Abstract

A femtosecond laser has been successfully utilized for patterning thin Flexible Organic Light Emitting Diode (FOLED) structures of individual layer thickness around 100nm. The authors report in this paper a step-like ablation behavior at the layer interfaces which accounts for a local removal of entire layers. Various surface analyzing techniques are used to investigate the morphologies and chemical compositions within and in the vicinity of the ablation areas. This study opens a new avenue in selectively ablating different layers from a multilayer stack on flexible substrates using fs lasers allowing post deposition structuring of large area flexible organic electronic devices.

© 2010 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. C. W. Tang and S. A. VanSlyke, “Organic electroluminescent diodes,” Appl. Phys. Lett. 51(12), 913–915 (1987).
    [CrossRef]
  2. A. N. Krasnov, “High-contrast organic light-emitting diodes on flexible substrates,” Appl. Phys. Lett. 80(20), 3853–3855 (2002).
    [CrossRef]
  3. J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
    [CrossRef]
  4. D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
    [CrossRef]
  5. T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
    [CrossRef]
  6. G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
    [CrossRef]
  7. S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
    [CrossRef]
  8. D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
    [CrossRef]
  9. Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
    [CrossRef]
  10. C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
    [CrossRef]
  11. N. Bityurin and A. Malyshev, “Bulk photothermal model for laser ablation of polymers by nanosecond and subpicosecond pulses,” J. Appl. Phys. 92(1), 605–613 (2002).
    [CrossRef]
  12. R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
    [CrossRef] [PubMed]
  13. F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).
  14. J. Kruger and W. Kautek, “Ultrashort Pulse Laser Interaction with Dielectrics and Polymers,” Adv. Polym. Sci. 168, 247–290 (2004).
  15. Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
    [CrossRef]
  16. P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
    [CrossRef]
  17. T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
    [CrossRef]
  18. E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

2009 (1)

Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
[CrossRef]

2008 (2)

C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
[CrossRef]

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

2005 (1)

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

2004 (3)

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

J. Kruger and W. Kautek, “Ultrashort Pulse Laser Interaction with Dielectrics and Polymers,” Adv. Polym. Sci. 168, 247–290 (2004).

E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

2003 (1)

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

2002 (3)

A. N. Krasnov, “High-contrast organic light-emitting diodes on flexible substrates,” Appl. Phys. Lett. 80(20), 3853–3855 (2002).
[CrossRef]

N. Bityurin and A. Malyshev, “Bulk photothermal model for laser ablation of polymers by nanosecond and subpicosecond pulses,” J. Appl. Phys. 92(1), 605–613 (2002).
[CrossRef]

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

2001 (2)

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
[CrossRef]

2000 (1)

D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
[CrossRef]

1999 (2)

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
[CrossRef]

1998 (1)

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

1987 (1)

C. W. Tang and S. A. VanSlyke, “Organic electroluminescent diodes,” Appl. Phys. Lett. 51(12), 913–915 (1987).
[CrossRef]

Achenbach, J. D.

T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
[CrossRef]

Allott, R.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Ashkenasi, D.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Beinhorn, F.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

Bennet, W.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Bharathan, J.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Bityurin, N.

N. Bityurin and A. Malyshev, “Bulk photothermal model for laser ablation of polymers by nanosecond and subpicosecond pulses,” J. Appl. Phys. 92(1), 605–613 (2002).
[CrossRef]

Böhlen, K.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Bonham, C.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Buckley, A.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Bulgakova, N. M.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Burrows, P. E.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Campbell, E. E.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Chang, S.-C.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

de Baets, J.

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

Dietzel, A.

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

Fieret, J.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Giebeler, C.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Graff, G. L.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Gross, M. E.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Hall, M.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Hebner, T. R.

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

Hertel, I. V.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Ihlemann, J.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

Ivanov, D. S.

E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

Jabbour, G. E.

G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
[CrossRef]

D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
[CrossRef]

Karnakis, Dimitris

Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
[CrossRef]

Kautek, W.

J. Kruger and W. Kautek, “Ultrashort Pulse Laser Interaction with Dielectrics and Polymers,” Adv. Polym. Sci. 168, 247–290 (2004).

