Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 – 4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

© 2010 OSA

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  1. C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
    [CrossRef]
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    [CrossRef] [PubMed]
  4. M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
    [CrossRef]
  5. M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
    [CrossRef] [PubMed]
  6. V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  8. D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
    [CrossRef]
  9. D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
    [CrossRef]
  10. D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
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    [CrossRef]
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    [CrossRef]
  14. M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
    [CrossRef]
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    [CrossRef] [PubMed]
  16. T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
    [CrossRef] [PubMed]
  17. M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
    [CrossRef] [PubMed]
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    [CrossRef]
  20. S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

2010

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

2009

2008

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

2007

2006

2003

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

2002

2001

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

1971

Aggarwal, I. D.

Ankiewicz, A.

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

Barthelemy, A.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Bellec, Y.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Benson, T. M.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Bulla, B.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Bulla, D.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

Bulla, D. A.

Charters, R.

Cheng, X.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Choi, D.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

Choi, D. Y.

Choi, D.-Y.

Clausen, A. T.

Couderc, V.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Duk-Yong Choi, D. A. P.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Eggleton, B. J.

Furniss, D.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Galili, M.

Guimond, Y.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Han, T.

Harbold, J. M.

Ilday, F. O.

Jeppesen, P.

Kohoutek, T.

Lamont, M. R. E.

Lamont, S.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Lian, Z. G.

Libin Fu, E.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Loni, A.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Luan, F.

Lucas, J.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Luther-Davies,

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Luther-Davies, B.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

Madden,

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Madden, S.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

Madden, S. J.

Madsen, C. K.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Magi, M. R. E.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

Moss, D. J.

Mulvad, H. C.

Nguyen, V. Q.

Orava, J.

Oxenløwe, L. K.

Pan, W.

Pan, W. J.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Park, H.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Pelusi, M.

Pelusi, M. D.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

Prasad, A.

Quémard, C.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Rode, A.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Rode, A. V.

Rowe, H.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Sanghera, J. S.

Schift, H.

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

Seddon, A. B.

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Sewell, P.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Shaw, L. B.

Smektala, F.

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

Smith, A.

Solmaz, M.

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

Ta’eed, V. G.

Tien, P. K.

Wagner, T.

Wang, R.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Wang, R. P.

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

Wise, F. W.

Xu, J.

Zha, C.

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

Zha, C. J.

Zhang, D.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Zhang, M.

Zhang, X. H.

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

Zhang, Y.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Appl. Opt.

IEEE J. Sel. Top. Quantum Electron.

M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008).
[CrossRef]

IEEE Photon. Technol. Lett.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010).
[CrossRef]

IEEE Trans. NanoTechnol.

D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008).
[CrossRef]

J. Appl. Phys.

D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010).
[CrossRef]

R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006).
[CrossRef]

J. Non-Cryst. Solids

X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003).
[CrossRef]

J. Phys. Chem. Solids

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001).
[CrossRef]

J. Vac. Sci. Technol. B

M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008).
[CrossRef]

H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008).
[CrossRef]

Microw. Opt. Technol. Lett.

W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008).
[CrossRef]

Opt. Express

V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006).
[CrossRef] [PubMed]

S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007).
[CrossRef] [PubMed]

A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008).
[CrossRef] [PubMed]

M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008).
[CrossRef] [PubMed]

M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009).
[CrossRef] [PubMed]

T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009).
[CrossRef] [PubMed]

Opt. Lett.

Other

S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

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Figures (7)

Fig. 1
Fig. 1

Schematic diagram of the imprinting chambers.

Fig. 2
Fig. 2

SEM images of imprinted rib waveguide in As24Se38S38 Chalcogenide glass.

Fig. 3
Fig. 3

Cross sectional optical microscope view of the finished imprinted rib waveguide.

Fig. 4
Fig. 4

Insertion loss of 3.3μm wide waveguides measured using cutback method.

Fig. 5
Fig. 5

Measured Optical propagation loss spectrum of 3.3μm wide waveguide.

Fig. 6
Fig. 6

Measured wavelength dependence of film propagation loss.

Fig. 7
Fig. 7

Optical micrograph of 1.7μm wide 0.85μm high imprinted As2S3 waveguide.

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