Abstract

It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss.

© 2009 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
    [CrossRef]
  2. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
    [CrossRef]
  3. J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
    [CrossRef]
  4. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
    [CrossRef]
  5. Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
    [CrossRef]
  6. T. Barwicz, M. A. Popović, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, “Microring-resonator-based add-drop filters in SiN: fabrication and analysis,” Opt. Express 12(7), 1437–1442 (2004).
    [CrossRef]
  7. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion,” Opt. Express 15(22), 14765–14771 (2007).
    [CrossRef]
  8. A. Melloni, “Synthesis of a parallel-coupled ring-resonator filter,” Opt. Lett. 26(12), 917–919 (2001).
    [CrossRef]
  9. B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
    [CrossRef]
  10. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
    [CrossRef]
  11. J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
    [CrossRef]
  12. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple- channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
    [CrossRef]
  13. F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
    [CrossRef]
  14. J. K. S. Poon, J. Scheuer, Y. Xu, and A. Yariv, “Designing coupled-resonator optical waveguide delay lines,” J. Opt. Soc. Am. B 21(9), 1665–1673 (2004).
    [CrossRef]
  15. Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
    [CrossRef]
  16. Q. Xu, V. R. Almeida, and M. Lipson, “Micrometer-scale all-optical wavelength converter on silicon,” Opt. Lett. 30(20), 2733–2735 (2005).
    [CrossRef]
  17. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
    [CrossRef]
  18. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express 15(22), 14467–14475 (2007).
    [CrossRef]
  19. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
    [CrossRef]
  20. Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
    [CrossRef]
  21. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
    [CrossRef]
  22. J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
    [CrossRef]
  23. M. A. Popovic, C. Manolatou, and M. R. Watts, “Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters,” Opt. Express 14(3), 1208–1222 (2006).
    [CrossRef]
  24. T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
    [CrossRef]
  25. Technology paper LETI_03, Jan. 5. 2009, http://www.epixfab.eu/uploads/media/Technology_LETI_03.pdf .

2008 (6)

J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
[CrossRef]

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef]

J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
[CrossRef]

2007 (5)

2006 (4)

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef]

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

M. A. Popovic, C. Manolatou, and M. R. Watts, “Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters,” Opt. Express 14(3), 1208–1222 (2006).
[CrossRef]

2005 (2)

Q. Xu, V. R. Almeida, and M. Lipson, “Micrometer-scale all-optical wavelength converter on silicon,” Opt. Lett. 30(20), 2733–2735 (2005).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef]

2004 (6)

T. Barwicz, M. A. Popović, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, “Microring-resonator-based add-drop filters in SiN: fabrication and analysis,” Opt. Express 12(7), 1437–1442 (2004).
[CrossRef]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[CrossRef]

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

J. K. S. Poon, J. Scheuer, Y. Xu, and A. Yariv, “Designing coupled-resonator optical waveguide delay lines,” J. Opt. Soc. Am. B 21(9), 1665–1673 (2004).
[CrossRef]

T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
[CrossRef]

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

2001 (1)

Absil, P. P.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Almeida, V. R.

Barwicz, T.

Beausoleil, R. G.

Bolivar, P. H.

Chu, S. T.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Cohen, O.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Fattal, D.

Gill, D.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Green, W. M. J.

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

Haeiwa, H.

T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
[CrossRef]

Haus, H. A.

Headley, W. R.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

Henschel, W.

Howe, S.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

Hryniewicz, J. V.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Ippen, E. P.

Johnson, F. G.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Khan, M. H.

Kim, D. J.

Kim, G.

Kim, G. H.

Kim, K. J.

King, O.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Kokubun, Y.

T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
[CrossRef]

Kuo, Y. H.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Kurz, H.

Kwon, O. K.

Lee, J. M.

J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
[CrossRef]

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

Li, Q.

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Lipson, M.

Little, B. E.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Liu, A.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

Liu, F.

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Liu, T.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

Manolatou, C.

Melloni, A.

Naganawa, T.

T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
[CrossRef]

Nawrocka, M. S.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

Niehusmann, J.

O'Boyle, M.

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

Panepucci, R. R.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

Paniccia, M.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

Park, J. W.