Kearsley, Andrew

Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
[CrossRef]

Kido, J.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Kim, C.-N.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Kim, K.-B.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Kim, M.-S.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Kim, S.-T.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Knowles, Martyn

Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
[CrossRef]

Krasnov, A. N.

A. N. Krasnov, “High-contrast organic light-emitting diodes on flexible substrates,” Appl. Phys. Lett. 80(20), 3853–3855 (2002).
[CrossRef]

Krishnaswamy, S.

T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
[CrossRef]

Kruger, J.

J. Kruger and W. Kautek, “Ultrashort Pulse Laser Interaction with Dielectrics and Polymers,” Adv. Polym. Sci. 168, 247–290 (2004).

Lee, M.-H.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Leveugle, E.

E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

Lidzey, D. G.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Liu, C.

C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
[CrossRef]

Liu, D.

C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
[CrossRef]

Liu, J.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Lu, M. H.

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

Luther, K.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

Malyshev, A.

N. Bityurin and A. Malyshev, “Bulk photothermal model for laser ablation of polymers by nanosecond and subpicosecond pulses,” J. Appl. Phys. 92(1), 605–613 (2002).
[CrossRef]

Marcy, D.

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

Martin, P. M.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Mast, E.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Murray, T. W.

T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
[CrossRef]

Onohara, J.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Pardo, D. A.

D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
[CrossRef]

Peyghambarian, N.

G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
[CrossRef]

D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
[CrossRef]

Radspinner, R.

G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
[CrossRef]

Rosenfeld, A.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Shi, M. K.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Stoian, R.

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Sturm, J. C.

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

Sullivan, M. B.

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

Tak, Y.-H.

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Tang, C. W.

C. W. Tang and S. A. VanSlyke, “Organic electroluminescent diodes,” Appl. Phys. Lett. 51(12), 913–915 (1987).
[CrossRef]

Troe, J.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

van den Brand, J.

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

van Mol, T.

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

VanSlyke, S. A.

C. W. Tang and S. A. VanSlyke, “Organic electroluminescent diodes,” Appl. Phys. Lett. 51(12), 913–915 (1987).
[CrossRef]

Voigt, M.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Wright, J.

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Wu, C. C.

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

Yang, Y.

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Zhigilei, L. V.

E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

Zhu, G.

C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
[CrossRef]

Adv. Mater. (2)

D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, “Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices,” Adv. Mater. 12(17), 1249–1252 (2000).
[CrossRef]

S.-C. Chang, J. Liu, J. Bharathan, Y. Yang, J. Onohara, and J. Kido, “Multicolor Organic Light-Emitting Diodes Processed by Hybrid Inkjet Printing,” Adv. Mater. 11(9), 734–737 (1999).
[CrossRef]

Adv. Polym. Sci. (1)

J. Kruger and W. Kautek, “Ultrashort Pulse Laser Interaction with Dielectrics and Polymers,” Adv. Polym. Sci. 168, 247–290 (2004).

Appl. Phys. Lett. (4)

T. W. Murray, S. Krishnaswamy, and J. D. Achenbach, “Laser generation of ultrasound in films and coatings,” Appl. Phys. Lett. 74(23), 3561–3564 (1999).
[CrossRef]

T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, “Ink-jet printing of doped polymers for organic light emitting devices,” Appl. Phys. Lett. 72(5), 519–521 (1998).
[CrossRef]

C. W. Tang and S. A. VanSlyke, “Organic electroluminescent diodes,” Appl. Phys. Lett. 51(12), 913–915 (1987).
[CrossRef]

A. N. Krasnov, “High-contrast organic light-emitting diodes on flexible substrates,” Appl. Phys. Lett. 80(20), 3853–3855 (2002).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (2)

E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, “Photomechanical spallation of molecular and metal targets: molecular dynamics study,” Appl. Phys., A Mater. Sci. Process. 79(7), 1643–1655 (2004).

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Plasma effects in picosecond-femtosecond UV laser ablation of polymers,” Appl. Phys., A Mater. Sci. Process. 79(4-6), 869–873 (2004).

