Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials

Aleksandr Ovsianikov; Xiao Shizhou; Maria Farsari; Maria Vamvakaki; Costas Fotakis; Boris N. Chichkov

doi:10.1364/OE.17.002143

Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials

Aleksandr Ovsianikov, Xiao Shizhou, Maria Farsari, Maria Vamvakaki, Costas Fotakis, and Boris N. Chichkov

Optics Express
Vol. 17,
Issue 4,
pp. 2143-2148
(2009)
•https://doi.org/10.1364/OE.17.002143

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Aleksandr Ovsianikov, Xiao Shizhou, Maria Farsari, Maria Vamvakaki, Costas Fotakis, and Boris N. Chichkov, "Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials," Opt. Express 17, 2143-2148 (2009)

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Related Topics
Table of Contents Category
- Materials
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Photonic crystals (050.5298)
- Photosensitive materials (160.5335)
- Solgel (160.6060)
- Materials processing (350.3850)

About this Article
History
- Original Manuscript: November 4, 2008
- Revised Manuscript: January 23, 2009
- Manuscript Accepted: January 25, 2009
- Published: February 2, 2009

Accessible

Open Access

Abstract

An investigation of the shrinking behaviour of a zirconium-based sol-gel composite micro-structured by two-photon polymerization is presented and a simple, straightforward methodology allowing the evaluation of shrinkage is suggested. It is shown that volume reduction is directly related to the average laser power (irradiation dose) used for the microfabrication and becomes a critical issue near the polymerization threshold. It is demonstrated that this shrinkage can be employed beneficially to improve the structural resolution. This is demonstrated by the presence of stopbands in the photonic crystal nanostructures fabricated with controlled volume reduction. Well above the polymerization threshold, the studied material exhibits remarkably low shrinkage. Therefore, no additional effort for the pre-compensation of distortion and for the improvement of structural stability is required.

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References

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|
Year
|
Author
|
Publication

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]
H-B. Sun and S. Kawata, NMR, 3D analysis, photopolymerization Eds N. Fatkullin (Springer2004), pp. 169–273.
A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.
S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]
M. Deubel, G. v. Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nature Materials 3, 444–447 (2004).
[Crossref] [PubMed]
V. Dinka, E. Kasotakis, J. Catherine, A. Mourka, A. Ranella, A. Ovsianikov, B. N. Chichkov, M. Farsari, A. Mitraki, and C. Fotakis, “Directed three-dimensional patterning of self-assembled peptide fibrils,” Nano Lett. 8, 538–543 (2008).
[Crossref]
A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Engin. Regen. Med. 1, 443–449 (2008).
[Crossref]
S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]
J-F- Xing, X-Z. Dong, W-Q. Chen, X.-M. Duana, N. Takeyasu, T. Tanaka, and S. Kawata, “Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency,” Appl. Phys. Lett. 90, 131106-1–131106-3 (2007).
[Crossref]
W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15, 3426–3436 (2007).
[Crossref] [PubMed]
Y. Li, F. Qi, H. Yang, Q. Gong, X. Dong, and X. Duan, “Nonuniform shrinkage and stretching of polymerized nanostructures fabricated by two-photon photopolymerization,” Nanotechnology 19, 055303, 5pp (2008).
[Crossref] [PubMed]
A. Ovsianikov, A. Gaidukeviciute, B. N. Chichkov, M. Oubaha, B. D. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, “Two-photon polymerization of hybrid sol-gel materials for photonics Applications,” Laser Chemistry, vol. 2008, Article ID 493059, 7 pages, 2008.
[Crossref]
J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12, 5221–5228 (2004).
[Crossref] [PubMed]
J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,“ Opt. Lett. 28, 301–303 (2003).
[Crossref] [PubMed]
G. von Freymann, T. Chan, S. John, V. Kitaev, G. A. Ozin, M. Deubel, and M. Wegener, “Sub-nanometer precision modification of the optical properties of three-dimensional polymer-based photonic crystals,” Photon. Nanostructures 2, 191–198 (2004).
[Crossref]

2008 (4)

V. Dinka, E. Kasotakis, J. Catherine, A. Mourka, A. Ranella, A. Ovsianikov, B. N. Chichkov, M. Farsari, A. Mitraki, and C. Fotakis, “Directed three-dimensional patterning of self-assembled peptide fibrils,” Nano Lett. 8, 538–543 (2008).
[Crossref]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Engin. Regen. Med. 1, 443–449 (2008).
[Crossref]

Y. Li, F. Qi, H. Yang, Q. Gong, X. Dong, and X. Duan, “Nonuniform shrinkage and stretching of polymerized nanostructures fabricated by two-photon photopolymerization,” Nanotechnology 19, 055303, 5pp (2008).
[Crossref] [PubMed]

A. Ovsianikov, A. Gaidukeviciute, B. N. Chichkov, M. Oubaha, B. D. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, “Two-photon polymerization of hybrid sol-gel materials for photonics Applications,” Laser Chemistry, vol. 2008, Article ID 493059, 7 pages, 2008.
[Crossref]

