High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

M. Toyoda and M. Yamamoto, “Analytical designing of two-aspherical-mirror anastigmats permitting practical misalighnments in a soft-X-ray optics,” Opt. Rev. 13(3), 149–157 (2006).
[Crossref]

T. Aota and T. Tomie, “Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma,” Phys. Rev. Lett. 94(1), 015004 (2005).
[Crossref] [PubMed]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

The extinction coefficient values are computed from the values of atomic scattering factor and density by the use of the computer program IMD. The details of the computer program IMD is described in the paper:D. L. Windt, “IMD-Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[Crossref]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

A. Ito and K. Shinohara, “Image blurring by thermal diffusion in the observation of hydrated biomolecules with soft X-ray microscopy,” Cell Struct. Funct. 17(4), 209–212 (1992).
[Crossref] [PubMed]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

T. Aota and T. Tomie, “Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma,” Phys. Rev. Lett. 94(1), 015004 (2005).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

A. Ito and K. Shinohara, “Image blurring by thermal diffusion in the observation of hydrated biomolecules with soft X-ray microscopy,” Cell Struct. Funct. 17(4), 209–212 (1992).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

A. Ito and K. Shinohara, “Image blurring by thermal diffusion in the observation of hydrated biomolecules with soft X-ray microscopy,” Cell Struct. Funct. 17(4), 209–212 (1992).
[Crossref] [PubMed]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

T. Aota and T. Tomie, “Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma,” Phys. Rev. Lett. 94(1), 015004 (2005).
[Crossref] [PubMed]

M. Toyoda and M. Yamamoto, “Analytical designing of two-aspherical-mirror anastigmats permitting practical misalighnments in a soft-X-ray optics,” Opt. Rev. 13(3), 149–157 (2006).
[Crossref]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

The extinction coefficient values are computed from the values of atomic scattering factor and density by the use of the computer program IMD. The details of the computer program IMD is described in the paper:D. L. Windt, “IMD-Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[Crossref]

M. Toyoda and M. Yamamoto, “Analytical designing of two-aspherical-mirror anastigmats permitting practical misalighnments in a soft-X-ray optics,” Opt. Rev. 13(3), 149–157 (2006).
[Crossref]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

A. Ito and K. Shinohara, “Image blurring by thermal diffusion in the observation of hydrated biomolecules with soft X-ray microscopy,” Cell Struct. Funct. 17(4), 209–212 (1992).
[Crossref] [PubMed]

The extinction coefficient values are computed from the values of atomic scattering factor and density by the use of the computer program IMD. The details of the computer program IMD is described in the paper:D. L. Windt, “IMD-Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[Crossref]

H. Mizutani, Y. Takeda, A. Momose, A. Takeuchi, and T. Takagi, “X-ray microscopy for neural circuit reconstruction,” J. Phys. Conf. Series 186, 012092 (2009).
[Crossref]

M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe, “A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests,” Jpn. J. Appl. Phys. 39(Part 1, No. 4A), 1926–1929 (2000).
[Crossref]

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009).
[Crossref] [PubMed]

I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Yu. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451–2453 (1995).
[Crossref] [PubMed]

C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref] [PubMed]

M. Toyoda and M. Yamamoto, “Analytical designing of two-aspherical-mirror anastigmats permitting practical misalighnments in a soft-X-ray optics,” Opt. Rev. 13(3), 149–157 (2006).
[Crossref]

T. Aota and T. Tomie, “Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma,” Phys. Rev. Lett. 94(1), 015004 (2005).
[Crossref] [PubMed]

A custom product of Nikon Engineering Co., Ltd., n-eng.sales@nikon.co.jp or http://www.ave.nikon.co.jp/n-eng/

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University Press, Cambridge, UK, 1999) p.528.

For example, D. Attwood, Soft X-rays and extreme ultraviolet radiation, (Cambridge University Press, Cambridge, 2000) Chap. 9.

When spatical resolution is given by Rayleigh’s criterion [2], the effective field of view provided by SOs is represented as (1.22λ/(P × NA))1/2 with the use of wavelength λ, coefficient of field curvature P, and numerical aperture NA [10]. Applying the sine condition to a high magnification Fresnel zone plate (FZP) imaging system that the spherical aberration is corrected, the outer zone width Δ of the FZP is represented as ymaxNA’2/2, where ymax is the maximum image height at image plane and NA’ is the numerical aperture of the FZP. The outer zone width Δ of FZP systems is also represented as λ/2NA’ at wavelength λ [4]. When the former two equations equal to each other, effective field of view of a high magnification FZP system is represented by a maximum image height and the notation is given by 8Δ3/λ2.

For example, D. Attwood, Soft X-rays and extreme ultraviolet radiation, (Cambridge University Press, Cambridge, 2000) Chaps. 4, 6, and 10.

T. Harada, Dr. of Eng. thesis, Tohoku University, 2007 (in Japanese).

M. Toyoda, JPN Patent pending.

For example, B. Alberts, A. Johnson, J. Lewis, M. Raff, K. Roberts, and P. Walter, Molecular biology of the cell, 5th ed., (Garland Science, Taylor & Francis Group, New York, 2008).
[PubMed]

M. Born and E. Wolf, Principles of Optics, 7th ed., (Cambridge University Press, Cambridge, 1999) Sec. 8.6.2.

L. Reimer, Transmission Electron Microscope, 3rd ed., (Springer-Verlag, Berlin Heidelberg, 1984, 1989, and 1993) Chap. 1.