Y.-J. Hung, S.-L. Lee, and Y.-T. Pan, “Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography,” J. Opt. 12(1), 015102 (2010).
[Crossref]
D.-H. Ko, J. R. Tumbleston, L. Zhang, S. Williams, J. M. DeSimone, R. Lopez, and E. T. Samulski, “Photonic crystal geometry for organic solar cells,” Nano Lett. 9(7), 2742–2746 (2009).
[Crossref]
[PubMed]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
S.-I. Inoue, S. Yokoyama, and Y. Aoyagi, “Direct determination of photonic band structure for waveguiding modes in two-dimensional photonic crystals,” Opt. Express 16(4), 2461–2468 (2008).
[Crossref]
[PubMed]
K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, “Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching,” Nanotechnology 19(34), 345301 (2008).
[Crossref]
[PubMed]
A. David, H. Benisty, and C. Weisbuch, “Optimization of light-diffracting photonic-crystals for high extraction efficiency LEDs,” J. Display Technol. 3(2), 133–148 (2007).
[Crossref]
X. Wang, W. Zeng, G. Lu, O. L. Russo, and E. Eisenbraun, “High aspect ratio Bosch etching of sub-0.25 μm trenches for hyperintegration applications,” J. Vac. Sci. Technol. B 25(4), 1376–1381 (2007).
[Crossref]
C.-H. Choi and C.-J. Kim, “Fabrication of a dense array of tall nanostructures over a large sample area with sidewall profile and tip sharpness control,” Nanotechnology 17(21), 5326–5333 (2006).
[Crossref]
Y.-F. Chang, Q.-R. Chou, J.-Y. Lin, and C.-H. Lee, “Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique,” Appl. Phys., A Mater. Sci. Process. 86(2), 193–196 (2006).
[Crossref]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
I. D. Block, L. L. Chan, and B. T. Cunningham, “Photonic crystal optical biosensor incorporating structured low-index porous dielectric,” Sens. Actuators B Chem. 120(1), 187–193 (2006).
[Crossref]
C. I. Hsieh, H. L. Chen, W. C. Chao, and F. H. Ko, “Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry,” Microelectron. Eng. 73–74, 920–926 (2004).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and shape-controlled fabrication of large-area periodic nanopillar arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, P. Chen, and G. A. Somorjai, “Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10nm resolution,” J. Phys. Chem. B 107(37), 9950–9953 (2003).
[Crossref]
Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
S. H. Zaidi, D. S. Ruby, and J. M. Gee, “Characterization of random reactive ion etched-textured silicon soar cells,” IEEE Trans. Electron. Dev. 48(6), 1200–1206 (2001).
[Crossref]
A. A. Ayón, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt, “Characterization of a time multiplexed inductively coupled plasma etcher,” J. Electrochem. Soc. 146(1), 339–349 (1999).
[Crossref]
V. Astratov, D. Whittaker, I. Culshaw, R. Stevenson, M. Skolnick, T. Krauss, and R. De La Rue, “Photonic band-structure effects in the reflectivity of periodically patterned waveguides,” Phys. Rev. B 60(24), 16255–16258 (1999).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
V. Astratov, D. Whittaker, I. Culshaw, R. Stevenson, M. Skolnick, T. Krauss, and R. De La Rue, “Photonic band-structure effects in the reflectivity of periodically patterned waveguides,” Phys. Rev. B 60(24), 16255–16258 (1999).
[Crossref]
A. A. Ayón, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt, “Characterization of a time multiplexed inductively coupled plasma etcher,” J. Electrochem. Soc. 146(1), 339–349 (1999).
[Crossref]
K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, “Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching,” Nanotechnology 19(34), 345301 (2008).
[Crossref]
[PubMed]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
A. David, H. Benisty, and C. Weisbuch, “Optimization of light-diffracting photonic-crystals for high extraction efficiency LEDs,” J. Display Technol. 3(2), 133–148 (2007).
[Crossref]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
I. D. Block, L. L. Chan, and B. T. Cunningham, “Photonic crystal optical biosensor incorporating structured low-index porous dielectric,” Sens. Actuators B Chem. 120(1), 187–193 (2006).
