Abstract

We present thermally reconfigurable multiplexing devices based on silicon microring resonators with low tuning power and low thermal crosstalk. Micro-heaters on top of the rings are employed to tune the resonant wavelengths through the thermo-optic effect of silicon. We achieve a low tuning power of 21 mW per free spectral range for a single ring by exploiting thermal isolation trenches close to the ring waveguides. Negligible thermal crosstalk is demonstrated for rings spaced by 15 µm, enabling compact multiplexing devices. The tuning time constant is demonstrated to be less than 10 µs.

© 2010 OSA

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2009 (5)

2008 (5)

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

L. Chen, P. Dong, and M. Lipson, “High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding,” Opt. Express 16(15), 11513–11518 (2008).
[CrossRef] [PubMed]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

2007 (1)

2006 (4)

B. G. Lee, B. A. Small, K. Bergman, Q. Xu, and M. Lipson, “Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator,” Opt. Lett. 31(18), 2701–2703 (2006).
[CrossRef] [PubMed]

B. Jalali, M. Paniccia, and G. Reed, “Silicon Photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006).
[CrossRef]

R. A. Soref, “The past, present and future of silicon photonics,” IEEE. J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

L. C. Kimerling, et al., “Electronic–photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 6–15 (2006).

2005 (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

2004 (2)

T. Fukazawa, F. Ohno, and T. Baba, “Very compact arrayed-waveguide grating demultiplexer using Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 5B), L673–L675 (2004).
[CrossRef]

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

2003 (1)

2000 (1)

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[CrossRef]

Asghari, M.

Baba, T.

T. Fukazawa, F. Ohno, and T. Baba, “Very compact arrayed-waveguide grating demultiplexer using Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 5B), L673–L675 (2004).
[CrossRef]

Baets, R.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Beausoleil, R. G.

Bergman, K.

Biberman, A.

Bogaerts, W.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Brouckaert, J.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Cassan, E.

Chen, L.

Chen, P.

Crozat, P.

Cunningham, J. E.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Damlencourt, J. F.

Daqun, L.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Dong, P.

Dumon, P.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Fattal, D.

Fédéli, J. M.

Feng, D.

Fukazawa, T.

T. Fukazawa, F. Ohno, and T. Baba, “Very compact arrayed-waveguide grating demultiplexer using Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 5B), L673–L675 (2004).
[CrossRef]

Geis, M. W.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

Geng, M.

Green, W. M. J.

F. Horst, W. M. J. Green, B. J. Offrein, and Y. A. Vlasov, “Silicon-on-insulator Echelle grating WDM demultiplexers with two stigmatic points,” IEEE Photon. Technol. Lett. 21(23), 1743–1745 (2009).
[CrossRef]

Han-Yong, N.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Horst, F.

F. Horst, W. M. J. Green, B. J. Offrein, and Y. A. Vlasov, “Silicon-on-insulator Echelle grating WDM demultiplexers with two stigmatic points,” IEEE Photon. Technol. Lett. 21(23), 1743–1745 (2009).
[CrossRef]

Itabashi, S.

Jalali, B.

B. Jalali, M. Paniccia, and G. Reed, “Silicon Photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006).
[CrossRef]

Jia, L.

Jose, M.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Kachesh, P.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Khan, M. H.

Kimerling, L. C.

L. C. Kimerling, et al., “Electronic–photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 6–15 (2006).

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Krishnamoorthy, A. V.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express 17(25), 22484–22490 (2009).
[CrossRef]

Kung, C.-C.

Laval, S.

Lecunff, Y.

Lee, B. G.

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Li, G.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express 17(25), 22484–22490 (2009).
[CrossRef]

Liang, H.

Liao, S.

Lipson, M.

Liu, Y.

Lyszczarz, T. M.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

Marris-Morini, D.

Michael, R. W.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Miller, D. A. B.

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[CrossRef]

Offrein, B. J.

F. Horst, W. M. J. Green, B. J. Offrein, and Y. A. Vlasov, “Silicon-on-insulator Echelle grating WDM demultiplexers with two stigmatic points,” IEEE Photon. Technol. Lett. 21(23), 1743–1745 (2009).
[CrossRef]

Ohno, F.

T. Fukazawa, F. Ohno, and T. Baba, “Very compact arrayed-waveguide grating demultiplexer using Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 5B), L673–L675 (2004).
[CrossRef]

Osmond, J.

