Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

M. A. Coughlan, M. Plewicki, and R. J. Levis, “Parametric spatio-temporal control of focusing laser pulses,” Opt. Express 17(18), 15808–15820 (2009).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

D. Oron, E. Tal, and Y. Silberberg, “Scanningless depth-resolved microscopy,” Opt. Express 13(5), 1468–1476 (2005).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

M. A. Coughlan, M. Plewicki, and R. J. Levis, “Parametric spatio-temporal control of focusing laser pulses,” Opt. Express 17(18), 15808–15820 (2009).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. A. Coughlan, M. Plewicki, and R. J. Levis, “Parametric spatio-temporal control of focusing laser pulses,” Opt. Express 17(18), 15808–15820 (2009).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

D. Oron, E. Tal, and Y. Silberberg, “Scanningless depth-resolved microscopy,” Opt. Express 13(5), 1468–1476 (2005).
[Crossref] [PubMed]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

M. A. Coughlan, M. Plewicki, and R. J. Levis, “Parametric spatio-temporal control of focusing laser pulses,” Opt. Express 17(18), 15808–15820 (2009).
[Crossref] [PubMed]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
[Crossref]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

D. Oron, E. Tal, and Y. Silberberg, “Scanningless depth-resolved microscopy,” Opt. Express 13(5), 1468–1476 (2005).
[Crossref] [PubMed]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
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F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

D. Oron, E. Tal, and Y. Silberberg, “Scanningless depth-resolved microscopy,” Opt. Express 13(5), 1468–1476 (2005).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

D. E. Hertzog, X. Michalet, M. Jäger, X. Kong, J. G. Santiago, S. Weiss, and O. Bakajin, “Femtomole mixer for microsecond kinetic studies of protein folding,” Anal. Chem. 76(24), 7169–7178 (2004).
[Crossref] [PubMed]

J.-C. M. Diels, J. J. Fontaine, I. C. McMichael, and F. Simoni, “Control and measurement of ultrashort pulse shapes (in amplitude and phase) with femtosecond accuracy,” Appl. Opt. 24(9), 1270–1282 (1985).
[Crossref] [PubMed]

G. Veshapidze, M. L. Trachy, M. H. Shah, and B. D. DePaola, “Reducing the uncertainty in laser beam size measurement with a scanning edge method,” Appl. Opt. 45(32), 8197–8199 (2006).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

P. S. Tsai, P. Blinder, B. J. Migliori, J. Neev, Y. Jin, J. A. Squier, and D. Kleinfeld, “Plasma-mediated ablation: an optical tool for submicrometer surgery on neuronal and vascular systems,” Curr. Opin. Biotechnol. 20(1), 90–99 (2009).
[Crossref] [PubMed]

J. Neev, W. A. Carrasco, W. B. Armstrong, L. B. Da Silva, M. D. Feit, D. L. Matthews, M. D. Perry, A. M. Rubenchik, and B. C. Stuart, “Applications of ultrashort pulse lasers for hard tissue surgery,” IEEE J. Sel. Top. Quantum Electron. 2, 790–800 (1996).
[Crossref]

J. F. Edd, D. D. Di Carlo, K. J. Humphry, S. Köster, D. Irimia, D. A. Weitz, and M. Toner, “Controlled encapsulation of single-cells into monodisperse picolitre drops,” Lab Chip 8(8), 1262–1264 (2008).
[Crossref] [PubMed]

P. S. Tsai, B. Friedman, A. I. Ifarraguerri, B. D. Thompson, V. Lev-Ram, C. B. Schaffer, Q. Xiong, R. Y. Tsien, J. A. Squier, and D. Kleinfeld, “All-optical histology using ultrashort laser pulses,” Neuron 39(1), 27–41 (2003).
[Crossref] [PubMed]

D. Schafer, E. A. Gibson, E. A. Salim, A. E. Palmer, R. Jimenez, and J. Squier, “Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding,” Opt. Express 17(8), 6068–6073 (2009).
[Crossref] [PubMed]

M. A. Coughlan, M. Plewicki, and R. J. Levis, “Parametric spatio-temporal control of focusing laser pulses,” Opt. Express 17(18), 15808–15820 (2009).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

D. Oron, E. Tal, and Y. Silberberg, “Scanningless depth-resolved microscopy,” Opt. Express 13(5), 1468–1476 (2005).
[Crossref] [PubMed]

G. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, “Simultaneous spatial and temporal focusing of femtosecond pulses,” Opt. Express 13(6), 2153–2159 (2005).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref]

F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses,” Opt. Lett. 35(7), 1106–1108 (2010).
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A. P. Joglekar, H. H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, “Optics at critical intensity: applications to nanomorphing,” Proc. Natl. Acad. Sci. U.S.A. 101(16), 5856–5861 (2004).
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M. Castaño-Álvarez, D. F. Pozo Ayuso, M. García Granda, M. T. Fernández-Abedul, J. Rodríguez García, and A. Costa-García, “Critical points in the fabrication of microfluidic devices on glass substrates,” Sens. Actuators B Chem. 130(1), 436–448 (2008).
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D. Vitek, D. Adams, A. Johnson, D. Kleinfeld, S. Backus, C. Durfee, and J. Squier, “Spatially chirped pulses for high aspect ratio micromachining by femtosecond laser ablation,” in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA T echnical Digest Series (CD) (Optical Society of America, 2010), paper CMBB5.