Abstract

A grating coupler with fully etched slots is optimized for fiber coupling into SOI slab waveguides. Such coupler can be produced in one lithography step together with other SOI components. Theoretical maximal coupling efficiency of 49% is demonstrated with a 3dB bandwidth of 35nm. Strong reflection from the fully etched grating was avoided through an antireflection interface. Constructive interference is used to decrease radiation into the substrate and the filling factor is optimized for optimal power coupling into the fiber mode. It was also demonstrated, that the chirped grating approach is inapplicable for fully etched gratings.

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2008 (2)

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

2007 (1)

2006 (2)

2005 (2)

2004 (3)

2003 (1)

2002 (2)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

1996 (1)

T. Weiland, “Time domain electromagnetic field computation with finite difference methods,” Int. J. Numer. Model. 9(4), 295–319 (1996).
[CrossRef]

1992 (1)

R. M. Emmons and D. G. Hall, “Buried-oxide silicon-on-insulator structures. II. Waveguide gratingcouplers,” IEEE J. Quantum Electron. 28(1), 164–175 (1992).
[CrossRef]

1986 (1)

T. Suhara and H. Nishihara, “Integrated optics components and devices using periodic structures,” IEEE J. Quantum Electron. 22(6), 845–867 (1986).
[CrossRef]

Almeida, V. R.

Andreani, L. C.

Ayre, M.

Baets, R.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

F. van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. van Thourhout, T. E. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

G. Roelkens, D. van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006), http://www.opticsinfobase.org/abstract.cfm?URI=oe-14-24-11622 .
[CrossRef]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[CrossRef]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Beckx, S.

Bienstman, P.

Blasco, J.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

Bogaerts, W.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Brision, S.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Cassan, E.

de Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Dumon, P.

El Melhaoui, L.

Emmons, R. M.

R. M. Emmons and D. G. Hall, “Buried-oxide silicon-on-insulator structures. II. Waveguide gratingcouplers,” IEEE J. Quantum Electron. 28(1), 164–175 (1992).
[CrossRef]

Fedeli, J. M.

Fédéli, J. M.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Galan, J. V.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

Gautier, P.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Gerace, D.

Grillot, F.

Hall, D. G.

R. M. Emmons and D. G. Hall, “Buried-oxide silicon-on-insulator structures. II. Waveguide gratingcouplers,” IEEE J. Quantum Electron. 28(1), 164–175 (1992).
[CrossRef]

Jiang, J.

Krauss, T. E.

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Lardenois, S.

Laval, S.

Lipson, M.

Luyssaert, B.

Lyan, P.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Marti, J.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

MarTis-Morini, D.

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Morita, H.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Nishihara, H.

T. Suhara and H. Nishihara, “Integrated optics components and devices using periodic structures,” IEEE J. Quantum Electron. 22(6), 845–867 (1986).
[CrossRef]

Nordin, G.

Panepucci, R. R.

Pascal, D.

Roelkens, G.

Sanchis, P.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

Schrauwen, J.

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Suhara, T.

T. Suhara and H. Nishihara, “Integrated optics components and devices using periodic structures,” IEEE J. Quantum Electron. 22(6), 845–867 (1986).
[CrossRef]

Taillaert, D.

Tsuchizawa, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

van Campenhout, J.

van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

van Laere, F.

van Thourhout, D.

Vermeulen, D.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Vivien, L.

Wang, B.

Watanabe, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Weiland, T.

T. Weiland, “Time domain electromagnetic field computation with finite difference methods,” Int. J. Numer. Model. 9(4), 295–319 (1996).
[CrossRef]

Wiaux, V.

Yamada, K.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Appl. Phys. Lett. (1)

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fédéli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92(13), 131101 (2008).
[CrossRef]

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 mu m square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

IEEE J. Quantum Electron. (3)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

T. Suhara and H. Nishihara, “Integrated optics components and devices using periodic structures,” IEEE J. Quantum Electron. 22(6), 845–867 (1986).
[CrossRef]

R. M. Emmons and D. G. Hall, “Buried-oxide silicon-on-insulator structures. II. Waveguide gratingcouplers,” IEEE J. Quantum Electron. 28(1), 164–175 (1992).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett. 20(12), 985–987 (2008).
[CrossRef]

Int. J. Numer. Model. (1)

T. Weiland, “Time domain electromagnetic field computation with finite difference methods,” Int. J. Numer. Model. 9(4), 295–319 (1996).
[CrossRef]

J. Lightwave Technol. (4)

Opt. Express (2)

Opt. Lett. (3)

Other (3)

M. Clemens, and T. Weiland, “Discrete electromagnetism with the finite integration technique,” in Geometric Methods for Computational Electromagnetics, PIER. 32, F. L. Teixeira, J. A. Kong, eds., (EMW Publishing, 2001) 65–87.

G. Roelkens, D. Vermeulen, D. van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. M. Fedeli, “High efficiency SOI fiber-to-waveguide grating couplers fabricated using CMOS technology,” in Integrated Photonics and Nanophotonics Research and Applications, (Optical Society of America, 2008) paper IME3, http://www.opticsinfobase.org/abstract.cfm?URI=IPNRA-2008-IME3

Available at, www.cst.com .

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