Abstract

3D in vivo optical imaging on a mouse has been obtained using a 2D MEMS mirror for lateral scanning in a time-domain optical coherence tomography (OCT) system. The MEMS mirror aperture size is 1 × 1 mm2, and the device footprint is 2 × 2 mm2. The MEMS mirror scans ± 30° optical angles about both x and y-axis at only 5.5V DC voltage. An endoscopic probe with an outer diameter of 5.8 mm has been designed, manufactured and packaged. The probe scans an average transverse area of 2 mm × 2 mm. The imaging speed of the probe is about 2.5 frames per second, limited by the speed of the employed optical delay line.

© 2010 OSA

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2009 (1)

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

2008 (3)

K. Kumar, K. Hoshino, and X. Zhang, “Handheld subcellular-resolution single-fiber confocal microscope using high-reflectivity two-axis vertical combdrive silicon microscanner,” Biomed. Microdevices 10(5), 653–660 (2008).
[CrossRef] [PubMed]

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

L. Wu and H. Xie, “A large vertical displacement electrothermal bimorph microactuator with very small lateral shift,” Sens. Actuators, A 145–146, 371–379 (2008).

2007 (3)

2006 (2)

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

J. Wu, M. Conry, C. Gu, F. Wang, Z. Yaqoob, and C. Yang, “Paired-angle-rotation scanning optical coherence tomography forward-imaging probe,” Opt. Lett. 31(9), 1265–1267 (2006).
[CrossRef] [PubMed]

2005 (3)

Y. Wang, M. Bachman, G. P. Li, S. Guo, B. J. F. Wong, and Z. Chen, “Low-voltage polymer-based scanning cantilever for in vivo optical coherence tomography,” Opt. Lett. 30(1), 53–55 (2005).
[CrossRef] [PubMed]

J. P. Yang, X. C. Deng, and T. C. Chong, “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” J. Micromech. Microeng. 15(5), 958–965 (2005).
[CrossRef]

A. Jain and H. Xie, “An electrothermal microlens scanner with low-voltage, large-vertical-displacement actuation,” IEEE Photon. Technol. Lett. 17(9), 1971–1973 (2005).
[CrossRef]

2004 (4)

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

P. H. Tran, D. S. Mukai, M. Brenner, and Z. Chen, “In vivo endoscopic optical coherence tomography by use of a rotational microelectromechanical system probe,” Opt. Lett. 29(11), 1236–1238 (2004).
[CrossRef] [PubMed]

X. Liu, M. J. Cobb, Y. Chen, M. B. Kimmey, and X. Li, “Rapid-scanning forward-imaging miniature endoscope for real-time optical coherence tomography,” Opt. Lett. 29(15), 1763–1765 (2004).
[CrossRef] [PubMed]

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

2003 (3)

J. G. Fujimoto, “Optical coherence tomography for ultrahigh resolution in vivo imaging,” Nat. Biotechnol. 21(11), 1361–1367 (2003).
[CrossRef] [PubMed]

H. Xie, Y. Pan, and G. K. Fedder, “Endoscopic opical coherence tomographic imaging with a CMOS MEMS micromirror,” Sens. Actuators, A 103(1-2), 237–241 (2003).
[CrossRef]

J. M. Zara, S. Yazdanfar, K. D. Rao, J. A. Izatt, and S. W. Smith, “Electrostatic micromachine scanning mirror for optical coherence tomography,” Opt. Lett. 28(8), 628–630 (2003).
[CrossRef] [PubMed]

2001 (4)

Y. Pan, H. Xie, and G. K. Fedder, “Endoscopic optical coherence tomography based on a microelectromechanical mirror,” Opt. Lett. 26(24), 1966–1968 (2001).
[CrossRef]

J. Welzel, “Optical coherence tomography in dermatology: a review,” Skin Res. Technol. 7, 1–9 (2001).
[CrossRef] [PubMed]

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

2000 (4)

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

1999 (1)

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
[CrossRef]

1997 (2)

1995 (2)

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

1992 (1)

1991 (1)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Adler, D. C.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Aguirre, A A. D.

Arya, A. V.

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

Bachman, M.

Bancu, M. G.

Becker, L.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Bernstein, J. J.

