Abstract

We demonstrate an electrically pumped high contrast grating (HCG) VCSEL operating at 1550 nm incorporating a proton implant-defined aperture. Output powers of >1 mW are obtained at room temperature under continuous wave operation. Devices operate continuous wave at temperatures exceeding 60° C. The novel device design, which is grown in a single epitaxy step, may enable lower cost long wavelength VCSELs.

© 2010 OSA

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  1. C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
    [CrossRef]
  2. M. Lackner, M. Schwarzott, F. Winter, B. Kögel, S. Jatta, H. Halbritter, and P. Meissner, “CO and CO2 spectroscopy using a 60 nm broadband tunable MEMS-VCSEL at 1.55 µm,” Opt. Lett. 31(21), 3170–3172 (2006).
    [CrossRef] [PubMed]
  3. M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
    [CrossRef]
  4. W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
    [CrossRef]
  5. S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
    [CrossRef]
  6. N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
    [CrossRef]
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    [CrossRef]
  8. C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
    [CrossRef]
  9. M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
    [CrossRef]
  10. Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
    [CrossRef]
  11. A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
    [CrossRef]
  12. M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
    [CrossRef]
  13. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
    [CrossRef]
  14. C. Chase, Y. Zhou, and C. J. Chang-Hasnain, “Size effect of high contrast gratings in VCSELs,” Opt. Express 17(26), 24002–24007 (2009).
    [CrossRef] [PubMed]
  15. V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
    [CrossRef] [PubMed]
  16. W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
    [CrossRef]
  17. P. Gilet, N. Olivier, P. Grosse, K. Gilbert, A. Chelnokov, I. Chung, and J. Mørk, “High-index-contrast subwavelength grating VCSEL,” in Vertical-Cavity Surface-Emitting Lasers XIV, J. K. Guenter and K. D. Choquette, eds. (SPIE, 2010), Vol. 7615, p. 76150J.
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    [CrossRef]

2010 (3)

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

2009 (2)

C. Chase, Y. Zhou, and C. J. Chang-Hasnain, “Size effect of high contrast gratings in VCSELs,” Opt. Express 17(26), 24002–24007 (2009).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

2008 (1)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

2007 (1)

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

2006 (2)

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

M. Lackner, M. Schwarzott, F. Winter, B. Kögel, S. Jatta, H. Halbritter, and P. Meissner, “CO and CO2 spectroscopy using a 60 nm broadband tunable MEMS-VCSEL at 1.55 µm,” Opt. Lett. 31(21), 3170–3172 (2006).
[CrossRef] [PubMed]

2005 (1)

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

2004 (2)

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

2001 (1)

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

2000 (3)

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

1981 (1)

Almuneau, G.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Amann, M.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

Amann, M. C.

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

Beaudoin, M.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Bengtsson, J.

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

Berseth, C.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Bhat, R.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Böhm, G.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

Boucart, J.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Buell, D. A.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Caliman, A.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Caneau, C.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Chang-Hasnain, C.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Chang-Hasnain, C. J.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

C. Chase, Y. Zhou, and C. J. Chang-Hasnain, “Size effect of high contrast gratings in VCSELs,” Opt. Express 17(26), 24002–24007 (2009).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Chase, C.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

C. Chase, Y. Zhou, and C. J. Chang-Hasnain, “Size effect of high contrast gratings in VCSELs,” Opt. Express 17(26), 24002–24007 (2009).
[CrossRef] [PubMed]

Chen, L.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Coldren, L. A.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Deichsel, E.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Gaylord, T. K.

Gorblich, M.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

Grasse, C.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

Guryanov, G.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Gustavsson, J.

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

Haglund, A.

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

Halbritter, H.

Hall, B.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Hall, E.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

He, C.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Hofmann, W.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

Hu, M.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Huang, M.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Huang, M. C.

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

Huang, M. C. Y.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

Iakovlev, V.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Jansen, M.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Jatta, S.

Jedrasik, P.

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

Kapon, E.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Karagodsky, V.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

Kim, J. K.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Kner, P.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Kögel, B.

Köhler, F.

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

Koyama, F.

Kroemer, H.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Lackner, M.

Larsson, A.

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

Li, G. S.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Li, M.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Liu, X.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Mateus, C.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Meissner, P.

Mereuta, A.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Mircea, A.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Moewe, M.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

Moharam, M. G.