Paniccia, M.

B. Jalali, M. Paniccia, and G. Reed, “Silicon Photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006).
[CrossRef]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Qi, M.

Qian, W.

Reed, G.

B. Jalali, M. Paniccia, and G. Reed, “Silicon Photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006).
[CrossRef]

Roberto, R. P.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Selvaraja, S.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Shafiiha, R.

Shen, H.

Sherwood-Droz, N.

Shoji, T.

Shubin, I.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

Small, B. A.

Soref, R. A.

R. A. Soref, “The past, present and future of silicon photonics,” IEEE. J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

Spector, S. J.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

Takahashi, J.

Tsuchizawa, T.

Van Thourhout, D.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

Vivien, L.

Vlasov, Y. A.

F. Horst, W. M. J. Green, B. J. Offrein, and Y. A. Vlasov, “Silicon-on-insulator Echelle grating WDM demultiplexers with two stigmatic points,” IEEE Photon. Technol. Lett. 21(23), 1743–1745 (2009).
[CrossRef]

Wang, H.

Wang, T.

Watanabe, T.

Williamson, R. C.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

Xiao, S.

Xu, Q.

Xuan, W.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Yamada, K.

Yang, L.

Zhang, L.

Zheng, D.

Zheng, X.

P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express 17(25), 22484–22490 (2009).
[CrossRef]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[CrossRef]

IEEE Microw. Mag. (1)

B. Jalali, M. Paniccia, and G. Reed, “Silicon Photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective Bragg reflector facets,” IEEE Photon. Technol. Lett. 20(4), 309–311 (2008).
[CrossRef]

F. Horst, W. M. J. Green, B. J. Offrein, and Y. A. Vlasov, “Silicon-on-insulator Echelle grating WDM demultiplexers with two stigmatic points,” IEEE Photon. Technol. Lett. 21(23), 1743–1745 (2009).
[CrossRef]

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond submilliwatt siliconon-insulator thermooptic switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004).
[CrossRef]

IEEE. J. Sel. Top. Quantum Electron. (1)

R. A. Soref, “The past, present and future of silicon photonics,” IEEE. J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

Jpn. J. Appl. Phys. (1)

T. Fukazawa, F. Ohno, and T. Baba, “Very compact arrayed-waveguide grating demultiplexer using Si photonic wire waveguides,” Jpn. J. Appl. Phys. 43(No. 5B), L673–L675 (2004).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Opt. Eng. (1)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength-reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 044601 (2008).
[CrossRef]

Opt. Express (7)

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple-channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
[CrossRef] [PubMed]

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef] [PubMed]

L. Chen, P. Dong, and M. Lipson, “High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding,” Opt. Express 16(15), 11513–11518 (2008).
[CrossRef] [PubMed]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

M. Geng, L. Jia, L. Zhang, L. Yang, P. Chen, T. Wang, and Y. Liu, “Four-channel reconfigurable optical add-drop multiplexer based on photonic wire waveguide,” Opt. Express 17(7), 5502–5516 (2009).
[CrossRef] [PubMed]

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Figures (6)

Fig. 1
Fig. 1

(a) Cascaded microring resonators to construct (de)multiplexers. (b) Cross section of the ring waveguide proposed to improve tuning efficiency.

Fig. 2
Fig. 2

(a) and (b) Simulated temperature distribution of the heating structures without (a) and (b) with trenches. (c) Phase change of the silicon waveguide underneath the heater. (d) Phase change for a probe waveguide 15 µm away from the original waveguide.

Fig. 3
Fig. 3

Tilted top-view SEM for a fully fabricated two-channel (de)multiplexer. The dashed red lines and blue lines indicate optical pathway and metal pathway.

Fig. 4
Fig. 4

Spectra with various heating powers. The heating is applied to the first ring. Spectra of drop port 1 (a) and port 2 (b) without trenches; Spectra of drop port 1 (c) and port 2 (d) with trenches.

Fig. 5
Fig. 5

Resonance shift versus heating powers.

Fig. 6
Fig. 6

Temporal response of the ring in the drop port.

Tables (1)

Tables Icon

Table 1 Tuning power comparison of previously demonstrated thermally tuned silicon microrings and the device presented in this work.

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