Abstract

Sub-wavelength antireflective structures are fabricated on a silicon nitride passivation layer of a Ga0.5In0.5P/GaAs/Ge triple-junction solar cell using polystyrene nanosphere lithography followed by anisotropic etching. The fabricated structures enhance optical transmission in the ultraviolet wavelength range, compared to a conventional single-layer antireflective coating (ARC). The transmission improvement contributes to an enhanced photocurrent, which is also verified by the external quantum efficiency characterization of the fabricated solar cells. Under one-sun illumination, the short-circuit current of a cell with sub-wavelength structures is enhanced by 46.1% and 3.4% due to much improved optical transmission and current matching, compared to cells without an ARC and with a conventional SiNx ARC, respectively. Further optimizations of the sub-wavelength structures including the periodicity and etching depth are conducted by performing comprehensive calculations based on a rigorous couple-wave analysis method.

© 2010 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. M. Olson, D. J. Friedman, and S. Kurtz, “High-efficiency III-V multijunction solar cells high-efficiency III-V multijunction solar cells,” in Handbook of Photovoltaic Science and Engineering, A. Luque and S. Hegedus, eds. (Academic, 2003).
  2. M. Yamaguchi, “III-V compound multi-junction solar cells: present and future,” Sol. Energy Mater. Sol. Cells 75(1-2), 261–269 (2003).
    [CrossRef]
  3. M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
    [CrossRef]
  4. G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
    [CrossRef]
  5. D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
    [CrossRef] [PubMed]
  6. A. R. Parker and H. E. Townley, “Biomimetics of photonic nanostructures,” Nat. Nanotechnol. 2(6), 347–353 (2007).
    [CrossRef]
  7. Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
    [CrossRef]
  8. D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
    [CrossRef]
  9. H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
    [CrossRef]
  10. C. H. Chiu, P. Yu, H. C. Kuo, C. C. Chen, T. C. Lu, S. C. Wang, S. H. Hsu, Y. J. Cheng, and Y. C. Chang, “Broadband and omnidirectional antireflection employing disordered GaN nanopillars,” Opt. Express 16(12), 8748–8754 (2008).
    [CrossRef] [PubMed]
  11. Y. Kanamori, M. Sasaki, and K. Hane, “Broadband antireflection gratings fabricated upon silicon substrates,” Opt. Lett. 24(20), 1422–1424 (1999).
    [CrossRef]
  12. Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
    [CrossRef]
  13. K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
    [CrossRef]
  14. E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc. 130(29), 9224–9225 (2008).
    [CrossRef] [PubMed]
  15. K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
    [CrossRef] [PubMed]
  16. B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
    [CrossRef]
  17. H. L. Chen, S. Y. Chuang, C. H. Lin, and Y. H. Lin, “Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells,” Opt. Express 15(22), 14793–14803 (2007).
    [CrossRef] [PubMed]
  18. C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
    [CrossRef]
  19. C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
    [CrossRef]
  20. C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
    [CrossRef]
  21. Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).
  22. Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
    [CrossRef]
  23. K. Emery, “Measurement and characterization of solar cells and modules,” in Handbook of Photovoltaic Science and Engineering, A. Luque and S. Hegedus, eds. (Academic, 2003).
  24. D. J. Friedman, J. M. Olson, S. Ward, T. Moriarty, K. Emery, S. Kurtz, and A. Duda, “Ge concentrator cells for III-V multijunction devices,” in Proc. 28 th IEEE Photovoltaic Specialists Conference, (Academic, 2000), pp. 965–967.
  25. M. Nevière, and E. Popov, Light Propagation in Periodic Media (Marcel Dekker, 2003).

2009

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

2008

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc. 130(29), 9224–9225 (2008).
[CrossRef] [PubMed]

C. H. Chiu, P. Yu, H. C. Kuo, C. C. Chen, T. C. Lu, S. C. Wang, S. H. Hsu, Y. J. Cheng, and Y. C. Chang, “Broadband and omnidirectional antireflection employing disordered GaN nanopillars,” Opt. Express 16(12), 8748–8754 (2008).
[CrossRef] [PubMed]

2007

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[CrossRef]

A. R. Parker and H. E. Townley, “Biomimetics of photonic nanostructures,” Nat. Nanotechnol. 2(6), 347–353 (2007).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
[CrossRef]

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

H. L. Chen, S. Y. Chuang, C. H. Lin, and Y. H. Lin, “Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells,” Opt. Express 15(22), 14793–14803 (2007).
[CrossRef] [PubMed]

2006

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

2005

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

2003

M. Yamaguchi, “III-V compound multi-junction solar cells: present and future,” Sol. Energy Mater. Sol. Cells 75(1-2), 261–269 (2003).
[CrossRef]

1999

Abbott, S.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Allsopp, D. W. E.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Arafune, K.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

Arikawa, K.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Chan, C. H.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Chang, C. W.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Chang, E. Y.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Chang, Y. C.

