Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits

J. W. Noh, R. Anderson, S. H. Kim, J. Cardenas, and G. P. Nordin, “In-plane photonic transduction of silicon-on-insulator microcantilevers,” Opt. Express 16, 12114–12123 (2008).
[Crossref] [PubMed]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 16, 4745–4752 (2007).
[Crossref]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

D. X. Dai, S. L. He, and H.-K. Tsang, “Bilevel mode converter between a silicon nanowire waveguide and a larger waveguide,” J. Lightwave Technol. 24, 2428–2433 (2006).
[Crossref]

J. K. Doylend and A. P. Knights, “Design and simulation of an integrated fiber-to-chip coupler for silicon-on-insulator waveguides,” IEEE J. Sel. Top. Quantum Electron. 12, 1363–1370 (2006).
[Crossref]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

G. Milton, Y. Gharbia, and J. Katupitiya, “Mechanical fabrication of precision microlenses on optical fiber endfaces,” Opt. Eng. 44, 123402 (2005).
[Crossref]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express. 11, 2927–2939 (2004).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

Z. Lu and D. Prather, “Total internal reflection-evanescent coupler for fiber-to-waveguide integration of planar optoelectric devices,” Opt. Lett. 29, 1748–1750 (2004).
[Crossref] [PubMed]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

T. Alder, A. Stohr, R. Heinzelmann, and D. Jager, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12, 1013–1015 (2000).
[Crossref]

R. Charavel, B. Olbrechts, and J. P. Raskin, “Stress release of PECVD oxide by RTA,” Proc. SPIE 5116, 596–606 (1993).
[Crossref]

H. M. Presby, A. F. Benner, and C. A. Edwards, “Laser micromachining of efficient fiber microlenses,” Appl. Opt. 29, 2692–2695 (1990).
[Crossref] [PubMed]

R. Ulrich, “Theory of the prism-film coupler by plane-wave analysis,” J. Opt. Soc. Am. 60, 1337–1350 (1970).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

T. Alder, A. Stohr, R. Heinzelmann, and D. Jager, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12, 1013–1015 (2000).
[Crossref]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

J. W. Noh, R. Anderson, S. H. Kim, J. Cardenas, and G. P. Nordin, “In-plane photonic transduction of silicon-on-insulator microcantilevers,” Opt. Express 16, 12114–12123 (2008).
[Crossref] [PubMed]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

H. M. Presby, A. F. Benner, and C. A. Edwards, “Laser micromachining of efficient fiber microlenses,” Appl. Opt. 29, 2692–2695 (1990).
[Crossref] [PubMed]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 16, 4745–4752 (2007).
[Crossref]

J. W. Noh, R. Anderson, S. H. Kim, J. Cardenas, and G. P. Nordin, “In-plane photonic transduction of silicon-on-insulator microcantilevers,” Opt. Express 16, 12114–12123 (2008).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

R. Charavel, B. Olbrechts, and J. P. Raskin, “Stress release of PECVD oxide by RTA,” Proc. SPIE 5116, 596–606 (1993).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 16, 4745–4752 (2007).
[Crossref]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

D. X. Dai, S. L. He, and H.-K. Tsang, “Bilevel mode converter between a silicon nanowire waveguide and a larger waveguide,” J. Lightwave Technol. 24, 2428–2433 (2006).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

J. K. Doylend and A. P. Knights, “Design and simulation of an integrated fiber-to-chip coupler for silicon-on-insulator waveguides,” IEEE J. Sel. Top. Quantum Electron. 12, 1363–1370 (2006).
[Crossref]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

H. M. Presby, A. F. Benner, and C. A. Edwards, “Laser micromachining of efficient fiber microlenses,” Appl. Opt. 29, 2692–2695 (1990).
[Crossref] [PubMed]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

G. Milton, Y. Gharbia, and J. Katupitiya, “Mechanical fabrication of precision microlenses on optical fiber endfaces,” Opt. Eng. 44, 123402 (2005).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

D. X. Dai, S. L. He, and H.-K. Tsang, “Bilevel mode converter between a silicon nanowire waveguide and a larger waveguide,” J. Lightwave Technol. 24, 2428–2433 (2006).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

T. Alder, A. Stohr, R. Heinzelmann, and D. Jager, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12, 1013–1015 (2000).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Alder, A. Stohr, R. Heinzelmann, and D. Jager, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12, 1013–1015 (2000).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 16, 4745–4752 (2007).
[Crossref]

G. Milton, Y. Gharbia, and J. Katupitiya, “Mechanical fabrication of precision microlenses on optical fiber endfaces,” Opt. Eng. 44, 123402 (2005).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

