Abstract

We analyze the resonance spectrum in silicon microring resonators taking into account the end-facet reflection from a coupled waveguide, which can provide a dense set of Fabry-Perot resonances. Based on the simple configuration of a microring coupled with a waveguide, the resulting asymmetric Fano-like non-Lorentzian resonance is obtained by scattering theory and experiment. Enhanced sensing performance with steeper slope to the resonance is theoretically predicted and experimentally demonstrated for a 10-μm racetrack silicon microring resonator. A high sensitivity of ~10−8 RIU in terms of the detection limit is obtained in a 30-dB signal-to-noise ratio (SNR) system.

© 2010 OSA

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References

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  1. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
    [CrossRef]
  2. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
    [CrossRef] [PubMed]
  3. C.-Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing applications,” J. Lightwave Technol. 24(3), 1395–1402 (2006).
    [CrossRef]
  4. Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
    [CrossRef]
  5. C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
    [CrossRef]
  6. Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
    [CrossRef] [PubMed]
  7. M. Hammer and E. van Groesen, “Total multimode reflection at facets of planar high-contrast optical waveguides,” J. Lightwave Technol. 20(8), 1549–1555 (2002).
    [CrossRef]
  8. A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
    [CrossRef] [PubMed]
  9. S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett. 80(6), 908–910 (2002).
    [CrossRef]
  10. C.-Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microring with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527–1529 (2003).
    [CrossRef]
  11. V. M. N. Passaro and F. De Leonardis, “Modeling and design of a novel high-sensitivity electric field silicon-on-insulator sensor based on a whispering-gallery-mode resonator,” IEEE J. Sel. Top. Quantum Electron. 12(1), 124–133 (2006).
    [CrossRef]
  12. W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
    [CrossRef] [PubMed]
  13. J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
    [CrossRef] [PubMed]
  14. C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
    [CrossRef] [PubMed]
  15. U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
    [CrossRef]

2008

Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
[CrossRef]

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
[CrossRef] [PubMed]

2007

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

2006

V. M. N. Passaro and F. De Leonardis, “Modeling and design of a novel high-sensitivity electric field silicon-on-insulator sensor based on a whispering-gallery-mode resonator,” IEEE J. Sel. Top. Quantum Electron. 12(1), 124–133 (2006).
[CrossRef]

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

C.-Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing applications,” J. Lightwave Technol. 24(3), 1395–1402 (2006).
[CrossRef]

C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
[CrossRef]

2003

C.-Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microring with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527–1529 (2003).
[CrossRef]

2002

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett. 80(6), 908–910 (2002).
[CrossRef]

M. Hammer and E. van Groesen, “Total multimode reflection at facets of planar high-contrast optical waveguides,” J. Lightwave Technol. 20(8), 1549–1555 (2002).
[CrossRef]

1998

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

1961

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[CrossRef]

Baets, R.

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Bartolozzi, I.

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Beausoleil, R. G.

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

Bienstman, P.

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Borselli, M.

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Chao, C.-Y.

C.-Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing applications,” J. Lightwave Technol. 24(3), 1395–1402 (2006).
[CrossRef]

C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
[CrossRef]

C.-Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microring with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527–1529 (2003).
[CrossRef]

Cheben, P.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Chen, L.

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
[CrossRef] [PubMed]

Chen, Y.

Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
[CrossRef]

Chrystal, C.

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Chu, S. T.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

De Leonardis, F.

V. M. N. Passaro and F. De Leonardis, “Modeling and design of a novel high-sensitivity electric field silicon-on-insulator sensor based on a whispering-gallery-mode resonator,” IEEE J. Sel. Top. Quantum Electron. 12(1), 124–133 (2006).
[CrossRef]

De Vos, K.

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Fan, S.

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett. 80(6), 908–910 (2002).
[CrossRef]

Fano, U.

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[CrossRef]

Fattal, D.

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Fung, W.

C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
[CrossRef]

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Guo, L. J.

C.-Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing applications,” J. Lightwave Technol. 24(3), 1395–1402 (2006).
[CrossRef]

C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
[CrossRef]

C.-Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microring with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527–1529 (2003).
[CrossRef]

Hammer, M.

M. Hammer and E. van Groesen, “Total multimode reflection at facets of planar high-contrast optical waveguides,” J. Lightwave Technol. 20(8), 1549–1555 (2002).
[CrossRef]

Haus, H. A.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Huang, Y.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

Ippen, E. P.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Janz, S.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Johnson, T. J.

