Abstract

Microneedle fabrication on a metal surface based on laser ablation using twisted light with spin was demonstrated, for the first time. The resulting needle showed a height of at least 10 μm above the target surface and a tip diameter of less than 0.3 μm. We also demonstrated the fabrication of a two-dimensional 5 × 6 microneedle array. The needles were uniformly well shaped with an average length and tip diameter of about 10 and 0.5 μm, respectively.

© 2010 OSA

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  1. D. Bäuerle, Laser processing and chemistry, 3rd edn. (Springer-Verlag, Berlin, Heidelberg, 2000).
  2. J. C. Miller, and R. F. Haglund, Laser ablation and desorption, (San Diego, Academic Press, 1998).
  3. M. C. Gower, “Industrial applications of laser micromachining,” Opt. Express 7(2), 56–67 (2000).
    [CrossRef] [PubMed]
  4. M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
    [CrossRef]
  5. K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
    [CrossRef]
  6. J. Hamazaki, R. Morita, K. Chujo, Y. Kobayashi, S. Tanda, and T. Omatsu, “Optical-vortex laser ablation,” Opt. Express 18(3), 2144–2151 (2010).
    [CrossRef] [PubMed]
  7. L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
    [CrossRef] [PubMed]
  8. M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
    [CrossRef]
  9. M. S. Soskin, and M. V. Vasnetsov, “Optical vortices,” in Progress in Optics, 42, E. Wolf, ed., (Elsevier, North-Holland, 2001).
  10. P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
    [CrossRef]
  11. B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
    [CrossRef]
  12. M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
    [CrossRef]
  13. P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
    [CrossRef]
  14. Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
    [CrossRef]
  15. M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
    [CrossRef]
  16. S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
    [CrossRef]
  17. G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
    [CrossRef]
  18. L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
    [CrossRef]
  19. N. R. Heckenberg, R. McDuff, C. P. Smith, and A. G. White, “Generation of optical phase singularities by computer-generated holograms,” Opt. Lett. 17(3), 221 (1992).
    [CrossRef] [PubMed]
  20. M. Okida, T. Omatsu, M. Itoh, and T. Yatagai, “Direct generation of high power Laguerre-Gaussian output from a diode-pumped Nd:YVO4 1.3-μm bounce laser,” Opt. Express 15(12), 7616–7622 (2007).
    [CrossRef] [PubMed]
  21. Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
    [CrossRef] [PubMed]
  22. J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
    [CrossRef]
  23. R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
    [PubMed]
  24. A. G. Mordovanakis, K.-C. Hou, Y.-C. Chang, M.-Y. Cheng, J. Nees, B. Hou, A. Maksimchuk, G. Mourou, A. Galvanauskas, and B. Lafontaine, “Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation,” Opt. Lett. 31(17), 2517–2519 (2006).
    [CrossRef] [PubMed]

2010 (1)

2007 (2)

M. Okida, T. Omatsu, M. Itoh, and T. Yatagai, “Direct generation of high power Laguerre-Gaussian output from a diode-pumped Nd:YVO4 1.3-μm bounce laser,” Opt. Express 15(12), 7616–7622 (2007).
[CrossRef] [PubMed]

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

2006 (3)

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

A. G. Mordovanakis, K.-C. Hou, Y.-C. Chang, M.-Y. Cheng, J. Nees, B. Hou, A. Maksimchuk, G. Mourou, A. Galvanauskas, and B. Lafontaine, “Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation,” Opt. Lett. 31(17), 2517–2519 (2006).
[CrossRef] [PubMed]

2004 (1)

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

2003 (1)

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

2001 (1)

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

2000 (3)

M. C. Gower, “Industrial applications of laser micromachining,” Opt. Express 7(2), 56–67 (2000).
[CrossRef] [PubMed]

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

1999 (2)

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

1998 (2)

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

1995 (1)

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

1992 (2)

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

N. R. Heckenberg, R. McDuff, C. P. Smith, and A. G. White, “Generation of optical phase singularities by computer-generated holograms,” Opt. Lett. 17(3), 221 (1992).
[CrossRef] [PubMed]

1990 (1)

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

1983 (1)

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Allen, L.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Andreoli, C.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Ashino, M.

