Abstract

We report on the effects of shrinking the physical size of a high index contrast grating (HCG) on a vertical cavity surface-emitting laser (VCSEL). HCGs previously had been simulated assuming infinite periodicity. Here we probe through simulation and experiment the effect of reducing the HCG to only a few periods. We experimentally realize lasing VCSELs with as few as 4 periods of HCG. By shrinking the HCG to an extremely small size and integrating it on a wavelength tunable VCSEL, we are able to achieve a tunable VCSEL with a record fast mechanical tuning response of >27 MHz. This is a 5X improvement over the fastest previously reported wavelength tunable VCSELs.

© 2009 OSA

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  1. C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
    [CrossRef]
  2. M. Lackner, M. Schwarzott, F. Winter, B. Kogel, S. Jatta, H. Halbritter, and P. Meissner, “CO and CO2 spectroscopy using a 60 nm broadband tunable MEMS-VCSEL at 1.55um,” Opt. Lett. 31(21), 3170–3172 (2006).
    [CrossRef] [PubMed]
  3. C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
    [CrossRef]
  4. S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
    [CrossRef]
  5. G. D. Cole, E. Behymer, T. C. Bond, and L. L. Goddard, “Short-wavelength MEMS-tunable VCSELs,” Opt. Express 16(20), 16093–16103 (2008).
    [CrossRef] [PubMed]
  6. C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
    [CrossRef]
  7. Y. Ding and R. Magnusson, “Resonant leaky-mode spectral-band engineering and device applications,” Opt. Express 12(23), 5661–5674 (2004).
    [CrossRef] [PubMed]
  8. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
    [CrossRef]
  9. S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
    [CrossRef]
  10. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
    [CrossRef]
  11. Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, “Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning,” Opt. Express 16(18), 14221–14226 (2008).
    [CrossRef] [PubMed]
  12. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
    [CrossRef]
  13. V. Karagodsky, M. C. Huang, and C. J. Chang-Hasnain, “Analytical Solution and Design Guideline for Highly Reflective Subwavelength Gratings,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JTuA128.

2008 (3)

2007 (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

2006 (1)

2004 (4)

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

Y. Ding and R. Magnusson, “Resonant leaky-mode spectral-band engineering and device applications,” Opt. Express 12(23), 5661–5674 (2004).
[CrossRef] [PubMed]

2000 (1)

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

1981 (1)

Beatty, R.

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

Behymer, E.

Benbakir, B.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Bond, T. C.

Boucart, J.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Boutami, S.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Chang-Hasnain, C. J.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, “Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning,” Opt. Express 16(18), 14221–14226 (2008).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

Cole, G. D.

Cunningham, B. T.

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

Decai, S.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Ding, Y.

Dongxu, Z.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Fan, W.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Foley, J. E.

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

Gaylord, T. K.

Goddard, L. L.

Halbritter, H.

Huang, M. C. Y.

Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, “Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning,” Opt. Express 16(18), 14221–14226 (2008).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

Jatta, S.

Kageyama, T.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Kner, P.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Kogel, B.

Lackner, M.

Leclercq, J. L.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Li, P.

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

Magnusson, R.

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

Meissner, P.

Moharam, M. G.

Nabiev, R. F.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Neureuther, A. R.

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

Pathak, R.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Schwarzott, M.

Viktorovitch, P.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Winter, F.

Yuen, W.

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

Yunfei, D.

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

Zhou, Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, “Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning,” Opt. Express 16(18), 14221–14226 (2008).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

Appl. Phys. Lett. (1)

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 µm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Electron. Lett. (1)

C. F. R. Mateus, M. C. Y. Huang, C. J. Chang-Hasnain, J. E. Foley, R. Beatty, P. Li, and B. T. Cunningham, “Ultra-sensitive immunoassay using VCSEL detection system,” Electron. Lett. 40(11), 649–651 (2004).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

C. J. Chang-Hasnain, “Tunable VCSEL,” IEEE J. Sel. Top. Quantum Electron. 6(6), 978–987 (2000).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, “Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure,” IEEE Photon. Technol. Lett. 16(3), 714–716 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16(2), 518–520 (2004).
[CrossRef]

J. Opt. Soc. Am. (1)

Nat. Photonics (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2(3), 180–184 (2008).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Other (1)

V. Karagodsky, M. C. Huang, and C. J. Chang-Hasnain, “Analytical Solution and Design Guideline for Highly Reflective Subwavelength Gratings,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JTuA128.

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Figures (6)

Fig. 1
Fig. 1

Schematic of a NEMO tunable VCSEL with a suspended TE-HCG in place of a typical top DBR.

Fig. 2
Fig. 2

(a) Light-current-voltage characteristic of a TE-HCG tunable VCSEL under continuous wave, room temperature operation. (b) Spectrum of another TE-HCG tunable VCSEL at constant bias current of 3.5 mA with the tuning contact under various reverse bias voltages (spectra offset by 60 dB).

Fig. 3
Fig. 3

Mirror loss of the TE-HCG structure as a function of mirror loss and grating size. The mirror loss of the device is constant until the HCG is slightly larger than the aperture size, indicating the reflectivity of the HCG is not significantly impacted by the number of periods in the structure.

Fig. 4
Fig. 4

SEM images of a 2.9 µm × 3 µm × 145 nm HCG, the smallest lasing HCG VCSEL (a) tilted view showing the 145 nm thickness of the TE-HCG (b) top view.

Fig. 5
Fig. 5

Light-current characteristics of TE-HCG VCSELs with different size HCGs. Device characteristics are nearly unchanged until the HCG has less than 7 periods (4.8 µm).

Fig. 6
Fig. 6

(a) Spectrum of a tunable VCSEL at constant bias of 1.4 mA with a mechanical tuning signal between the tuning contact and laser contact of a DC voltage plus an AC voltage at various frequencies. (b) Relative optical wavelength change of the VCSEL as a function of input frequency to the tuning contact. The −3dB point in optical response occurs around 27 MHz.

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