Abstract

Control of photonic crystal resonances in conjunction with large spectral shifting is critical in achieving reconfigurable photonic crystal devices. We propose a simple approach to achieve nano-mechanical control of photonic crystal resonances within a compact integrated on-chip approach. Three different tip designs utilizing an in-plane nano-mechanical tuning approach are shown to achieve reversible and low-loss resonance control on a one-dimensional photonic crystal nanocavity. The proposed nano-mechanical approach driven by a sub-micron micro-electromechanical system integrated on low loss suspended feeding nanowire waveguide, achieved relatively large resonance spectral shifts of up to 18 nm at a driving voltage of 25 V. Such designs may potentially be used as tunable optical filters or switches.

© 2010 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2010 (6)

2009 (2)

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam cavities,” Appl. Phys. Lett. 95(3), 031102–031104 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

2008 (6)

A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De La Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express 16(16), 12084–12089 (2008).
[CrossRef]

K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[CrossRef] [PubMed]

A. Gondarenko and M. Lipson, “Low modal volume dipole-like dielectric slab resonator,” Opt. Express 16(22), 17689–17694 (2008).
[CrossRef] [PubMed]

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[CrossRef]

M. Notomi, T. Tanabe, A. Shinya, E. Kuramochi, and H. Taniyama, “On-chip all-optical switching and memory by silicon photonic crystal nanocavities,” Adv. Opt. Technol. 2008, 568936 (2008).

2007 (2)

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[CrossRef]

2006 (6)

K. Umemori, Y. Kanamori, and K. Hane, “Photonic crystal waveguide switch with a microelectromechanical actuator,” Appl. Phys. Lett. 89(2), 021102 (2006).
[CrossRef]

I. Märki, M. Salt, and H. P. Herzig, “Tuning the resonance of a photonic crystal microcavity with an AFM probe,” Opt. Express 14(7), 2969–2978 (2006).
[CrossRef] [PubMed]

W. C. L. Hopman, K. O. van der Werf, A. J. Hollink, W. Bogaerts, V. Subramaniam, and R. M. de Ridder, “Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance,” Opt. Express 14(19), 8745–8752 (2006).
[CrossRef] [PubMed]

S. Tomljenovic-Hanic, C. M. de Sterke, and M. J. Steel, “Design of high-Q cavities in photonic crystal slab heterostructures by air-holes infiltration,” Opt. Express 14(25), 12451–12456 (2006).
[CrossRef] [PubMed]

M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[CrossRef]

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, “Tuning photonic nanocavities by atomic force microscope nano-oxidation,” Appl. Phys. Lett. 89(4), 041118 (2006).
[CrossRef]

2005 (6)

M. Schmidt, M. Eich, U. Huebner, and R. Boucher, “Electro-optically tunable photonic crystals,” Appl. Phys. Lett. 87(12), 121110 (2005).
[CrossRef]

A. F. Koenderink, M. Kafesaki, B. C. Buchler, and V. Sandoghdar, “Controlling the resonance of a photonic crystal microcavity by a near-field probe,” Phys. Rev. Lett. 95(15), 153904 (2005).
[CrossRef] [PubMed]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005).
[CrossRef] [PubMed]

Y. A. Vlasov, M. O’Boyle, H. F. Hamann, and S. J. McNab, “Active control of slow light on a chip with photonic crystal waveguides,” Nature 438(7064), 65–69 (2005).
[CrossRef] [PubMed]

B.-S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

2004 (2)

H. M. H. Chong and R. M. De La Rue, “Tuning of photonic crystal waveguide microcavity by thermooptic effect,” IEEE Photon. Technol. Lett. 16(6), 1528–1530 (2004).
[CrossRef]

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, “Low loss intersection of Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 2), 646–647 (2004).
[CrossRef]

2003 (5)

G. Zhou and P. Dowd, “Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators,” J. Micromech. Microeng. 13(2), 178–183 (2003).
[CrossRef]

M. Bao, Y. Heng, S. Yuancheng, and W. Yuelin, “Squeeze-film air damping of thick hole-plate,” Sens. Actuators A Phys. 108(1-3), 212–217 (2003).
[CrossRef]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[CrossRef] [PubMed]

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[CrossRef] [PubMed]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

2002 (2)

J. Vuckovic, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E 65, 016601–016608 (2002).

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

2001 (1)

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[CrossRef]

1997 (1)

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

1993 (1)

M. Andrews, I. Harris, and G. Turner, “Comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A Phys. 36(1), 79–87 (1993).
[CrossRef]

1987 (1)

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

Ahn, B. H.

Akahane, Y.

B.-S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Andrews, M.

M. Andrews, I. Harris, and G. Turner, “Comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A Phys. 36(1), 79–87 (1993).
[CrossRef]

Asano, T.