[Crossref]
A. A. Ayón, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt, “Characterization of a time multiplexed inductively coupled plasma etcher,” J. Electrochem. Soc. 146(1), 339–349 (1999).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
I. D. Block, L. L. Chan, and B. T. Cunningham, “Photonic crystal optical biosensor incorporating structured low-index porous dielectric,” Sens. Actuators B Chem. 120(1), 187–193 (2006).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
Y.-F. Chang, Q.-R. Chou, J.-Y. Lin, and C.-H. Lee, “Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique,” Appl. Phys., A Mater. Sci. Process. 86(2), 193–196 (2006).
[Crossref]
C. I. Hsieh, H. L. Chen, W. C. Chao, and F. H. Ko, “Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry,” Microelectron. Eng. 73–74, 920–926 (2004).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
C. I. Hsieh, H. L. Chen, W. C. Chao, and F. H. Ko, “Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry,” Microelectron. Eng. 73–74, 920–926 (2004).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, P. Chen, and G. A. Somorjai, “Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10nm resolution,” J. Phys. Chem. B 107(37), 9950–9953 (2003).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and shape-controlled fabrication of large-area periodic nanopillar arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]
C.-H. Choi and C.-J. Kim, “Fabrication of a dense array of tall nanostructures over a large sample area with sidewall profile and tip sharpness control,” Nanotechnology 17(21), 5326–5333 (2006).
[Crossref]
Y.-F. Chang, Q.-R. Chou, J.-Y. Lin, and C.-H. Lee, “Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique,” Appl. Phys., A Mater. Sci. Process. 86(2), 193–196 (2006).
[Crossref]
K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, “Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching,” Nanotechnology 19(34), 345301 (2008).
[Crossref]
[PubMed]
Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[Crossref]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
V. Astratov, D. Whittaker, I. Culshaw, R. Stevenson, M. Skolnick, T. Krauss, and R. De La Rue, “Photonic band-structure effects in the reflectivity of periodically patterned waveguides,” Phys. Rev. B 60(24), 16255–16258 (1999).
[Crossref]
I. D. Block, L. L. Chan, and B. T. Cunningham, “Photonic crystal optical biosensor incorporating structured low-index porous dielectric,” Sens. Actuators B Chem. 120(1), 187–193 (2006).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
V. Astratov, D. Whittaker, I. Culshaw, R. Stevenson, M. Skolnick, T. Krauss, and R. De La Rue, “Photonic band-structure effects in the reflectivity of periodically patterned waveguides,” Phys. Rev. B 60(24), 16255–16258 (1999).
[Crossref]
D.-H. Ko, J. R. Tumbleston, L. Zhang, S. Williams, J. M. DeSimone, R. Lopez, and E. T. Samulski, “Photonic crystal geometry for organic solar cells,” Nano Lett. 9(7), 2742–2746 (2009).
[Crossref]
[PubMed]
X. Wang, W. Zeng, G. Lu, O. L. Russo, and E. Eisenbraun, “High aspect ratio Bosch etching of sub-0.25 μm trenches for hyperintegration applications,” J. Vac. Sci. Technol. B 25(4), 1376–1381 (2007).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[Crossref]
Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[Crossref]
S. H. Zaidi, D. S. Ruby, and J. M. Gee, “Characterization of random reactive ion etched-textured silicon soar cells,” IEEE Trans. Electron. Dev. 48(6), 1200–1206 (2001).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
C. I. Hsieh, H. L. Chen, W. C. Chao, and F. H. Ko, “Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry,” Microelectron. Eng. 73–74, 920–926 (2004).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
Y.-J. Hung, S.-L. Lee, and Y.-T. Pan, “Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography,” J. Opt. 12(1), 015102 (2010).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
C.-H. Choi and C.-J. Kim, “Fabrication of a dense array of tall nanostructures over a large sample area with sidewall profile and tip sharpness control,” Nanotechnology 17(21), 5326–5333 (2006).
[Crossref]
D.-H. Ko, J. R. Tumbleston, L. Zhang, S. Williams, J. M. DeSimone, R. Lopez, and E. T. Samulski, “Photonic crystal geometry for organic solar cells,” Nano Lett. 9(7), 2742–2746 (2009).
