Abstract

For the first time, in situ the hole shape evolution during ultrashort pulse laser drilling in semiconductor material is imaged. The trans-illumination of the sample at a wavelength of 1.06 µm is projected onto a standard CCD camera during the ablation, providing an image of the contour of the ablated structure perpendicular to the irradiation for drilling. This demonstrated technique enables a direct, high resolution investigation of the temporal evolution of the drilling process in the depth of the material without complex sample preparation or post processing.

© 2010 OSA

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  1. D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
    [CrossRef]
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    [CrossRef]
  3. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Optical ablation by high-power short-pulse lasers,” J. Opt. Soc. Am. B 13(2), 459–468 (1996).
    [CrossRef]
  4. C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
    [CrossRef]
  5. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
    [CrossRef]
  6. B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
    [CrossRef]
  7. P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
    [CrossRef]
  8. D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in micromachining of metals with short and ultrashort laser pulses,” Proc. SPIE 5339, 49–63 (2004).
    [CrossRef]
  9. M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
    [CrossRef]
  10. J. König, S. Nolte, and A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses,” Opt. Express 13(26), 10597–10607 (2005).
    [CrossRef] [PubMed]
  11. S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
    [CrossRef]
  12. S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
    [CrossRef]
  13. S. Amoruso, R. Bruzzese, C. Pagano, and X. Wang, “Features of plasma plume evolution and material removal efficiency during femtosecond laser ablation of nickel in high vacuum,” Appl. Phys., A Mater. Sci. Process. 89(4), 1017–1024 (2007).
    [CrossRef]
  14. N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, “Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum,” Phys. Rev. Lett. 99(16), 167602 (2007).
    [CrossRef] [PubMed]
  15. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
    [CrossRef]
  16. N. N. Nedialkov, S. E. Imamova, and P. A. Atanasov, “Ablation of metals by ultrashort laser pulses,” J. Phys. D Appl. Phys. 37(4), 638–643 (2004).
    [CrossRef]
  17. N. N. Nedialkov and P. A. Atanasov, “Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4411–4415 (2006).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  22. A. E. Wynne and B. C. Stuart, “Rate dependence of short-pulse laser ablation of metals in air and vacuum,” Appl. Phys., A Mater. Sci. Process. 76(3), 373–378 (2003).
    [CrossRef]
  23. D. Bouilly, D. Perez, and L. J. Lewis, “Damage in materials following ablation by ultrashort laser pulses: A molecular-dynamics study,” Phys. Rev. B 76(18), 184119 (2007).
    [CrossRef]
  24. S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
    [CrossRef]
  25. T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
    [CrossRef]
  26. S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
    [CrossRef]
  27. A. Ancona, F. Röser, K. Rademaker, J. Limpert, S. Nolte, and A. Tünnermann, “High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system,” Opt. Express 16(12), 8958–8968 (2008).
    [CrossRef] [PubMed]
  28. S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
    [CrossRef]
  29. A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
    [CrossRef]
  30. A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
    [CrossRef]
  31. J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
    [CrossRef]
  32. P. J. L. Webster, M. S. Muller, and J. M. Fraser, “High speed in situ depth profiling of ultrafast micromachining,” Opt. Express 15(23), 14967–14972 (2007).
    [CrossRef] [PubMed]
  33. P. J. L. Webster, J. X. Z. Yu, B. Y. C. Leung, M. D. Anderson, V. X. D. Yang, and J. M. Fraser, “In situ 24 kHz coherent imaging of morphology change in laser percussion drilling,” Opt. Lett. 35(5), 646–648 (2010).
    [CrossRef] [PubMed]
  34. M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
    [CrossRef]
  35. E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
    [CrossRef]

2010 (1)

2008 (5)

A. Ancona, F. Röser, K. Rademaker, J. Limpert, S. Nolte, and A. Tünnermann, “High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system,” Opt. Express 16(12), 8958–8968 (2008).
[CrossRef] [PubMed]

A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
[CrossRef]

M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
[CrossRef]

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
[CrossRef]

2007 (6)

P. J. L. Webster, M. S. Muller, and J. M. Fraser, “High speed in situ depth profiling of ultrafast micromachining,” Opt. Express 15(23), 14967–14972 (2007).
[CrossRef] [PubMed]

S. Amoruso, R. Bruzzese, C. Pagano, and X. Wang, “Features of plasma plume evolution and material removal efficiency during femtosecond laser ablation of nickel in high vacuum,” Appl. Phys., A Mater. Sci. Process. 89(4), 1017–1024 (2007).
[CrossRef]

N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, “Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum,” Phys. Rev. Lett. 99(16), 167602 (2007).
[CrossRef] [PubMed]