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

Banks, P. S.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Beijersbergen, M. W.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Binnig, G.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Binnig, G. K.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Borrielli, A.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Brugger, J.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Caridi, F.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Chang, R. P. H.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Chang, Y.-C.

Cheng, M.-Y.

Chiu, D. T.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Chujo, K.

Courtial, J.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Dai, J. Y.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Despont, M.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Drechsler, U.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Du, D.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Durig, U.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Dutta, S. K.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Edgar, J. S.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Feit, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Fontana, J. R.

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Fuhr, G. R.

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

Fujioka, K.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Galvanauskas, A.

Gower, M. C.

Haberle, W.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Hamazaki, J.

Heckenberg, N. R.

Horade, M.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Hou, B.

Hou, K.-C.

Itoh, M.

Jeffries, G. D. M.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Khumpuang, S.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Kimura, W. D.

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

Kobayashi, Y.

Lafontaine, B.

Lauerhaas, J. M.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Lutwyche, M.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Lutwyche, M. I.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Maksimchuk, A.

Margarone, D.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

McDuff, R.

McGloin, D.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Mordovanakis, A. G.

Morita, R.

Mourou, G.

Nees, J.

Obara, M.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Ohtu, M.

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

Okida, M.

Omatsu, T.

Ozono, K.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Padgett, M.

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Pantell, R. H.

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Parviz, B. A.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Perry, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Picciotto, A.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Pronko, P. P.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Quate, C.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Reichle, C.

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

Rohrer, H.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Romea, R. D.

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

Rothuizen, H.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Rothuizen, H. E.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Rubenchik, A. M.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Rudd, J. V.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Ryan, D.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Seelig, E. W.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Setlur, A. A.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

Smith, C. P.

Spreeuw, R. J. C.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Squier, J.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Stuart, B. C.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Stutz, R.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Sugiyama, S.

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

Sunakawa, H.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Tanda, S.

Torrisi, L.

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

Usui, A.

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

Vettiger, P.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Wang, Q. H.

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

White, A. G.

Whitesides, G. M.

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

Widmer, R.

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

Woerdman, J. P.

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Yanovsky, V.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

Yaralioglu, G.

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Yatagai, T.

Zhao, Y.

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Appl. Phys. Lett. (2)

Q. H. Wang, A. A. Setlur, J. M. Lauerhaas, J. Y. Dai, E. W. Seelig, and R. P. H. Chang, “A nanotube-based field-emission flat panel display,” Appl. Phys. Lett. 72(22), 2912 (1998).
[CrossRef]

M. Ashino and M. Ohtu, “Fabrication and evaluation of a localized plasmon resonance probe for near-field optical microscopy/spectroscopy,” Appl. Phys. Lett. 72(11), 1299 (1998).
[CrossRef]

IBM J. Res. Develop. (1)

P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, “The “Millipede” - more than one thousand tips for future AFM data storage,” IBM J. Res. Develop. 44(3), 323–340 (2000).
[CrossRef]

IEEE Trans. Adv. Packag. (1)

B. A. Parviz, D. Ryan, and G. M. Whitesides, “Using Self-Assembly for the Fabrication of Nano-Scale Electronic and Photonic Devices,” IEEE Trans. Adv. Packag. 26(3), 233–241 (2003).
[CrossRef]

J. Appl. Phys. (3)

L. Torrisi, F. Caridi, A. Picciotto, D. Margarone, and A. Borrielli, “Particle emission from tantalum plasma produced by 532 nm laser pulse ablation,” J. Appl. Phys. 100(9), 093306 (2006).
[CrossRef]

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulse laser machining of dielectric materials,” J. Appl. Phys. 85(9), 6803 (1999).
[CrossRef]

