Abstract

New wide single mode strip and grating loaded waveguide on thin silicon-on-insulator CMOS compatible structure is proposed and analyzed. Waveguide is built by silicon nitride strip and gratings placed on silica cover of slab silicon. This structure is similar to conventional strip-loaded waveguide but differs by additional gratings near the strip sides. Numerical 3D simulations by FDTD and BPM prove that the side gratings with period 0.6 µm and depth 0.16 µm provide the high Figure of merit for higher order mode suppression and built quasi-single-mode waveguide with mode size ~10 µm and propagation loss ~0.3 dB/cm.

© 2009 Optical Society of America

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  1. G. T. Reed, Silicon Photonics. State of the art (John Wiley & Sons, Ltd, 2008).
  2. R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
    [Crossref]
  3. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
    [Crossref]
  4. R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
    [Crossref]
  5. J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
    [Crossref]
  6. D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
    [Crossref]
  7. W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
    [Crossref]
  8. W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
    [Crossref]
  9. A. V. Tsarev, “Tunable optical filters,” United States Patent No 6,999,639, February 14, 2006.
  10. A. V. Tsarev, V. M. N. Passaro, and F. Magno, “Widely Tunable Reconfigurable Optical Add/Drop Multiplexers in Silicon-on-Insulator Technology: a New Approach,” in Silicon Photonics, V.M.N. PassaroEd., Research Signpost Publ., Trivandrum, Kerala, India: ISBN: 81-308-0077-2, 47–77 (2006).
  11. Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
    [Crossref]
  12. A. V. Tsarev, “New type of heterogeneous nanophotonic silicon-on-insulator optical waveguides,” Quantum Electron. 37(8), 775–776 (2007).
    [Crossref]
  13. A. V. Tsarev, “Thin heterogeneous optical silicon-on-insulator waveguides and their application in reconfigurable optical multiplexers,” Quantum Electron.  38(5), 445–451 (2008).
    [Crossref]
  14. A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
    [Crossref]
  15. F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
    [Crossref]
  16. www.rsoftdesign.com, Rsoft Photonic CAD Suite, ver. 8.0, single license (2007).
  17. R. V. Ramaswamy, “Strip loaded film waveguides,” Bell Syst. Tech. J.  53, 697–704 (1974).
  18. Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
    [Crossref]
  19. N. Daldosso, M. Melchiorri, F. Riboli, M. Girardini, G. Pucker, M. Crivellari, P. Bellutti, A. Lui, and L. Pavesi, “Comparison Among Various Si3N4 Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line,” J. Lightwave Technol.  22, 1734–1740 (2004).
    [Crossref]
  20. S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP  2, 466–475 (1956).
  21. H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
    [Crossref]
  22. M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
    [Crossref]

2009 (3)

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

2008 (3)

A. V. Tsarev, “Thin heterogeneous optical silicon-on-insulator waveguides and their application in reconfigurable optical multiplexers,” Quantum Electron.  38(5), 445–451 (2008).
[Crossref]

A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
[Crossref]

F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
[Crossref]

2007 (3)

A. V. Tsarev, “New type of heterogeneous nanophotonic silicon-on-insulator optical waveguides,” Quantum Electron. 37(8), 775–776 (2007).
[Crossref]

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

2005 (3)

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
[Crossref]

2004 (1)

2003 (2)

H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
[Crossref]

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

1991 (1)

R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
[Crossref]

1974 (1)

R. V. Ramaswamy, “Strip loaded film waveguides,” Bell Syst. Tech. J.  53, 697–704 (1974).

1956 (1)

S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP  2, 466–475 (1956).

Baets, R.

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

Beckx, S.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Bellutti, P.

Bienstman, P.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Bogaerts, W.

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Borel, P. I.

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

Borselli, M.

M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
[Crossref]

Cardenas, J.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Chang-Hasnain, C. J.

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

Chen, E.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Chen, L.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Crivellari, M.

Daldosso, N.

De La Rue, R. M.

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

De Leonardis, F.

F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
[Crossref]

A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
[Crossref]

Dumon, P.

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Fang, Q.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Frandsen, L. H.

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

Girardini, M.

Harold Chong,

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

He, Y.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Johnson, Th.

M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
[Crossref]

Karagodsky, V.

