Abstract

We designed, fabricated and demonstrated a solar-blind deep-UV pass filter, that has a measured optical performance of a 27% transmission peak at 290 nm, a pass-band width of 100 nm (from 250 to 350 nm), and a 20dB rejection ratio between deep-UV wavelength and visible wavelength. The filter consists of an aluminum nano-grid, which was made by coating 20 nm Al on a SiO2 square grid with 190 nm pitch, 30 nm linewidth and 250 nm depth. The performances agree with a rigorous coupled wave analysis. The wavelength for the peak transmission and the pass-bandwidth can be tuned through adjusting the metal nano-grid dimensions. The filter was fabricated by nanoimprint lithography, hence is large area and low cost. Combining with Si photodetectors, the filter offers simple yet effective and low cost solar-blind deep-UV detection at either a single device or large-area complex integrated imaging array level.

©2010 Optical Society of America

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References

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  1. T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
    [Crossref]
  2. E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
    [Crossref]
  3. A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).
  4. J. T. Clarke, W. R. Skinner, M. B. Vincent, T. Irgang, V. Suratkal, H. Grassl, and J. T. Trauger, “Laboratory studies of alkali metal filter deposition, ultraviolet transmission, and visible blocking,” Appl. Opt. 38(9), 1803–1813 (1999).
    [Crossref]
  5. G. Chen, Z. Y. Xu, H. P. Ding, and B. M. Sadler, “Path loss modeling and performance trade-off study for short-range non-line-of-sight ultraviolet communications,” Opt. Express 17(5), 3929–3940 (2009).
    [Crossref] [PubMed]
  6. Z. Y. Xu and B. M. Sadler, “Ultraviolet communications: Potential and state-of-the-art,” IEEE Commun. Mag. 46(5), 67–73 (2008).
    [Crossref]
  7. M. Razeghi and R. McClintock, “A review of III-nitride research at the Center for Quantum Devices,” J. Cryst. Growth 311(10), 3067–3074 (2009).
    [Crossref]
  8. R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
    [Crossref]
  9. F. Moscatelli, “Silicon carbide for UV, alpha, beta and X-ray detectors: Results and perspectives,” Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 583(1), 157–161 (2007).
  10. J. Xing, E. Guo, K. J. Jin, H. B. Lu, J. Wen, and G. Z. Yang, “Solar-blind deep-ultraviolet photodetectors based on an LaAlO(3) single crystal,” Opt. Lett. 34(11), 1675–1677 (2009).
    [Crossref] [PubMed]
  11. Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
    [Crossref] [PubMed]
  12. R. W. Wood, “Remarkable optical properties of the alkali metals,” Phys. Rev. 44(5), 353–360 (1933).
    [Crossref]
  13. R. G. Safin, I. S. Gainutdinov, R. S. Sabirov, and M. K. Azamatov, “Solar-blind filter for the ultraviolet region,” J. Opt. Technol. 74(3), 208–210 (2007).
    [Crossref]
  14. F. G. Haibach, A. E. Greer, M. V. Schiza, R. J. Priore, O. O. Soyemi, and M. L. Myrick, “On-line reoptimization of filter designs for multivariate optical elements,” Appl. Opt. 42(10), 1833–1838 (2003).
    [Crossref] [PubMed]
  15. T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
    [Crossref]
  16. K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).
  17. H. S. Lee, Y. T. Yoon, S. S. Lee, S. H. Kim, and K. D. Lee, “Color filter based on a subwavelength patterned metal grating,” Opt. Express 15(23), 15457–15463 (2007).
    [Crossref] [PubMed]
  18. Y. Ekinci, H. H. Solak, and C. David, “Extraordinary optical transmission in the ultraviolet region through aluminum hole arrays,” Opt. Lett. 32(2), 172–174 (2007).
    [Crossref]
  19. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
    [Crossref]
  20. Y. J. Lee and S.-W. Kang, “Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma,” Electrochem. Solid-State Lett. 5(10), C91–C93 (2002).
    [Crossref]
  21. K. C. Johnson, “GD-Calc,” (2006)
  22. Handbook of optical constants of solids, edited by E. D. Palik, Academic Press, (1985)

2009 (4)

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

M. Razeghi and R. McClintock, “A review of III-nitride research at the Center for Quantum Devices,” J. Cryst. Growth 311(10), 3067–3074 (2009).
[Crossref]

G. Chen, Z. Y. Xu, H. P. Ding, and B. M. Sadler, “Path loss modeling and performance trade-off study for short-range non-line-of-sight ultraviolet communications,” Opt. Express 17(5), 3929–3940 (2009).
[Crossref] [PubMed]

