Abstract

We design and fabricate pedestal-type, 15 μm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 μm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of ~34,000 (λres = 1523.7nm) and energy overlap in slot region of 21.6%.

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2009 (8)

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009).
[CrossRef]

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009).
[CrossRef] [PubMed]

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17(23), 20911–20919 (2009).
[CrossRef] [PubMed]

2008 (5)

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

H. G. Yoo, Y. Fu, D. Riley, J. H. Shin, and P. M. Fauchet, “Birefringence and optical power confinement in horizontal multi-slot waveguides made of Si and SiO2.,” Opt. Express 16(12), 8623–8628 (2008).
[CrossRef] [PubMed]

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16(6), 4296–4301 (2008).
[CrossRef] [PubMed]

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

2007 (4)

2005 (1)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

2004 (1)

2003 (2)

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

T. Barwicz and H. I. Smith, “Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices,” J. Vac. Sci. Technol. B 21(6), 2892–2896 (2003).
[CrossRef]

Ahn, D.

Almeida, V. R.

Andreani, L. C.

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

Atwater, H. A.

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

Baehr-Jones, T.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

Baets, R.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Barrios, C. A.

Barwicz, T.

T. Barwicz and H. I. Smith, “Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices,” J. Vac. Sci. Technol. B 21(6), 2892–2896 (2003).
[CrossRef]

Beals, M.

Biaggio, I.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Bogaerts, W.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Briggs, R. M.

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

Casquel, R.

Chang, J. S.

J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009).
[CrossRef]

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

Chen, J.

Chen, L.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009).
[CrossRef] [PubMed]

J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16(6), 4296–4301 (2008).
[CrossRef] [PubMed]

Cluzel, B.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Creatore, C.

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

Dalton, L.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Davies, J.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

de Fornel, F.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Delamadeleine, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Diederich, F.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Dong, P.

Dumon, P.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Eom, S. C.

Erickson, D.

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

Esembeson, B.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Fauchet, P. M.

Feng, N. N.

Foubert, K.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Freude, W.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Fu, Y.

Giziewicz, W.

Gondarenko, A.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Griol, A.

Gylfason, K. B.

Hadji, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Hochberg, M.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

Holgado, M.

Hong, C. Y.

Huang, J.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Jen, A.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Jiang, X.

Kärtner, F. X.

Khan, M. H.

Kim, M.-K.

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

Kim, T.-D.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Kimerling, L.

Kimerling, L. C.

Kippenberg, T. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Klug, M.

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

Koch, T. L.

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

Koos, C.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Lalouat, L.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Lee, Y.-H.

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

Leuthold, J.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Li, J.

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

Lin, Q.

Lipson, M.

Liu, J.

Lo Savio, R.

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

Luo, J.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Michel, J.

Michinobu, T.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Miritello, M.

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

Moore, S. D.

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

Pafchek, R. M.

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

Painter, O.

Painter, O. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Penkov, B.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Peyrade, D.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Picard, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

Priolo, F.

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

Qi, M.

Riley, D.

Robinson, J. T.

Rosenberg, J.

Sánchez, B.

Scherer, A.

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

Schmidt, B. S.

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

Shearn, M.

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

Shen, H.

Shin, J. H.

Smith, H. I.

T. Barwicz and H. I. Smith, “Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices,” J. Vac. Sci. Technol. B 21(6), 2892–2896 (2003).
[CrossRef]

Sohlström, H.

Spillane, S. M.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Sullivan, P.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Sun, R.

Sung, G. Y.

J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009).
[CrossRef]

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

Takayesu, J.

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

Tummidi, R. S.

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

Vahala, K.

Vahala, K. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Vallaitis, T.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Vorreau, P.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

Wiederhecker, G. S.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Xiao, S.

Xu, Q.

Yang, A. H. J.

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

Yoo, H. G.

Appl. Phys. Lett. (5)

T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008).
[CrossRef]

C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009).
[CrossRef]

R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[CrossRef]

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009).
[CrossRef]

J. Vac. Sci. Technol. B (1)

T. Barwicz and H. I. Smith, “Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices,” J. Vac. Sci. Technol. B 21(6), 2892–2896 (2003).
[CrossRef]

Nat. Photonics (1)

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[CrossRef]

Nature (2)

A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009).
[CrossRef] [PubMed]

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Opt. Express (7)

Opt. Lett. (2)

Phys. Rev. Lett. (1)

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Proc. SPIE (1)

J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

(a) SEM image of the deposited multilayer thin film prior to disk formation. (b) SEM image of the fabricated microdisk. The inset shows the disk edge in detail, showing the presence of air-slot. The scale in the inset is 500 nm. (c) Cross-section TEM image of the fabricated microdisk. (d) Optical microscope image of the overall disk.

Fig. 2
Fig. 2

(a) Simulated |E|2 profile of a TM-like whispering gallery mode (m = 44, λ = 1530.5nm) of a hypothetical resonator with the 40 nm air-slot extending across the entire disk area; (b) Same as in (a), but with 40 nm air-slot extending 3.5 μm from the disk-edge; (c) Simulated resonance peak positions obtained by Fourier transform of |E|2. The width of the resonant peaks are determined by the number of data points, and does not reflect the quality factor of the microresonators ; (d) Cross-section of E-field intensity calculated for 15 μm diameter air-slot resonator with vertical and 10° sloped sidewall. The center of the mode (Rm) shifts slight inward from 7.1 μm to 7.05 μm, and also slightly upward; (e) Simulated resonance peak positions obtained by Fourier transform of |E|2.

Fig. 3
Fig. 3

The transmissions spectra of TE-like and TM-like modes, measured from the same disk before and after the air-slot formation. The red arrows indicate the calculated positions of fundamental TM-like slot modes.

Fig. 4
Fig. 4

(a) The transmissions spectra of a single SiNx disk, fabricated by removing the top disk through completely etching away the SiO2 spacer layer. No TM-like mode can be observed but TE-like modes are slightly mixed. The inset shows the SEM image of the bottom disk after removal of the top disk. (b) AFM image of the top surface of the bottom disk thus exposed. The RMS roughness is 0.51 nm only.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

slot ε (r)|E(r)| 2 dxdy  /  ε (r)|E(r)| 2 dxdy .
1/ τ m e a s u r e d   = 1 / τ f i b e r + 1 / τ c a v i t y = FWHM,
Transmission  = ( 1 / τ c a v i t y 1 / τ f i b e r ) 2 ( 1 / τ c a v i t y + 1 / τ f i b e r ) 2 .

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