Displays (2)

P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennet, and M. B. Sullivan, “Ultra barrier flexible substrates for flat panel displays,” Displays 22(2), 65–69 (2001).
[CrossRef]

C. Liu, G. Zhu, and D. Liu, “Patterning cathode for organic light-emitting diode by pulsed laser ablation,” Displays 29(5), 536–540 (2008).
[CrossRef]

IEEE Sel.Top. Quantum Electron. (1)

G. E. Jabbour, R. Radspinner, and N. Peyghambarian, “Screen printing for the fabrication of organic light-emitting devices,” IEEE Sel.Top. Quantum Electron. 7(5), 769–773 (2001).
[CrossRef]

J. Appl. Phys. (1)

N. Bityurin and A. Malyshev, “Bulk photothermal model for laser ablation of polymers by nanosecond and subpicosecond pulses,” J. Appl. Phys. 92(1), 605–613 (2002).
[CrossRef]

J. Laser Micro/Nanoengineering (1)

Dimitris Karnakis, Andrew Kearsley, and Martyn Knowles,“Ultrafast Laser Patterning of OLEDs on Flexible Substrate for Solid-state Lighting,” J. Laser Micro/Nanoengineering 4, 218–223 (2009).
[CrossRef]

Microelectron. Reliab. (1)

J. van den Brand, J. de Baets, T. van Mol, and A. Dietzel, “Systems-in-foil - Devices, fabrication processes and reliability issues,” Microelectron. Reliab. 48(8-9), 1123–1128 (2008).
[CrossRef]

Org. Electron. (1)

D. G. Lidzey, M. Voigt, C. Giebeler, A. Buckley, J. Wright, K. Böhlen, J. Fieret, and R. Allott, “Laser-assisted patterning of conjugated polymer light emitting diodes,” Org. Electron. 6, 221–228 (2005).
[CrossRef]

Phys. Rev. Lett. (1)

R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. Campbell, “Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation,” Phys. Rev. Lett. 88(9), 097603–097606 (2002).
[CrossRef] [PubMed]

Synth. Met. (1)

Y.-H. Tak, C.-N. Kim, M.-S. Kim, K.-B. Kim, M.-H. Lee, and S.-T. Kim, “Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes,” Synth. Met. 138(3), 497–500 (2003).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (9)

Fig. 1
Fig. 1

Detailed structure of OLED showing different layers

Fig. 2
Fig. 2

Schematic of the experimental setup for single shot, multiple shot and patterning experiments on the OLED stack. Inset shows the layer sequence used for the experiments.

Fig. 3
Fig. 3

Various depths achieved at various laser fluence levels. There exists a process window of at least 4 shots per location for the patterning.

Fig. 4
Fig. 4

Dektak profilometry showing the depth of the patterned layers. The inset pictures are the respective microscopic images (a) Stopping on PEDOT (LEP removed) (b) Stopping on ITO (LEP and PEDOT removed) (c) Stopping on barrier (LEP, PEDOT and ITO removed

Fig. 5
Fig. 5

Ablation depth values from profilometry measurements (squares) and from white light interferometry (Diamond) compared with layer thicknesses of the flexible OLED stack

Fig. 6
Fig. 6

Optical absorption spectrum of various layers used

Fig. 7
Fig. 7

The SEM image (inset) and the EDAX spectra of the various laser ablated regions within the OLED stack (a) PEDOT is exposed; ‘S’ peak visible (fluence: 0.075 J/cm2) (b) ITO is exposed; ‘S’ peak disappears and ‘In’ peak is still visible (fluence: 0.20J /cm2) (c) SiN is exposed; both ‘S’ and ‘In’ peaks disappears and ‘Si’ peak still visible (fluence: 0.60 J/cm2)

Fig. 8
Fig. 8

(a) White light interferometer image of a patterned line (b) depth measurement obtained from the interferometer. The spike shown in the figure is due to the large flakes formed by the delamination of the layer during laser ablation. This can also be seen in the figure (a) at the ablation edges (c) Dektak measurement and the microscopic image of the patterned line.

Fig. 9
Fig. 9

The SEM image (inset) and the EDAX spectrum of laser scribed line showing that the LEP and PEDOT layers are completely removed at an effective fluence of 0.19 J/cm2. The presence of ‘In’ peak confirms the presence of ITO layer

Metrics