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

Kikuta, H.

H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
[Crossref]

Koch, T. L.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Li, F.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Li, J.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Lipson, M.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Liu, Y.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Lui, A.

Luyssaert, B.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Magno, F.

A. V. Tsarev, V. M. N. Passaro, and F. Magno, “Widely Tunable Reconfigurable Optical Add/Drop Multiplexers in Silicon-on-Insulator Technology: a New Approach,” in Silicon Photonics, V.M.N. PassaroEd., Research Signpost Publ., Trivandrum, Kerala, India: ISBN: 81-308-0077-2, 47–77 (2006).

Melchiorri, M.

Pafchek, R.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Painter, O.

M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
[Crossref]

Passaro, V. M.

F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
[Crossref]

Passaro, V. M. N.

A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
[Crossref]

A. V. Tsarev, V. M. N. Passaro, and F. Magno, “Widely Tunable Reconfigurable Optical Add/Drop Multiplexers in Silicon-on-Insulator Technology: a New Approach,” in Silicon Photonics, V.M.N. PassaroEd., Research Signpost Publ., Trivandrum, Kerala, India: ISBN: 81-308-0077-2, 47–77 (2006).

Pavesi, L.

Pesala, B.

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

Petermann, K.

R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
[Crossref]

Pluk, E.

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

Poitras, C. B.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Preston, K.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Pucker, G.

Ramaswamy, R. V.

R. V. Ramaswamy, “Strip loaded film waveguides,” Bell Syst. Tech. J.  53, 697–704 (1974).

Reed, G. T.

G. T. Reed, Silicon Photonics. State of the art (John Wiley & Sons, Ltd, 2008).

Riboli, F.

Robinson, J. T.

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

Rytov, S. M.

S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP  2, 466–475 (1956).

Schmidtchen, J.

R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
[Crossref]

Sedgwick, F. G.

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

Soref, R. A.

R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
[Crossref]

Taillaert, D.

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

Thourhout, D. V.

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

Toyota, H.

H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
[Crossref]

Tsarev, A. V.

A. V. Tsarev, “Thin heterogeneous optical silicon-on-insulator waveguides and their application in reconfigurable optical multiplexers,” Quantum Electron.  38(5), 445–451 (2008).
[Crossref]

A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
[Crossref]

F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
[Crossref]

A. V. Tsarev, “New type of heterogeneous nanophotonic silicon-on-insulator optical waveguides,” Quantum Electron. 37(8), 775–776 (2007).
[Crossref]

A. V. Tsarev, “Tunable optical filters,” United States Patent No 6,999,639, February 14, 2006.

A. V. Tsarev, V. M. N. Passaro, and F. Magno, “Widely Tunable Reconfigurable Optical Add/Drop Multiplexers in Silicon-on-Insulator Technology: a New Approach,” in Silicon Photonics, V.M.N. PassaroEd., Research Signpost Publ., Trivandrum, Kerala, India: ISBN: 81-308-0077-2, 47–77 (2006).

Tummidi, R.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Van Campenhout, J.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Van Thourhout, D.

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Webster, M. A.

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Wiaux, V.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

Xin, H.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Yang, L.

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Yu, W.

H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
[Crossref]

Zhou, Y.

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

Appl. Opt. (1)

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.  48(5), 958–963 (2009).
[Crossref]

Bell Syst. Tech. J. (1)

R. V. Ramaswamy, “Strip loaded film waveguides,” Bell Syst. Tech. J.  53, 697–704 (1974).

IEEE Photon. Technol. Lett. (1)

D. Taillaert, Harold Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.  15(9), 1249–1251 (2003).
[Crossref]

J. Lightwave Technol. (2)

N. Daldosso, M. Melchiorri, F. Riboli, M. Girardini, G. Pucker, M. Crivellari, P. Bellutti, A. Lui, and L. Pavesi, “Comparison Among Various Si3N4 Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line,” J. Lightwave Technol.  22, 1734–1740 (2004).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology,” J. Lightwave Technol.  23(1), 401–412 (2005).
[Crossref]

J. Quantum Electronics (1)

R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single mode rib waveguides in GeSi-Si and Si-on-SiO2,” J. Quantum Electronics  27(8), 1971–1974 (1991).
[Crossref]