Boppart, S. A.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Bouma, B. E.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

K. H. Kim, B. H. Park, G. N. Maguluri, T. W. Lee, F. J. Rogomentich, M. G. Bancu, B. E. Bouma, J. F. de Boer, and J. J. Bernstein, “Two-axis magnetically-driven MEMS scanning catheter for endoscopic high-speed optical coherence tomography,” Opt. Express 15(26), 18130–18140 (2007).
[CrossRef] [PubMed]

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Brand, B.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Brand, S.

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

Brenner, M.

Brezinski, M. E.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Calmes, S.

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
[CrossRef]

Cense, B.

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

Chak, A.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Chang, W.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Chen, Y.

Chen, Z.

Chiou, S.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Chong, T. C.

J. P. Yang, X. C. Deng, and T. C. Chong, “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” J. Micromech. Microeng. 15(5), 958–965 (2005).
[CrossRef]

Chumakov, Y.

Cobb, M. J.

Compton, C. C.

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

Conry, M.

Cousseau, P.

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

de Boer, J. F.

K. H. Kim, B. H. Park, G. N. Maguluri, T. W. Lee, F. J. Rogomentich, M. G. Bancu, B. E. Bouma, J. F. de Boer, and J. J. Bernstein, “Two-axis magnetically-driven MEMS scanning catheter for endoscopic high-speed optical coherence tomography,” Opt. Express 15(26), 18130–18140 (2007).
[CrossRef] [PubMed]

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

Deng, X. C.

J. P. Yang, X. C. Deng, and T. C. Chong, “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” J. Micromech. Microeng. 15(5), 958–965 (2005).
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Denisenko, A.

Desjardins, A. E.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Drexler, W.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Duker, J. S.

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

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B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Fan, L.

Fedder, G. K.

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

H. Xie, Y. Pan, and G. K. Fedder, “Endoscopic opical coherence tomographic imaging with a CMOS MEMS micromirror,” Sens. Actuators, A 103(1-2), 237–241 (2003).
[CrossRef]

Y. Pan, H. Xie, and G. K. Fedder, “Endoscopic optical coherence tomography based on a microelectromechanical mirror,” Opt. Lett. 26(24), 1966–1968 (2001).
[CrossRef]

Feldchtein, F.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

A. Sergeev, V. Gelikonov, G. Gelikonov, F. Feldchtein, R. Kuranov, N. Gladkova, N. Shakhova, L. Snopova, A. Shakhov, I. Kuznetzova, A. Denisenko, V. Pochinko, Y. Chumakov, and O. Streltzova, “In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa,” Opt. Express 1(13), 432–440 (1997).
[CrossRef] [PubMed]

Flotte, T.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Freund, J.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Fritscher-Ravens, A.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Fujimoto, J. G.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
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A A. D. Aguirre, P. R. Hertz, Y. Chen, J. G. Fujimoto, W. Piyawattanametha, L. Fan, and M. C. Wu, “Two-axis MEMS scanning catheter for ultrahigh resolution three-dimensional and en face Imaging,” Opt. Express 15(5Issue 5), 2445–2453 (2007).
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J. G. Fujimoto, “Optical coherence tomography for ultrahigh resolution in vivo imaging,” Nat. Biotechnol. 21(11), 1361–1367 (2003).
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X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Gelikonov, G.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

A. Sergeev, V. Gelikonov, G. Gelikonov, F. Feldchtein, R. Kuranov, N. Gladkova, N. Shakhova, L. Snopova, A. Shakhov, I. Kuznetzova, A. Denisenko, V. Pochinko, Y. Chumakov, and O. Streltzova, “In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa,” Opt. Express 1(13), 432–440 (1997).
[CrossRef] [PubMed]

Gelikonov, V.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

A. Sergeev, V. Gelikonov, G. Gelikonov, F. Feldchtein, R. Kuranov, N. Gladkova, N. Shakhova, L. Snopova, A. Shakhov, I. Kuznetzova, A. Denisenko, V. Pochinko, Y. Chumakov, and O. Streltzova, “In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa,” Opt. Express 1(13), 432–440 (1997).
[CrossRef] [PubMed]

Gladkova, N.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

A. Sergeev, V. Gelikonov, G. Gelikonov, F. Feldchtein, R. Kuranov, N. Gladkova, N. Shakhova, L. Snopova, A. Shakhov, I. Kuznetzova, A. Denisenko, V. Pochinko, Y. Chumakov, and O. Streltzova, “In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa,” Opt. Express 1(13), 432–440 (1997).
[CrossRef] [PubMed]

Gregory, K.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
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Gu, C.

