Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing

J. H. Schmid; W. Sinclair; J. García; S. Janz; J. Lapointe; D. Poitras; Y. Li; T. Mischki; G. Lopinski; P. Cheben; A. Delâge; A. Densmore; P. Waldron; D.-X. Xu

doi:10.1364/OE.17.018371

Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu

Optics Express
Vol. 17,
Issue 20,
pp. 18371-18380
(2009)
•https://doi.org/10.1364/OE.17.018371

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J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, "Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing," Opt. Express 17, 18371-18380 (2009)

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Related Topics
Table of Contents Category
- Integrated Optics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Gratings (050.2770)
- Integrated optics devices (130.3120)
- Sensors (130.6010)
- Resonators (230.5750)

About this Article
History
- Original Manuscript: August 19, 2009
- Revised Manuscript: September 20, 2009
- Manuscript Accepted: September 20, 2009
- Published: September 25, 2009
Virtual Issues
Virtual Journal for Biomedical Optics Vol. 4, Iss. 11

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Open Access

Abstract

We present experimental and theoretical results of label-free molecular sensing using the transverse magnetic mode of a 0.22 μm thick silicon slab waveguide with a surface grating implemented in a guided mode resonance configuration. Due to the strong overlap of the evanescent field of the waveguide mode with a molecular layer attached to the surface, these sensors exhibit high sensitivity, while their fabrication and packaging requirements are modest. Experimentally, we demonstrate a resonance wavelength shift of ~1 nm when a monolayer of the protein streptavidin is attached to the surface, in good agreement with calculations based on rigorous coupled wave analysis. In our current optical setup this shift corresponds to an estimated limit of detection of 0.2% of a monolayer of streptavidin.

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References

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Article Order
|
Year
|
Author
|
Publication

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]
A. Densmore, D.-X. Xu, S. Janz, P. Waldron, T. Mischki, G. Lopinski, A. Delâge, J. Lapointe, P. Cheben, B. Lamontagne, and J. H. Schmid, “Spiral-path high-sensitivity silicon photonic wire molecular sensor with temperature-independent response,” Opt. Lett. 33(6), 596–598 (2008).
[Crossref] [PubMed]
D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express 16(19), 15137–15148 (2008).
[Crossref] [PubMed]
A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]
S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]
J. J. Wang, L. Chen, S. Kwan, F. Liu, and X. Deng, “Resonant grating filters as refractive index sensors for chemical and biological detections,” J. Vac. Sci. Technol. B 23(6), 3006–3010 (2005).
[Crossref]
The RODIS software package, developed by the Photonics Research Group at the University of Ghent, Belgium, is available for download from the website: http://www.photonics.intec.ugent.be/research/facilities/design/rodis/default.htm
M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
[Crossref]
I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]
J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]
D. W. Peters, S. A. Kemme, and G. R. Hadley, “Effect of finite grating, waveguide width, and end-facet geometry on resonant subwavelength grating reflectivity,” J. Opt. Soc. Am. A 21(6), 981–987 (2004).
[Crossref]
K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[Crossref] [PubMed]
A. Delâge, D.-X. Xu, R. W. McKinnon, E. Post, P. Waldron, J. Lapointe, C. Storey, A. Densmore, S. Janz, B. Lamontagne, P. Cheben, and J. H. Schmid, “Wavelength-dependent model of ring resonator sensor excited by a directional coupler,” J. Lightwave Technol. 27(9), 1172–1180 (2009).
[Crossref]
J. Heebner, R. Grover, and T. Ibrahim, “Optical microresonators: theory, fabrication, and applications,” Springer Series in Optical Sciences 138, Springer, New York (2008).

2006 (1)

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

2005 (1)

J. J. Wang, L. Chen, S. Kwan, F. Liu, and X. Deng, “Resonant grating filters as refractive index sensors for chemical and biological detections,” J. Vac. Sci. Technol. B 23(6), 3006–3010 (2005).
[Crossref]

2004 (1)

D. W. Peters, S. A. Kemme, and G. R. Hadley, “Effect of finite grating, waveguide width, and end-facet geometry on resonant subwavelength grating reflectivity,” J. Opt. Soc. Am. A 21(6), 981–987 (2004).
[Crossref]

1999 (1)

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]

1990 (1)

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

1981 (1)

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
[Crossref]

Agarwal, A.

J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]

Baets, R.

Bagby, J. S.

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

Bartolozzi, I.

Bienstman, P.

Cheben, P.

Chen, L.

De Vos, K.

Delâge, A.

Deng, X.

Densmore, A.

Fan, X.

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

Gauglitz, G.

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]

Gaylord, T. K.

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
[Crossref]

Hadley, G. R.

Homola, J.

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]

Hu, J.

J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]

Janz, S.

Kemme, S. A.

Kimerling, L. C.

J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]

Kwan, S.

Lamontagne, B.

Lapointe, J.

Liu, F.

Lopinski, G.

Magnusson, R.

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

McKinnon, R.

McKinnon, R. W.

Mischki, T.

Moharam, M. G.

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
[Crossref]

Peters, D. W.

Post, E.

Schacht, E.

Schmid, J. H.

Storey, C.

Sun, X.

J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]

Waldron, P.

Wang, J. J.

Wang, S. S.

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

White, I. M.

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

Xu, D.-X.

Yee, S. S.