N. N. Nedialkov, P. A. Atanasov, S. Amoruso, R. Bruzzese, and X. Wang, “Laser ablation of metals by femtosecond pulses: Theoretical and experimental study,” Appl. Surf. Sci. 253(19), 7761–7766 (2007).
[CrossRef]

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

D. Bouilly, D. Perez, and L. J. Lewis, “Damage in materials following ablation by ultrashort laser pulses: A molecular-dynamics study,” Phys. Rev. B 76(18), 184119 (2007).
[CrossRef]

2006 (2)

N. N. Nedialkov and P. A. Atanasov, “Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4411–4415 (2006).
[CrossRef]

P. Lorazo, L. J. Lewis, and M. Meunier, “Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation,” Phys. Rev. B 73(13), 134108 (2006).
[CrossRef]

2005 (3)

S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
[CrossRef]

J. König, S. Nolte, and A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses,” Opt. Express 13(26), 10597–10607 (2005).
[CrossRef] [PubMed]

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

2004 (4)

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in micromachining of metals with short and ultrashort laser pulses,” Proc. SPIE 5339, 49–63 (2004).
[CrossRef]

S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
[CrossRef]

N. N. Nedialkov, S. E. Imamova, and P. A. Atanasov, “Ablation of metals by ultrashort laser pulses,” J. Phys. D Appl. Phys. 37(4), 638–643 (2004).
[CrossRef]

2003 (2)

A. E. Wynne and B. C. Stuart, “Rate dependence of short-pulse laser ablation of metals in air and vacuum,” Appl. Phys., A Mater. Sci. Process. 76(3), 373–378 (2003).
[CrossRef]

E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
[CrossRef]

2002 (1)

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

2001 (2)

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

1999 (2)

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

1997 (1)

1996 (4)

A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Optical ablation by high-power short-pulse lasers,” J. Opt. Soc. Am. B 13(2), 459–468 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[CrossRef]

1995 (1)

S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys., A Mater. Sci. Process. 61(1), 33–37 (1995).
[CrossRef]

1994 (1)

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Amoruso, S.

S. Amoruso, R. Bruzzese, C. Pagano, and X. Wang, “Features of plasma plume evolution and material removal efficiency during femtosecond laser ablation of nickel in high vacuum,” Appl. Phys., A Mater. Sci. Process. 89(4), 1017–1024 (2007).
[CrossRef]

N. N. Nedialkov, P. A. Atanasov, S. Amoruso, R. Bruzzese, and X. Wang, “Laser ablation of metals by femtosecond pulses: Theoretical and experimental study,” Appl. Surf. Sci. 253(19), 7761–7766 (2007).
[CrossRef]

S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
[CrossRef]

S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
[CrossRef]

Ancona, A.

Anderson, M. D.

Atanasov, P. A.

N. N. Nedialkov, P. A. Atanasov, S. Amoruso, R. Bruzzese, and X. Wang, “Laser ablation of metals by femtosecond pulses: Theoretical and experimental study,” Appl. Surf. Sci. 253(19), 7761–7766 (2007).
[CrossRef]

N. N. Nedialkov and P. A. Atanasov, “Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4411–4415 (2006).
[CrossRef]

N. N. Nedialkov, S. E. Imamova, and P. A. Atanasov, “Ablation of metals by ultrashort laser pulses,” J. Phys. D Appl. Phys. 37(4), 638–643 (2004).
[CrossRef]

Ausanio, G.

S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
[CrossRef]

Axente, E.

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

Bouilly, D.

D. Bouilly, D. Perez, and L. J. Lewis, “Damage in materials following ablation by ultrashort laser pulses: A molecular-dynamics study,” Phys. Rev. B 76(18), 184119 (2007).
[CrossRef]

Brajdic, M.

M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
[CrossRef]

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Breitling, D.

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in micromachining of metals with short and ultrashort laser pulses,” Proc. SPIE 5339, 49–63 (2004).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Bruneau, S.

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

Bruzzese, R.

S. Amoruso, R. Bruzzese, C. Pagano, and X. Wang, “Features of plasma plume evolution and material removal efficiency during femtosecond laser ablation of nickel in high vacuum,” Appl. Phys., A Mater. Sci. Process. 89(4), 1017–1024 (2007).
[CrossRef]

N. N. Nedialkov, P. A. Atanasov, S. Amoruso, R. Bruzzese, and X. Wang, “Laser ablation of metals by femtosecond pulses: Theoretical and experimental study,” Appl. Surf. Sci. 253(19), 7761–7766 (2007).
[CrossRef]

S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
[CrossRef]

Chichkov, B. N.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Collmer, S.

M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
[CrossRef]

Coyne, E.

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
[CrossRef]

Dausinger, F.

M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
[CrossRef]

A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
[CrossRef]

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in micromachining of metals with short and ultrashort laser pulses,” Proc. SPIE 5339, 49–63 (2004).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Demchuk, A.

