Abstract

We demonstrate an integrated triplexer on silicon with a compact size of 1mm by 3.5mm by utilizing a selective area wafer bonding technique. The wavelength demultiplexer on the triplexer chip successfully separates signals at wavelengths of 1310nm, 1490nm and 1550nm with more than 10dB extinction ratio. The measured 3dB bandwidth of the integrated laser and photodetectors are 2GHz and 16GHz, respectively. Open eye diagrams are also measured for the integrated photodetector up to 12.5GHz PRBS inputs.

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  1. Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
    [CrossRef]
  2. W. Chen, B. Little, W. Chen, S. Chu, J. Hryniewicz, D. Gill, O. King, F. Johnson, R. Davidson, K. Donovan, and J. Gibson, “Compact, Low Cost Chip Scale Triplexer WDM Filters,” OFC PDP12 (2006).
  3. S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “SOI waveguide based planar reflective grating demultiplexer for FTTH,” Proc. SPIE 6477, 64770F 1–6 (2007)
  4. N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
    [CrossRef]
  5. T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
    [CrossRef]
  6. H.-H. Chang, A. W. Fang, M. N. Sysak, H. Park, R. Jones, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, “1310nm silicon evanescent laser,” Opt. Express 15(18), 11466–11471 (2007).
    [CrossRef] [PubMed]
  7. J. E. Bowers and C. A. Burrus, “Ultrawide-Band Long-Wavelength p-i-n Photodetectors,” J. Lightwave Technol. 5(10), 1339–1350 (1987).
    [CrossRef]
  8. K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
    [CrossRef]
  9. A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, “Integrated AlGaInAs-silicon evanescent race track laser and photodetector,” Opt. Express 15(5), 2315–2322 (2007).
    [CrossRef] [PubMed]
  10. A. Barkai, A. Liu, D. Kim, R. Cohen, N. Elek, H.-H. Chang, B. H. Malik, R. Gabay, R. Jones, M. Paniccia, and N. Izhaky, “Efficient mode converter for coupling between fiber and micrometer size silicon waveguides,” IEEE International Conference on Group IV Photonics, WC4 (2007).

2008 (2)

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
[CrossRef]

2007 (2)

2006 (1)

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

1996 (1)

K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
[CrossRef]

1987 (1)

J. E. Bowers and C. A. Burrus, “Ultrawide-Band Long-Wavelength p-i-n Photodetectors,” J. Lightwave Technol. 5(10), 1339–1350 (1987).
[CrossRef]

Asghari, M.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Bowers, J. E.

A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, “Integrated AlGaInAs-silicon evanescent race track laser and photodetector,” Opt. Express 15(5), 2315–2322 (2007).
[CrossRef] [PubMed]

H.-H. Chang, A. W. Fang, M. N. Sysak, H. Park, R. Jones, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, “1310nm silicon evanescent laser,” Opt. Express 15(18), 11466–11471 (2007).
[CrossRef] [PubMed]

K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
[CrossRef]

J. E. Bowers and C. A. Burrus, “Ultrawide-Band Long-Wavelength p-i-n Photodetectors,” J. Lightwave Technol. 5(10), 1339–1350 (1987).
[CrossRef]

Burrus, C. A.

J. E. Bowers and C. A. Burrus, “Ultrawide-Band Long-Wavelength p-i-n Photodetectors,” J. Lightwave Technol. 5(10), 1339–1350 (1987).
[CrossRef]

Chang, H.-H.

Chung, Y. C.

T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
[CrossRef]

Cohen, O.

Fang, A. W.

Feng, D.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Feng, N.-N.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Fong, J.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Giboney, K. S.

K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
[CrossRef]

Han, Y.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Hwang, W.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Jones, R.

Kim, D.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Kung, C.-C.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Kwon, Y.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Lee, D.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Lee, D. H.

T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
[CrossRef]

Lee, T. H.

T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
[CrossRef]

Liang, H.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Paniccia, M. J.

Park, C.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Park, H.

