Abstract

One dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 mm is studied at cryogenic and room temperatures at different optical pump powers. The resonators demonstrate Purcell enhanced absorption and emission rates, also confirmed by time resolved measurements. Resonances exhibit linewidth narrowing with pump power, signifying absorption bleaching and the onset of stimulated emission in the material at both 5.5 K and room temperature. We estimate from the cavity linewidths that Er has been pumped to transparency at the cavity resonance wavelength.

© 2010 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  22. . Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
    [CrossRef]
  23. . H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
    [CrossRef]

2010

. Y. Gong and J. Vučkovič, “Photonic Crystal Cavities in Silicon Dioxide,” Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

2009

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. R. Li, S. Yerci, and L. Dal Negro, “Temperature dependence of the energy transfer from amorphous silicon nitride to Er ions,” Appl. Phys. Lett. 95, 041111 (2009).
[CrossRef]

2008

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

. C. Kreuzer, J. Riedrich-M¨oller, E. Neu, and C. Becher, “Design of Photonic Crystal Microcavities in Diamond Films,” Opt. Express 16, 1632-1644 (2008).
[CrossRef]

. M. W. McCutcheon and M. Lončar, “Design of an ultrahigh Quality factor silicon nitride photonic crystal nanocavity for coupling to diamond nanocrystals,” Opt. Express 16, 19136-19145 (2008).
[CrossRef]

2007

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

2006

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

2005

. H. Altug and J. Vučkovič, “Experimental demonstration of the slow group velocity of light in two-dimensional coupled photonic crystal microcavity arrays,” Appl. Phys. Lett. 86, 111102 (2005).
[CrossRef]

. R. H. Hadfield, M. J. Stevens, S. G. Gruber, A. J. Miller, R. E. Schwall, R. P. Mirin, and S. W. Nam, “Single photon source characterization with a superconducting single photon detector,” Opt. Express 13, 10846-10853 (2005).
[CrossRef]

2002

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

1997

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

1991

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

1946

. E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 681 (1946).
[CrossRef]

Altug, H.

. H. Altug and J. Vučkovič, “Experimental demonstration of the slow group velocity of light in two-dimensional coupled photonic crystal microcavity arrays,” Appl. Phys. Lett. 86, 111102 (2005).
[CrossRef]

Awschalom, D. D.

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Baek, B.

Basu, S. N.

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

Becher, C.

Beveratos, A.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Böttger, T.

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

Braive, R.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Camacho, R.

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

Chan, J.

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

Cheng, S-L.

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

Cone, R. L.

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

Dal Negro, L.

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. R. Li, S. Yerci, and L. Dal Negro, “Temperature dependence of the energy transfer from amorphous silicon nitride to Er ions,” Appl. Phys. Lett. 95, 041111 (2009).
[CrossRef]

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

de Waal, H.

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

Dorenbos, S. N.

Eaglesham, D. J.

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Eichenfield, M.

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

Englund, D.

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

Faber, A. J.

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

Faraon, A.

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

Fushman, I.

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

Gong, Y.

. Y. Gong and J. Vučkovič, “Photonic Crystal Cavities in Silicon Dioxide,” Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

Gruber, S. G.

Hadfield, R. H.

Han, H.-S.

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

Hanson, R.

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Hostein, R.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Hu, E. L.

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Jacobson, D. C.

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Kik, P. G.

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

Kistler, R. C.

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Kreuzer, C.

Kucheyev, S. O.

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

Larqué, M.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Le Gratiet, L.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Lee, K.-H.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Li, R.

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. R. Li, S. Yerci, and L. Dal Negro, “Temperature dependence of the energy transfer from amorphous silicon nitride to Er ions,” Appl. Phys. Lett. 95, 041111 (2009).
[CrossRef]

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

Loncar, M.

Makarova, M.

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

McCutcheon, M. W.

Miller, A. J.

Mirin, R. P.

Nam, S. W.

Neu, E.

Nishi, Y.

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Painter, O.

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

Park, N.

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

Petroff, P.

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

Poate, J. M.

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Polman, A.

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Purcell, E. M.

. E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 681 (1946).
[CrossRef]

Riedrich-M¨oller, J.

Robert-Philip, I.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Sagnes, I.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Sanda, H.

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Schwall, R. E.

Seo, S.-Y.

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

Shin, J. H.

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

Sih, V.

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

Stevens, M. J.

Stoltz, N.

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

Sun, Y.

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

Talneau, A.

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

Thiel, C. W.

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

Vahala, K. J.

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

van Buuren, T.

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

Vuckovic, J.

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. Y. Gong and J. Vučkovič, “Photonic Crystal Cavities in Silicon Dioxide,” Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

. H. Altug and J. Vučkovič, “Experimental demonstration of the slow group velocity of light in two-dimensional coupled photonic crystal microcavity arrays,” Appl. Phys. Lett. 86, 111102 (2005).
[CrossRef]

Wang, C. F.

