Abstract

Microneedle fabrication on a metal surface based on laser ablation using twisted light with spin was demonstrated, for the first time. The resulting needle showed a height of at least 10 μm above the target surface and a tip diameter of less than 0.3 μm. We also demonstrated the fabrication of a two-dimensional 5 × 6 microneedle array. The needles were uniformly well shaped with an average length and tip diameter of about 10 and 0.5 μm, respectively.

© 2010 OSA

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2010

2007

M. Okida, T. Omatsu, M. Itoh, and T. Yatagai, “Direct generation of high power Laguerre-Gaussian output from a diode-pumped Nd:YVO4 1.3-μm bounce laser,” Opt. Express 15(12), 7616–7622 (2007).
[CrossRef] [PubMed]

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

2006

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

A. G. Mordovanakis, K.-C. Hou, Y.-C. Chang, M.-Y. Cheng, J. Nees, B. Hou, A. Maksimchuk, G. Mourou, A. Galvanauskas, and B. Lafontaine, “Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation,” Opt. Lett. 31(17), 2517–2519 (2006).
[CrossRef] [PubMed]

2004

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

2003

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

2001

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

2000

M. C. Gower, “Industrial applications of laser micromachining,” Opt. Express 7(2), 56–67 (2000).
[CrossRef] [PubMed]

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

1999

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

1998

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

1995

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

1992

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

N. R. Heckenberg, R. McDuff, C. P. Smith, and A. G. White, “Generation of optical phase singularities by computer-generated holograms,” Opt. Lett. 17(3), 221 (1992).
[CrossRef] [PubMed]

1990

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

1983

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Allen, L.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Andreoli, C.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Ashino, M.

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

Banks, P. S.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Beijersbergen, M. W.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Binnig, G.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Binnig, G. K.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Borrielli, A.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Brugger, J.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Caridi, F.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Chang, R. P. H.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Chang, Y.-C.

Cheng, M.-Y.

Chiu, D. T.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Chujo, K.

Courtial, J.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Dai, J. Y.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Despont, M.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Drechsler, U.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Du, D.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Durig, U.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Dutta, S. K.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Edgar, J. S.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Feit, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Fontana, J. R.

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Fuhr, G. R.

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

Fujioka, K.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Galvanauskas, A.

Gower, M. C.

Haberle, W.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Hamazaki, J.

Heckenberg, N. R.

Horade, M.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Hou, B.

Hou, K.-C.

Itoh, M.

Jeffries, G. D. M.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Khumpuang, S.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Kimura, W. D.

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

Kobayashi, Y.

Lafontaine, B.

Lauerhaas, J. M.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Lutwyche, M.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Lutwyche, M. I.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Maksimchuk, A.

Margarone, D.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

McDuff, R.

McGloin, D.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Mordovanakis, A. G.

Morita, R.

Mourou, G.

Nees, J.

Obara, M.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Ohtu, M.

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

Okida, M.

Omatsu, T.

Ozono, K.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Padgett, M.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Pantell, R. H.

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Parviz, B. A.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Perry, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Picciotto, A.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Pronko, P. P.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Quate, C.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Reichle, C.

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

Rohrer, H.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Romea, R. D.

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

Rothuizen, H.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Rothuizen, H. E.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Rubenchik, A. M.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Rudd, J. V.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Ryan, D.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Seelig, E. W.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Setlur, A. A.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Smith, C. P.

Spreeuw, R. J. C.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Squier, J.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Stuart, B. C.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Stutz, R.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Sugiyama, S.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Sunakawa, H.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Tanda, S.

Torrisi, L.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Usui, A.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Vettiger, P.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Wang, Q. H.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

White, A. G.

Whitesides, G. M.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Widmer, R.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Woerdman, J. P.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Yanovsky, V.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Yaralioglu, G.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Yatagai, T.

Zhao, Y.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Appl. Phys. Lett.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

IBM J. Res. Develop.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

IEEE Trans. Adv. Packag.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

J. Appl. Phys.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Opt. Commun.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. A

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

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Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Phys. Today

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Sens. Actuators

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Smart Mater. Struct.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

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Figures (6)

Fig. 1
Fig. 1

Definition of the total angular momentum of twisted light with spin.

Fig. 2
Fig. 2

(a) Experimental setup for metal microneedle fabrication system using twisted light with spin. A is an aperture, SPP is a phase plate, and QWP is a quarter-wave plate, respectively. (b) Intensity profile of the twisted light. (c) Interferogram formed by the twisted light and a plane reference wavefront. The folk-like fringes are seen at the center of the interferogram, proving that the light has an on-axis helical wavefront.

Fig. 3
Fig. 3

Surfaces processed by a single twisted light pulse with total angular momentum of (a) J = 2 and (b) J = 0. Surfaces processed by deposition of four twisted light pulses having angular momentum of (c) J = 2 and (d) J = 0.

Fig. 4
Fig. 4

Experimental measurements of the (a) height, (b) tip diameter, (c) thickness and (d) aspect ratio of the structured protuberances. Error bars show the standard deviations of the measured values.

Fig. 5
Fig. 5

Model for a microneedle fabrication by 'twisted-light with spin' laser ablation

Fig. 6
Fig. 6

Two-dimensional 5x6 microneedle array fabricated by using twisted light with spin. Two twisted light pulses were overlaid on a target for a needle fabrication, and after that, the target was translated.

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