Abstract

We design a double-disk microcavity consisting of a pair of silica microdisks separated by a nanoscale gap region on a silicon chip for cavity optomechanics. We show that this type of photonic structure can provide a per-photon gradient force with a magnitude much larger than for scattering-force-based structures. Moreover, this device provides for nearly independent optimization of optical and mechanical properties. We present the processing details of fabricated devices.

© 2009 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-17172 .
    [CrossRef] [PubMed]
  2. T. J. Kippenberg and K. J. Vahala, “Cavity Optomechanics: Back-Action at the Mesoscale,” Science 321(5893), 1172–1176 (2008).
    [CrossRef] [PubMed]
  3. I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photonics 3(4), 201–205 (2009).
    [CrossRef]
  4. T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
    [CrossRef] [PubMed]
  5. H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, “Radiation-pressure-driven micro-mechanical oscillator,” Opt. Express 13(14), 5293–5301 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-14-5293 .
    [CrossRef] [PubMed]
  6. T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
    [CrossRef] [PubMed]
  7. S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
    [CrossRef] [PubMed]
  8. O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
    [CrossRef] [PubMed]
  9. D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature 444(7115), 75–78 (2006).
    [CrossRef] [PubMed]
  10. A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
    [CrossRef] [PubMed]
  11. T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
    [CrossRef] [PubMed]
  12. T. Carmon and K. J. Vahala, “Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency,” Phys. Rev. Lett. 98(12), 123901 (2007).
    [CrossRef] [PubMed]
  13. J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
    [CrossRef] [PubMed]
  14. V. B. Braginsky, Measurement of Weak Forces in Physics Experiments (University of Chicago Press, Chicago, 1977).
  15. M. L. Povinelli, M. Loncar, M. Ibanescu, E. J. Smythe, S. G. Johnson, F. Capasso, and J. D. Joannopoulos, “Evanescent-wave bonding between optical waveguides,” Opt. Lett. 30(22), 3042–3044 (2005).
    [CrossRef] [PubMed]
  16. M. L. Povinelli, S. G. Johnson, M. Loncar, M. Ibanescu, E. J. Smythe, F. Capasso, and J. D. Joannopoulos, “High-Q enhancement of attractive and repulsive optical forces between coupled whispering-gallery- mode resonators,” Opt. Express 13(20), 8286–8295 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-20-8286 .
    [CrossRef] [PubMed]
  17. P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
    [CrossRef]
  18. M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
    [CrossRef] [PubMed]
  19. M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
    [CrossRef]
  20. M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
    [CrossRef] [PubMed]
  21. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
    [CrossRef] [PubMed]
  22. G. Anetsberger, O. Arcizet, Q. P. Unterreithmeier, E. M. Weig, J. P. Kotthaus, and T. J. Kippenberg, “Near-field cavity optomechanics with nanomechanical oscillators,” arXiv: 0904.4051v1.
  23. Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009). See also arXiv:0905.2716v1.
  24. J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
    [CrossRef]
  25. T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
    [CrossRef]
  26. T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
    [CrossRef]
  27. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
    [CrossRef] [PubMed]
  28. M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
    [CrossRef] [PubMed]
  29. S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
    [CrossRef] [PubMed]

2009 (3)

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photonics 3(4), 201–205 (2009).
[CrossRef]

2008 (3)

T. J. Kippenberg and K. J. Vahala, “Cavity Optomechanics: Back-Action at the Mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

2007 (5)

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

T. Carmon and K. J. Vahala, “Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency,” Phys. Rev. Lett. 98(12), 123901 (2007).
[CrossRef] [PubMed]

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-17172 .
[CrossRef] [PubMed]

2006 (6)

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature 444(7115), 75–78 (2006).
[CrossRef] [PubMed]

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

2005 (5)

2003 (3)

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

2000 (1)

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[CrossRef] [PubMed]

Arcizet, O.

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Armani, D. K.

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Aspelmeyer, M.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Baehr-Jones, T.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Bäuerle, D.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Blaser, F.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Böhm, H. R.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Bouwmeester, D.

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature 444(7115), 75–78 (2006).
[CrossRef] [PubMed]

Briant, T.

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Cai, M.

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[CrossRef] [PubMed]

Camacho, R.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

Capasso, F.

Carmon, T.

T. Carmon and K. J. Vahala, “Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency,” Phys. Rev. Lett. 98(12), 123901 (2007).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, “Radiation-pressure-driven micro-mechanical oscillator,” Opt. Express 13(14), 5293–5301 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-14-5293 .
[CrossRef] [PubMed]

Chan, J.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

Chen, Y.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Cohadon, P. F.