2007 (2)

J-F- Xing, X-Z. Dong, W-Q. Chen, X.-M. Duana, N. Takeyasu, T. Tanaka, and S. Kawata, “Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency,” Appl. Phys. Lett. 90, 131106-1–131106-3 (2007).
[Crossref]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15, 3426–3436 (2007).
[Crossref] [PubMed]

2005 (1)

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

2004 (3)

J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12, 5221–5228 (2004).
[Crossref] [PubMed]

M. Deubel, G. v. Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nature Materials 3, 444–447 (2004).
[Crossref] [PubMed]

G. von Freymann, T. Chan, S. John, V. Kitaev, G. A. Ozin, M. Deubel, and M. Wegener, “Sub-nanometer precision modification of the optical properties of three-dimensional polymer-based photonic crystals,” Photon. Nanostructures 2, 191–198 (2004).
[Crossref]

2003 (2)

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,“ Opt. Lett. 28, 301–303 (2003).
[Crossref] [PubMed]

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

1997 (1)

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]

Barlow, S.

Busch, K.

Catherine, J.

Chan, T.

Chen, V. W.

Chen, W-Q.

Chichkov, B.

Chichkov, B. N.

A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.

Cronauer, C.

Deubel, M.

Dinka, V.

Domann, G.

Dong, W.

Dong, X.

Dong, X-Z.

Duan, X.

Duana, X.-M.

Egbert, A.

Farsari, M.

Fotakis, C.

Freymann, G. v.

Fröhlich, L.

Gaidukeviciute, A.

Giakoumaki, A.

Gong, Q.

Gray, D.

Hales, J. M.

Haske, W.

Haverich, A.

Houbertz, R.

A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.

John, S.

Juodkazis, S.

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Kasotakis, E.

Kawata, S.

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]

H-B. Sun and S. Kawata, NMR, 3D analysis, photopolymerization Eds N. Fatkullin (Springer2004), pp. 169–273.

Kitaev, V.

Li, Y.

MacCraith, B. D.

Marder, S. R.

Maruo, S.

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]

Mashiko, S.

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

Miki, H.

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

Misawa, H.

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Mitraki, A.

Miwa, M.

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Mizeikis, V.

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Mourka, A.

Nakahama, T.

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

Nakamura, O.

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]

Ngezahayo, A.

Ostendorf, A.

Oubaha, M.

Ovsianikov, A.

A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.

Ozin, G. A.

Passinger, S.

A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.

Pereira, S.

Perry, J. W.

Popall, M.

Qi, F.

Ranella, A.

Sakellari, I.

Schlie, S.

Schulz, J.

Seet, K-K.

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Serbin, J.

Soukoulis, C. M.

Sun, H-B.

H-B. Sun and S. Kawata, NMR, 3D analysis, photopolymerization Eds N. Fatkullin (Springer2004), pp. 169–273.

Takeyasu, N.

Tanaka, T.

Vamvakaki, M.

von Freymann, G.

Wegener, M.

Xing, J-F-

Yang, H.

Yokoyama, S.

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

Appl. Phys. Lett. (2)

S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, “Two-photon-induced polymerization in a laser gain medium for optical microstructure,” Appl. Phys. Lett. 82, 3221–3223 (2003)
[Crossref]

J. Tissue Engin. Regen. Med. (1)

Laser Chemistry (1)

Nano Lett. (1)

Nanotechnology (2)

S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, “Two-photon lithography of nanorods in SU-8 photoresist,” Nanotechnology 16, 846–848 (2005).
[Crossref]

Nature Materials (1)

Opt. Express (2)

Opt. Lett. (2)

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22, 132–134 (1997).
[Crossref] [PubMed]

Photon. Nanostructures (1)

Other (2)

H-B. Sun and S. Kawata, NMR, 3D analysis, photopolymerization Eds N. Fatkullin (Springer2004), pp. 169–273.

A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences2006), pp. 129–167.

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Fig. 1.

SEM images of representative woodpile structures, applied for investigations of shrinkage. From bottom to the top: structure side view, top view, and a close-up view on the upper layers are presented. The applied average laser powers from left to right are accordingly (a) 8.0 mW; (b) 5.5 mW and (c) 4.5mW. It is observed that the decrease of laser power results in increased material/structure shrinkage, and deformation of the supporting columns.

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Fig. 2.

Characteristics of the polymerized structures: a) linear shrinkage strain in [%] as a function of the applied laser power; b) line width (lateral resolution) dependence on the applied laser power.

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Fig. 3.

(a) schematic illustration of the polymerization process at low (A) and high (B) average laser powers; (b) the reflectance and transmittance spectra obtained by a microscope coupled to FTIR spectrometer, indicate a bandstop at 1330 nm

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Equations (1)

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d = w_{0} \sqrt{\ln (\frac{P}{P_{t h}})}