Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 – 4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

© 2010 OSA

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  1. C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
    [CrossRef]
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    [CrossRef] [PubMed]
  4. M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
    [CrossRef]
  5. M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
    [CrossRef] [PubMed]
  6. V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  8. D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
    [CrossRef]
  9. D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
    [CrossRef]
  10. D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  16. T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
    [CrossRef] [PubMed]
  17. M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
    [CrossRef] [PubMed]
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    [CrossRef]
  20. S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

2010 (2)

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

2009 (3)

2008 (7)

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

2007 (1)

2006 (2)

2003 (1)

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

2002 (1)

2001 (1)

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

1971 (1)

Aggarwal, I. D.

Ankiewicz, A.

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

Barthelemy, A.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Bellec, Y.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Benson, T. M.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Bulla, B.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Bulla, D.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

Bulla, D. A.

Charters, R.

Cheng, X.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Choi, D.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

Choi, D. Y.

Choi, D.-Y.

Clausen, A. T.

Couderc, V.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Duk-Yong Choi, D. A. P.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Eggleton, B. J.

Furniss, D.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Galili, M.

Guimond, Y.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Han, T.

Harbold, J. M.

Ilday, F. O.

Jeppesen, P.

Kohoutek, T.

Lamont, M. R. E.

Lamont, S.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Lian, Z. G.

Libin Fu, E.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Loni, A.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Luan, F.

Lucas, J.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Luther-Davies,

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Luther-Davies, B.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Madden,

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Madden, S.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Madden, S. J.

Madsen, C. K.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Magi, M. R. E.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Moss, D. J.

Mulvad, H. C.

Nguyen, V. Q.

Orava, J.

Oxenløwe, L. K.

Pan, W.

Pan, W. J.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Park, H.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Pelusi, M.

Pelusi, M. D.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

Prasad, A.

Quémard, C.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Rode, A.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Rode, A. V.

Rowe, H.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Sanghera, J. S.

Schift, H.

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

Seddon, A. B.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Sewell, P.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Shaw, L. B.

Smektala, F.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Smith, A.

Solmaz, M.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Ta’eed, V. G.

Tien, P. K.

Wagner, T.

Wang, R.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Wang, R. P.

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

Wise, F. W.

Xu, J.

Zha, C.

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Zha, C. J.

Zhang, D.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Zhang, M.

Zhang, X. H.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Zhang, Y.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Appl. Opt. (1)

IEEE J. Sel. Top. Quantum Electron. (1)

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

IEEE Trans. NanoTechnol. (1)

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

J. Appl. Phys. (2)

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

J. Non-Cryst. Solids (1)

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

J. Phys. Chem. Solids (1)

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

J. Vac. Sci. Technol. B (2)

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Microw. Opt. Technol. Lett. (1)

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Opt. Express (6)

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

Opt. Lett. (2)

Other (1)

S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

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Figures (7)

Fig. 1
Fig. 1

Schematic diagram of the imprinting chambers.

Fig. 2
Fig. 2

SEM images of imprinted rib waveguide in As24Se38S38 Chalcogenide glass.

Fig. 3
Fig. 3

Cross sectional optical microscope view of the finished imprinted rib waveguide.

Fig. 4
Fig. 4

Insertion loss of 3.3μm wide waveguides measured using cutback method.

Fig. 5
Fig. 5

Measured Optical propagation loss spectrum of 3.3μm wide waveguide.

Fig. 6
Fig. 6

Measured wavelength dependence of film propagation loss.

Fig. 7
Fig. 7

Optical micrograph of 1.7μm wide 0.85μm high imprinted As2S3 waveguide.

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