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Corbitt, T.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Del’Haye, P.

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

Eichenfield, M.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

Favero, I.

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photonics 3(4), 201–205 (2009).
[CrossRef]

Gigan, S.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Girvin, S. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Harris, J. G. E.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Heidmann, A.

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Hertzberg, J. B.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Hochberg, M.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Ibanescu, M.

Innerhofer, E.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Ippen, E. P.

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

Jayich, A. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Joannopoulos, J. D.

Johnson, S. G.

Kalkman, J.

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

Karrai, K.

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photonics 3(4), 201–205 (2009).
[CrossRef]

Kippenberg, T. J.

T. J. Kippenberg and K. J. Vahala, “Cavity Optomechanics: Back-Action at the Mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-17172 .
[CrossRef] [PubMed]

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, “Radiation-pressure-driven micro-mechanical oscillator,” Opt. Express 13(14), 5293–5301 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-14-5293 .
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Kleckner, D.

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature 444(7115), 75–78 (2006).
[CrossRef] [PubMed]

Kuramochi, E.

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

Langer, G.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Li, M.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Lin, Q.

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

Loncar, M.

Marquardt, F.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Mavalvala, N.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Michael, C. P.

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

Mitsugi, S.

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

Müller-Ebhardt, H.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Nooshi, N.

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

Notomi, M.

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

Ottaway, D.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Painter, O.

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[CrossRef] [PubMed]

Painter, O. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Paternostro, M.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Perahia, R.

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

Pernice, W. H. P.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Pinard, M.

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Polman, A.

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

Popovic, M. A.

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

Povinelli, M. L.

Rakich, P. T.

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

Rehbein, H.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Rokhsari, H.

H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, “Radiation-pressure-driven micro-mechanical oscillator,” Opt. Express 13(14), 5293–5301 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-14-5293 .
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

Rosenberg, J.

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

Scherer, A.

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

Schliesser, A.

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

Schwab, K. C.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Sigg, D.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Smythe, E. J.

Soljacic, M.

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

Spillane, S. M.

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

Tang, H. X.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Taniyama, H.

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

Thompson, J. D.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Vahala, K. J.

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

T. J. Kippenberg and K. J. Vahala, “Cavity Optomechanics: Back-Action at the Mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

T. J. Kippenberg and K. J. Vahala, “Cavity opto-mechanics,” Opt. Express 15(25), 17172–17205 (2007), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-17172 .
[CrossRef] [PubMed]

T. Carmon and K. J. Vahala, “Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency,” Phys. Rev. Lett. 98(12), 123901 (2007).
[CrossRef] [PubMed]

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, “Radiation-pressure-driven micro-mechanical oscillator,” Opt. Express 13(14), 5293–5301 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-14-5293 .
[CrossRef] [PubMed]

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[CrossRef] [PubMed]

Whitcomb, S.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Wipf, C.

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

Xiong, C.

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

Yang, L.

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

Zeilinger, A.

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

Zwickl, B. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

Appl. Phys. Lett. (1)

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, “Fabrication and coupling to planar high-Q silica disk microcavities,” Appl. Phys. Lett. 83(4), 797–799 (2003).
[CrossRef]

Nat. Photonics (4)

M. Eichenfield, C. P. Michael, R. Perahia, and O. Painter, “Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces,” Nat. Photonics 1(7), 416–422 (2007).
[CrossRef]

J. Rosenberg, Q. Lin, and O. Painter, “Static and dynamic wavelength routing via the gradient optical force,” Nat. Photonics 3(8), 478–483 (2009).
[CrossRef]

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photonics 3(4), 201–205 (2009).
[CrossRef]

P. T. Rakich, M. A. Popovic, M. Soljacic, and E. P. Ippen, “Trapping, corralling and spectral bonding of optical resonances through optically induced potentials,” Nat. Photonics 1(11), 658–665 (2007).
[CrossRef]

Nature (7)

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, “Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane,” Nature 452(7183), 72–75 (2008).
[CrossRef] [PubMed]

S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bäuerle, M. Aspelmeyer, and A. Zeilinger, “Self-cooling of a micromirror by radiation pressure,” Nature 444(7115), 67–70 (2006).
[CrossRef] [PubMed]

O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature 444(7115), 71–74 (2006).
[CrossRef] [PubMed]

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature 444(7115), 75–78 (2006).
[CrossRef] [PubMed]

