H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
A. Wiegmann, M. Schulz, and C. Elster, “Suppression of aliasing in multi-sensor scanning absolute profile measurement,” Opt. Express 17(13), 11098–11106 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-13-11098 .
[Crossref]
[PubMed]
J. Flügge, R. Köning, and C. Weichert, “W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, “Development of a 1.5D reference comparator for position and straightness metrology on photomasks,” Proc. SPIE 7122, 71222Y (2008), doi:, http://link.aip.org/link/?PSI/7122/71222Y/1 .
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
C. Elster, I. Weingärtner, and M. Schulz, “Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors,” Precis. Eng. 30(1), 32–38 (2006).
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
B. Doerband and J. Hetzler, “Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF),” Proc. SPIE 5878, 587806 (2005).
[Crossref]
I. Weingärtner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precis. Eng. 28(2), 164–170 (2004).
[Crossref]
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
T. Nomura, S. Okuda, K. Kamiya, H. Tashiro, and K. Yoshikawa, “Improved Saunders method for the analysis of lateral shearing interferograms,” Appl. Opt. 41(10), 1954–1961 (2002).
[Crossref]
[PubMed]
H. Tanaka and H. Sato, “Extensive analysis and development of straightness measurement by sequential-two-points method,” Trans. ASME J. Eng. Ind 108, 167–182 (1986).
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
B. Doerband and J. Hetzler, “Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF),” Proc. SPIE 5878, 587806 (2005).
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
A. Wiegmann, M. Schulz, and C. Elster, “Suppression of aliasing in multi-sensor scanning absolute profile measurement,” Opt. Express 17(13), 11098–11106 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-13-11098 .
[Crossref]
[PubMed]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
C. Elster, I. Weingärtner, and M. Schulz, “Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors,” Precis. Eng. 30(1), 32–38 (2006).
[Crossref]
I. Weingärtner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precis. Eng. 28(2), 164–170 (2004).
[Crossref]
C. Elster and I. Weingärtner, “Solution to the shearing problem,” Appl. Opt. 38(23), 5024–5031 (1999).
[Crossref]
C. Elster, “Recovering wavefronts from difference measurements in lateral shearing interferometry,” J. Comput. Appl. Math. 110(1), 177–180 (1999).
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
J. Flügge, R. Köning, and C. Weichert, “W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, “Development of a 1.5D reference comparator for position and straightness metrology on photomasks,” Proc. SPIE 7122, 71222Y (2008), doi:, http://link.aip.org/link/?PSI/7122/71222Y/1 .
[Crossref]
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
B. Doerband and J. Hetzler, “Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF),” Proc. SPIE 5878, 587806 (2005).
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
J. Flügge, R. Köning, and C. Weichert, “W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, “Development of a 1.5D reference comparator for position and straightness metrology on photomasks,” Proc. SPIE 7122, 71222Y (2008), doi:, http://link.aip.org/link/?PSI/7122/71222Y/1 .
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Tanaka and H. Sato, “Extensive analysis and development of straightness measurement by sequential-two-points method,” Trans. ASME J. Eng. Ind 108, 167–182 (1986).
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
A. Wiegmann, M. Schulz, and C. Elster, “Suppression of aliasing in multi-sensor scanning absolute profile measurement,” Opt. Express 17(13), 11098–11106 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-13-11098 .
[Crossref]
[PubMed]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
C. Elster, I. Weingärtner, and M. Schulz, “Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors,” Precis. Eng. 30(1), 32–38 (2006).
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Tanaka and H. Sato, “Extensive analysis and development of straightness measurement by sequential-two-points method,” Trans. ASME J. Eng. Ind 108, 167–182 (1986).
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
J. Flügge, R. Köning, and C. Weichert, “W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, “Development of a 1.5D reference comparator for position and straightness metrology on photomasks,” Proc. SPIE 7122, 71222Y (2008), doi:, http://link.aip.org/link/?PSI/7122/71222Y/1 .
[Crossref]
C. Elster, I. Weingärtner, and M. Schulz, “Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors,” Precis. Eng. 30(1), 32–38 (2006).
[Crossref]
I. Weingärtner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precis. Eng. 28(2), 164–170 (2004).
[Crossref]
C. Elster and I. Weingärtner, “Solution to the shearing problem,” Appl. Opt. 38(23), 5024–5031 (1999).
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
A. Wiegmann, M. Schulz, and C. Elster, “Suppression of aliasing in multi-sensor scanning absolute profile measurement,” Opt. Express 17(13), 11098–11106 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-13-11098 .
[Crossref]
[PubMed]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
T. Nomura, S. Okuda, K. Kamiya, H. Tashiro, and K. Yoshikawa, “Improved Saunders method for the analysis of lateral shearing interferograms,” Appl. Opt. 41(10), 1954–1961 (2002).
[Crossref]
[PubMed]
C. Elster and I. Weingärtner, “Solution to the shearing problem,” Appl. Opt. 38(23), 5024–5031 (1999).
[Crossref]
C. Elster, “Recovering wavefronts from difference measurements in lateral shearing interferometry,” J. Comput. Appl. Math. 110(1), 177–180 (1999).
[Crossref]
W. Gao, J. Yokoyama, H. Kojima, and S. Kiyono, “Precision measurement of cylinder straightness using a scanning multi-probe system,” Precis. Eng. 26, 279–288 (2002).
I. Weingärtner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precis. Eng. 28(2), 164–170 (2004).
[Crossref]
C. Elster, I. Weingärtner, and M. Schulz, “Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors,” Precis. Eng. 30(1), 32–38 (2006).
[Crossref]
H. Bremer, F. Schmahling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, and A. Wiegmann, “Simple methods for alignment of line distance sensor arrays,” Proc. SPIE 7718, 77181M (2010), doi:.
[Crossref]
J. Flügge, R. Köning, and C. Weichert, “W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, “Development of a 1.5D reference comparator for position and straightness metrology on photomasks,” Proc. SPIE 7122, 71222Y (2008), doi:, http://link.aip.org/link/?PSI/7122/71222Y/1 .
[Crossref]
B. Doerband and J. Hetzler, “Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF),” Proc. SPIE 5878, 587806 (2005).
[Crossref]
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, and R. Tutsch, “A model based approach to reference-free straightness measurement at the Nanometer Comparator,” Proc. SPIE 7390, 73900O (2009), doi:.
[Crossref]
H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005), doi:.
[Crossref]
R. Krueger-Sehm, P. Bakucz, L. Jung, and H. Wilhelms, “Chirp-Kalibriernormale fuer Obeflaechenmessgeraete,” Tech. Mess. 74, 572–576 (2007).
H. Tanaka and H. Sato, “Extensive analysis and development of straightness measurement by sequential-two-points method,” Trans. ASME J. Eng. Ind 108, 167–182 (1986).
[Crossref]
W. Gao, and S. Kiyono, “On-Machine Profile Measurement of Machined Surface using the Combined Three-Point Method,” JSME Int. J. Ser. C 40 (2), 253–259 (1997). http://ci.nii.ac.jp/naid/110004164205/en/ .
W. H. Press, P. B. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in C: The Art of Scientific Computing, (Cambridge University Press, 1992).
I. Lira, Evaluating the Measurement Uncertainty, (Taylor & Francis Group, 2002).
D. Malacara, M. Servín, and Z. Malacara, Interferogram analysis for optical testing, CRC Press (1998), Chapt. 1.6.4.