J. W. Noh, R. Anderson, S. H. Kim, J. Cardenas, and G. P. Nordin, “In-plane photonic transduction of silicon-on-insulator microcantilevers,” Opt. Express 16, 12114–12123 (2008).
[Crossref] [PubMed]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

J. K. Doylend and A. P. Knights, “Design and simulation of an integrated fiber-to-chip coupler for silicon-on-insulator waveguides,” IEEE J. Sel. Top. Quantum Electron. 12, 1363–1370 (2006).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
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Z. Lu and D. Prather, “Total internal reflection-evanescent coupler for fiber-to-waveguide integration of planar optoelectric devices,” Opt. Lett. 29, 1748–1750 (2004).
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C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
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C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
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C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
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V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
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G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
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V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
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V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
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K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
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K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

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[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, “An optical fiber-taper probe for wafer-scale microphotonic device characterization,” Opt. Express 16, 4745–4752 (2007).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
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J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

Z. Lu and D. Prather, “Total internal reflection-evanescent coupler for fiber-to-waveguide integration of planar optoelectric devices,” Opt. Lett. 29, 1748–1750 (2004).
[Crossref] [PubMed]

H. M. Presby, A. F. Benner, and C. A. Edwards, “Laser micromachining of efficient fiber microlenses,” Appl. Opt. 29, 2692–2695 (1990).
[Crossref] [PubMed]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

R. Charavel, B. Olbrechts, and J. P. Raskin, “Stress release of PECVD oxide by RTA,” Proc. SPIE 5116, 596–606 (1993).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. Magi, D. J. Moss, and B. Eggleton, “Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowires,” Opt. Express 14, 1070–1078 (2006).
[Crossref] [PubMed]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

T. Alder, A. Stohr, R. Heinzelmann, and D. Jager, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12, 1013–1015 (2000).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, and A. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374–7379 (2005).
[Crossref] [PubMed]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

D. X. Dai, S. L. He, and H.-K. Tsang, “Bilevel mode converter between a silicon nanowire waveguide and a larger waveguide,” J. Lightwave Technol. 24, 2428–2433 (2006).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

R. Ulrich, “Theory of the prism-film coupler by plane-wave analysis,” J. Opt. Soc. Am. 60, 1337–1350 (1970).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17, 2613–2615 (2005).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fedeli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24, 3810–3815 (2006).
[Crossref]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express. 11, 2927–2939 (2004).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

J. S. Pulskamp, A. Wickenden, R. Polcawich, B. Piekarski, M. Dubey, and G. Smith, “Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices,” J. Vac. Sci. Technol. B 21, 2482–2486 (2003).
[Crossref]

C. Grillet, C. Monat, C. Smith, B. Eggleton, D. Moss, S. Frederick, D. Dalacu, P. Poole, J. Lapointe, G. Aers, and R. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15, 1267–1276 (2007).
[Crossref] [PubMed]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron. 87, 351–358 (2004).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30, 498–500 (2005).
[Crossref] [PubMed]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

N. Kawasaki, M. Umetsu, H. Yoda, H. Tsuchiya, K. Shiraishi, K. Watanabe, and S. Shikano, “A novel lensed fiber with a focused spot diameter as small as the wavelength,” in Proceedings of IEEE Conference on Optical Fiber Communication and the National Fiber Optic Engineers Conference (Institude of Electrical and Electronics Engineers, New York, 2007), paper OWI2.
[Crossref] [PubMed]

H. M. Presby, A. F. Benner, and C. A. Edwards, “Laser micromachining of efficient fiber microlenses,” Appl. Opt. 29, 2692–2695 (1990).
[Crossref] [PubMed]

V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, C.-Y. Hong, J. Yasaitis, L. C. Kimerling, and J. Michel, “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems,” Appl. Phys. Lett. 88, 081112 (2006).
[Crossref]

K. Shiraishi, H. Yoda, A. Ohshima, H. Ikedo, and C. S. Tsai, “A silicon-based spot-size converter between single mode fibers and Si-wire waveguides using cascaded tapers,” Appl. Phys. Lett. 91, 141120 (2007).
[Crossref]

I. K. Hwang, S. K. Kim, J. K. Yang, S. H. Kim, S. H. Lee, and Y. H. Lee, “Curved-microfiber photon coupling for photonic crystal light emitter,” Appl. Phys. Lett. 87, 131107 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

J. K. Doylend and A. P. Knights, “Design and simulation of an integrated fiber-to-chip coupler for silicon-on-insulator waveguides,” IEEE J. Sel. Top. Quantum Electron. 12, 1363–1370 (2006).
[Crossref]

H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12, 1371–1379 (2006).
[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

P. Cheben, S. Janz, D. X. Xu, B. Lamontagne, A. Delage, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18, 13–15 (2006).
[Crossref]

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