Abstract

We demonstrate an eight-channel reconfigurable optical filter on a silicon chip. It consists of cascaded microring resonators and integrated compact heaters. With an embedded Mach-Zehnder (MZ) arm coupling to a microring resonator, the important parameters of a filter such as center frequency, extinction ratio and bandwidth can be controlled simultaneously for purposes of filtering, routing and spectral shaping. Thus our device could potentially be useful in dense wavelength division multiplexing (DWDM) and radio frequency arbitrary waveform generation (RFAWG). Multichannel filter response was successfully tuned to match the International Telecommunication Unit (ITU) grid with 50, 100 and 200GHz in channel spacing. Programmable channel selectivity was demonstrated by heating the MZ arm, and continuous adjustment of through-port extinction ratio from 0dB to 27dB was achieved. Meanwhile, the 3dB bandwidth in the drop port changed from 0.12nm to 0.16nm. The device had an ultra-compact footprint (1200μm×100μm) excluding the metal leads and contact pads, making it suitable for large scale integration.

© 2010 OSA

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2009

2008

2007

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple-channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
[CrossRef] [PubMed]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[CrossRef] [PubMed]

E. J. Klein, P. Urban, G. Sengo, L. T. Hilderink, M. Hoekman, R. Pellens, P. van Dijk, and A. Driessen, “Densely integrated microring resonator based photonic devices for use in access networks,” Opt. Express 15(16), 10346–10355 (2007).
[CrossRef] [PubMed]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Modeling and measurement of losses in silicon-on-insulator resonators and bends,” Opt. Express 15(17), 10553–10561 (2007).
[CrossRef] [PubMed]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express 15(22), 14467–14475 (2007).
[CrossRef] [PubMed]

M. P. Earnshaw, L. Buhl, M. A. Cappuzzo, E. Chen, L. Gomez, and A. Wong-Foy, “A Colorless Wavelength Add or Drop Module With Ultralow Power Consumption,” J. Lightwave Technol. 25(10), 3082–3088 (2007).
[CrossRef]

L. Chen, N. Sherwood-Droz, and M. Lipson, “Compact bandwidth-tunable microring resonators,” Opt. Lett. 32(22), 3361–3363 (2007).
[CrossRef] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

2006

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

H. A. Haus, M. A. Popovic, and M. R. Watts, “Broadband hitless bypass switch for integrated photonic circuits,” IEEE Photon. Technol. Lett. 18(10), 1137–1139 (2006).
[CrossRef]

M. Popovic, C. Manolatou, and M. Watts, “Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters,” Opt. Express 14(3), 1208–1222 (2006).
[CrossRef] [PubMed]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef] [PubMed]

2005

2003

2002

Almeida, V. R.

Baets, R.

Barwicz, T.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

Bergman, K.

B. G. Lee, A. Biberman, D. Po, M. Lipson, and K. Bergman, “All-Optical Comb Switch for Multiwavelength Message Routing in Silicon Photonic Networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

Biberman, A.

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

B. G. Lee, A. Biberman, D. Po, M. Lipson, and K. Bergman, “All-Optical Comb Switch for Multiwavelength Message Routing in Silicon Photonic Networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Buhl, L.

Cappuzzo, M. A.

Chen, E.

Chen, L.

Chen, P.

Chu, S. T.

Derose, G. A.

Driessen, A.

Earnshaw, M. P.

Fan, S.

Geng, M.

Gomez, L.

Green, W. M. J.

Hashimoto, T.

Hatakeyama, Y.

Haus, H. A.

H. A. Haus, M. A. Popovic, and M. R. Watts, “Broadband hitless bypass switch for integrated photonic circuits,” IEEE Photon. Technol. Lett. 18(10), 1137–1139 (2006).
[CrossRef]

Hilderink, L. T.

Hirooka, T.

Hoekman, M.

Holzwarth, C. W.

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Ippen, E. P.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

Jia, L.

Joannopoulos, J. D.

Kartner, F. X.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Khan, M. H.

Klein, E. J.

Kokubun, Y.

Lee, B. G.

B. G. Lee, A. Biberman, D. Po, M. Lipson, and K. Bergman, “All-Optical Comb Switch for Multiwavelength Message Routing in Silicon Photonic Networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

Lee, R. K.

Liew, H. L.

Lipson, M.

Liu, Y.

Manolatou, C.

Nakazawa, M.

Okamoto, K.

Panepucci, R. R.

Pellens, R.

Po, D.

B. G. Lee, A. Biberman, D. Po, M. Lipson, and K. Bergman, “All-Optical Comb Switch for Multiwavelength Message Routing in Silicon Photonic Networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Popovic, M.