Guo, S.

Hah, D.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Hee, M. R.

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Hertz, P. R.

Hoshino, K.

K. Kumar, K. Hoshino, and X. Zhang, “Handheld subcellular-resolution single-fiber confocal microscope using high-reflectivity two-axis vertical combdrive silicon microscanner,” Biomed. Microdevices 10(5), 653–660 (2008).
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Hsieh, T.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Huang, D.

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Huang, Q.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Hyle Park, B.

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

Isenberg, G. A.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
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Izatt, J. A.

J. M. Zara, S. Yazdanfar, K. D. Rao, J. A. Izatt, and S. W. Smith, “Electrostatic micromachine scanning mirror for optical coherence tomography,” Opt. Lett. 28(8), 628–630 (2003).
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M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

Jäckle, S.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
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A. Jain and H. Xie, “An electrothermal microlens scanner with low-voltage, large-vertical-displacement actuation,” IEEE Photon. Technol. Lett. 17(9), 1971–1973 (2005).
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A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

Jung, W.

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Kim, K. H.

Kimmey, M. B.

Klein, M.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Kobayashi, K.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Kopa, A.

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

Krinsky, M. L.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Kumar, K.

K. Kumar, K. Hoshino, and X. Zhang, “Handheld subcellular-resolution single-fiber confocal microscope using high-reflectivity two-axis vertical combdrive silicon microscanner,” Biomed. Microdevices 10(5), 653–660 (2008).
[CrossRef] [PubMed]

Kuranov, R.

Kuznetzova, I.

Lammel, G.

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
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Laudon, M.

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
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Lee, H. C.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Lee, T. W.

Li, G. P.

Li, X.

Li, X. D.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Lin, C. P.

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Liu, X.

Maguluri, G. N.

Mashimo, H.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

McCormick, D. T.

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Mukai, D. S.

Mutinga, M.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Nelson, J. S.

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

Nishioka, N. S.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

Oh, W. Y.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Pan, Y.

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

H. Xie, Y. Pan, and G. K. Fedder, “Endoscopic opical coherence tomographic imaging with a CMOS MEMS micromirror,” Sens. Actuators, A 103(1-2), 237–241 (2003).
[CrossRef]

Y. Pan, H. Xie, and G. K. Fedder, “Endoscopic optical coherence tomography based on a microelectromechanical mirror,” Opt. Lett. 26(24), 1966–1968 (2001).
[CrossRef]

Park, B. H.

K. H. Kim, B. H. Park, G. N. Maguluri, T. W. Lee, F. J. Rogomentich, M. G. Bancu, B. E. Bouma, J. F. de Boer, and J. J. Bernstein, “Two-axis magnetically-driven MEMS scanning catheter for endoscopic high-speed optical coherence tomography,” Opt. Express 15(26), 18130–18140 (2007).
[CrossRef] [PubMed]

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

Pedut-Kloizman, T.

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

Pierce, M. C.

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

Pitris, C.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Piyawattanametha, W.

Pochinko, V.

Poneros, J. M.

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

Puliafito, C. A.

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Rao, K. D.

Reichel, E.

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

Renaud, Ph.

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
[CrossRef]

Rogomentich, F. J.

Rollins, A. M.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Saxer, C.

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

Schmitt, J. M.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Schröder, S.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Schuman, J. S.

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Schweizer, S.

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
[CrossRef]

Seitz, U.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Sergeev, A.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

A. Sergeev, V. Gelikonov, G. Gelikonov, F. Feldchtein, R. Kuranov, N. Gladkova, N. Shakhova, L. Snopova, A. Shakhov, I. Kuznetzova, A. Denisenko, V. Pochinko, Y. Chumakov, and O. Streltzova, “In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa,” Opt. Express 1(13), 432–440 (1997).
[CrossRef] [PubMed]

Shakhov, A.