B.-S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Atature, M.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

Atatüre, M.

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005).
[CrossRef] [PubMed]

Baba, T.

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, “Low loss intersection of Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 2), 646–647 (2004).
[CrossRef]

Badolato, A.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, “Tuning photonic nanocavities by atomic force microscope nano-oxidation,” Appl. Phys. Lett. 89(4), 041118 (2006).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005).
[CrossRef] [PubMed]

Balet, L.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Bao, M.

M. Bao, Y. Heng, S. Yuancheng, and W. Yuelin, “Squeeze-film air damping of thick hole-plate,” Sens. Actuators A Phys. 108(1-3), 212–217 (2003).
[CrossRef]

Bogaerts, W.

Boucher, R.

M. Schmidt, M. Eich, U. Huebner, and R. Boucher, “Electro-optically tunable photonic crystals,” Appl. Phys. Lett. 87(12), 121110 (2005).
[CrossRef]

Buchler, B. C.

A. F. Koenderink, M. Kafesaki, B. C. Buchler, and V. Sandoghdar, “Controlling the resonance of a photonic crystal microcavity by a near-field probe,” Phys. Rev. Lett. 95(15), 153904 (2005).
[CrossRef] [PubMed]

Bulgan, E.

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[CrossRef]

Chong, H. M. H.

H. M. H. Chong and R. M. De La Rue, “Tuning of photonic crystal waveguide microcavity by thermooptic effect,” IEEE Photon. Technol. Lett. 16(6), 1528–1530 (2004).
[CrossRef]

Chutinan, A.

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[CrossRef]

Clerc, P. A.

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

Cluzel, B.

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

Colocci, M.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Dandliker, R.

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

de Fornel, F.

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

De La Rue, R. M.

A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De La Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express 16(16), 12084–12089 (2008).
[CrossRef]

H. M. H. Chong and R. M. De La Rue, “Tuning of photonic crystal waveguide microcavity by thermooptic effect,” IEEE Photon. Technol. Lett. 16(6), 1528–1530 (2004).
[CrossRef]

de Ridder, R. M.

de Rooij, N.

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

de Sterke, C. M.

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A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005).
[CrossRef] [PubMed]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

Peyrade, D.

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

Picard, E.

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

Quan, Q.

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

Riboli, F.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Ryou, J.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, and M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Salt, M.

Sandoghdar, V.

A. F. Koenderink, M. Kafesaki, B. C. Buchler, and V. Sandoghdar, “Controlling the resonance of a photonic crystal microcavity by a near-field probe,” Phys. Rev. Lett. 95(15), 153904 (2005).
[CrossRef] [PubMed]

Sarmiento, T.

Scherer, A.

J. Vuckovic, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E 65, 016601–016608 (2002).

Schmidt, M.

M. Schmidt, M. Eich, U. Huebner, and R. Boucher, “Electro-optically tunable photonic crystals,” Appl. Phys. Lett. 87(12), 121110 (2005).
[CrossRef]

Shambat, G.

Shinya, A.

M. Notomi, T. Tanabe, A. Shinya, E. Kuramochi, and H. Taniyama, “On-chip all-optical switching and memory by silicon photonic crystal nanocavities,” Adv. Opt. Technol. 2008, 568936 (2008).

Smith, H. I.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Song, B. S.

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Song, B.-S.

B.-S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Song, J. H.

Sorel, M.

Steel, M. J.

Steinmeyer, G.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Subramaniam, V.

Takahashi, K.

Tamboli, A.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

Tanabe, T.

M. Notomi, T. Tanabe, A. Shinya, E. Kuramochi, and H. Taniyama, “On-chip all-optical switching and memory by silicon photonic crystal nanocavities,” Adv. Opt. Technol. 2008, 568936 (2008).

Taniyama, H.

M. Notomi, T. Tanabe, A. Shinya, E. Kuramochi, and H. Taniyama, “On-chip all-optical switching and memory by silicon photonic crystal nanocavities,” Adv. Opt. Technol. 2008, 568936 (2008).

Thoen, E. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Tomljenovic-Hanic, S.

Toshiyoshi, H.

M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[CrossRef]

Turner, G.

M. Andrews, I. Harris, and G. Turner, “Comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A Phys. 36(1), 79–87 (1993).
[CrossRef]

Umemori, K.

K. Umemori, Y. Kanamori, and K. Hane, “Photonic crystal waveguide switch with a microelectromechanical actuator,” Appl. Phys. Lett. 89(2), 021102 (2006).
[CrossRef]

Vahala, K. J.

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[CrossRef] [PubMed]

van der Werf, K. O.

Velha, P.