[Crossref]
[PubMed]
C. I. Hsieh, H. L. Chen, W. C. Chao, and F. H. Ko, “Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry,” Microelectron. Eng. 73–74, 920–926 (2004).
[Crossref]
V. Astratov, D. Whittaker, I. Culshaw, R. Stevenson, M. Skolnick, T. Krauss, and R. De La Rue, “Photonic band-structure effects in the reflectivity of periodically patterned waveguides,” Phys. Rev. B 60(24), 16255–16258 (1999).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, P. Chen, and G. A. Somorjai, “Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10nm resolution,” J. Phys. Chem. B 107(37), 9950–9953 (2003).
[Crossref]
C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and shape-controlled fabrication of large-area periodic nanopillar arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]
Y.-F. Chang, Q.-R. Chou, J.-Y. Lin, and C.-H. Lee, “Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique,” Appl. Phys., A Mater. Sci. Process. 86(2), 193–196 (2006).
[Crossref]
Y.-J. Hung, S.-L. Lee, and Y.-T. Pan, “Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography,” J. Opt. 12(1), 015102 (2010).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
A. A. Ayón, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt, “Characterization of a time multiplexed inductively coupled plasma etcher,” J. Electrochem. Soc. 146(1), 339–349 (1999).
[Crossref]
C.-H. Lin, H.-L. Chen, W.-C. Chao, C.-I. Hsieh, and W.-H. Chang, “Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis,” Microelectron. Eng. 83(4-9), 1798–1804 (2006).
[Crossref]
Y.-F. Chang, Q.-R. Chou, J.-Y. Lin, and C.-H. Lee, “Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique,” Appl. Phys., A Mater. Sci. Process. 86(2), 193–196 (2006).
[Crossref]
D.-H. Ko, J. R. Tumbleston, L. Zhang, S. Williams, J. M. DeSimone, R. Lopez, and E. T. Samulski, “Photonic crystal geometry for organic solar cells,” Nano Lett. 9(7), 2742–2746 (2009).
[Crossref]
[PubMed]
H. Benisty, J.-M. Lourtioz, A. Chelnokov, S. Combrie, and X. Checoury, “Recent advances toward optical devices in semiconductor-based photonic crystals,” Proc. IEEE 94(5), 997–1023 (2006).
[Crossref]
X. Wang, W. Zeng, G. Lu, O. L. Russo, and E. Eisenbraun, “High aspect ratio Bosch etching of sub-0.25 μm trenches for hyperintegration applications,” J. Vac. Sci. Technol. B 25(4), 1376–1381 (2007).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett. 9(1), 279–282 (2009).
[Crossref]
K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, “Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching,” Nanotechnology 19(34), 345301 (2008).
[Crossref]
[PubMed]
K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, “Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching,” Nanotechnology 19(34), 345301 (2008).
[Crossref]
[PubMed]
Y.-J. Hung, S.-L. Lee, and Y.-T. Pan, “Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography,” J. Opt. 12(1), 015102 (2010).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
M. Galli, M. Agio, L. Andreani, M. Belotti, G. Guizzetti, F. Marabelli, M. Patrini, P. Bettotti, L. Dal Negro, Z. Gaburro, L. Pavesi, A. Lui, and P. Bellutti, “Spectroscopy of photonic bands in macroporous silicon photonic crystals,” Phys. Rev. B 65(11), 113111 (2002).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
S. H. Zaidi, D. S. Ruby, and J. M. Gee, “Characterization of random reactive ion etched-textured silicon soar cells,” IEEE Trans. Electron. Dev. 48(6), 1200–1206 (2001).
[Crossref]
Z. Fan, D. J. Ruebusch, A. A. Rathore, R. Kapadia, O. Ergen, P. W. Leu, and A. Javey, “Challenges and prospects of nanopillar-based solar cells,” Nano Res. 2(11), 829–843 (2009).
[Crossref]
X. Wang, W. Zeng, G. Lu, O. L. Russo, and E. Eisenbraun, “High aspect ratio Bosch etching of sub-0.25 μm trenches for hyperintegration applications,” J. Vac. Sci. Technol. B 25(4), 1376–1381 (2007).
[Crossref]
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