Shakhova, N.

Sheridan, R. L.

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

Shishko, M.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Sivak, M. V.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Smith, S. W.

Snopova, L.

Soehendra, N.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Southern, J. F.

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Srinivas, S. M.

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

Stinson, W. G.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Streltzova, O.

Sun, C.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Suter, M. J.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Swanson, E. A.

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

E. A. Swanson, D. Huang, M. R. Hee, J. G. Fujimoto, C. P. Lin, and C. A. Puliafito, “High-speed optical coherence domain reflectometry,” Opt. Lett. 17(2), 151–153 (1992).
[CrossRef] [PubMed]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

Tearney, G. J.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Terentieva, A.

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

Tien, N. C.

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Tran, P. H.

Tsai, J.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Tsai, T. H.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Ung-Runyawee, R.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Vakoc, B. J.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Van Dam, J.

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

Wang, F.

Wang, L.

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Wang, Y.

Welzel, J.

J. Welzel, “Optical coherence tomography in dermatology: a review,” Skin Res. Technol. 7, 1–9 (2001).
[CrossRef] [PubMed]

Willis, J.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Wong, B. J. F.

Wong, R. C.

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

Wu, J.

Wu, L.

L. Wu and H. Xie, “A large vertical displacement electrothermal bimorph microactuator with very small lateral shift,” Sens. Actuators, A 145–146, 371–379 (2008).

Wu, M. C.

Wu, M. D.

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Xie, H.

L. Wu and H. Xie, “A large vertical displacement electrothermal bimorph microactuator with very small lateral shift,” Sens. Actuators, A 145–146, 371–379 (2008).

A. Jain and H. Xie, “An electrothermal microlens scanner with low-voltage, large-vertical-displacement actuation,” IEEE Photon. Technol. Lett. 17(9), 1971–1973 (2005).
[CrossRef]

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

H. Xie, Y. Pan, and G. K. Fedder, “Endoscopic opical coherence tomographic imaging with a CMOS MEMS micromirror,” Sens. Actuators, A 103(1-2), 237–241 (2003).
[CrossRef]

Y. Pan, H. Xie, and G. K. Fedder, “Endoscopic optical coherence tomography based on a microelectromechanical mirror,” Opt. Lett. 26(24), 1966–1968 (2001).
[CrossRef]

Yang, C.

Yang, J. P.

J. P. Yang, X. C. Deng, and T. C. Chong, “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” J. Micromech. Microeng. 15(5), 958–965 (2005).
[CrossRef]

Yaqoob, Z.

Yazdanfar, S.

Yun, S. H.

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

Zara, J. M.

Zhang, J.

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Zhang, X.

K. Kumar, K. Hoshino, and X. Zhang, “Handheld subcellular-resolution single-fiber confocal microscope using high-reflectivity two-axis vertical combdrive silicon microscanner,” Biomed. Microdevices 10(5), 653–660 (2008).
[CrossRef] [PubMed]

Zhou, C.

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Appl. Phys. Lett. (1)

W. Jung, D. T. McCormick, J. Zhang, L. Wang, N. C. Tien, and Z. Chen, “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Appl. Phys. Lett. 88(16), 163901 (2006).
[CrossRef]

Biomed. Microdevices (1)

K. Kumar, K. Hoshino, and X. Zhang, “Handheld subcellular-resolution single-fiber confocal microscope using high-reflectivity two-axis vertical combdrive silicon microscanner,” Biomed. Microdevices 10(5), 653–660 (2008).
[CrossRef] [PubMed]

Burns (1)

M. C. Pierce, R. L. Sheridan, B. Hyle Park, B. Cense, and J. F. de Boer, “Collagen denaturation can be quantified in burned human skin using polarization-sensitive optical coherence tomography,” Burns 30(6), 511–517 (2004).
[CrossRef] [PubMed]

Curr. Opin. Ophthalmol. (1)

J. S. Schuman, M. R. Hee, A. V. Arya, T. Pedut-Kloizman, C. A. Puliafito, J. G. Fujimoto, and E. A. Swanson, “Optical coherence tomography: a new tool for glaucoma diagnosis,” Curr. Opin. Ophthalmol. 6(2), 89–95 (1995).
[PubMed]

