This study presents an analysis of the nonlinearity resulting from polarization crosstalk at a polarizing beam splitter (PBS) and a wave plate (WP) in a homodyne interferometer. From a theoretical approach, a new compensation method involving a realignment of the axes of WPs to some specific angles according to the characteristics of the PBS is introduced. This method suppresses the nonlinearity in a homodyne interferometer to 0.36 nm, which would be 3.75 nm with conventional alignment methods of WPs.
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