Park, M.

Park, S.

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

Poon, J. K. S.

Popovic, M. A.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef]

Qi, M.

Qiu, M.

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Raday, O.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Rakich, P. T.

Reed, G. T.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

Rong, H.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Rooks, M.

Scheuer, J.

Schmidt, B.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef]

Seiferth, F.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Sekaric, L.

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef]

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

Shakya, J.

Shen, H.

Sih, V.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Smith, H. I.

Su, Y.

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Trakalo, M.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Van, V.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

Vlasov, Y.

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef]

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

Vörckel, A.

Wahlbrink, T.

Wang, X.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

Watts, M. R.

Xia, F.

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef]

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

Xiao, S.

Xu, Q.

Xu, S.

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Xu, Y.

Yariv, A.

You, J. B.

Zhang, Z.

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

Appl. Phys. Lett. (4)

F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006).
[CrossRef]

Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008).
[CrossRef]

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006).
[CrossRef]

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004).
[CrossRef]

J. Opt. Soc. Am. B (1)

Jpn. J. Appl. Phys. (1)

T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004).
[CrossRef]

Nat. Photonics (2)

H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007).
[CrossRef]

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef]

Opt. Commun. (1)

J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008).
[CrossRef]

Opt. Express (10)

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple- channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007).
[CrossRef]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[CrossRef]

J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008).
[CrossRef]

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006).
[CrossRef]

T. Barwicz, M. A. Popović, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, “Microring-resonator-based add-drop filters in SiN: fabrication and analysis,” Opt. Express 12(7), 1437–1442 (2004).
[CrossRef]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion,” Opt. Express 15(22), 14765–14771 (2007).
[CrossRef]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express 15(22), 14467–14475 (2007).
[CrossRef]

J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008).
[CrossRef]

M. A. Popovic, C. Manolatou, and M. R. Watts, “Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters,” Opt. Express 14(3), 1208–1222 (2006).
[CrossRef]

Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008).
[CrossRef]

Opt. Lett. (3)

Other (1)

Technology paper LETI_03, Jan. 5. 2009, http://www.epixfab.eu/uploads/media/Technology_LETI_03.pdf .

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (9)

Fig. 1.
Fig. 1.

(a) Transmission spectra of 1st order 8-channel ring resonators produced by the Hg I-line photolithography, where different color curves represent different channels. (b) Statistical variation of the resonance wavelengths. (c) Microscope image of 1st order ring resonators.

Fig. 2.
Fig. 2.

Transmission spectra of 3rd order rings of which resonance wavelengths are, (a) in perfect accordance, (b) varied by 0.5 nm longer and shorter, as shown in the inset.

Fig. 3.
Fig. 3.

Transmission spectra of 5th order rings of which resonance wavelengths are, (a) in perfect accordance, (b) varied by 0.5 nm longer and shorter, as shown in the inset.

Fig. 4.
Fig. 4.

Transmission spectra of 3rd order rings (a) before and (b) after depositing 4000 Å thick SiN, red curves for theoretical calculations and black for experiments.

Fig. 5.
Fig. 5.

shows the shifts of (a) spectral curves for the etched times of 0, 3, 5 minutes and (b) resonant wavelengths as the thickness of the SiN varied, where 1 min corresponds to 500 Å decrease.

Fig. 6.
Fig. 6.

Transmission spectra of 3rd order ring filters (a) before RIE and after (b) 30s x3 and (c) 30s x5 RIE for the center ring, red curves for theoretical calculations and black for experiments.

Fig. 7.
Fig. 7.

Transmission spectra of 1st order rings, upper curve for air clad and 100 nm gap and lower curve for nitride clad and 150 nm gap.

Fig. 8.
Fig. 8.

(a) a schematic diagram to etch a Si waveguide by KOH solution and (b) a SEM image of the etched waveguide.

Fig. 9.
Fig. 9.

Transmission spectra of a 3rd order ring resonator before and after etching the Si waveguide for 5 sec by KOH solution

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

[an+1bn+1]=(PQ)nP[a0b0]
P[rit1itejkLc1itejkLcrit]
Q[0α12ejk(Lp2)α12ejk(Lp2)0],

Metrics