M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456(7221), 480–484 (2008).
[CrossRef] [PubMed]

M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, “A picogram- and nanometre-scale photonic-crystal optomechanical cavity,” Nature 459(7246), 550–555 (2009).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. A (1)

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74(5), 051802 (2006).
[CrossRef]

Phys. Rev. Lett. (8)

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003).
[CrossRef] [PubMed]

M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, “Optomechanical Wavelength and Energy Conversion in High-Q Double-Layer Cavities of Photonic Cystal Slabs,” Phys. Rev. Lett. 97(2), 023903 (2006).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett. 95(3), 033901 (2005).
[CrossRef] [PubMed]

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal Behavior of Radiation-Pressure-Induced Vibrations of an Optical Microcavity Phonon Mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[CrossRef] [PubMed]

A. Schliesser, P. Del’Haye, N. Nooshi, K. J. Vahala, and T. J. Kippenberg, “Radiation pressure cooling of a micromechanical oscillator using dynamical backaction,” Phys. Rev. Lett. 97(24), 243905 (2006).
[CrossRef] [PubMed]

T. Corbitt, Y. Chen, E. Innerhofer, H. Müller-Ebhardt, D. Ottaway, H. Rehbein, D. Sigg, S. Whitcomb, C. Wipf, and N. Mavalvala, “An all-optical trap for a gram-scale mirror,” Phys. Rev. Lett. 98(15), 150802 (2007).
[CrossRef] [PubMed]

T. Carmon and K. J. Vahala, “Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency,” Phys. Rev. Lett. 98(12), 123901 (2007).
[CrossRef] [PubMed]

Science (1)

T. J. Kippenberg and K. J. Vahala, “Cavity Optomechanics: Back-Action at the Mesoscale,” Science 321(5893), 1172–1176 (2008).
[CrossRef] [PubMed]

Other (3)

V. B. Braginsky, Measurement of Weak Forces in Physics Experiments (University of Chicago Press, Chicago, 1977).

G. Anetsberger, O. Arcizet, Q. P. Unterreithmeier, E. M. Weig, J. P. Kotthaus, and T. J. Kippenberg, “Near-field cavity optomechanics with nanomechanical oscillators,” arXiv: 0904.4051v1.

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009). See also arXiv:0905.2716v1.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (10)

Fig. 1
Fig. 1

Schematics of double-disk microcavity.

Fig. 2
Fig. 2

Mode profiles of the radial component of the electric field for the TE-like cavity mode in a double-disk cavity. (a) bonding and (b) antibonding mode in a cavity with a vertical sidewall. (c) bonding and (d) anti-bonding mode in a practical cavity with a angled sidewall. The mode hybridization is clearly visible for the anti-bonding mode.

Fig. 3
Fig. 3

(a) Resonance wavelength (blue) and effective length (green) as a function of disk spacing, for a TE-like bonding mode. (b) The corresponding optomechanical coupling coefficient.

Fig. 4
Fig. 4

(a) Mode profiles of the vertical component of the electric field for the TM-like cavity mode. (b) The optomechanical coupling coefficient gOM as a function of disk spacing for the TM-like mode.

Fig. 5
Fig. 5

FEM simulations of three typical mechanical modes in a 90-µm-diameter, double-disk cavity with 7 µm undercut, 400 nm thickness for each disk and 200 nm disk spacing. The color map shows the vertical displacement, exaggerated for clarity.

Fig. 6
Fig. 6

The mechanical frequency of the flapping mode as a function of undercut width.

Fig. 7
Fig. 7

Schematic description of the procedure for fabricating the double-disk microcavities. (a) Deposition of silica, α-silicon, and silica layers on top of a silicon wafer. (b) E-beam lithography to form the microdisk pattern on the mask. (c) RIE dry etching to produce double microdisks. (d) Plasma dry release to partially remove the silicon layers to form the silicon pedestal and partially undercut sandwiched α-silicon layer.

Fig. 8
Fig. 8

Scanning electron microscope image of the double-disk edge.

Fig. 9
Fig. 9

(a) Schematic of the experimental setup for optical and mechanical measurement. (b) Top-view optical image of the taper-disk coupling system. It is enclosed in a nitrogen environment at atmospheric pressure. VOA: variable optical attenuator.

Fig. 10
Fig. 10

Linear scan of cavity transmission. The inset shows a detailed scan of the bonding mode at 1512.80 nm, with experimental data in blue and theoretical fit in red.

Metrics