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Kimerling, L. C.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Lapointe, J.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Liang, W.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

Lipson, M.

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
[CrossRef] [PubMed]

Little, B. E.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Michael, C. P.

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Nitkowski, A.

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
[CrossRef] [PubMed]

Painter, O.

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Passaro, V. M. N.

V. M. N. Passaro and F. De Leonardis, “Modeling and design of a novel high-sensitivity electric field silicon-on-insulator sensor based on a whispering-gallery-mode resonator,” IEEE J. Sel. Top. Quantum Electron. 12(1), 124–133 (2006).
[CrossRef]

Poon, J. K. S.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

Post, E.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Schacht, E.

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Schmid, J. H.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Thoen, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Vahala, K. J.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

van Groesen, E.

M. Hammer and E. van Groesen, “Total multimode reflection at facets of planar high-contrast optical waveguides,” J. Lightwave Technol. 20(8), 1549–1555 (2002).
[CrossRef]

Xia, Z.

Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
[CrossRef]

Xu, D. X.

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Xu, Q.

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

Yang, L.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

Yariv, A.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

Zhou, Z.

Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
[CrossRef]

Appl. Phys. Lett.

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett. 80(6), 908–910 (2002).
[CrossRef]

C.-Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microring with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527–1529 (2003).
[CrossRef]

IEEE J. Quantum Electron.

Z. Xia, Y. Chen, and Z. Zhou, “Dual waveguide coupled microring resonator sensor based on intensity detection,” IEEE J. Quantum Electron. 44(1), 100–107 (2008).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

C.-Y. Chao, W. Fung, and L. J. Guo, “Polymer microring resonators for biochemical sensing applications,” IEEE J. Sel. Top. Quantum Electron. 12(1), 134–142 (2006).
[CrossRef]

V. M. N. Passaro and F. De Leonardis, “Modeling and design of a novel high-sensitivity electric field silicon-on-insulator sensor based on a whispering-gallery-mode resonator,” IEEE J. Sel. Top. Quantum Electron. 12(1), 124–133 (2006).
[CrossRef]

J. Lightwave Technol.

M. Hammer and E. van Groesen, “Total multimode reflection at facets of planar high-contrast optical waveguides,” J. Lightwave Technol. 20(8), 1549–1555 (2002).
[CrossRef]

C.-Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing applications,” J. Lightwave Technol. 24(3), 1395–1402 (2006).
[CrossRef]

Opt. Express

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16(16), 11930–11936 (2008).
[CrossRef] [PubMed]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 15(8), 4745–4752 (2007).
[CrossRef] [PubMed]

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Opt. Lett.

W. Liang, L. Yang, J. K. S. Poon, Y. Huang, K. J. Vahala, and A. Yariv, “Transmission characteristics of a Fabry-Perot etalon-microtoroid resonator coupled system,” Opt. Lett. 31(4), 510–512 (2006).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D. X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Photon. Technol. Lett.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” Photon. Technol. Lett. 10(4), 549–551 (1998).
[CrossRef]

Phys. Rev.

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

MR resonator with end facet reflection

Fig. 2
Fig. 2

(a) SEM image of racetrack microring. (b) Simulation results showing the coupled MR-waveguide resonance for W = 0.032 nm for α = 0.13 π and α = 0.5 π , W = 0.02 nm for α = π . (c) Experimental results showing the coupled resonance for racetrack MRs, upper two curves with 10 μm and lower curve with 6 μm coupling length, and the length of the bus waveguide is about 10 mm.

Fig. 3
Fig. 3

The coupled resonance with different end-facet reflection coefficientsr, W = 0.032 nm.

Fig. 4
Fig. 4

(a) Resonances in a Si MR resonator. The dashed line represents the pure resonance, the solid line represents the combined resonance, and the circles represent the experimentally measured spectrum. (b) The end-facet reflection in ultra high Q microring resonator.

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

T r = [ 1 i W ω ω 0 i W ω ω 0 i W ω ω 0 1 + i W ω ω 0 ] ,
T = T F P [ e i φ 0 0 e i φ ] T r [ e i φ 0 0 e i φ ] T F P ,
T F P = 1 i 1 r 2 [ 1 r r 1 ] ,
r = n e f f 1 n e f f + 1 ,
δ n = δ I S ,

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