Abstract

Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wave-front (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

© 2010 Optical Society of America

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References

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  1. E. Cuche, P. Marquet, and C. Depeursinge, “Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms,” Appl. Opt. 38, 6994–7001 (1999). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-6994.
    [Crossref]
  2. S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
    [Crossref]
  3. J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
    [Crossref]
  4. T. Ikeda, G. Popescu, R. Dasari, and M. Feld, “Hilbert phase microscopy for investigating fast dynamics in transparent systems,” Opt. Lett. 30, 1165–1167 (2005).
    [Crossref] [PubMed]
  5. P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
    [Crossref] [PubMed]
  6. B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
    [Crossref]
  7. B. Rappaz, F. Charrière, C. Depeursinge, P. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33, 744–746 (2008). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-7-744.
    [Crossref] [PubMed]
  8. H. Wahba and T. Kreis, “Characterization of graded index optical fibers by digital holographic interferometry,” Appl. Opt. 48, 1573–1582 (2009). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-8-1573.
    [Crossref] [PubMed]
  9. C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
    [Crossref] [PubMed]
  10. C. Moore, “Optical reflectometry elucidates layer thicknesses,” III-Vs Review 12, 34–37 (1999).
    [Crossref]
  11. P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
    [Crossref]
  12. S. Debnath, M. Kothiyal, J. Schmit, and P. Hariharan, “Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates,” Opt. Express 14, 4662 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-11-4662.
    [Crossref] [PubMed]
  13. S. K. Debnath, J. Kothiyal, P. Mahendra, Schmit, and P. Hariharan, “Spectrally resolved phase-shifting inter-ferometry of transparent thin films: sensitivity of thickness measurements,” Appl. Opt. 45, 8636–8640 (2006). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-34-8636.
    [Crossref] [PubMed]
  14. J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
    [Crossref] [PubMed]
  15. C. Mann, L. Yu, C.-M. Lo, and M. Kim, “High-resolution quantitative phase-contrast microscopy by digital holography,” Opt. Express 13, 8693–8698 (2005). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-22-8693.
    [Crossref] [PubMed]
  16. E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin-image elimination in digital off-axis holography.” Appl. Opt. 39, 4070–4075 (2000). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4070.
    [Crossref]
  17. T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
    [Crossref] [PubMed]
  18. T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
    [Crossref] [PubMed]
  19. P. Pereyra and A. Robledo-Martinez, “On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media,” Eur. J. Phys. 30, 393–401 (2009).
    [Crossref]
  20. C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
    [Crossref]
  21. URL http://refractiveindex.info/.
  22. D. S. McPhail, “Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science,” Journal of Materials Science 41, 873–903 (2006).
    [Crossref]
  23. Y. Yamamura and M. Ishida, “Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer,” Applied Surface Science 203–204, 6268 (2003).
    [Crossref]
  24. A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
    [Crossref]
  25. Y. Wang and E. A. Irene, “Consistent refractive index parameters for ultrathin SiO2 films,” J. Vac. Sci. Technol. B 18, 279–282 (2000).
    [Crossref]

2009 (2)

H. Wahba and T. Kreis, “Characterization of graded index optical fibers by digital holographic interferometry,” Appl. Opt. 48, 1573–1582 (2009). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-8-1573.
[Crossref] [PubMed]

P. Pereyra and A. Robledo-Martinez, “On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media,” Eur. J. Phys. 30, 393–401 (2009).
[Crossref]

2008 (5)

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
[Crossref] [PubMed]

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

B. Rappaz, F. Charrière, C. Depeursinge, P. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33, 744–746 (2008). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-7-744.
[Crossref] [PubMed]

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

2007 (1)

2006 (5)

S. Debnath, M. Kothiyal, J. Schmit, and P. Hariharan, “Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates,” Opt. Express 14, 4662 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-11-4662.
[Crossref] [PubMed]

S. K. Debnath, J. Kothiyal, P. Mahendra, Schmit, and P. Hariharan, “Spectrally resolved phase-shifting inter-ferometry of transparent thin films: sensitivity of thickness measurements,” Appl. Opt. 45, 8636–8640 (2006). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-34-8636.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

D. S. McPhail, “Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science,” Journal of Materials Science 41, 873–903 (2006).
[Crossref]

2005 (3)

2004 (1)

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

2003 (1)

Y. Yamamura and M. Ishida, “Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer,” Applied Surface Science 203–204, 6268 (2003).
[Crossref]

2000 (2)

1999 (2)

1990 (1)

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

1985 (1)

C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
[Crossref]

Andrews, J. W.

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Aspert, N.

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

Barbul, A.

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

Bourquin, S.

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

Charriére, F.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

Charrière, F.

Chiarini, M.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Chlebus, R.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

Chongsawangvirod, S.

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Ciprian, D.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

Cobianu, C.

C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
[Crossref]

Colomb, T.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
[Crossref] [PubMed]

Coppola, G.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Cuche, E.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
[Crossref] [PubMed]

E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin-image elimination in digital off-axis holography.” Appl. Opt. 39, 4070–4075 (2000). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4070.
[Crossref]

E. Cuche, P. Marquet, and C. Depeursinge, “Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms,” Appl. Opt. 38, 6994–7001 (1999). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-6994.
[Crossref]

Dasari, R.

Debnath, S.

Debnath, S. K.

Depeursinge, C.

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

B. Rappaz, F. Charrière, C. Depeursinge, P. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33, 744–746 (2008). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-7-744.
[Crossref] [PubMed]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
[Crossref] [PubMed]

E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin-image elimination in digital off-axis holography.” Appl. Opt. 39, 4070–4075 (2000). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4070.
[Crossref]

E. Cuche, P. Marquet, and C. Depeursinge, “Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms,” Appl. Opt. 38, 6994–7001 (1999). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-6994.
[Crossref]

Ellul, J. P.