J. Xing, E. Guo, K. J. Jin, H. B. Lu, J. Wen, and G. Z. Yang, “Solar-blind deep-ultraviolet photodetectors based on an LaAlO(3) single crystal,” Opt. Lett. 34(11), 1675–1677 (2009).
[Crossref] [PubMed]

2008 (3)

Z. Y. Xu and B. M. Sadler, “Ultraviolet communications: Potential and state-of-the-art,” IEEE Commun. Mag. 46(5), 67–73 (2008).
[Crossref]

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

2007 (3)

2006 (1)

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

2005 (1)

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

2004 (2)

T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
[Crossref]

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

2003 (1)

2002 (1)

Y. J. Lee and S.-W. Kang, “Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma,” Electrochem. Solid-State Lett. 5(10), C91–C93 (2002).
[Crossref]

1999 (1)

1996 (1)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[Crossref]

1933 (1)

R. W. Wood, “Remarkable optical properties of the alkali metals,” Phys. Rev. 44(5), 353–360 (1933).
[Crossref]

Akazawa, M.

T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
[Crossref]

Altukhov, A. A.

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

Arai, N.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Azamatov, M. K.

Aziz, A. A.

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

Blakesley, J. C.

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Chen, G.

Chou, S. Y.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[Crossref]

Clarke, J. T.

David, C.

Ding, H. P.

Ekinci, Y.

Feshchenko, V. S.

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

Fujita, S.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Gainutdinov, I. S.

Gorokhov, E. V.

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

Grassl, H.

Greenham, N. C.

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Greer, A. E.

Guo, E.

Haibach, F. G.

Hassan, Z.

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

Hino, H.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Hudeish, A. Y.

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

Irgang, T.

Jefimovs, K.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Jin, K. J.

Jin, Y. Z.

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Kaipiainen, M.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Kang, S.-W.

Y. J. Lee and S.-W. Kang, “Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma,” Electrochem. Solid-State Lett. 5(10), C91–C93 (2002).
[Crossref]

Kettunen, V.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Kim, S. H.

Krauss, P. R.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[Crossref]

Kuittinen, M.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Kung, P.

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Lee, H. S.

Lee, K. D.

Lee, S. S.

Lee, Y. J.

Y. J. Lee and S.-W. Kang, “Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma,” Electrochem. Solid-State Lett. 5(10), C91–C93 (2002).
[Crossref]

Lu, H. B.

Magunov, A. N.

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

Mayes, K.

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

McClintock, R.

M. Razeghi and R. McClintock, “A review of III-nitride research at the Center for Quantum Devices,” J. Cryst. Growth 311(10), 3067–3074 (2009).
[Crossref]

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Myrick, M. L.

Nenonen, S.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Okuno, T.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Oshima, T.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Priore, R. J.

Razeghi, M.

M. Razeghi and R. McClintock, “A review of III-nitride research at the Center for Quantum Devices,” J. Cryst. Growth 311(10), 3067–3074 (2009).
[Crossref]

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Renstrom, P. J.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[Crossref]

Sabirov, R. S.

Sadler, B. M.

Safin, R. G.

Sano, E.

T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
[Crossref]

Schiza, M. V.

Shiell, D.

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Skinner, W. R.

Solak, H. H.

Soyemi, O. O.

Sun, B. Q.

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Suratkal, V.

Suzuki, N.

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

Tan, C. K.

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

Tanaka, T.

T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
[Crossref]

Trauger, J. T.

Turunen, J.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Vahimaa, P.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Vallius, T.

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

Vincent, M. B.

Wang, J. P.

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Wen, J.

Wood, R. W.

R. W. Wood, “Remarkable optical properties of the alkali metals,” Phys. Rev. 44(5), 353–360 (1933).
[Crossref]

Xing, J.

Xu, Z. Y.

Yang, G. Z.

Yasan, A.

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Yoon, Y. T.

Appl. Opt. (2)

Appl. Phys. Lett. (1)

R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi, “320x256 solar-blind focal plane arrays based on AlxGa1-xN,” Appl. Phys. Lett. 86(1), 011117 (2005).
[Crossref]

Electrochem. Solid-State Lett. (1)

Y. J. Lee and S.-W. Kang, “Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma,” Electrochem. Solid-State Lett. 5(10), C91–C93 (2002).
[Crossref]

Functional Materials and Devices (1)

A. Y. Hudeish, C. K. Tan, A. A. Aziz, and Z. Hassan, “A chemical sensor based on AlGaN,” Functional Materials and Devices 517, 33–36 (2006).