Endoscopy (3)

S. Jäckle, N. Gladkova, F. Feldchtein, A. Terentieva, B. Brand, G. Gelikonov, V. Gelikonov, A. Sergeev, A. Fritscher-Ravens, J. Freund, U. Seitz, S. Schröder, and N. Soehendra, “In vivo endoscopic optical coherence tomography of esophagitis, Barrett’s esophagus, and adenocarcinoma of the esophagus,” Endoscopy 32(10), 750–755 (2000).
[CrossRef] [PubMed]

X. D. Li, S. A. Boppart, J. Van Dam, H. Mashimo, M. Mutinga, W. Drexler, M. Klein, C. Pitris, M. L. Krinsky, M. E. Brezinski, and J. G. Fujimoto, “Optical coherence tomography: advanced technology for the endoscopic imaging of Barrett’s esophagus,” Endoscopy 32(12), 921–930 (2000).
[CrossRef]

D. C. Adler, C. Zhou, T. H. Tsai, H. C. Lee, L. Becker, J. M. Schmitt, Q. Huang, J. G. Fujimoto, and H. Mashimo, “Three-dimensional optical coherence tomography of Barrett’s esophagus and buried glands beneath neosquamous epithelium following radiofrequency ablation,” Endoscopy 41(9), 773–776 (2009).
[CrossRef] [PubMed]

Gastroenterology (1)

J. M. Poneros, S. Brand, B. E. Bouma, G. J. Tearney, C. C. Compton, and N. S. Nishioka, “Diagnosis of specialized intestinal metaplasia by optical coherence tomography,” Gastroenterology 120(1), 7–12 (2001).
[CrossRef] [PubMed]

Gastrointest. Endosc. (2)

M. V. Sivak, K. Kobayashi, J. A. Izatt, A. M. Rollins, R. Ung-Runyawee, A. Chak, R. C. Wong, G. A. Isenberg, and J. Willis, “High-resolution endoscopic imaging of the GI tract using optical coherence tomography,” Gastrointest. Endosc. 51(4 Pt 1), 474–479 (2000).
[CrossRef] [PubMed]

B. J. Vakoc, M. Shishko, S. H. Yun, W. Y. Oh, M. J. Suter, A. E. Desjardins, J. A. Evans, N. S. Nishioka, G. J. Tearney, and B. E. Bouma, “Comprehensive esophageal microscopy by using optical frequency-domain imaging (with video),” Gastrointest. Endosc. 65(6), 898–905 (2007).
[CrossRef] [PubMed]

IEEE J. Sel. Top. Quantum Electron. (1)

A. Jain, A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, “A two-axis electrothermal micromirror for endoscopic optical coherence tomography,” IEEE J. Sel. Top. Quantum Electron. 10, 636–642 (2004).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

A. Jain and H. Xie, “An electrothermal microlens scanner with low-voltage, large-vertical-displacement actuation,” IEEE Photon. Technol. Lett. 17(9), 1971–1973 (2005).
[CrossRef]

J. Biomed. Opt. (1)

B. H. Park, C. Saxer, S. M. Srinivas, J. S. Nelson, and J. F. de Boer, “In vivo burn depth determination by high-speed fiber-based polarization sensitive optical coherence tomography,” J. Biomed. Opt. 6(4), 474–479 (2001).
[CrossRef] [PubMed]

J. Micromech. Microeng. (1)

J. P. Yang, X. C. Deng, and T. C. Chong, “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” J. Micromech. Microeng. 15(5), 958–965 (2005).
[CrossRef]

J. Opt. A, Pure Appl. Opt. (1)

J. Tsai, S. Chiou, T. Hsieh, C. Sun, D. Hah, and M. D. Wu, “Vertical combdrive actuators-design, theoretical analysis, and fabrication,” J. Opt. A, Pure Appl. Opt. 10, 044006 (2008).
[CrossRef]

Nat. Biotechnol. (1)

J. G. Fujimoto, “Optical coherence tomography for ultrahigh resolution in vivo imaging,” Nat. Biotechnol. 21(11), 1361–1367 (2003).
[CrossRef] [PubMed]

Ophthalmology (1)