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Emery, Y.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
[Crossref] [PubMed]

Feld, M.

Ferraro, P.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Finizio, A.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Grilli, S.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Hariharan, P.

Hlubina, P.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

Ikeda, T.

Iodice, M.

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Irene, E. A.

Y. Wang and E. A. Irene, “Consistent refractive index parameters for ultrathin SiO2 films,” J. Vac. Sci. Technol. B 18, 279–282 (2000).
[Crossref]

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Ishida, M.

Y. Yamamura and M. Ishida, “Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer,” Applied Surface Science 203–204, 6268 (2003).
[Crossref]

Kalnitsky, A.

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Kim, M.

Korenstein, R.

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

Kothapalli, S.-R.

C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
[Crossref] [PubMed]

Kothiyal, J.

Kothiyal, M.

Kreis, T.

Kühn, J.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

Lo, C.-M.

Lunacek, J.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

Magistretti, P.

Mahendra, P.

Mann, C.

Marian, A.

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

Marquet, P.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

B. Rappaz, F. Charrière, C. Depeursinge, P. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33, 744–746 (2008). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-7-744.
[Crossref] [PubMed]

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, “Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram,” Opt. Express 14, 4300–4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300.
[Crossref] [PubMed]

P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, “Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy,” Opt. Lett. 30, 468–470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468.
[Crossref] [PubMed]

E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin-image elimination in digital off-axis holography.” Appl. Opt. 39, 4070–4075 (2000). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4070.
[Crossref]

E. Cuche, P. Marquet, and C. Depeursinge, “Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms,” Appl. Opt. 38, 6994–7001 (1999). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-6994.
[Crossref]

McPhail, D. S.

D. S. McPhail, “Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science,” Journal of Materials Science 41, 873–903 (2006).
[Crossref]

Montfort, F.

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231.
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

Moore, C.

C. Moore, “Optical reflectometry elucidates layer thicknesses,” III-Vs Review 12, 34–37 (1999).
[Crossref]

Natale, P. De

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Nicola, S. de

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

Paunescu, A.

C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
[Crossref]

Pavelescu, C.

C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
[Crossref]

Pereyra, P.

P. Pereyra and A. Robledo-Martinez, “On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media,” Eur. J. Phys. 30, 393–401 (2009).
[Crossref]

Popescu, G.

Rao, D.

C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
[Crossref] [PubMed]

Rappaz, B.

Robledo-Martinez, A.

P. Pereyra and A. Robledo-Martinez, “On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media,” Eur. J. Phys. 30, 393–401 (2009).
[Crossref]

Schmit,

Schmit, J.

Tay, S. P.

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

Wahba, H.

Wang, Y.

Y. Wang and E. A. Irene, “Consistent refractive index parameters for ultrathin SiO2 films,” J. Vac. Sci. Technol. B 18, 279–282 (2000).
[Crossref]

Yamamura, Y.

Y. Yamamura and M. Ishida, “Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer,” Applied Surface Science 203–204, 6268 (2003).
[Crossref]

Yelleswarapu, C.

C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
[Crossref] [PubMed]

Yu, L.

Appl. Opt. (4)

Applied Physics B: Lasers and Optics (1)

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, “Spectral interferometry and reflectometry used to measure thin films,” Applied Physics B: Lasers and Optics 92, 203–207 (2008).
[Crossref]

Applied Surface Science (1)

Y. Yamamura and M. Ishida, “Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer,” Applied Surface Science 203–204, 6268 (2003).
[Crossref]

Cytometry Part A (1)

B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, “Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer,” Cytometry Part A 73a, 895–903 (2008).
[Crossref]

Eur. J. Phys. (1)

P. Pereyra and A. Robledo-Martinez, “On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media,” Eur. J. Phys. 30, 393–401 (2009).
[Crossref]

III-Vs Review (1)

C. Moore, “Optical reflectometry elucidates layer thicknesses,” III-Vs Review 12, 34–37 (1999).
[Crossref]

J. Electrochem. Soc. (1)

A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, “Measurements and modeling of thin silicon dioxide films on silicon,” J. Electrochem. Soc. 1, 234–238 (1990).
[Crossref]

J. Vac. Sci. Technol. B (1)

Y. Wang and E. A. Irene, “Consistent refractive index parameters for ultrathin SiO2 films,” J. Vac. Sci. Technol. B 18, 279–282 (2000).
[Crossref]

JOSA A (1)

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy,” JOSA A 23, 3177–3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177.
[Crossref] [PubMed]

Journal of Materials Science (1)

D. S. McPhail, “Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science,” Journal of Materials Science 41, 873–903 (2006).
[Crossref]

Journal of Materials Science Letters (1)

C. Cobianu, C. Pavelescu, and A. Paunescu, “The effect of deposition conditions on the refractive index of LTCVD SiO2 films,” Journal of Materials Science Letters 4, 1419–1420 (1985).
[Crossref]

Meas. Sci. Technol. (2)

S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, “Surface topography of microstructures in lithium niobate by digital holographic microscopy,” Meas. Sci. Technol. 15, 961–968 (2004).
[Crossref]

J. Kühn, F. Charriére, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074,007–74,008 (2008).
[Crossref]

Opt. Commun. (1)

C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, “Optical Fourier techniques for medical image processing and phase contrast imaging,” Opt. Commun. 281, 1876–1888 (2008).
[Crossref] [PubMed]

Opt. Express (4)

Opt. Lett. (3)

Other (1)

URL http://refractiveindex.info/.

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