Chang, Y. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Chattopadhyay, S.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Chen, A.

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

Chen, C. C.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

C. H. Chiu, P. Yu, H. C. Kuo, C. C. Chen, T. C. Lu, S. C. Wang, S. H. Hsu, Y. J. Cheng, and Y. C. Chang, “Broadband and omnidirectional antireflection employing disordered GaN nanopillars,” Opt. Express 16(12), 8748–8754 (2008).
[CrossRef] [PubMed]

Chen, C.-C.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Chen, H. L.

Chen, K. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Chen, L. C.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Chen, Q.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Chen, T. J.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Cheng, Y. J.

Chien, H. T.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Chiu, C. H.

Chua, S.-J.

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

Chuang, S. Y.

Conibeer, G.

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[CrossRef]

Connor, S. T.

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

Cui, Y.

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

Dong, H.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Emery, K.

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

Foletti, S.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Garnett, E. C.

E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc. 130(29), 9224–9225 (2008).
[CrossRef] [PubMed]

Green, M. A.

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

Hane, K.

Hishikawa, Y.

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

Hobbs, D. S.

D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
[CrossRef]

Hou, C. H.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Hsiao, F. L.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Hsu, C. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Hsu, C.-M.

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

Hsu, J. W. P.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Hsu, S. H.

Hsu, Y. K.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Huang, J. H.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Huang, Y. F.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Hubbard, G.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Jen, Y. J.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Jia, F.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Jiang, B.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

Jiang, P.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

Kanamori, Y.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

Y. Kanamori, M. Sasaki, and K. Hane, “Broadband antireflection gratings fabricated upon silicon substrates,” Opt. Lett. 24(20), 1422–1424 (1999).
[CrossRef]

Kuo, H. C.

Lee, C. C.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Lee, C. S.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Lee, S. T.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Lee, Y.-J.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Li, H.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Li, Y.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Lin, C. H.

Lin, M. K.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Lin, Y. H.

Liu, C.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Liu, T. A.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Lo, H. C.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Lu, T. C.

Lu, Y. Y.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

MacLeod, B. D.

D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
[CrossRef]

McKenzie, B. B.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Ohshita, Y.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

Palasantzas, G.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Pan, C. L.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Parker, A. R.

A. R. Parker and H. E. Townley, “Biomimetics of photonic nanostructures,” Nat. Nanotechnol. 2(6), 347–353 (2007).
[CrossRef]

Peng, C. Y.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Peng, K.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Peters, D. W.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Riccobono, J. R.

D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
[CrossRef]

Ruby, D. S.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Sahoo, K. C.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Sai, H.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

Sasaki, M.

Shields, A.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Stavenga, D. G.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Sun, C. H.

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

Sun, Z.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Tang, M. X.

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

Townley, H. E.

A. R. Parker and H. E. Townley, “Biomimetics of photonic nanostructures,” Nat. Nanotechnol. 2(6), 347–353 (2007).
[CrossRef]

Tsai, Y. L.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Tseng, S. Z.

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

Wang, B.

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

Wang, S. C.

Wang, W. N.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

Wang, Z.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Warta, W.

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

Wu, Y.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Xu, W.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Xu, Y.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Yamaguchi, M.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

M. Yamaguchi, “III-V compound multi-junction solar cells: present and future,” Sol. Energy Mater. Sol. Cells 75(1-2), 261–269 (2003).
[CrossRef]

Yan, Y.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Yang, B.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Yang, P.

E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc. 130(29), 9224–9225 (2008).
[CrossRef] [PubMed]

Yu, P.

Zhang, J.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Zhang, L.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Zhao, W.

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

Zhu, J.

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Zhu, S.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Adv. Mater.

Y. Li, J. Zhang, S. Zhu, H. Dong, F. Jia, Z. Wang, Z. Sun, L. Zhang, Y. Li, H. Li, W. Xu, and B. Yang, “Biomimetic surfaces for high-performance optics,” Adv. Mater. 21, 4731–4734 (2009).

Appl. Phys. Lett.