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]

IEEE Photon. Technol. Lett. (1)

J. Lightwave Technol. (1)

J. Opt. Soc. Am. (1)

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
[Crossref]

J. Opt. Soc. Am. A (2)

S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990).
[Crossref]

J. Opt. Soc. Am. B (1)

J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009).
[Crossref]

J. Vac. Sci. Technol. B (1)

Opt. Express (3)

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

Opt. Lett. (1)

Sens. Act. B (1)

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999).
[Crossref]

Other (2)

The RODIS software package, developed by the Photonics Research Group at the University of Ghent, Belgium, is available for download from the website: http://www.photonics.intec.ugent.be/research/facilities/design/rodis/default.htm

J. Heebner, R. Grover, and T. Ibrahim, “Optical microresonators: theory, fabrication, and applications,” Springer Series in Optical Sciences 138, Springer, New York (2008).

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Fig. 1

Schematic side view of an SOI guided mode resonance sensor. At resonance, the laser beam incident from the wafer backside excites a slab waveguide mode in the thin silicon surface layer. The evanescent tail of this mode has a strong interaction with the sensor surface.

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Fig. 2

RCWA calculations of resonant grating sensors. a) Response to bulk cladding index change. b) Resonance wavelength shift induced by the attachment of a 2 nm thick organic layer on a grating surface with periodicity Λ = 1.24 μm and a thickness of 50 nm in air. c) same as b) but for a grating with a thickness of 200 nm.

Download Full Size | PPT Slide | PDF

Fig. 3

a) Guided mode resonance wavelength shift induced by attachment of a 2 nm thick organic surface layer on a grating with periodicity Λ = 1.17 μm and a thickness of 50 nm in water. b) Same as a) for a grating with a thickness of 200 nm. c) Ratio of wavelength shift and linewidth (sensitivity figure of merit) as a function of grating depth.

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Fig. 4

Transmission spectra of ring resonator (finesse F = 10) (a) and Mach-Zehnder interferometer (b) evanescent field sensor, indicating resonance shift (δλ) in response to a waveguide effective index change and linewidth (Δλ).

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Fig. 5

a) Photograph of an SOI resonant grating sensor chip with two gratings of size 5 × 7 mm². b) SEM micrograph of a SiO₂ grating on the surface of an SOI chip fabricated using HSQ resist and electron beam lithography.

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Fig. 6

a) Measurements of guided mode resonance spectra in air for a clean surface, a biotin functionalized surface and after a layer of streptavidin protein is adsorbed. b) RCWA calculation of the reflection spectra for a grating with the structural parameters of the experiment with a clean surface and with an additional organic layer of 2 nm thickness.

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Equations (11)

Equations on this page are rendered with MathJax. Learn more.

λ = Λ (n_{e f f} - \sin θ)

\frac{\partial λ}{\partial θ} = \frac{Λ \cos θ}{Λ \frac{\partial n_{e f f}}{\partial λ} - 1}

Δ λ = \frac{λ^{2}}{π L (n_{g} - \sin θ)}

δ λ = \frac{Λ δ n_{e f f}}{1 - Λ \frac{\partial n_{e f f}}{\partial λ}} = \frac{λ δ n_{e f f}}{n_{g} - \sin θ}

S = \frac{1}{Δ λ} (\frac{δ λ}{δ n_{e f f}}) = \frac{π L}{λ}

δ λ_{r i n g} = λ \frac{δ n_{e f f}}{n_{g}}

Δ λ_{r i n g} = \frac{λ^{2}}{n_{g} L F}

S_{r i n g} = \frac{1}{Δ λ_{r i n g}} (\frac{δ λ_{r i n g}}{δ n_{e f f}}) = \frac{L F}{λ} = \frac{π L_{e f f}}{λ}

δ λ_{M Z I} = \frac{λ L_{s} δ n_{e f f, s}}{n_{g, s} L_{s} - n_{g, r} L_{r}}

Δ λ_{M Z I} = \frac{λ^{2}}{2 (n_{g, s} L_{s} - n_{g, r} L_{r})}

S_{M Z I} = \frac{1}{Δ λ_{M Z I}} (\frac{δ λ_{M Z I}}{δ n_{e f f, s}}) = \frac{2 L_{s}}{λ}

Abstract

References

2009 (2)

2008 (3)

2007 (1)

2006 (1)

2005 (1)

2004 (1)

1999 (1)

1990 (1)

1981 (1)

Agarwal, A.

Baets, R.

Bagby, J. S.

Bartolozzi, I.

Bienstman, P.

Cheben, P.

Chen, L.

De Vos, K.

Delâge, A.

Deng, X.

Densmore, A.

Fan, X.

Gauglitz, G.

Gaylord, T. K.

Hadley, G. R.

Homola, J.

Hu, J.

Janz, S.

Kemme, S. A.

Kimerling, L. C.

Kwan, S.

Lamontagne, B.

Lapointe, J.

Liu, F.

Lopinski, G.

Magnusson, R.

McKinnon, R.

McKinnon, R. W.

Mischki, T.

Moharam, M. G.

Peters, D. W.

Post, E.

Schacht, E.

Schmid, J. H.

Storey, C.

Sun, X.

Waldron, P.

Wang, J. J.

Wang, S. S.

White, I. M.

Xu, D.-X.

Yee, S. S.

IEEE Photon. Technol. Lett. (1)

J. Lightwave Technol. (1)

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (2)

J. Opt. Soc. Am. B (1)

J. Vac. Sci. Technol. B (1)

Opt. Express (3)

Opt. Lett. (1)

Sens. Act. B (1)

Other (2)

Cited By

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Equations (11)

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