Popovic, M. A.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

H. A. Haus, M. A. Popovic, and M. R. Watts, “Broadband hitless bypass switch for integrated photonic circuits,” IEEE Photon. Technol. Lett. 18(10), 1137–1139 (2006).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Prabhu, A. M.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Qi, M.

Rakich, P. T.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

Saida, T.

Sakamaki, Y.

Scheerlinck, S.

Scherer, A.

Schmidt, B.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Schrauwen, J.

Sekaric, L.

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Sengo, G.

Shakya, J.

Shen, H.

Sherwood-Droz, N.

Smith, H. I.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

Socci, L.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

Suh, W.

Suzuki, S.

Taillaert, D.

Takahashi, H.

Urban, P.

Van, V.

van Dijk, P.

Van Laere, F.

Van Thourhout, D.

Vlasov, Y.

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Wang, H.

Wang, T.

Watts, M.

Watts, M. R.

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched microring resonators,” J. Lightwave Technol. 24(5), 2207–2218 (2006).
[CrossRef]

H. A. Haus, M. A. Popovic, and M. R. Watts, “Broadband hitless bypass switch for integrated photonic circuits,” IEEE Photon. Technol. Lett. 18(10), 1137–1139 (2006).
[CrossRef]

Wong-Foy, A.

Xia, F.

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

Xiao, S.

Xu, Q.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Yang, L.

Yariv, A.

Zhang, L.

IEEE Photon. Technol. Lett.

B. G. Lee, A. Biberman, D. Po, M. Lipson, and K. Bergman, “All-Optical Comb Switch for Multiwavelength Message Routing in Silicon Photonic Networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

H. A. Haus, M. A. Popovic, and M. R. Watts, “Broadband hitless bypass switch for integrated photonic circuits,” IEEE Photon. Technol. Lett. 18(10), 1137–1139 (2006).
[CrossRef]

J. Lightwave Technol.

J. Opt. Soc. Am. A

J. Opt. Soc. Am. B

J. Vac. Sci. Technol. B

C. W. Holzwarth, T. Barwicz, M. A. Popovic, P. T. Rakich, E. P. Ippen, F. X. Kartner, and H. I. Smith, “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” J. Vac. Sci. Technol. B 24(6), 3244–3247 (2006).
[CrossRef]

Nat. Photonics

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[CrossRef]

T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kartner, E. P. Ippen, and H. I. Smith, “Polarization-transparent microphotonic devices in the strong confinement limit,” Nat. Photonics 1(1), 57–60 (2007).
[CrossRef]

Nature

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Figures (7)

Fig. 1
Fig. 1

(a) Schematic of the 8-channel resonator array. (b) A scanning electron micrograph of the fabricated micro heater array, with high packing density. Four sets of devices were stacked vertically. (c) A zoom-in view of the micro heater over a microring.

Fig. 2
Fig. 2

Through-port power spectrum of an eight channel microring filter. (a) before thermal tuning, (b) after thermal tuning.

Fig. 3
Fig. 3

(a) Thermally tuning the resonance wavelength of the microring with the largest radius by 1nm. The three neighboring resonators are also shown. (b) The resonance wavelength of the adjacent channel is shifted by 0.03nm due to thermal crosstalk.

Fig. 4
Fig. 4

(a) Schematic of a reconfigurable eight-channel microring filter with MZ arms. (b) Optical microscopic picture of the fabricated device.

Fig. 5
Fig. 5

(a) Continuous control of through-port extinction ratio from 0dB to 27dB by heating the MZ arm coupled to a microring resonator. (b) The through-port extinction ratio, through-port 3dB bandwidth and drop-port 3dB bandwidth vs. voltage applied to the heater over the MZ arm.

Fig. 6
Fig. 6

Eight channel microring filter with channel frequency from (a-b):193.0 to 193.7THz (100 GHz channel spacing); (c-d): 193.0 to 193.7THz (100 GHz channel spacing) with channel 4 and 6 suppressed; (e-f): 192.9 to 194.3 THz (200 GHz channel spacing); (g-h):193.20 to 193.55THz (50 GHz channel spacing). The blue charts are transmission spectra from through port and the red ones are transmission spectra from common drop port.

Fig. 7
Fig. 7

Through port power spectrum of eight channel microring resonator filter with embedded MZ arm before applying thermal tuning. The numbers indicate the channel positions.

Equations (2)

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T t h r o u g h = ( κ d 2 + κ l 2 κ e 2 ) 2 ( κ d 2 + κ l 2 + κ e 2 ) 2
δ 3 d B d r o p = F S R 2 π ( κ d 2 + κ l 2 + κ e 2 ) 2

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