A simple method for measuring the second order diffraction efficiency in the vacuum ultraviolet (VUV) is described. Spectral reflectance of a mirror will be influenced by the second diffraction order, measured in a spectrophotometer system without filters. The second order diffraction efficiency can be calculated from the different spectral reflectance values. A deuterium lamp and a scintillated photomultiplier are used in the measurement system. The second order diffraction efficiency can be determined from 120nm to 165nm. The result of 0.00579±11.9% is obtained at 161nm.
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