Abstract

Hydrogenated amorphous silicon (a-Si:H) wire waveguides were fabricated by plasma-enhanced chemical vapor deposition and anisotropic dry etching. With the optimized fabrication process, the propagation losses of as low as 3.2 ± 0.2 dB/cm for the TE mode and 2.3 ± 0.1 dB/cm for the TM mode were measured for the 200 nm (height) × 500 nm (width) wire waveguides at 1550 nm using the standard cutback method. The loss becomes larger at shorter wavelength (~4.4 dB/cm for TE and ~5.0 dB/cm for TM at 1520 nm) and smaller at longer wavelength (~1.9 dB/cm for TE and ~1.4 dB/cm for TM at 1620 nm). With the waveguide width shrinking from 500 nm to 300 nm, the TM mode loss keeps almost unchanged whereas the TE mode loss increases, indicating that the predominant loss contributor is the waveguide sidewall roughness, similar to the crystalline silicon waveguides. Although the a-Si:H and the upper cladding SiO2 were both deposited at 400°C, the propagation loss of the fabricated a-Si:H wire waveguides starts to increase upon furnace annealing under atmosphere at a temperature larger than 300°C: ~13–15 dB/cm after 400°C/30 min annealing and >70 dB/cm after 500°C/30 min annealing, which can be attributed to hydrogen out-diffusion. Even higher temperature (i.e., >600°C) annealing leads to the propagation loss approaching to the polycrystalline silicon counterparts (~40-50 dB/cm) due to onset of a-Si:H solid-phase crystallization.

© 2010 OSA

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2010

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

Y. Shoji, T. Ogasawara, T. Kamei, Y. Sakakibara, S. Suda, K. Kintaka, H. Kawashima, M. Okano, T. Hasama, H. Ishikawa, and M. Mori, “Ultrafast nonlinear effects in hydrogenated amorphous silicon wire waveguide,” Opt. Express 18(6), 5668–5673 (2010).
[CrossRef] [PubMed]

2009

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

B. Redding, S. Shi, and D. W. Prather, “Electromagnetic analysis of ring-cavity-assisted amplified spontaneous emission in Er:SiO2/a-Si horizontal slot waveguides,” IEEE J. Quantum Electron. 45(7), 825–829 (2009).
[CrossRef]

K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 (2009).
[CrossRef] [PubMed]

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009).
[CrossRef] [PubMed]

K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 (2009).
[CrossRef] [PubMed]

R. Sun, J. Cheng, J. Michel, and L. Kimerling, “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process,” Opt. Lett. 34(15), 2378–2380 (2009).
[CrossRef] [PubMed]

S. Y. Zhu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides,” Opt. Express 17(23), 20891–20899 (2009).
[CrossRef] [PubMed]

2008

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

2007

2006

P. K. Lim and W. K. Tam, “Local vibrational modes and the optical absorption tail of amorphous silicon,” Int. J. Mod. Phys. B 20(25 & 27), 4261–4266 (2006).
[CrossRef]

2005

A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 (2005).
[CrossRef]

2004

2000

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Agarwal, A. M.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Baets, R.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Beals, M.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

Blasco, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Bogaerts, W.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Cardenas, J.

Chen, L.

Cheng, J.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

R. Sun, J. Cheng, J. Michel, and L. Kimerling, “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process,” Opt. Lett. 34(15), 2378–2380 (2009).
[CrossRef] [PubMed]

Daldosso, N.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

De La Rue, R. M.

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

Dong, P.

Duan, X.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Dumon, P.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Fang, Q.

Fedeli, J. M.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Feng, N. N.

Galán, J. V.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

García-Rupérez, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Garrido, B.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Gautier, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Gnan, M.

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

Gondarenko, A.

Guider, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Harke, A.

A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 (2005).
[CrossRef]

Hasama, T.

Hernández, S.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Hong, C. Y.

Ishikawa, H.

Jalali, B.

Jordana, E.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Kamei, T.

Kawashima, H.

Kimerling, L.

Kimerling, L. C.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Kintaka, K.

Koonath, P.

Krause, M.

A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 (2005).
[CrossRef]

Kwong, D. L.

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

S. Y. Zhu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides,” Opt. Express 17(23), 20891–20899 (2009).
[CrossRef] [PubMed]

Lebour, Y.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Lee, K. K.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Liao, L.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Lim, D. R.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Lim, P. K.

P. K. Lim and W. K. Tam, “Local vibrational modes and the optical absorption tail of amorphous silicon,” Int. J. Mod. Phys. B 20(25 & 27), 4261–4266 (2006).
[CrossRef]

Lipson, M.

Lo, G. Q.

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

S. Y. Zhu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides,” Opt. Express 17(23), 20891–20899 (2009).
[CrossRef] [PubMed]

Macintyre, D. S.

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

Manipatruni, S.

Martí, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Martínez, A.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

McComber, K.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

McNab, S. J.

Michel, J.

Mori, M.

Mueller, J.

A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 (2005).
[CrossRef]

Ogasawara, T.

Okano, M.

Pavesi, L.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Poitras, C. B.

Prather, D. W.

B. Redding, S. Shi, and D. W. Prather, “Electromagnetic analysis of ring-cavity-assisted amplified spontaneous emission in Er:SiO2/a-Si horizontal slot waveguides,” IEEE J. Quantum Electron. 45(7), 825–829 (2009).
[CrossRef]

Preston, K.

Redding, B.

B. Redding, S. Shi, and D. W. Prather, “Electromagnetic analysis of ring-cavity-assisted amplified spontaneous emission in Er:SiO2/a-Si horizontal slot waveguides,” IEEE J. Quantum Electron. 45(7), 825–829 (2009).
[CrossRef]

Robinson, J. T.

Sakakibara, Y.