Müller, M.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

Nabiev, R. F.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Nakagawa, S.

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Nishiyama, N.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Ortsiefer, M.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

Pesala, B.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express 18(2), 694–699 (2010).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

Rao, Y.

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

Ronneberg, E.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

Rosskopf, J.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

Rudra, A.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Schwarzott, M.

Sedgwick, F. G.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

Shau, R.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

Stone, R. J.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Suruceanu, G.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Suzuki, Y.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Syrbu, A.

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

Winter, F.

Worland, D. P.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Xu, Y.

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

Yu, K.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Yuen, W.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Zah, C.

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

Zhang, D.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Zheng, T.

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

Zhou, Y.

C. Chase, Y. Zhou, and C. J. Chang-Hasnain, “Size effect of high contrast gratings in VCSELs,” Opt. Express 17(26), 24002–24007 (2009).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

Appl. Phys. Lett. (2)

M. Ortsiefer, R. Shau, G. Böhm, F. Köhler, and M. C. Amann, “Low-threshold index-guided 1.5 µm long-wavelength vertical-cavity surface-emitting laser with high efficiency,” Appl. Phys. Lett. 76(16), 2179 (2000).
[CrossRef]

S. Nakagawa, E. Hall, G. Almuneau, J. K. Kim, D. A. Buell, H. Kroemer, and L. A. Coldren, “88 °C, continuous-wave operation of apertured, intracavity contacted, 1.55 μm vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 78(10), 1337 (2001).
[CrossRef]

Electron. Lett. (2)

W. Yuen, G. S. Li, R. F. Nabiev, J. Boucart, P. Kner, R. J. Stone, D. Zhang, M. Beaudoin, T. Zheng, C. He, K. Yu, M. Jansen, D. P. Worland, and C. J. Chang-Hasnain, “High-performance 1.6 µm single-epitaxy top-emitting VCSEL,” Electron. Lett. 36(13), 1121–1123 (2000).
[CrossRef]

A. Syrbu, A. Mereuta, A. Mircea, A. Caliman, V. Iakovlev, C. Berseth, G. Suruceanu, A. Rudra, E. Deichsel, and E. Kapon, “1550 nm-band VCSEL 0.76 mW singlemode output power in 20–80°C temperature range,” Electron. Lett. 40(5), 306 (2004).
[CrossRef]

IEEE J. Quantum Electron. (1)

A. Haglund, J. Gustavsson, J. Bengtsson, P. Jedrasik, and A. Larsson, “Design and Evaluation of Fundamental-Mode and Polarization-Stabilized VCSELs With a Subwavelength Surface Grating,” IEEE J. Quantum Electron. 42(3), 231–240 (2006).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (3)

N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, M. Li, R. Bhat, and C. Zah, “Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs-InP DBR Grown by MOCVD,” IEEE J. Sel. Top. Quantum Electron. 11(5), 990–998 (2005).
[CrossRef]

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices,” IEEE J. Sel. Top. Quantum Electron. 15(5), 1485–1499 (2009).
[CrossRef]

IEEE Photon. J. (1)

W. Hofmann, C. Chase, M. Müller, Y. Rao, C. Grasse, G. Böhm, M. Amann, and C. J. Chang-Hasnain, “Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser,” IEEE Photon. J. 2(3), 415–422 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

M. Ortsiefer, M. Gorblich, Y. Xu, E. Ronneberg, J. Rosskopf, R. Shau, and M. Amann, “Polarization Control in Buried Tunnel Junction VCSELs Using a Birefringent Semiconductor/Dielectric Subwavelength Grating,” IEEE Photon. Technol. Lett. 22(1), 15–17 (2010).
[CrossRef]

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-Band Mirror (1.12-1.62 µm) Using a Subwavelength Grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

J. Opt. Soc. Am. (1)

Nat. Photonics (2)

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

Opt. Express (2)

Opt. Lett. (1)

Other (1)

P. Gilet, N. Olivier, P. Grosse, K. Gilbert, A. Chelnokov, I. Chung, and J. Mørk, “High-index-contrast subwavelength grating VCSEL,” in Vertical-Cavity Surface-Emitting Lasers XIV, J. K. Guenter and K. D. Choquette, eds. (SPIE, 2010), Vol. 7615, p. 76150J.

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