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

Vignolini, S.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Villeneuve, P. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Vinattieri, A.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Vlasov, Y.

Vlasov, Y. A.

Y. A. Vlasov, M. O’Boyle, H. F. Hamann, and S. J. McNab, “Active control of slow light on a chip with photonic crystal waveguides,” Nature 438(7064), 65–69 (2005).
[CrossRef] [PubMed]

Vuckovic, J.

Y. Gong, B. Ellis, G. Shambat, T. Sarmiento, J. S. Harris, and J. Vuckovic, “Nanobeam photonic crystal cavity quantum dot laser,” Opt. Express 18(9), 8781–8789 (2010).
[CrossRef] [PubMed]

J. Vuckovic, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E 65, 016601–016608 (2002).

Weible, K. J.

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

Wiersma, D. S.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Wu, M.

M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[CrossRef]

Wu, M. C.

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[CrossRef]

Yablonovitch, E.

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

Yao, J.

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[CrossRef]

Yuancheng, S.

M. Bao, Y. Heng, S. Yuancheng, and W. Yuelin, “Squeeze-film air damping of thick hole-plate,” Sens. Actuators A Phys. 108(1-3), 212–217 (2003).
[CrossRef]

Yuelin, W.

M. Bao, Y. Heng, S. Yuancheng, and W. Yuelin, “Squeeze-film air damping of thick hole-plate,” Sens. Actuators A Phys. 108(1-3), 212–217 (2003).
[CrossRef]

Zhang, Y.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, and M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Zhou, G.

G. Zhou and P. Dowd, “Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators,” J. Micromech. Microeng. 13(2), 178–183 (2003).
[CrossRef]

Zinoni, C.

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Adv. Opt. Technol. (1)

M. Notomi, T. Tanabe, A. Shinya, E. Kuramochi, and H. Taniyama, “On-chip all-optical switching and memory by silicon photonic crystal nanocavities,” Adv. Opt. Technol. 2008, 568936 (2008).

Appl. Phys. Lett. (10)

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, “Tuning photonic crystal nanocavity modes by wet chemical digital etching,” Appl. Phys. Lett. 87(2), 021108 (2005).
[CrossRef]

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, “Tuning photonic nanocavities by atomic force microscope nano-oxidation,” Appl. Phys. Lett. 89(4), 041118 (2006).
[CrossRef]

M. Schmidt, M. Eich, U. Huebner, and R. Boucher, “Electro-optically tunable photonic crystals,” Appl. Phys. Lett. 87(12), 121110 (2005).
[CrossRef]

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, and M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[CrossRef]

K. Umemori, Y. Kanamori, and K. Hane, “Photonic crystal waveguide switch with a microelectromechanical actuator,” Appl. Phys. Lett. 89(2), 021102 (2006).
[CrossRef]

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “Coupled photonic crystal nanobeam cavities,” Appl. Phys. Lett. 95(3), 031102–031104 (2009).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[CrossRef]

H. M. H. Chong and R. M. De La Rue, “Tuning of photonic crystal waveguide microcavity by thermooptic effect,” IEEE Photon. Technol. Lett. 16(6), 1528–1530 (2004).
[CrossRef]

J. Micromech. Microeng. (1)

G. Zhou and P. Dowd, “Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators,” J. Micromech. Microeng. 13(2), 178–183 (2003).
[CrossRef]

Jpn. J. Appl. Phys. (1)

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, “Low loss intersection of Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 2), 646–647 (2004).
[CrossRef]

Nat. Mater. (1)

B.-S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-high-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[CrossRef]

Nature (4)

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[CrossRef] [PubMed]

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Y. A. Vlasov, M. O’Boyle, H. F. Hamann, and S. J. McNab, “Active control of slow light on a chip with photonic crystal waveguides,” Nature 438(7064), 65–69 (2005).
[CrossRef] [PubMed]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Opt. Express (11)

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[CrossRef] [PubMed]

I. Märki, M. Salt, and H. P. Herzig, “Tuning the resonance of a photonic crystal microcavity with an AFM probe,” Opt. Express 14(7), 2969–2978 (2006).
[CrossRef] [PubMed]

W. C. L. Hopman, K. O. van der Werf, A. J. Hollink, W. Bogaerts, V. Subramaniam, and R. M. de Ridder, “Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance,” Opt. Express 14(19), 8745–8752 (2006).
[CrossRef] [PubMed]

S. Tomljenovic-Hanic, C. M. de Sterke, and M. J. Steel, “Design of high-Q cavities in photonic crystal slab heterostructures by air-holes infiltration,” Opt. Express 14(25), 12451–12456 (2006).
[CrossRef] [PubMed]

A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De La Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express 16(16), 12084–12089 (2008).
[CrossRef]