IEEE Commun. Mag. (1)

Z. Y. Xu and B. M. Sadler, “Ultraviolet communications: Potential and state-of-the-art,” IEEE Commun. Mag. 46(5), 67–73 (2008).
[Crossref]

Instrum. Exp. Tech. (1)

E. V. Gorokhov, A. N. Magunov, V. S. Feshchenko, and A. A. Altukhov, “Solar-blind UV flame detector based on natural diamond,” Instrum. Exp. Tech. 51(2), 280–283 (2008).
[Crossref]

J. Cryst. Growth (1)

M. Razeghi and R. McClintock, “A review of III-nitride research at the Center for Quantum Devices,” J. Cryst. Growth 311(10), 3067–3074 (2009).
[Crossref]

J. Mod. Opt. (1)

K. Jefimovs, T. Vallius, V. Kettunen, M. Kuittinen, J. Turunen, P. Vahimaa, M. Kaipiainen, and S. Nenonen, “Inductive grid filters for rejection of infrared radiation,” J. Mod. Opt. 51(11), 1651–1661 (2004).

J. Opt. Technol. (1)

Jpn. J. Appl. Phys. (2)

T. Oshima, T. Okuno, N. Arai, N. Suzuki, H. Hino, and S. Fujita, “Flame Detection by a beta-Ga2O3-Based Sensor,” Jpn. J. Appl. Phys. 48(1), 011605 (2009).
[Crossref]

T. Tanaka, M. Akazawa, and E. Sano, “Terahertz wave filter from cascaded thin-metal-film meshes with a triangular array of hexagonal holes,” Jpn. J. Appl. Phys. 43(Part 2), L287–L289 (2004).
[Crossref]

Nano Lett. (1)

Y. Z. Jin, J. P. Wang, B. Q. Sun, J. C. Blakesley, and N. C. Greenham, “Solution-processed ultraviolet photodetectors based on colloidal ZnO nanoparticles,” Nano Lett. 8(6), 1649–1653 (2008).
[Crossref] [PubMed]

Opt. Express (2)

Opt. Lett. (2)

Phys. Rev. (1)

R. W. Wood, “Remarkable optical properties of the alkali metals,” Phys. Rev. 44(5), 353–360 (1933).
[Crossref]

Science (1)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[Crossref]

Other (3)

K. C. Johnson, “GD-Calc,” (2006)

Handbook of optical constants of solids, edited by E. D. Palik, Academic Press, (1985)

F. Moscatelli, “Silicon carbide for UV, alpha, beta and X-ray detectors: Results and perspectives,” Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 583(1), 157–161 (2007).

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Figures (6)

Fig. 1
Fig. 1 Schematic of the metal nano-grid filter consisting of a dielectric grid array of periodic square holes on a UV transparent fused silica substrate and a thin aluminum layer coated over the dielectric grid.

Download Full Size | PPT Slide | PDF

Fig. 2
Fig. 2 Fabrication flowchart: (a) a silicon mold carrying narrow grating patterns with 190 nm pitch, 30 nm grating width and 120 nm depth; (b) pressing the mold into imprint resist spun on top of a fused silica wafer; (c) grating pattern transferred into imprint resist after separating the mold; (d) normal deposition of chromium after etching away residual resist in grating trenches; (e) 1st set of chromium grating etching mask after lift-off; (f) repeating (b)-(e) to get 2nd set of chromium grating etching mask which is perpendicular to the 1st set of chromium mask; (g) etching into fused silica substrate by CF4/H2 based RIE using the chromium grating in (f) as an etching mask; (h) oblique deposition of aluminum on the sidewalls of the fused silica grid core to form aluminum grid filter.

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Fig. 3
Fig. 3 SEM pictures of (a) SiO2 grid core on fused silica substrate; (b) titled and (c) cross-sectional view of final device after coating 20 nm thick aluminum on the SiO2 grid core.

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Fig. 4
Fig. 4 (a) Measured transmission spectrum of a fabricated aluminum grid filter under unpolarized normal incidence (linear scale); (b) Comparison of measurement result and numerical simulation using actual structure dimensions. (logarithmic scale)

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Fig. 5
Fig. 5 (a) Measured transmission spectrum at various angles of incidence; (b) Measured peak transmission versus incident angle.

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Fig. 6
Fig. 6 (a) Simulated transmission efficiency versus aluminum grid width with the period fixed at 190nm and depth fixed at 300 nm; (b) Simulated transmission efficiency versus aluminum grid depth with the period fixed at 190nm and aluminum grid width fixed at 44 nm; (c) Pushing cut-off wavelength down to 280 nm by reducing the grid period to 140 nm and shrinking aluminum thickness to 20 nm.

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