J. R. Fontana and R. H. Pantell, “A high-energy, laser accelerator for electrons using the inverse Cherenkov effect,” J. Appl. Phys. 54(8), 4285 (1983).
[CrossRef]

Opt. Commun. (2)

K. Ozono, M. Obara, A. Usui, and H. Sunakawa, “High-speed ablation etching of GaN semiconductor using femtosecond laser,” Opt. Commun. 189(1-3), 103–106 (2001).
[CrossRef]

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[CrossRef]

Opt. Express (3)

Opt. Lett. (2)

Phys. Rev. A (1)

L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, “Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes,” Phys. Rev. A 45(11), 8185–8189 (1992).
[CrossRef] [PubMed]

Phys. Rev. D Part. Fields (1)

R. D. Romea and W. D. Kimura, “Modeling of inverse Čerenkov laser acceleration with axicon laser-beam focusing,” Phys. Rev. D Part. Fields 42(5), 1807–1818 (1990).
[PubMed]

Phys. Rev. Lett. (1)

Y. Zhao, J. S. Edgar, G. D. M. Jeffries, D. McGloin, and D. T. Chiu, “Spin-to-orbital angular momentum conversion in a strongly focused optical beam,” Phys. Rev. Lett. 99(7), 073901 (2007).
[CrossRef] [PubMed]

Phys. Today (1)

M. Padgett, J. Courtial, and L. Allen, “Light’s orbital angular momentum,” Phys. Today 57(5), 35 (2004).
[CrossRef]

Sens. Actuators (1)

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate, “5x5 2D AFM cantilever arrays a first step towards a Terabit storage device,” Sens. Actuators 73(1-2), 89–94 (1999).
[CrossRef]

Smart Mater. Struct. (1)

S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Microneedle Fabrication using the Plane Pattern to Cross-section Transfer Method,” Smart Mater. Struct. 15(2), 600–606 (2006).
[CrossRef]

TrAC Trends in Analytical Chemistry (1)

G. R. Fuhr and C. Reichle, “Living cells in opto-electrical cages,” TrAC Trends in Analytical Chemistry 19(6), 402–409 (2000).
[CrossRef]

Other (3)

M. S. Soskin, and M. V. Vasnetsov, “Optical vortices,” in Progress in Optics, 42, E. Wolf, ed., (Elsevier, North-Holland, 2001).

D. Bäuerle, Laser processing and chemistry, 3rd edn. (Springer-Verlag, Berlin, Heidelberg, 2000).

J. C. Miller, and R. F. Haglund, Laser ablation and desorption, (San Diego, Academic Press, 1998).

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Figures (6)

Fig. 1
Fig. 1

Definition of the total angular momentum of twisted light with spin.

Fig. 2
Fig. 2

(a) Experimental setup for metal microneedle fabrication system using twisted light with spin. A is an aperture, SPP is a phase plate, and QWP is a quarter-wave plate, respectively. (b) Intensity profile of the twisted light. (c) Interferogram formed by the twisted light and a plane reference wavefront. The folk-like fringes are seen at the center of the interferogram, proving that the light has an on-axis helical wavefront.

Fig. 3
Fig. 3

Surfaces processed by a single twisted light pulse with total angular momentum of (a) J = 2 and (b) J = 0. Surfaces processed by deposition of four twisted light pulses having angular momentum of (c) J = 2 and (d) J = 0.

Fig. 4
Fig. 4

Experimental measurements of the (a) height, (b) tip diameter, (c) thickness and (d) aspect ratio of the structured protuberances. Error bars show the standard deviations of the measured values.

Fig. 5
Fig. 5

Model for a microneedle fabrication by 'twisted-light with spin' laser ablation

Fig. 6
Fig. 6

Two-dimensional 5x6 microneedle array fabricated by using twisted light with spin. Two twisted light pulses were overlaid on a target for a needle fabrication, and after that, the target was translated.

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