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Warga, J.

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

Yan, Y. C.

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

Yerci, S.

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

. Y. Gong, M. Makarova, S. Yerci, R. Li, M. J. Stevens, B. Baek, S. W. Nam, R. H. Hadfield, S. N. Dorenbos, V. Zwiller, J. Vučkovič, and L. Dal Negro, “Linewidth narrowing and Purcell enhancement in photonic crystal cavities on an Er-doped silicon nitride platform,” Opt. Express 18, 2601-2612 (2010).
[CrossRef]

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. R. Li, S. Yerci, and L. Dal Negro, “Temperature dependence of the energy transfer from amorphous silicon nitride to Er ions,” Appl. Phys. Lett. 95, 041111 (2009).
[CrossRef]

Zwiller, V.

Appl. Phys. Lett.

. S. Yerci, R. Li, S. O. Kucheyev, T. van Buuren, S. N. Basu, and L. Dal Negro, “Energy transfer and 1.54 μm emission in amorphous silicon nitride films,” Appl. Phys. Lett. 95, 031107-031107 (2009).
[CrossRef]

. R. Li, S. Yerci, and L. Dal Negro, “Temperature dependence of the energy transfer from amorphous silicon nitride to Er ions,” Appl. Phys. Lett. 95, 041111 (2009).
[CrossRef]

. J. Warga, R. Li, S. N. Basu, and L. Dal Negro, “Electroluminescence from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 93, 151116 (2008).
[CrossRef]

. M. Makarova, V. Sih, J. Warga, R. Li, L. Dal Negro, and J. Vučkovič, “Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals,” Appl. Phys. Lett. 92, 161107 (2008).
[CrossRef]

. C. F. Wang, R. Hanson, D. D. Awschalom, and E. L. Hu, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

. Y. Gong and J. Vučkovič, “Photonic Crystal Cavities in Silicon Dioxide,” Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

. M. Makarova, J. Vučkovič, H. Sanda, and Y. Nishi, “Silicon based photonic crystal nanocavity light emitters,” Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

. H. Altug and J. Vučkovič, “Experimental demonstration of the slow group velocity of light in two-dimensional coupled photonic crystal microcavity arrays,” Appl. Phys. Lett. 86, 111102 (2005).
[CrossRef]

. R. Hostein, R. Braive, M. Larqué, K.-H. Lee, A. Talneau, L. Le Gratiet, I. Robert-Philip, I. Sagnes, and A. Beveratos, “Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band,” Appl. Phys. Lett. 94, 123101 (2009).
[CrossRef]

. Y. C. Yan, A. J. Faber, H. de Waal, P. G. Kik, and A. Polman, “Erbium-doped phosphate glass waveguide on silicon with 4.1 dB/cm gain at 1.535 μm,” Appl. Phys. Lett. 71, 2922-2924 (1997).
[CrossRef]

. H.-S. Han, S.-Y. Seo, J. H. Shin, and N. Park, “Coefficient determination related to optical gain in erbium-doped silicon-rich silicon oxide waveguide amplifier,” Appl. Phys. Lett. 81, 3720-3722 (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum. Electron.

. M. Makarova, Y. Gong, S-L. Cheng, Y. Nishi, S. Yerci, R. Li, L. Dal Negro, and J. Vučković. “Photonic Crystal and Plasmonic Silicon Based Light Sources,” IEEE J. Sel. Top. Quantum. Electron. 16, 132-140 (2010).
[CrossRef]

J. Appl. Phys.

. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778-3784 (1991).
[CrossRef]

Nature

. D. Englund, A. Faraon, I. Fushman, N. Stoltz, P. Petroff, and J. Vučkovič, “Controlling Cavity Reflectivity With a Single Quantum Dot,” Nature 450, 857-861 (2007).
[CrossRef]

. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photoniccrystal optomechanical cavity,” Nature 459, 550-555 (2009).
[CrossRef]

Opt. Express

Phys Rev. B

. T. Böttger, C. W. Thiel, Y. Sun, and R. L. Cone, “Optical decoherence and spectral diffusion at 1.5 μm in Er3+:Y2SiO5 versus magnetic field, temperature, and Er3+ concentration,” Phys Rev. B 73, 075101 (2006).
[CrossRef]

Phys. Rev.

. E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 681 (1946).
[CrossRef]

Other

. H. J. Kimble, “Structure and dynamics in cavity quantum electrodynamics,” in Cavity Quantum Electrodynamics, edited by P. Berman, pp. 203-267, Academic Press, 1994.

. E. Desurvire, Erbium-doped fiber amplifiers: principles and applications, pp. 230-298. JohnWiley & Sons: New York, 1994.

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