Opt. Eng. (1)

Y. He, L. Yang, Q. Fang, H. Xin, F. Li, and Y. Liu, “Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator,” Opt. Eng.  44(4), 040504 (2005).
[Crossref]

Opt. Express (6)

Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “A novel ultra-low loss hollow-core waveguide using subwavelength high-contrast gratings,” Opt. Express  17(3), 1508–1517 (2009).
[Crossref]

A. V. Tsarev, F. De Leonardis, and V. M. N. Passaro, “Thin heterogeneous SOI waveguides for thermo-optical tuning and filtering,” Opt. Express  16(5), 3101–3113 (2008).
[Crossref]

F. De Leonardis, A. V. Tsarev, and V. M. Passaro, “Optical properties of new wide heterogeneous waveguides with thermo optical shifters,” Opt. Express  16(26), 21333–21338 (2008).
[Crossref]

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express  17(6), 4752–4757 (2009).
[Crossref]

W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, “A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires,” Opt. Express  15(4), 1567–1578 (2007).
[Crossref]

M. Borselli, Th. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express  13(5), 1515–1530 (2005).
[Crossref]

Opt. Lett. (1)

W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett.  32(19), 2801–2803 (2007).
[Crossref]

Opt. Rev. (1)

H. Kikuta, H. Toyota, and W. Yu, “Optical elements with subwavelength structured surfaces,” Opt. Rev.  10(2), 63–73 (2003).
[Crossref]

Quantum Electron. (2)

A. V. Tsarev, “New type of heterogeneous nanophotonic silicon-on-insulator optical waveguides,” Quantum Electron. 37(8), 775–776 (2007).
[Crossref]

A. V. Tsarev, “Thin heterogeneous optical silicon-on-insulator waveguides and their application in reconfigurable optical multiplexers,” Quantum Electron.  38(5), 445–451 (2008).
[Crossref]

Sov. Phys. JETP (1)

S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP  2, 466–475 (1956).

Other (4)

www.rsoftdesign.com, Rsoft Photonic CAD Suite, ver. 8.0, single license (2007).

A. V. Tsarev, “Tunable optical filters,” United States Patent No 6,999,639, February 14, 2006.

A. V. Tsarev, V. M. N. Passaro, and F. Magno, “Widely Tunable Reconfigurable Optical Add/Drop Multiplexers in Silicon-on-Insulator Technology: a New Approach,” in Silicon Photonics, V.M.N. PassaroEd., Research Signpost Publ., Trivandrum, Kerala, India: ISBN: 81-308-0077-2, 47–77 (2006).

G. T. Reed, Silicon Photonics. State of the art (John Wiley & Sons, Ltd, 2008).

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Figures (4)

Fig.1.
Fig.1.

General view of SGL waveguide and the field distribution of the two first guided TE-modes studied by 3D BPM. a) m=0; b) m=1. d=0.16 µm, hc =0.12 µm; W0 =32 µm, W=10 µm, Wg =2 µm.

Fig.2.
Fig.2.

Simulation of rectangular shaped grating by FDTD. a) general view of the 2D waveguide with the grating loading; b) Optical loss in 2D waveguide with the grating for different values of hc and d (dots and curves corresponds to FDTD and BPM simulations, respectively); (c) Optical loss in 3D SGL waveguide obtained by different ways: 1- 3D FDTD, 2 – 3D BPM for equivalent waveguide; 3 - 3D BPM for equivalent waveguide with corrected (by 1.13) value of ni .

Fig.3.
Fig.3.

Simulated parameters of optical loss in ideal SGL waveguide (SLoss=0) studied by 3D BPM. a) For the fundamental mode (m=0); b) For the first mode (m=1). d=0.16 µm, W0 =32 µm, W=10 µm.

Fig.4.
Fig.4.

Simulated parameters of the additional optical loss in SGL waveguide studied by 3D BPM. a) as a function of waveguide spacing Wg for different Sloss (in dB/cm units) for hc =0.12 µm; b) as a function of hc for different Wg (SLoss=0.1 dB/cm). d=0.16 µm, W0 =32 µm, W=10 µm.

Equations (2)

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no2=(1f)n12+fn22,
ne2=(n1n2)2[(1f)n22+fn12],

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