S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys., A Mater. Sci. Process. 61(1), 33–37 (1995).
[CrossRef]

Dietrich, J.

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Du, D.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Dumitru, G.

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

Emsermann, A.

A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
[CrossRef]

Fallnich, C.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

Feit, M. D.

Föhl, C.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

Franz, U.

A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
[CrossRef]

Fraser, J. M.

Garnov, S. V.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Glynn, T. J.

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

Gobert, O.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Graf, T.

A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
[CrossRef]

Herman, S.

Hermann, J.

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

Hermans, M.

M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
[CrossRef]

Horn, A.

M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
[CrossRef]

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Imamova, S. E.

N. N. Nedialkov, S. E. Imamova, and P. A. Atanasov, “Ablation of metals by ultrashort laser pulses,” J. Phys. D Appl. Phys. 37(4), 638–643 (2004).
[CrossRef]

Itina, T. E.

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

Jacobs, H.

Kamlage, G.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

Kaspar, J.

A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
[CrossRef]

Kelbassa, I.

M. Brajdic, M. Hermans, A. Horn, and I. Kelbassa, “In situ measurement of plasma and shock wave properties inside laser-drilled metal holes,” Meas. Sci. Technol. 19(10), 105703 (2008).
[CrossRef]

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Khishchenko, K. V.

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

Klimentov, S. M.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

König, J.

Kononenko, T. V.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Konov, V. I.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Korn, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Kraus, M.

M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
[CrossRef]

Leung, B. Y. C.

Levashov, P. R.

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

Lewis, L. J.

D. Bouilly, D. Perez, and L. J. Lewis, “Damage in materials following ablation by ultrashort laser pulses: A molecular-dynamics study,” Phys. Rev. B 76(18), 184119 (2007).
[CrossRef]

P. Lorazo, L. J. Lewis, and M. Meunier, “Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation,” Phys. Rev. B 73(13), 134108 (2006).
[CrossRef]

Limpert, J.

Liu, X.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Lorazo, P.

P. Lorazo, L. J. Lewis, and M. Meunier, “Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation,” Phys. Rev. B 73(13), 134108 (2006).
[CrossRef]

Luft, A.

A. Luft, U. Franz, A. Emsermann, and J. Kaspar, “A study of thermal and mechanical effects on materials induced by pulsed laser drilling,” Appl. Phys., A Mater. Sci. Process. 63(2), 93–101 (1996).
[CrossRef]

Magee, J.

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
[CrossRef]

Mannion, P.

E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
[CrossRef]

Mannion, P. T.

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

Meunier, M.

P. Lorazo, L. J. Lewis, and M. Meunier, “Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation,” Phys. Rev. B 73(13), 134108 (2006).
[CrossRef]

Meynadier, P.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Michalowski, A.

A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
[CrossRef]

Momma, C.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Mourou, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Muller, M. S.

Nedialkov, N. N.

N. N. Nedialkov, P. A. Atanasov, S. Amoruso, R. Bruzzese, and X. Wang, “Laser ablation of metals by femtosecond pulses: Theoretical and experimental study,” Appl. Surf. Sci. 253(19), 7761–7766 (2007).
[CrossRef]

N. N. Nedialkov and P. A. Atanasov, “Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4411–4415 (2006).
[CrossRef]

N. N. Nedialkov, S. E. Imamova, and P. A. Atanasov, “Ablation of metals by ultrashort laser pulses,” J. Phys. D Appl. Phys. 37(4), 638–643 (2004).
[CrossRef]

Nolte, S.

A. Ancona, F. Röser, K. Rademaker, J. Limpert, S. Nolte, and A. Tünnermann, “High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system,” Opt. Express 16(12), 8958–8968 (2008).
[CrossRef] [PubMed]

J. König, S. Nolte, and A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses,” Opt. Express 13(26), 10597–10607 (2005).
[CrossRef] [PubMed]

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

O’Connor, G.

E. Coyne, J. Magee, P. Mannion, and G. O’Connor, “A study of Femtosecond Laser interaction with Wafer Grade Silicon,” Proc. SPIE 4876, 487–499 (2003).
[CrossRef]

O’Connor, G. M.

P. T. Mannion, J. Magee, E. Coyne, G. M. O’Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Appl. Surf. Sci. 233(1-4), 275–287 (2004).
[CrossRef]

Ostendorf, A.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

Pagano, C.

S. Amoruso, R. Bruzzese, C. Pagano, and X. Wang, “Features of plasma plume evolution and material removal efficiency during femtosecond laser ablation of nickel in high vacuum,” Appl. Phys., A Mater. Sci. Process. 89(4), 1017–1024 (2007).
[CrossRef]

Perdrix, M.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Perez, D.