K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[CrossRef] [PubMed]

A. Gondarenko and M. Lipson, “Low modal volume dipole-like dielectric slab resonator,” Opt. Express 16(22), 17689–17694 (2008).
[CrossRef] [PubMed]

B. H. Ahn, J. H. Kang, M. K. Kim, J. H. Song, B. Min, K. S. Kim, and Y. H. Lee, “One-dimensional parabolic-beam photonic crystal laser,” Opt. Express 18(6), 5654–5660 (2010).
[CrossRef] [PubMed]

T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[CrossRef] [PubMed]

I. W. Frank, P. B. Deotare, M. W. McCutcheon, and M. Loncar, “Programmable photonic crystal nanobeam cavities,” Opt. Express 18(8), 8705–8712 (2010).
[CrossRef] [PubMed]

Y. Gong, B. Ellis, G. Shambat, T. Sarmiento, J. S. Harris, and J. Vuckovic, “Nanobeam photonic crystal cavity quantum dot laser,” Opt. Express 18(9), 8781–8789 (2010).
[CrossRef] [PubMed]

Phys. Rev. B (2)

L. Lalouat, B. Cluzel, P. Velha, E. Picard, D. Peyrade, J. P. Hugonin, P. Lalanne, E. Hadji, and F. de Fornel, “Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity,” Phys. Rev. B 76(4), 041102 (2007).
[CrossRef]

F. Intonti, S. Vignolini, F. Riboli, A. Vinattieri, D. S. Wiersma, M. Colocci, L. Balet, C. Monat, C. Zinoni, L. H. Li, R. Houdre, M. Francardi, A. Gerardino, A. Fiore, and M. Gurioli, “Spectral tuning and near-field imaging of photonic crystal microcavities,” Phys. Rev. B 78(4), 041401 (2008).
[CrossRef]

Phys. Rev. E (1)

J. Vuckovic, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E 65, 016601–016608 (2002).

Phys. Rev. Lett. (2)

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

A. F. Koenderink, M. Kafesaki, B. C. Buchler, and V. Sandoghdar, “Controlling the resonance of a photonic crystal microcavity by a near-field probe,” Phys. Rev. Lett. 95(15), 153904 (2005).
[CrossRef] [PubMed]

Science (1)

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005).
[CrossRef] [PubMed]

Sens. Actuators A Phys. (2)

M. Andrews, I. Harris, and G. Turner, “Comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A Phys. 36(1), 79–87 (1993).
[CrossRef]

M. Bao, Y. Heng, S. Yuancheng, and W. Yuelin, “Squeeze-film air damping of thick hole-plate,” Sens. Actuators A Phys. 108(1-3), 212–217 (2003).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

SEM image of the nano-mechanically variable photonic devices. (a) Illustration of the proposed retractable nano-mechanical actuating mechanism with integrated low loss nanowire waveguides. Lighter color structures are driven with voltage where the darker structures are grounded. (b) coupled-nanocavity nano-tip (c) rectangular nano-tip (d) meniscus-like perturbing nano-tip. Inset in (c) & (d) is an enlarged schematic of the tip design for clarity.

Fig. 2
Fig. 2

SEM characterization of the static displacements as a function of applied voltage of the retractable nano-mechanical actuator. Inset shows the various designs at 70 nm gap (a) coupled-nanocavities, (b) meniscus-like nano-tip, (c) rectangular nano-tip. SEM demonstration of a (d) stiction incurred nano-mechanical structure and (e) retracted mechanical structure

Fig. 3
Fig. 3

(a) Experimental and simulated resonance shift of perturbing tips as a function of offset distance & driving voltage. E-fields plots of both nano-tip designs are shown in the inset. Transmission spectra of the resonance shift with static electrical actuations for (b) rectangular nano-tip (c) meniscus-like nano-tip. Solid dots denotes the experimental results, solid lines denotes the fitted lorentzian peak. (d) Experimental Q of menicus-like tip and rectangular tip as a function of offset distance

Fig. 4
Fig. 4

(a) Experimental and simulated resonance shift of coupled nanocavities as a function of offset distance & driving voltage. E-field plots of even and odd modes are shown as inset (b) Transmission spectra of the resonance shift with static electrical actuations (c) Experimental Q of odd and even modes as a function of offset distance

Fig. 5
Fig. 5

Transient characteristics of the nano-mechanical modulated PhC resonator with a square-wave driven signal under atmospheric conditions of (a) meniscus-like nano-tip, (b) coupled-nanocavity. Inset in (a) shows the chosen half height location of resonance peak which would encounter transmission increase when actuating voltage is reduced. Resonance red-shifts as actuating voltage is increased and blue shifts with reducing actuating voltage.

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