C. A. Puliafito, M. R. Hee, C. P. Lin, E. Reichel, J. S. Schuman, J. S. Duker, J. A. Izatt, E. A. Swanson, and J. G. Fujimoto, “Imaging of macular diseases with optical coherence tomography,” Ophthalmology 102(2), 217–229 (1995).
[PubMed]

Opt. Express (3)

Opt. Lett. (7)

Science (2)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991).
[CrossRef] [PubMed]

G. J. Tearney, M. E. Brezinski, B. E. Bouma, S. A. Boppart, C. Pitris, J. F. Southern, and J. G. Fujimoto, “In vivo endoscopic optical biopsy with optical coherence tomography,” Science 276(5321), 2037–2039 (1997).
[CrossRef] [PubMed]

Sens. Actuators (2)

S. Schweizer, S. Calmes, M. Laudon, and Ph. Renaud, “Thermally actuated optical microscanner with large angle and low consumption,” Sens. Actuators 76(1-3), 470–477 (1999).
[CrossRef]

S. Schweizer, P. Cousseau, G. Lammel, S. Calmes, and Ph. Renaud, “Two-dimensional thermally actuated optical microprojector,” Sens. Actuators 85(1-3), 424–429 (2000).
[CrossRef]

Sens. Actuators, A (2)

L. Wu and H. Xie, “A large vertical displacement electrothermal bimorph microactuator with very small lateral shift,” Sens. Actuators, A 145–146, 371–379 (2008).

H. Xie, Y. Pan, and G. K. Fedder, “Endoscopic opical coherence tomographic imaging with a CMOS MEMS micromirror,” Sens. Actuators, A 103(1-2), 237–241 (2003).
[CrossRef]

Skin Res. Technol. (1)

J. Welzel, “Optical coherence tomography in dermatology: a review,” Skin Res. Technol. 7, 1–9 (2001).
[CrossRef] [PubMed]

Other (3)

J.J. Bernstein, T.W. Lee, F.J. Rogomentich, M.G. Bancu, K.H. Kim, G. Maguluri, B.E. Bouma, and J.F. DeBoer, “Magnetic two-axis micromirror for 3D OCT endoscopy,” Technical Digest of Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, June 4–8, 2006, pp. 7–10.

D. Hah, S. Huang, H. Hguyen, H. Chang, and M.C. Wu, “A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuation for WDM routers,” Optical Fiber Communication Conference and Exhibit, (2002).

J. A. Ayers, W. C. Tang, and Z. Chen, “360°Rotating Micro Mirror for Transmitting and Sensing Optical Coherence Tomography Signals,” IEEE Proceedings (2004).

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Figures (9)

Fig. 1
Fig. 1

Schematic of the 2D micromirror design. (a) Top view of the MEMS mirror. (b) Schematic showing actuation principle of a LSF-LVD actuator with initial elevation.

Fig. 2
Fig. 2

Scanning electron micrographs of the 2D MEMS mirror: (a) the whole device, (b) the LSF-LVD actuator, and (c) the first bimorph section.

Fig. 3
Fig. 3

Simplified fabrication process flow for the MEMS mirror.

Fig. 4
Fig. 4

MEMS mirror experimental results: (a) vertical displacement versus voltage; (b) optical scan angles versus voltage applied on each actuator; (c) linear fit of measured optical angle by driving actuator 1; (d) optical scan angles versus current consumption; (e) frequency response of the MEMS mirror (f) a raster scan pattern; and (g) a Lissajous scan pattern.

Fig. 5
Fig. 5

MEMS probe design schematic. (a) 3D model of the probe design. (b) Optical design of the probe (not drawn to scale).

Fig. 6
Fig. 6

OCT probe. (a) Packaged 3D MEMS OCT probe. (b) Close-up of the assembled MEMS OCT probe.

Fig. 7
Fig. 7

OCT system schematic.

Fig. 8
Fig. 8

2D and 3D in vivo OCT images of mouse tongue.

Fig. 9
Fig. 9

2D and 3D in vivo images of mouse ear.

Tables (1)

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Table 1 Comparison Between Different Actuation Mechanisms

Equations (2)

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l 1 = l 3 = 1 2 l 2 ,
L 1 = L 2 ,

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