Q. Chen, G. Hubbard, A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94(26), 263118 (2009).
[CrossRef]

C. H. Sun, P. Jiang, and B. Jiang, “Broadband moth-eye antireflection coatings on silicon,” Appl. Phys. Lett. 92(6), 061112 (2008).
[CrossRef]

C.-M. Hsu, S. T. Connor, M. X. Tang, and Y. Cui, “Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching,” Appl. Phys. Lett. 93(13), 133109 (2008).
[CrossRef]

C. H. Chan, C. H. Hou, S. Z. Tseng, T. J. Chen, H. T. Chien, F. L. Hsiao, C. C. Lee, Y. L. Tsai, and C.-C. Chen, “Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate,” Appl. Phys. Lett. 95(1), 011110 (2009).
[CrossRef]

J. Am. Chem. Soc.

E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc. 130(29), 9224–9225 (2008).
[CrossRef] [PubMed]

J. Cryst. Growth

B. Wang, W. Zhao, A. Chen, and S.-J. Chua, “Formation of nanoimprinting mould through use of nanosphere lithography,” J. Cryst. Growth 288(1), 200–204 (2006).
[CrossRef]

Mater. Today

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[CrossRef]

Nano Lett.

Y.-J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett. 8(5), 1501–1505 (2008).
[CrossRef]

Nanoscale Res. Lett.

K. C. Sahoo, M. K. Lin, E. Y. Chang, Y. Y. Lu, C. C. Chen, J. H. Huang, and C. W. Chang, “Fabrication of antireflective sub-wavelength structures on silicon nitride using nano cluster mask for solar cell application,” Nanoscale Res. Lett. 4(7), 680–683 (2009).
[CrossRef] [PubMed]

Nat. Nanotechnol.

A. R. Parker and H. E. Townley, “Biomimetics of photonic nanostructures,” Nat. Nanotechnol. 2(6), 347–353 (2007).
[CrossRef]

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef]

Opt. Express

Opt. Lett.

Proc. Biol. Sci.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci. 273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Proc. SPIE

D. S. Hobbs, B. D. MacLeod, and J. R. Riccobono, “Update on the development of high performance anti-reflecting surface relief micro-structures,” Proc. SPIE 6545, 65450Y (2007).
[CrossRef]

Prog. Photovolt. Res. Appl.

H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, “Light trapping effect of submicron surface textures in crystalline Si solar cells,” Prog. Photovolt. Res. Appl. 15(5), 415–423 (2007).
[CrossRef]

M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, “Solar cell efficiency tables (version 34),” Prog. Photovolt. Res. Appl. 17(5), 320–326 (2009).
[CrossRef]

Small

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small 1(11), 1062–1067 (2005).
[CrossRef]

Sol. Energy Mater. Sol. Cells

M. Yamaguchi, “III-V compound multi-junction solar cells: present and future,” Sol. Energy Mater. Sol. Cells 75(1-2), 261–269 (2003).
[CrossRef]

Other

J. M. Olson, D. J. Friedman, and S. Kurtz, “High-efficiency III-V multijunction solar cells high-efficiency III-V multijunction solar cells,” in Handbook of Photovoltaic Science and Engineering, A. Luque and S. Hegedus, eds. (Academic, 2003).

K. Emery, “Measurement and characterization of solar cells and modules,” in Handbook of Photovoltaic Science and Engineering, A. Luque and S. Hegedus, eds. (Academic, 2003).

D. J. Friedman, J. M. Olson, S. Ward, T. Moriarty, K. Emery, S. Kurtz, and A. Duda, “Ge concentrator cells for III-V multijunction devices,” in Proc. 28 th IEEE Photovoltaic Specialists Conference, (Academic, 2000), pp. 965–967.

M. Nevière, and E. Popov, Light Propagation in Periodic Media (Marcel Dekker, 2003).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

(a) A large-area scanning electron micrograph of nearly-close-packed polystyrene nanospheres with a 600 nm diameter deposited on SiNx; (b) the cross-sectional view of SiNx sub-wavelength structures resulting from two-step and (c) from one-step etching processes. A thin layer of SiNx ~100 nm thick is kept for passivation.

Fig. 2
Fig. 2

(a) The measured reflectance spectra are plotted for cells with sub-wavelength structures (SWSs) and a conventional single-layer antireflective coating (SL ARC). The green symbol-line represents the calculated reflectance spectra according to the inset 7x7 array model. (b) The measured external quantum efficiency (EQE) of the Ga0.5In0.5P top cell and the GaAs middle cell with SWS, SL ARC and without ARC. The SWS cell shows higher EQEs for λ< 500 nm than the SL ARC cell, consistent with the observation in (a).

Fig. 3
Fig. 3

The calculated reflectance spectra for the wavelength range of λ = 300 nm-1000 nm as a function of (a) the nanosphere diameter, and (b) the structural height. (c) The calculated short circuit current densities as a function of the diameter and height.

Tables (1)

Tables Icon

Table 1 AM 1.5G Current-Voltage Characteristics of Solar Cells with Various Antireflective Coatings (ARCs)

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

J s c = e h c 300 n m 1000 n m λ [ 1 R ( λ ) ] I A M 1.5 G d λ

Metrics