D. Bouilly, D. Perez, and L. J. Lewis, “Damage in materials following ablation by ultrashort laser pulses: A molecular-dynamics study,” Phys. Rev. B 76(18), 184119 (2007).
[CrossRef]

Perry, M. D.

Petite, G.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Pivovarov, P. A.

T. V. Kononenko, S. M. Klimentov, V. I. Konov, P. A. Pivovarov, S. V. Garnov, F. Dausinger, and D. Breitling, “Propagation of short-pulsed laser radiation and stages of ablative deep channel formation,” Proc. SPIE 4274, 248–257 (2001).
[CrossRef]

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Poprawe, R.

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Povarnitsyn, M. E.

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

Preuss, S.

S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys., A Mater. Sci. Process. 61(1), 33–37 (1995).
[CrossRef]

Prokhorov, A. M.

S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, “The role of plasma in ablation of materials by ultrashort laser pulses,” Quantum Electron. 31(5), 378–382 (2001).
[CrossRef]

Rademaker, K.

Radtke, J.

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

Röser, F.

Rubenchik, A. M.

Ruf, A.

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in micromachining of metals with short and ultrashort laser pulses,” Proc. SPIE 5339, 49–63 (2004).
[CrossRef]

T. V. Kononenko, S. M. Klimentov, S. V. Garnov, V. I. Konov, D. Breitling, C. Föhl, A. Ruf, J. Radtke, and F. Dausinger, “Hole formation process in laser deep drilling with short and ultrashort pulses,” Proc. SPIE 4426, 108–112 (2002).
[CrossRef]

Sallé, B.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Schou, J.

S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
[CrossRef]

Semerok, A.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, “Femtosecond and picosecond lasermicroablation: ablation efficiency and laser microplasma expansion,” Appl. Phys., A Mater. Sci. Process. 69(7Suppl.), 381–383 (1999).
[CrossRef]

Sentis, M.

M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, “Material decomposition mechanisms in femtosecond laser interactions with metals,” Phys. Rev. B 75(23), 235414 (2007).
[CrossRef]

S. Bruneau, J. Hermann, G. Dumitru, M. Sentis, and E. Axente, “Ultra-fast laser ablation applied to deep-drilling of metals,” Appl. Surf. Sci. 248(1-4), 299–303 (2005).
[CrossRef]

Shore, B. W.

Sommer, S.

M. Kraus, S. Collmer, S. Sommer, and F. Dausinger, “Microdrilling in Steel with Frequency-doubled Ultrashort Pulsed Laser Radiation,” J. Laser. Micro.Nanoengin. 3, 129–134 (2008).
[CrossRef]

Squier, J.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[CrossRef]

Stuart, B. C.

A. E. Wynne and B. C. Stuart, “Rate dependence of short-pulse laser ablation of metals in air and vacuum,” Appl. Phys., A Mater. Sci. Process. 76(3), 373–378 (2003).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Optical ablation by high-power short-pulse lasers,” J. Opt. Soc. Am. B 13(2), 459–468 (1996).
[CrossRef]

Stuke, M.

S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys., A Mater. Sci. Process. 61(1), 33–37 (1995).
[CrossRef]

Toftmann, B.

S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
[CrossRef]

Tünnermann, A.

Velotta, R.

S. Amoruso, B. Toftmann, J. Schou, R. Velotta, and X. Wang, “Diagnostics of laser ablated plasma plumes,” Thin Solid Films 453–454, 562–572 (2004).
[CrossRef]

Vitiello, M.

S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, and X. Wang, “Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum,” Phys. Rev. B 71(3), 033406 (2005).
[CrossRef]

von Alvensleben, F.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process. 68(5), 563–567 (1999).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Walter, D.

A. Michalowski, D. Walter, F. Dausinger, and T. Graf, “Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses,” J. Laser. Micro.Nanoengin. 3, 211–215 (2008).
[CrossRef]

Walther, K.

J. Dietrich, M. Brajdic, K. Walther, A. Horn, I. Kelbassa, and R. Poprawe, “Investigation of increased drilling speed by online high-speed photography,” Opt. Lasers Eng. 46(10), 705–710 (2008).
[CrossRef]

Wang, M.

N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, “Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum,” Phys. Rev. Lett. 99(16), 167602 (2007).
[CrossRef] [PubMed]

Wang, X.

N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, “Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum,” Phys. Rev. Lett. 99(16), 167602 (2007).
[CrossRef] [PubMed]

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Supplementary Material (1)

» Media 1: MOV (3220 KB)     

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Figures (2)

Fig. 1
Fig. 1

(Color online) Principle experimental setup for trans-illumination imaging of the laser drilling process in the silicon sample.

Fig. 2
Fig. 2

(Color online) Trans-illumination images of the drilling process. The number of pulses applied is given below each picture. Arrows indicate the occurrences of bulges, change in drilling direction and the formation of multiple hole ends. Video online, with linear timescale (Media1).

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