Sanchis, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Schaekers, M.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Selvaraja, S. K.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Shi, S.

B. Redding, S. Shi, and D. W. Prather, “Electromagnetic analysis of ring-cavity-assisted amplified spontaneous emission in Er:SiO2/a-Si horizontal slot waveguides,” IEEE J. Quantum Electron. 45(7), 825–829 (2009).
[CrossRef]

Shoji, Y.

Sleeckx, E.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Sorel, M.

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

Spano, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Sparacin, D. K.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

Suda, S.

Sun, R.

Tam, W. K.

P. K. Lim and W. K. Tam, “Local vibrational modes and the optical absorption tail of amorphous silicon,” Int. J. Mod. Phys. B 20(25 & 27), 4261–4266 (2006).
[CrossRef]

Thoms, S.

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

Thourhout, D. V.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Vlasov, Y. A.

Ye, J. D.

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

Yu, M. B.

Zhu, S. Y.

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

S. Y. Zhu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides,” Opt. Express 17(23), 20891–20899 (2009).
[CrossRef] [PubMed]

Appl. Phys. Lett.

R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer,” Appl. Phys. Lett. 94(14), 141108 (2009).
[CrossRef]

Electron. Lett.

A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 (2005).
[CrossRef]

M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008).
[CrossRef]

IEEE J. Quantum Electron.

B. Redding, S. Shi, and D. W. Prather, “Electromagnetic analysis of ring-cavity-assisted amplified spontaneous emission in Er:SiO2/a-Si horizontal slot waveguides,” IEEE J. Quantum Electron. 45(7), 825–829 (2009).
[CrossRef]

IEEE Photon. Technol. Lett.

S. Y. Zhu, G. Q. Lo, J. D. Ye, and D. L. Kwong, “Influence of RTA and LTA on the optical propagation loss in polycrystalline silicon wire waveguides,” IEEE Photon. Technol. Lett. 22(7), 480–482 (2010).
[CrossRef]

Int. J. Mod. Phys. B

P. K. Lim and W. K. Tam, “Local vibrational modes and the optical absorption tail of amorphous silicon,” Int. J. Mod. Phys. B 20(25 & 27), 4261–4266 (2006).
[CrossRef]

J. Electron. Mater.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 (2000).
[CrossRef]

Nano Lett.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Opt. Commun.

S. K. Selvaraja, E. Sleeckx, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry,” Opt. Commun. 282(9), 1767–1770 (2009).
[CrossRef]

Opt. Express

Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004).
[CrossRef] [PubMed]

P. Koonath and B. Jalali, “Multilayer 3-D photonics in silicon,” Opt. Express 15(20), 12686–12691 (2007).
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R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15(26), 17967–17972 (2007).
[CrossRef] [PubMed]

K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 (2009).
[CrossRef] [PubMed]

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009).
[CrossRef] [PubMed]

K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 (2009).
[CrossRef] [PubMed]

S. Y. Zhu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides,” Opt. Express 17(23), 20891–20899 (2009).
[CrossRef] [PubMed]

Y. Shoji, T. Ogasawara, T. Kamei, Y. Sakakibara, S. Suda, K. Kintaka, H. Kawashima, M. Okano, T. Hasama, H. Ishikawa, and M. Mori, “Ultrafast nonlinear effects in hydrogenated amorphous silicon wire waveguide,” Opt. Express 18(6), 5668–5673 (2010).
[CrossRef] [PubMed]

Opt. Lett.

Other

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low loss amorphous silicon channel waveguides for integrated photonics,” 3rd IEEE Intern. Conf. on Group IV Photonics, 255–257 (2006).

T. Lipka, A. Harke, O. Horn, J. Amthor, and J. Muller, “Amorphous waveguides for high index photonic circuitry,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper OMJ2.

M. Zeman, “Advanced amorphous silicon solar cell technologies,” in Thin Film Solar Cells Fabrication, Characterization and Applications, J. Poortmans and V. Arkhipov, eds., (John Wiley & Sons, 2006).

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Figures (5)

Fig. 1
Fig. 1

The measured output light power as a function of waveguide length at 1550 nm for 3 sets of 220 nm × 500 nm waveguides fabricated by the same process, from which, the propagation losses are extracted by the linearly fitting. The chips were taken from the different locations in the wafer or different wafers fabricated with the same process, and were measured with different input light power.

Fig. 2
Fig. 2

(a) The cross-sectional TEM image of the 220 nm × 500 nm a-Si:H wire waveguide core; (b) The TE mode profile; and (c) the TM mode profile in the waveguide, calculated using a full-vector finite difference method.

Fig. 3
Fig. 3

Propagation loss of 220-nm thick wire waveguide at 1550 nm as a function of the waveguide width for a-Si:H films without and with the CMP step. Although the CMP step reduces the a-Si:H surface roughness from ~1.86 nm to ~0.61 nm, its effect to the overall propagation loss (especially the TM mode) is destructive.

Fig. 4
Fig. 4

The propagation loss of 220 nm × 500 nm a-Si:H wire waveguides (100W/400°C deposition) as a function of subsequent annealing temperature. The annealing time keeps 30 min. The initial propagation losses as well as those after the forming gas annealing (carried out before the upper cladding-SiO2 deposition) are also shown.

Fig. 5
Fig. 5

The TE and TM mode losses of 209 nm × 500 nm waveguides (S1: 80W/400°C deposition) as a function of wavelength ranging from 1520 nm to 1620 nm. The propagation losses (for un-polarized light) of 220 nm × 500 nm waveguides (S2: 100W/400°C deposition) measured from the tunable laser and from the Exfo laser source are also shown.

Tables (1)

Tables Icon

Table 1 Propagation losses at 1550 nm in 500-nm-width a-Si:H wire waveguides for four deposition conditions

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