
[CrossRef] [PubMed]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoğlu, “Quantum nature of a strongly coupled single quantum dot-cavity system,” Nature 445(7130), 896–899 (2007).
[CrossRef] [PubMed]

D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vucković, “Controlling cavity reflectivity with a single quantum dot,” Nature 450(7171), 857–861 (2007).
[CrossRef] [PubMed]

Opt. Express (8)

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, “Ultra-high q/v fabry-perot microcavity on soi substrate,” Opt. Express 15(24), 16090–16096 (2007).
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M. W. McCutcheon, A. G. Pattantyus-Abraham, G. W. Rieger, and J. F. Young, “Emission spectrum of electromagnetic energy stored in a dynamically perturbed optical microcavity,” Opt. Express 15(18), 11472–11480 (2007).
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M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008).
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M. Notomi, E. Kuramochi, and H. Taniyama, “Ultrahigh-Q nanocavity with 1D photonic gap,” Opt. Express 16(15), 11095–11102 (2008).
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Opt. Lett. (2)

Other (1)

C. Liu, Foundations of MEMS (Prentice Hall, 2005).

Supplementary Material (1)

» Media 1: MOV (21514 KB)     

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Figures (3)

Fig. 1
Fig. 1

Coupled photonic crystal nanobeam cavities. a, SEM image of a representative fabricated structure. The suspended silicon is in contact with gold electrodes seen at the edge of the image and is supported by islands of SiO2 (scalebar = 1 μm). b, SEM image showing the deflection of the nanobeams due to electrostatic actuation. c, Finite element simulations showing nanobeams deflected due to an applied potential. The insets depict the Ey component of the optical supermodes of the coupled cavities. d, Simulation data: the red curve shows the lateral separation of a pair of nanobeams, measured at the center of the structure, as a potential is applied across them, while the blue curve shows the force generated due to the applied voltage.

Fig. 2
Fig. 2

Electrostatic tuning of a coupled photonic crystal nanobeam cavity. a, Finite element simulations showing the dependence of the even (shown in red) and odd (blue) supermode resonance on the applied bias voltage. b, Experimental data showing the measured resonances for even and odd supermodes. The trend seen in the experimental data matches well with the simulated results. The slight discrepancy in the absolute value of resonant wavelength can be attributed to uncertainty in the thickness and refractive index of the device layer of the SOI wafer, as well as the amount of tensile stress in the nanobeams. c Detected spectrum and Fano fits [26] at different applied voltages.

Fig. 3
Fig. 3

(Media 1) Sensitivity of the coupled-cavity resonance and the visualization of nanobeam deflection due to applied voltage. a, Experimental results showing the resonant wavelength of the even supermode as the bias voltage is stepped up to 6 V (red curve). Tuning up to 9.6nm is obtained in this cavity. The blue curve shows the sensitivity of the same cavity resonance to the applied voltage. A high sensitivity of 50 nm/V is obtained when cavity is operated around with a bias 6 V. The results are obtained for a cavity with initial (V = 0) nanobeam separation of -70 nm. b, Scanning electron microscopy images showing deflection of a pair of nanobeams under different bias voltages. The lower nanobeam remains grounded, while the potential on the upper nanobeam is increased as indicated.

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