Park, S.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Park, S. O.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Park, Y.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Qian, W.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Raday, O.

Rodwell, M. J. W.

K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
[CrossRef]

Shin, J.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Sung, H.

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

Sysak, M. N.

ETRI J. (1)

Y. Han, Y. Park, S. O. Park, J. Shin, D. Kim, C. Park, S. Park, Y. Kwon, D. Lee, W. Hwang, and H. Sung, “A PLC-based optical sub-assembly of triplexer using TFF-attached WDM and PD Carriers,” ETRI J. 28(1), 103–106 (2006).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

K. S. Giboney, M. J. W. Rodwell, and J. E. Bowers, “Traveling-Wave Photodetector Design and Measurements,” IEEE J. Sel. Top. Quantum Electron. 2(3), 622–629 (1996).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization –insensitive silicon –on-insulator-base WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

T. H. Lee, D. H. Lee, and Y. C. Chung, “Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach-Zehnder interferometers,” IEEE Photon. Technol. Lett. 20(1), 33–35 (2008).
[CrossRef]

J. Lightwave Technol. (1)

J. E. Bowers and C. A. Burrus, “Ultrawide-Band Long-Wavelength p-i-n Photodetectors,” J. Lightwave Technol. 5(10), 1339–1350 (1987).
[CrossRef]

Opt. Express (2)

Other (3)

W. Chen, B. Little, W. Chen, S. Chu, J. Hryniewicz, D. Gill, O. King, F. Johnson, R. Davidson, K. Donovan, and J. Gibson, “Compact, Low Cost Chip Scale Triplexer WDM Filters,” OFC PDP12 (2006).

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “SOI waveguide based planar reflective grating demultiplexer for FTTH,” Proc. SPIE 6477, 64770F 1–6 (2007)

A. Barkai, A. Liu, D. Kim, R. Cohen, N. Elek, H.-H. Chang, B. H. Malik, R. Gabay, R. Jones, M. Paniccia, and N. Izhaky, “Efficient mode converter for coupling between fiber and micrometer size silicon waveguides,” IEEE International Conference on Group IV Photonics, WC4 (2007).

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Figures (12)

Fig. 1
Fig. 1

The architecture diagram of a FTTH network.

Fig. 2
Fig. 2

Selective area wafer bonding diagram. (a) Before assembly. (b) After assembly and applying the bonding pressure. (c) Three-dimensional bonding diagram.

Fig. 3
Fig. 3

Bonding results of three identical III-V pieces to an SOI chip. (a) Without an Al film. (b) With an Al film.

Fig. 4
Fig. 4

Selective area wafer bonding results. (a) Two laser and one photodetector III-V films integrated on an SOI triplexer chip after substrate removal. (b) Schematic. (c) Top view of an integrated triplexer.

Fig. 5
Fig. 5

MMI multiplexer for 1310nm and 1490/1550nm channels. (a) Schematic. (b) Simulated spectral response. (c) Measured spectral response.

Fig. 6
Fig. 6

MZI demultiplexer for 1490nm and 1550nm channels. (a) Schematic. (b) 2x2 3dB MMI power splitter dimension. (c) Simulated spectral response. (d) Measured spectral response.

Fig. 7
Fig. 7

1310nm ring laser. (a) Device profile. (b) Schematic. (c) SEM picture. (d) III-V epitaxial layer structure.

Fig. 8
Fig. 8

1310nm ring laser characterization. (a) L-I curve. (b) Frequency response at a current of 430mA.

Fig. 9
Fig. 9

PIN photodetector. (a) Device profile. (b) Epitaxial layer structure.

Fig. 10
Fig. 10

PIN photodetector 3dB bandwidth simulation for different intrinsic layer thicknesses.

Fig. 11
Fig. 11

High speed measurement results of PIN photodetectors on hybrid silicon platform. (a) Frequency response. (b) Eye diagrams at 2.4, 5, 10, and 12.5Gb/s. (c) Bit error rate curves.

Fig. 12
Fig. 12

Photodetector eye diagram measurement setup.

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